Bearing device and semiconductor process equipment

Abstract

The utility model provides a bearing device and semiconductor process equipment, the bearing device comprises a base, an edge ring and a plurality of elastic members, the base is provided with a bearing surface used for bearing a substrate; the edge ring comprises an outer ring body and a pressing ring which are connected, the outer ring body surrounds the outer side of the base, the pressing ring is located above the base, and the orthographic projection of the pressing ring in the vertical direction covers the circumferential edge area of the base; the elastic pieces are arranged between the outer ring body and the base, the elastic pieces surround the base in the circumferential direction at intervals and are evenly distributed, each elastic piece is provided with a first end and a second end in the length direction of the elastic piece, the first end is fixedly connected with the base, and the second end elastically abuts against the edge ring; and each elastic piece is in an elastic deformation state. By omitting a positioning pin, the edge ring is sleeved on the periphery of the base and abuts against the second end of each elastic piece, so that the installation can be completed, the installation of the edge ring is flexible, and the convenience of the installation of the edge ring is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a carrier device and semiconductor process equipment. Background Art

[0002] Metal-organic Chemical Vapor Deposition (MOCVD) is a vapor phase epitaxial growth technology. Its principle is to introduce a process gas mixed with metal organic compounds into the process chamber. The process gas flows through the substrate surface heated to a relatively high temperature. The metal organic compounds undergo thermal decomposition reaction on the substrate surface and grow epitaxially into compound single crystal thin films.

[0003] like Figure 1 In the related art shown, a protruding platform 11a is provided on a base 10a. The top surface of the protruding platform 11a is used to support the substrate. An edge ring 20a is also provided around the outer side of the protruding platform 11a. An annular gas channel 110a is formed between the inner circumference of the edge ring 20a and the outer circumference of the protruding platform 11a. Heat transfer gas can be blown through the annular gas channel 110a toward the back side of the substrate edge. In this way, by controlling the amount of heat transfer gas delivered to the annular gas channel 110a, the temperature of the substrate edge can be adjusted, thereby controlling the thickness of the long film at the substrate edge.

[0004] Process uniformity is related to the consistency of the annular airway's radial dimensions along the base. To ensure high consistency of the annular airway by aligning the edge ring with the base, the prior art connects the edge ring and base with multiple locating pins. However, this approach makes the edge ring installation inflexible. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art, and proposes a carrier device and semiconductor process equipment.

[0006] The first aspect of the present invention provides a supporting device, comprising: a base, an edge ring and a plurality of elastic members, the base having a supporting surface for supporting a substrate; the edge ring comprising an outer ring body and a pressure ring which are coaxially arranged and connected, the outer ring body surrounding the outside of the base, the pressure ring being located above the base, and the positive projection of the pressure ring in the vertical direction covering the circumferential edge area of ​​the base; the plurality of elastic members are arranged between the outer ring body and the base, the plurality of elastic members are spaced and evenly distributed around the circumference of the base, the elastic member having a first end and a second end along its length direction, the first end being fixedly connected to the base, and the second end elastically abutting against the edge ring; each elastic member is in an elastically deformed state.

[0007] In the bearing device as described above, the plurality of elastic members are further used to support the pressure ring so that there is a gap between the pressure ring and the base in the vertical direction.

[0008] The supporting device as described above, wherein the elastic member is a spring sheet, and the spring sheet has a first surface and a second surface disposed opposite to each other along its thickness direction,

[0009] The circumferential side surface of the base is provided with a plurality of grooves corresponding to the plurality of spring sheets, and the plurality of grooves are distributed at intervals around the circumference of the base; the first end of each spring sheet extends into the corresponding groove, and the second end is located outside the corresponding groove; the groove passes through the upper surface of the base in the vertical direction, and the spring sheet is partially exposed outside the corresponding groove in the vertical direction.

[0010] As described above, the first side of each spring sheet abuts against the groove wall of the corresponding groove; the first end of each spring sheet is fastened to the base through a fastener, the fastener passes through the spring sheet from the second side of the corresponding spring sheet and is fastened to the base, and the head of the fastener is located inside the corresponding groove.

[0011] The carrying device as described above, wherein the carrying device also includes a plurality of pressure plates corresponding one-to-one to the plurality of spring sheets, the second surface of each spring sheet is fitted one-to-one with each pressure plate, the fasteners pass through the pressure plates and spring sheets in sequence and are fastened to the base, and the pressure plates are accommodated in the corresponding grooves.

[0012] The carrying device as described above, wherein the carrying device also includes multiple pins, each spring piece is provided with a first pin hole, and each groove wall is provided with a second pin hole, the multiple first pin holes are coaxial with the multiple second pin holes, and each pin passes through the first pin hole and cooperates with the corresponding second pin hole.

