Crucible edge and single crystal furnace

Abstract

The utility model discloses a crucible side and a single crystal furnace, the crucible side comprises at least two sectioning bodies and at least one cylinder hoop, the sectioning bodies are distributed along the circumferential direction of the crucible side, the adjacent sectioning bodies are connected through complementary splicing structures, all the sectioning bodies are spliced together to form a cylindrical body, and the cylinder hoop is sleeved on the outer surface of the cylindrical body. The crucible edge disclosed by the utility model can be better separated from a quartz crucible.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a crucible and a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon and grows single crystals using the Czochralski method. Quartz crucibles, as consumables in the Czochralski process, need to be replaced with each furnace. Because the quartz crucible, after softening at high temperatures, becomes tightly attached to the outer cladding, it cannot be removed directly after the furnace is completed. Currently, metal hammers are used to break and separate the quartz crucibles. This process is laborious and can cause slag to fly, posing a risk. Furthermore, forceful impact damage to the outer cladding can significantly reduce its lifespan. Utility Model Content

[0003] In view of this, one of the purposes of the present invention is to provide a crucible bond to better complete the separation of the crucible bond and the quartz crucible. Another purpose of the present invention is to provide a single crystal furnace including the crucible bond.

[0004] In order to achieve the above purpose, the present invention provides the following technical solutions:

[0005] A crucible, comprising:

[0006] At least two petal bodies, the petal bodies are distributed along the circumference of the crucible, adjacent petal bodies are connected by complementary splicing structures, and all the petal bodies are assembled together to form a cylindrical body;

[0007] At least one tube hoop is sleeved on the outer surface of the cylindrical body.

[0008] Optionally, in the above-mentioned crucible, the tube hoop is provided with a mounting hole, the outer surface of the petal body is provided with a threaded hole corresponding to the position of the mounting hole, and the tube hoop and the petal body are connected by screws passing through the mounting hole.

[0009] Optionally, in the above-mentioned crucible, the threaded hole is located outside the area corresponding to the splicing structure, or the threaded hole includes a first threaded hole located in the area corresponding to the splicing structure.

[0010] Optionally, in the above-mentioned crucible, the splicing structure is configured as a structure overlapped along the radial direction of the crucible.

[0011] Optionally, in the above-mentioned crucible, a dimension of the splicing structure between adjacent petal bodies along the circumference of the crucible is 40 mm to 50 mm.

[0012] Optionally, in the above-mentioned crucible, the cylindrical body is provided with the cylindrical hoops at both ends in the axial direction.

[0013] Optionally, in the above-mentioned crucible, the distance between the tube hoop and the end surface of the cylindrical body is 40 mm to 50 mm.

[0014] Optionally, in the above-mentioned crucible, the tube hoop is a split structure, including at least two arc-shaped bodies, and the middle part of the arc-shaped body corresponds to the position of the splicing structure.

[0015] Optionally, in the above-mentioned crucible, the arc-shaped body is semicircular.

[0016] A single crystal furnace comprises the crucible disclosed in any one of the above items.

[0017] The crucible provided by the utility model has the following beneficial effects:

[0018] The crucible clasp comprises multiple petals that together form a cylindrical body, and a hoop that sleeves onto the outer surface of the cylindrical body. This allows for the clasp to be removed from the furnace while maintaining the overall strength of the assembled crucible clasp. The petals can then be peeled off one by one from the outside of the quartz crucible, freeing the support for the crucible. This demonstrates that the crucible clasp of the present invention is more effective at separating from the quartz crucible and significantly increases its lifespan compared to the traditional method of breaking the crucible by pounding. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0020] Figure 1 It is a schematic diagram of a crucible provided by an embodiment of the present utility model.