[0013] As described above, the supporting device, wherein the portion of the top of the spring sheet that exceeds the groove forms a stop portion, and the inner peripheral edge of the edge ring protrudes downward to form an annular convex portion; along the radial direction of the base, the stop portion is located on the outside of the annular convex portion, and the stop portion can limit the displacement of the convex portion toward the outside of the base along the radial direction of the base.

[0014] In the above-mentioned carrying device, the first surface and the second surface intersect with the carrying surface.

[0015] In the above-mentioned carrying device, the spring piece is in the shape of a rounded rectangle.

[0016] In the supporting device as described above, a plurality of mounting portions are protruding from the circumferential side surface of the base, the plurality of mounting portions are distributed at intervals around the circumference of the base, and the plurality of mounting portions are connected to the first ends of the plurality of elastic members in a one-to-one correspondence.

[0017] The supporting device as described above, wherein the base includes a first cylinder, a second cylinder and a third cylinder stacked in sequence from top to bottom, the outer diameters of the first cylinder, the second cylinder and the third cylinder increase in sequence, and the side of the first cylinder facing away from the second cylinder is the supporting surface; the first end of each elastic member is fixedly connected to the second cylinder, and the second end extends to the outside of the third cylinder.

[0018] The second aspect of the present invention provides a semiconductor process equipment, comprising: a process chamber, a gas source and any one of the carrying devices provided by the first aspect of the present invention, the carrying device is arranged in the process chamber, and the gas source is arranged outside the process chamber for providing heat conduction gas into the process chamber.

[0019] The utility model has the following beneficial effects:

[0020] The supporting device and semiconductor processing equipment provided by the present invention utilize multiple elastic members spaced and evenly distributed around the circumference of a base. When an edge ring is sleeved onto the outer periphery of the base, each elastic member is elastically deformed, generating elastic forces acting on the edge ring. This balances the forces on the edge ring, ensuring that the edge ring and the base are concentric, thereby achieving precise positioning of the edge ring. The edge ring can be installed simply by sleeved onto the outer periphery of the base and abutting against the second ends of each elastic member. This allows for flexible installation of the edge ring, thereby enhancing its ease of installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of a carrier device provided as an example of the related art;

[0022] Figure 2 for Figure 1 A schematic diagram of the cooperation between the base and the positioning pin in the carrying device shown;

[0023] Figure 3 A schematic diagram of the three-dimensional structure of the carrying device provided in an embodiment of the present application;

[0024] Figure 4 for Figure 3 A front view of the carrier shown;

[0025] Figure 5 for Figure 4 The cross-sectional schematic diagram of the carrying device shown is along the AA direction;

[0026] Figure 6 for Figure 4 The cross-sectional schematic diagram of the carrying device shown is along the BB direction;

[0027] Figure 7 for Figure 5 A partial enlarged view of point C in the middle;

[0028] Figure 8 for Figure 3 The illustrated partial schematic diagram of the carrying device omitting the edge ring;

[0029] Figure 9 for Figure 8 An exploded schematic diagram of part of the load-bearing device is shown.

[0030] Description of reference numerals:

[0031] 100-carrying device;

[0032] 10-base; 11-first cylinder; 110-annular air channel; 12-second cylinder; 121-groove; 122-screw hole; 123-second pin hole; 13-third cylinder;

[0033] 20-edge ring; 21-outer ring body; 22-pressure ring; 23-annular convex portion;

[0034] 30-spring; 31-first through hole; 32-first pin hole;

[0035] 40- fasteners;

[0036] 50-pressing plate;

[0037] 60-pin;

[0038] 200-substrate. DETAILED DESCRIPTION

[0039] Please refer to Figure 1 and Figure 2 In the supporting device 100a of the related art, the supporting device 100a further includes a heat-insulating ring 80a. The heat-insulating ring 80a is arranged around the outer side of the boss 11a, and in the vertical direction, the heat-insulating ring 80a is located between the edge ring 20a and the base 10a. The heat-insulating ring 80a can separate the edge ring 20a and the base 10a, preventing the edge ring 20a from directly contacting the base 10a, thereby preventing the heat of the base 10a from being directly transferred to the heat-insulating ring 80a. The heat-insulating ring 80a is screwed to the edge ring 20a using screws 40a. Specifically, the heat-insulating ring 80a is provided with a plurality of first connecting holes, and the edge ring 20a is provided with a plurality of second connecting holes. The plurality of first connecting holes and the plurality of second connecting holes correspond to each other one by one. Accordingly, a plurality of screws 40a are also provided, and each screw 40a passes through a first connecting hole and is screwed to a second connecting hole.

[0040] To ensure that the edge ring 20a and the base 10a can be connected through the multiple positioning pins 70a, the heat insulation ring 80a is also provided with multiple avoidance holes 81a. The base 10a is fixed with multiple positioning pins 70a, and the edge ring 20a is also provided with multiple positioning grooves. Each positioning pin 70a passes through an avoidance hole 81a and then extends into a positioning groove and has an interference fit with the positioning groove. Figure 2 As shown, the number of the positioning pins 70a can be 3. Similarly, the number of the screws 40a can also be 3.

[0041] In this way, the process of installing the edge ring 20a on the base 10a is generally as follows: move the insulation ring 80a so that the three first connecting holes on the insulation ring 80a are respectively opposite to the three second connecting holes on the edge ring 20a; use three screws 40a to connect the insulation ring 80a and the edge ring 20a into a whole; then move the insulation ring 80a and the edge ring 20a connected as a whole so that the three positioning grooves on the edge ring 20a are respectively opposite to the three positioning pins 70a on the base 10a, and at the same time, the three avoidance holes 81a on the insulation ring 80a are also respectively opposite to the three positioning pins 70a on the base 10a; continue to move the insulation ring 80a and the edge ring 20a connected as a whole so that the three positioning pins 70a are respectively extended into the corresponding positioning grooves and interference fit with them.

[0042] exist Figure 1 and Figure 2 In the illustrated example, screws 40a cooperate with the first and second connecting holes to ensure that each first connecting hole is coaxial with a second connecting hole, thereby achieving concentricity between thermal insulation ring 80a and edge ring 20a. Furthermore, positioning pins 70a cooperate with positioning grooves to achieve concentricity between edge ring 20a and base 10a, ensuring high consistency in the radial dimensions of annular air passage 110a along base 10a, thereby ensuring process uniformity.

[0043] However, the supporting device inevitably has the problem that the edge ring is not flexible in installation, which makes the installation operation of the edge ring inconvenient. Since the edge ring is connected to the base through positioning pins, the installation position of the edge ring is related to the number of positioning pins, which limits the installation position of the edge ring. For example, Figure 2 In the example shown, when there are three positioning grooves and three positioning pins, one of the positioning grooves needs to be aligned with one of the positioning pins, so the edge ring has only three optional installation positions.

[0044] In addition, to achieve the metal organic chemical vapor deposition process, the base needs to be heated to a relatively high temperature, which means that the support device needs to be used in a high-temperature working environment. The edge ring is usually made of aluminum or aluminum alloy, and the base is usually made of stainless steel. Since the thermal expansion coefficient of aluminum is greater than that of stainless steel, when the support device is in a high-temperature environment, the degree of expansion and deformation of the edge ring is greater than that of the base. At this time, lateral stress is generated between the edge ring and the positioning pins. Under the influence of this lateral stress, the relative position of the edge ring and the base is easily shifted, affecting the positioning accuracy of the edge ring, and further causing the concentricity of the edge ring and the base to deteriorate, thereby affecting process uniformity. In severe cases, the edge ring may even fail and break.

[0045] Based on this, the following embodiments of the present application provide a carrier device and semiconductor process equipment. In order to enable those skilled in the art to better understand the technical solution of the present invention, the carrier device and semiconductor process equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0046] An embodiment of the present application provides a semiconductor process device. The process types that can be implemented by the semiconductor process device are not limited to metal organic compound chemical vapor deposition, and can also be used to implement other types of processes.

[0047] The semiconductor process equipment includes a process chamber, a carrier device, and a gas source. The carrier device is disposed inside the process chamber, and the gas source is disposed outside the process chamber to provide a heat transfer gas. The heat transfer gas may be, for example, an inert gas such as helium (He) or argon (Ar).

[0048] In some embodiments, the semiconductor process equipment may further include a power supply disposed outside the process chamber.

[0049] Figure 3 This is a schematic diagram of the three-dimensional structure of the carrying device provided in an embodiment of the present application. Figure 4 for Figure 3 The front view of the carrying device shown, Figure 5 for Figure 4 The cross-sectional view of the carrying device along the AA direction is shown. Figure 6 for Figure 4 The cross-sectional view of the carrying device along the BB direction is shown. Figure 7 for Figure 6 A partial enlarged view of point C in the middle. Figures 3 to 7 The embodiment of the present application further provides a carrying device 100 , which includes a base 10 and an edge ring 20 .