[0021] The following are marked in the figure:

[0022] 101. First lobed body; 102. Second lobed body; 201. First arc-shaped body; 202. Second arc-shaped body; 301. First screw; 302. Second screw. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] See also Figure 1 The embodiment of the present invention provides a crucible, comprising at least two petal bodies and at least one tube hoop, wherein the petal bodies are distributed along the circumference of the crucible, adjacent petal bodies are connected by complementary splicing structures, all petal bodies are assembled into a cylindrical body, and the tube hoop is sleeved on the outer surface of the cylindrical body. Figure 1 In the exemplary embodiment, the pot body includes a first lobed body 101 and a second lobed body 102, which together form a cylindrical body. The first lobed body 101 and the second lobed body 102 each occupy approximately 180° along the circumference of the cylindrical body. Of course, in other embodiments, the first lobed body 101 and the second lobed body 102 can also be configured to have different sizes, for example, one lobed body occupies approximately 160° along the circumference of the cylindrical body, and the other lobed body occupies approximately 260° along the circumference of the cylindrical body. In addition, the number of lobed bodies can be set to three, four, or other values.

[0025] There are many forms of splicing structures between the petals to choose from. For example, the splicing structure can be set as a structure overlapped along the radial direction of the crucible, such as Figure 1 As shown, the two sides of the first lobed body 101 are provided with a first stop with an inner groove, and the two sides of the second lobed body 102 are provided with a second stop with an outer groove. The first stop and the second stop are spliced ​​together to form a structure that overlaps radially along the crucible. Since the first lobed body 101 and the second lobed body 102 overlap at the splicing structure, it is possible to avoid the formation of a light-transmitting straight seam at the splicing structure. This can effectively prevent the heat outside the crucible from directly radiating to the quartz crucible, thereby improving the protection effect of the crucible on the quartz crucible. For another example, the splicing structure can be set as a structure that overlaps axially along the crucible, that is, adjacent lobed bodies are spliced ​​together by a cross-finger structure, that is, a comb-like connection structure is set on the side of the lobed body to cooperate with the adjacent lobed bodies for splicing.

[0026] In some embodiments, the dimension a of the splicing structure between adjacent petals along the circumference of the crucible can be set to 40 mm to 50 mm, for example, 45 mm. Figure 1As shown, the dimension a at the splicing structure should not be too large. On the premise of meeting the strength requirements of the splicing structure after assembly, setting the dimension a to 40 mm~50 mm can avoid the splicing structure from warping and deformation at high temperatures. In other words, if the dimension a is too large, it is easy to warp and deform at high temperatures, and then spark with the heating area of ​​the heater outside the crucible.

[0027] In some embodiments, the tube hoop can be provided with a mounting hole, and the outer surface of the petal body is provided with a threaded hole corresponding to the position of the mounting hole. The tube hoop and the petal body are connected by screws passing through the mounting hole. Such a setting can further improve the overall strength of the combined crucible. Figure 1 In the exemplary embodiment, the threaded hole includes a first threaded hole located in the area corresponding to the splicing structure, and the first screw 301 is screwed into the first threaded hole to connect the tube hoop, the first petal body 101 and the second petal body 102. On this basis, the threaded hole may also include a second threaded hole located outside the area corresponding to the splicing structure, such as Figure 1 As shown, the second screw 302 is screwed into the second threaded hole on the second lobed body 102 to connect the tube hoop and the second lobed body 102. It is easy to understand that the screw screwed into the second threaded hole on the first lobed body 101 connects the tube hoop and the first lobed body 101. In other embodiments, the threaded holes on the lobed bodies may be provided only in locations outside the area corresponding to the splicing structure. For example, the first lobed body 101 and the second lobed body 102 may only be provided with second threaded holes outside the area corresponding to the splicing structure.

[0028] In some embodiments, both ends of the cylindrical body in the axial direction may be provided with a cylindrical hoop, such as Figure 1 As shown, the upper and lower ends of the crucible are provided with a tube hoop, so that the upper and lower ends of the crucible can better withstand the force generated by the expansion of the quartz crucible. The distance between the tube hoop and the end face of the cylindrical body can be set to 40 mm to 50 mm, for example, Figure 1 The tube hoop at the upper end of the crucible is 40 mm away from the upper end surface of the crucible. Figure 1 The tube hoop located at the lower end of the crucible is 45 mm away from the lower end surface of the crucible.