[0050] The base 10 includes a main body and a first cylinder 11. The first cylinder 11 is stacked on top of the main body. The first cylinder 11 is coaxially arranged with the main body. The vertical projection of the first cylinder 11 falls into the top surface of the main body. The top surface of the first cylinder 11 facing away from the main body is a bearing surface, which is used to bear the substrate 200.

[0051] A heater (not shown) may also be provided inside the base 10, which is electrically connected to a power source provided outside the process chamber. The heater generates heat when powered on, so that the base 10 can be heated to a higher temperature to meet the temperature requirements of the metal organic compound chemical vapor deposition process.

[0052] The base 10 is further provided with an air flow channel (not shown). The air inlet of the air flow channel is connected to the air source, and the air flow channel has an air outlet, both of which are located on the top surface of the main body. There may be multiple air outlets, and all of them are evenly and spaced apart along the circumference of the first cylindrical body 11 to form a circle.

[0053] The base 10 may be made of stainless steel, and the edge ring 20 may be made of aluminum or aluminum alloy.

[0054] The edge ring 20 surrounds the outer periphery of the base 10. Figure 7 The edge ring 20 includes an outer ring body 21 and a pressure ring 22 arranged coaxially, and the outer ring body 21 and the pressure ring 22 are connected. Among them, the outer ring body 21 surrounds the outside of the base 10, and the pressure ring 22 is located above the base 10. The positive projection of the pressure ring 22 in the vertical direction falls on the circumferential edge area of ​​the main body. Here, the pressure ring 22 is located above the base 10, which should be understood in a broad sense. For example, according to Figure 7 In the example shown, the pressure ring 22 is located above the main body and surrounds the outside of the first cylinder 11. An annular air channel 110 is formed between the inner circumferential surface of the pressure ring 22 and the circumferential side surface of the first cylinder 11, and the annular air channel 110 is connected to the gas outlet end of the gas flow channel. In this way, during the process, the substrate 200 is placed on the supporting surface, and the edge of the substrate 200 protrudes from the first cylinder 11 and extends to the top of the edge ring 20. At this time, the gas source transports heat-conducting gas to the gas flow channel, and the heat-conducting gas flows into the annular air channel 110 from the gas outlet end of the gas flow channel, and then is blown to the bottom surface of the edge of the substrate 200, and then flows into the process chamber through the gap between the edge of the substrate 200 and the edge ring 20. The flow path of the heat-conducting gas is as follows: Figure 7 Indicated by the solid arrow.

[0055] Please continue reading Figure 3 、 Figure 6 and Figure 7The carrier device 100 further includes three elastic members, each disposed between the outer ring body 21 of the edge ring 20 and the base 10. The three elastic members are spaced and evenly distributed circumferentially around the base 10. It is understood that the number of elastic members is not limited to the above number; as long as a plurality of elastic members are provided, the specific design can be determined based on requirements and actual working conditions.

[0056] It should be noted that the structures and specifications of the various elastic members are identical. Each elastic member has a first end and a second end along its length. The first end is fixedly connected to the main body of the base 10, and the second end elastically abuts against the inner circumference of the outer ring 21. Furthermore, when the support device 100 is initially in operation, the elastic members are in an elastically deformed state.

[0057] It can be understood that, taking the case where three elastic members are provided as an example, the process of installing the edge ring 20 in the carrying device 100 onto the base 10 generally includes the following steps.

[0058] Install the elastic members. Securely connect the first end of the elastic member to the main body of the base 10, and extend the second end of the elastic member outside the main body. Repeat this step until all three elastic members are connected to the main body of the base 10. At this point, each elastic member is in its original state.

[0059] Install the edge ring 20. Apply force to the second end of each elastic member, causing the second end of each elastic member to move toward the first end, thereby transforming each elastic member from its original state to an elastically deformed state. Move the edge ring 20 above the base 10 so that the pressure ring 22 is aligned with the circumferential edge area of ​​the main body. Move the edge ring 20 downward so that the outer ring body 21 of the edge ring 20 is sleeved onto the outside of the main body. Continue to move the edge ring 20 downward until the inner circumference of the outer ring body 21 abuts against the second end of each elastic member.

[0060] Thus, after the edge ring 20 is mounted on the base 10, each elastic member generates an elastic force due to its elastic deformation. This elastic force acts on the outer ring body 21 of the edge ring 20 in a direction parallel to the bearing surface. Furthermore, because each elastic member has the same structure and specifications, the magnitude of the elastic force generated by each elastic member is the same.

[0061] It can be seen that the supporting device 100 of this embodiment is designed with multiple elastic parts that are spaced and evenly distributed around the circumference of the base 10. When the edge ring 20 is sleeved onto the outer periphery of the base 10, each elastic part is in an elastic deformation state to generate the same elastic force acting on the edge ring 20. The edge ring 20 is subjected to balanced force, so that the center of the edge ring 20 can coincide with the center of each elastic part (that is, the center of the base 10), that is, the edge ring 20 is concentric with the base 10, so as to achieve precise positioning of the edge ring 20.

[0062] and Figure 1 and Figure 2 Compared to the illustrated support device 100a, the positioning pins 70a are eliminated in the support device 100 of this embodiment. The edge ring 20 can be installed by simply fitting it around the periphery of the base 10 and abutting against the second ends of the elastic members. The abutment position of the edge ring 20 and the second ends of the elastic members is not restricted. This allows for a wide range of optional installation positions for the edge ring 20, making it more flexible and convenient to install.

[0063] Furthermore, in an embodiment where the base 10 is made of stainless steel and the edge ring 20 is made of aluminum, when the carrier device 100 of this embodiment operates in a high-temperature environment, if both the edge ring 20 and the base 10 expand due to the high temperature, even if the degree of expansion and deformation of the edge ring 20 is greater than that of the base 10, the edge ring 20 expands outward from the base 10, and the amount of expansion is equal at all locations on the edge ring 20. To recover from the deformation, the second end of each elastic member moves away from its first end, and the amount of movement of the second end of each elastic member is the same. In other words, the elastic force generated by each elastic member remains the same, and the elastic force on the edge ring 20 remains balanced. The expanded and deformed edge ring 20 is not subjected to lateral stress, thereby ensuring that the edge ring 20 remains concentric with the base 10 in the high-temperature environment, thereby ensuring process uniformity and preventing failure or fracture of the edge ring 20 due to lateral stress.

[0064] In some embodiments, multiple elastic members can also be used to support the pressure ring 22, so that there is a gap between the pressure ring 22 and the base 10 in the vertical direction. For example, multiple elastic members can be arranged on the top surface of the main body of the base 10, and the elastic members abut the bottom surface of the pressure ring 22 to support the pressure ring. Thus, compared to the case where the pressure ring 22 abuts the top surface of the base 10, in this embodiment, there is a gap between the pressure ring 22 and the base 10 in the vertical direction, which helps to prevent direct contact between the edge ring 20 and the base 10, thereby providing thermal insulation. Furthermore, it can also prevent over-positioning of the pressure ring 22 in the vertical direction.

[0065] Since the structures and specifications of the elastic members are the same, the structure, installation method and fixing position of one of the elastic members will be described in detail below.

[0066] The elastic member disclosed herein can be implemented in a variety of ways. For example, the elastic member can be a spring that extends radially along the base 10. In this case, the elastic deformation state means that the spring is in a compressed state. For another example, Figure 3 and Figure 6 As shown, the elastic member may also be a spring sheet 30 , which may extend radially along the base 10 when in its original state, or the extension direction of the spring sheet 30 may form an angle with the radial direction of the base 10 when in its original state.

[0067] The thickness direction of the spring clip 30 is also not limited. The thickness direction of the spring clip 30 can be parallel to the height direction (i.e., the vertical direction) of the base 10. Accordingly, the first and second surfaces of the spring clip 30, which are arranged opposite to each other along the thickness direction, are both parallel to the support surface. In this case, the second end of the spring clip 30 can be bent upward or downward to achieve an elastic deformation state. Alternatively, the thickness direction of the spring clip 30 can also be at an angle to the height direction of the base 10. Accordingly, the first and second surfaces of the spring clip 30 intersect with the support surface. Figure 8 for Figure 3 The illustrated partial schematic diagram of the carrier device 100 omits the edge ring 20. For example, Figure 8 As shown, the thickness direction of the spring piece 30 and the height direction of the base 10 can be 90 degrees, so the first surface and the second surface of the spring piece 30 are perpendicular to the bearing surface. Figure 6 As shown, the second end of the elastic piece 30 can be bent and deformed in a clockwise direction to achieve an elastic deformation state, or can be bent and deformed in a counterclockwise direction to achieve an elastic deformation state.

[0068] In some embodiments, please combine Figure 3 、 Figure 7 and Figure 8 , the main body is in the shape of a truncated cone, and the main body may specifically include a second cylinder 12 and a third cylinder 13 stacked in sequence from top to bottom, the first cylinder 11, the second cylinder 12 and the third cylinder 13 are coaxially arranged, and the outer diameters of the first cylinder 11, the second cylinder 12 and the third cylinder 13 increase in sequence. In this way, the base 10 is formed in a three-step shape. As mentioned in this article, the air outlet end can be provided on the top surface of the second cylinder 12. In this embodiment, the first end of each elastic member can be specifically fixedly connected to the second cylinder 12, and the second end of each elastic member extends to the outside of the third cylinder 13 to abut against the inner circumference of the outer ring body 21.