[0029] In some embodiments, the hoop can be configured as a split structure, including at least two arc-shaped bodies, the middle of which corresponds to the joint structure position between adjacent petal bodies, that is, the arc-shaped body has an overlapping portion with at least two petal bodies along the circumference of the hoop. Figure 1In the exemplary embodiment, the cylindrical hoop includes a semicircular first arc 201 and a second arc 202, i.e., the central angles of the first arc 201 and the second arc 202 are both approximately 180°. The first arc 201 and the second arc 202 enclose the first lobed body 101 and the second lobed body 102 to form a cylindrical body. The first arc 201 occupies half of the first lobed body 101 and half of the second lobed body 102 in the circumferential direction of the cylindrical body, and the second arc 202 occupies the other half of the first lobed body 101 and the other half of the second lobed body 102 in the circumferential direction of the cylindrical body. Of course, in other embodiments, the central angles of the arcs can also be other values, such as 90°, 120°, 200°, or the like.

[0030] like Figure 1 As shown, in some embodiments, the first arc body 201 and the second arc body 202 are respectively connected to the middle part of the second lobed body 102 by a second screw 302. In other embodiments, the first arc body 201 and the second arc body 202 can also be provided with an overlapping structure similar to the first lobed body 101 and the second lobed body 102, so that the end of the first arc body 201 and the end of the second arc body 202 are overlapped along the radial direction of the crucible, and a second screw 302 can be used to connect the first arc body 201 and the second arc body 202 together to the middle part of the second lobed body 102.

[0031] It is easy to understand that when the tube hoop is set as a split structure, the restriction of the tube hoop on the petal body can be easily released by disassembling the arc body of the tube hoop one by one. When the tube hoop is set as an integrated annular structure, in order to facilitate the disassembly of the furnace, the tube hoop can be sheared or cut to release the restriction of the tube hoop on the petal body. In this case, the tube hoop is used as a consumable part, and a new tube hoop is required for each furnace. Figure 1 As shown, the first arc-shaped body 201 and the second arc-shaped body 202 are connected to the petal body by screws, so they can be reused, which reduces the use cost of the Canbang.

[0032] The present invention also provides a single crystal furnace, which includes the crucible disclosed in the above embodiment. Since the crucible disclosed in the above embodiment has the above technical effects, the single crystal furnace including the crucible also has the above technical effects, which will not be described in detail herein.

[0033] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0034] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A crucible, characterized in that: include: At least two petal bodies, the petal bodies are distributed along the circumference of the crucible, adjacent petal bodies are connected by complementary splicing structures, and all the petal bodies are assembled together to form a cylindrical body; At least one tube hoop is sleeved on the outer surface of the cylindrical body.

2. The crucible according to claim 1, characterized in that: The tube hoop is provided with a mounting hole, and the outer surface of the petal body is provided with a threaded hole corresponding to the position of the mounting hole. The tube hoop and the petal body are connected by screws passing through the mounting hole.

3. The crucible according to claim 2, characterized in that: The threaded hole is located outside the area corresponding to the splicing structure, or the threaded hole includes a first threaded hole located in the area corresponding to the splicing structure.

4. The crucible according to claim 1, characterized in that: The splicing structure is configured as a structure overlapped along the radial direction of the crucible.

5. The crucible according to claim 4, characterized in that: The dimension of the splicing structure between adjacent petal bodies along the circumference of the crucible is 40 mm to 50 mm.

6. The crucible according to claim 1, characterized in that: The cylindrical body is provided with the cylindrical hoops at both ends in the axial direction.

7. The Zhubang according to claim 6, characterized in that: The distance between the tube hoop and the end surface of the cylindrical body is 40 mm to 50 mm.

8. The crucible according to any one of claims 1 to 7, characterized in that: The tube hoop is a split structure, including at least two arc-shaped bodies, and the middle part of the arc-shaped body corresponds to the position of the splicing structure.

9. The crucible according to claim 8, characterized in that: The arc-shaped body is semicircular.

10. A single crystal furnace, characterized in that: Including the crucible as described in any one of claims 1 to 9.

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