[0069] In this way, the length of the part of the elastic member located on the outside of the third cylinder 13 is smaller, so that the outer ring body 21 can be as close to the circumferential side of the main body as possible. At the same time, by designing the first end of the elastic member to be connected to the second cylinder 12, the length of the elastic member can be larger and the elastic member can have better elasticity.

[0070] Of course, in other embodiments of the present application, the main body may also be cylindrical. In this embodiment, when the elastic member is a spring, the first end of the spring may be connected to the circumferential side surface of the main body.

[0071] The following description will take the elastic member as a spring piece 30, with the first end of the spring piece 30 connected to the second cylinder 12 as an example. After reading the following technical solution, those skilled in the art will obviously understand the technical solution in which the first end of the elastic member is connected to the cylindrical main body.

[0072] As disclosed in the carrying device 100 , there are various possibilities for connecting the first end of the elastic piece 30 to the second cylinder 12 .

[0073] In some embodiments not shown, multiple mounting portions may be protruding from the circumferential side surface of the second cylindrical body 12. The multiple mounting portions are spaced and evenly distributed around the circumference of the second cylindrical body 12, and the multiple mounting portions are connected to the first ends of the multiple elastic pieces 30 in a one-to-one correspondence. The mounting portions may be block-shaped or plate-shaped.

[0074] In some other embodiments not shown in the figures, a plurality of spring pieces 30 are fixedly disposed on the top surface of the second cylinder 12 , and the plurality of spring pieces 30 can be used to support the pressure ring 22 .

[0075] In an alternative embodiment, please refer to Figure 7 and Figure 8 The circumferential side surface of the second cylindrical body 12 is provided with a plurality of grooves 121 corresponding to the plurality of elastic members. The plurality of grooves 121 are spaced and evenly distributed around the circumference of the second cylindrical body 12. The first end of each elastic member extends into a corresponding groove 121 and is fixedly connected to the base 10, while the second end of each elastic member is located outside the groove 121. Furthermore, the groove 121 vertically penetrates the upper surface of the base 10. In the vertical direction, a portion of the elastic sheet 30 is exposed outside the corresponding groove 121. The pressure ring 22 is superimposed on the portion of the elastic sheet 30 exposed in the groove 121, so that the portion of the elastic sheet 30 exposed in the groove 121 can support the pressure ring 22, so that there is a gap between the bottom surface of the pressure ring 22 and the base 10.

[0076] Comparing the solution in which the first end of the elastic member is connected to the mounting portion with the solution in which the first end of the elastic member extends into the groove 121 and is connected to the base 10, the solution in which the first end of the elastic member extends into the groove 121 not only provides a mounting for the first end of the elastic member, but also, assuming the length of the portion of the elastic member located outside the third cylindrical body 13 remains the same, the elastic member is longer in this solution, resulting in greater elasticity. Furthermore, in this solution, the groove 121 can be directly machined into the second cylindrical body 12 through machining methods such as cutting.

[0077] Understandable, such as Figure 8 As shown, the groove 121 specifically passes through the top surface of the second cylinder 12 along the vertical direction. In this example, the first end of the elastic member can be moved into the groove 121 along the vertical direction.

[0078] The vertical dimension h of the spring piece 30 is specifically greater than the vertical depth H of the groove 121. In the vertical direction, the top portion of the spring piece 30 extends out of the groove 121 and exceeds the top surface of the second cylinder 12 to be exposed in the corresponding groove 121. When the first surface of the spring piece 30 is parallel to the bearing surface, the vertical dimension h of the spring piece 30 is the thickness of the spring piece 30. Figure 3 and Figure 7 When the first surface of the spring piece 30 intersects the bearing surface, the dimension h of the spring piece 30 along the vertical direction is the width of the spring piece 30 .

[0079] For further information, please refer to Figures 7 to 9 The portion of the top of the spring piece 30 that extends beyond the groove 121 forms a stopper, and the inner peripheral edge of the bottom surface of the pressure ring 22 protrudes downward to form an annular protrusion 23. Along the radial direction of the base 10, the annular protrusion 23 is located between the stopper and the first cylindrical body 11, that is, the stopper is located on the outside of the annular protrusion 23. In this way, the stopper can limit the displacement of the annular protrusion 23 toward the outside of the base 10 along the radial direction of the base 10. With such a configuration, the stopper can prevent the annular protrusion 23 from moving toward the outside of the base 10, which is beneficial to prevent the pressure ring 22 from detaching from the base 10 along the radial direction of the base 10, and further helps to ensure that the edge ring 20 can be stably installed on the base 10.

[0080] It's worth noting that in this embodiment, when there are three elastic members, there are correspondingly three stoppers. Since the annular protrusion 23 is annular, any portion of the annular protrusion 23 can be aligned with one of the stoppers. This means that the installation position of the edge ring 20 is not affected by the number of stoppers, allowing for flexible installation and ease of operation.

[0081] Of course, in other embodiments of the present application, the stopper may also be formed protruding from the top surface of the second cylinder 12. For example, the stopper may be a bump protruding from the top surface of the second cylinder 12, and the annular protrusion 23 is located between the bump and the first cylinder 11.

[0082] Comparing the examples in which the stop portion is the portion of the top of the spring clip 30 exposed in the groove 121 and the stop portion protruding from the top surface of the second cylinder 12, in the embodiment in which the stop portion is the portion of the top of the spring clip 30 exposed in the groove 121, the spring clip 30 has multiple functions. It can not only elastically resist the outer ring body 21, but also block the annular protrusion 23 on the pressure ring 22 from moving radially toward the outside of the base 10 to prevent the edge ring 20 from detaching from the base 10, so there is no need to set an additional stop portion.

[0083] The elastic member, the fastener 40, the pressing plate 50 and the pin 60 can all be made of stainless steel. As such, stainless steel has a small thermal expansion coefficient, so that the elastic member, the fastener 40, the pressing plate 50 and the pin 60 are less deformed by expansion when in a high temperature environment.

[0084] Regardless of whether the first end of the elastic member is connected to the mounting portion or extends into the groove 121 and is connected to the base 10 , the first end of the elastic member can be connected to the base 10 by welding or bonding.

[0085] In the embodiment where the elastic member is a spring 30, the first end of the spring 30 can also be engaged with the groove 121. As an optional embodiment, in the technical solution where the elastic member is a spring 30, the first end of the spring 30 can also be fastened to the base 10 via a fastener 40.

[0086] Figure 9 for Figure 8 FIG. 1 is a schematic diagram of a partial exploded view of the carrying device 100. In a specific example, as shown in FIG. Figures 7 to 9 As shown, taking the example in which the groove 121 passes through the top surface of the second cylinder 12 in the vertical direction and the first end of the spring 30 is fastened to the base 10 by a fastener 40, the groove 121 has a groove bottom wall and a groove side wall, the top surface of the second cylinder 12 is connected to the groove bottom wall through the groove side wall, and a first through hole 31 is provided on the first end of the spring piece 30, and the first through hole 31 passes through the spring piece 30 along the thickness direction of the spring piece 30.

[0087] exist Figures 7 to 9 In the example shown, the thickness direction of the spring piece 30 is perpendicular to the height direction of the base 10. At this time, a screw hole 122 is provided on the side wall of the groove, the first surface of the spring piece 30 is against the side wall of the groove and the first through hole 31 is coaxial with the screw hole 122, and the fastener 40 passes through the spring piece 30 from the second surface of the spring piece 30 through the first through hole 31 and is screwed to the screw hole 122.

[0088] It can be understood that when the thickness direction of the spring sheet 30 is parallel to the height direction of the base 10, the screw hole 122 is set on the bottom wall of the groove, the first surface of the spring sheet 30 is against the bottom wall of the groove and the first through hole 31 is coaxial with the screw hole 122. The fastener 40 passes through the spring sheet 30 from the second surface of the spring sheet 30 through the first through hole 31 and is screwed into the screw hole 122.

[0089] Furthermore, the head of the fastener 40 is located inside the groove 121. The fastener 40 can be a screw, and the head of the fastener 40 refers to the screw head.

[0090] This arrangement helps to avoid the possibility that the head of the fastener 40 protrudes from the second cylindrical body 12 and interferes with other components.

[0091] Based on the fact that the first end of the spring piece 30 is connected to the base 10 via the fastener 40, as a further optional embodiment, the supporting device 100 may further include a plurality of pressure plates 50 corresponding to the plurality of spring pieces 30. The first surface of the spring piece 30 is in contact with the groove wall of the groove 121, while the second surface is in contact with the pressure plate 50. The pressure plate 50 is provided with a second through hole, which may be coaxial with the first through hole 31 and the screw hole 122. The fastener 40 passes through the pressure plate 50 through the second through hole, then passes through the spring piece 30 through the first through hole 31, and then extends into the screw hole 122 and is screwed thereto.

[0092] By designing the pressure plate 50, the pressure plate 50 can press the first end of the spring piece 30, which helps to ensure that the first end of each spring piece 30 does not deform, so that the deformation positions of each spring piece 30 are consistent and located at the second end, and thus helps to avoid the different deformation positions of each spring piece 30 affecting the positioning accuracy of the edge ring 20.

[0093] Furthermore, in the above embodiment, the pressing plate 50 is also accommodated in the groove 121. This helps to avoid the pressing plate 50 protruding from the second cylindrical body 12 and possibly interfering with other components.

[0094] On the basis that the first end of the spring piece 30 is connected to the base 10 through the fastener 40, the supporting device 100 may further include a pin shaft 60, the first end of the spring piece 30 is provided with a first pin hole 32, and the groove wall of the groove 121 is provided with a second pin hole 123. When the first surface of the spring piece 30 is in contact with the groove wall of the groove 121, the first pin hole 32 and the second pin hole 123 are coaxial, and the pin shaft 60 passes through the first pin hole 32 from the second surface of the spring piece 30 and cooperates with the second pin hole 123.

[0095] The installation process of the spring piece 30 in this embodiment is roughly as follows: extend the first end of the spring piece 30 into the groove 121 so that the first surface of the spring piece 30 fits against the groove wall of the groove 121, and align the first pin hole 32 with the second pin hole 123, and align the first through hole 31 with the screw hole 122; move the pin shaft 60 into the groove 121, so that the pin shaft 60 passes through the first pin hole 32 and then extends into the second pin hole 123; then move the pressure plate 50 into the groove 121, so that the second through hole of the pressure plate 50 is aligned with the first through hole 31; thereafter, move the fastener 40 into the groove 121, so that the fastener 40 passes through the second through hole and the first through hole 31 in sequence and then is screwed into the screw hole 122.

[0096] By adopting such a design, the spring piece 30 can be positioned on the base 10 by utilizing the matching relationship between the pin shaft 60 and the first pin hole 32 and the second pin hole 123, thereby facilitating the edge ring 20 mounted on the base 10 to be elastically supported by the spring piece 30 and to be concentric with the base 10.

[0097] Furthermore, in the above embodiment, when the elastic member is a spring clip 30, the spring clip 30 may be in the form of a rounded rectangle. Compared to a rectangular spring clip 30, rounding the corners of the spring clip 30 prevents the corners of the spring clip 30 from being too sharp. This helps, firstly, reduce stress concentration at the corners of the spring clip 30, secondly, reduces the risk of the corners of the spring clip 30 scratching the inner circumference of the outer ring body 21 against which they abut, and thirdly, helps prevent workers from being scratched by the corners of the spring clip 30 during installation.

[0098] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A carrier device, suitable for semiconductor process equipment, characterized in that: include: a base having a carrying surface for carrying a substrate; An edge ring, comprising an outer ring body and a pressure ring coaxially arranged and connected, wherein the outer ring body surrounds the outer side of the base, the pressure ring is located above the base, and the orthographic projection of the pressure ring in the vertical direction covers the circumferential edge area of ​​the base; Multiple elastic members are arranged between the outer ring body and the base. The multiple elastic members are spaced and evenly distributed around the circumference of the base. The elastic members have a first end and a second end along their length direction. The first end is fixedly connected to the base, and the second end elastically abuts against the edge ring; each of the elastic members is in an elastically deformed state.

2. The carrying device according to claim 1, characterized in that: The plurality of elastic members are further used to support the pressure ring so that there is a gap between the pressure ring and the base in a vertical direction.

3. The carrying device according to claim 1, characterized in that: The elastic member is a spring sheet, and the spring sheet has a first surface and a second surface disposed opposite to each other along its thickness direction; the circumferential side surface of the base is provided with a plurality of grooves corresponding to the plurality of spring sheets, and the plurality of grooves are distributed at intervals around the circumference of the base; The first end of each of the elastic pieces extends into the corresponding groove, and the second end is located outside the corresponding groove; The groove passes through the upper surface of the base in a vertical direction, and the elastic sheet is partially exposed outside the corresponding groove in the vertical direction.

4. The carrying device according to claim 3, characterized in that: The first surface of each of the elastic sheets abuts against the groove wall of the corresponding groove; the first end of each of the elastic sheets is fastened to the base through a fastener, and the fastener passes through the corresponding elastic sheet from the second surface and is fastened to the base, and the head of the fastener is located inside the corresponding groove.

5. The carrying device according to claim 4, characterized in that: It also includes multiple pressure plates corresponding to the multiple spring sheets, the second surface of each spring sheet is fitted with each pressure plate in a one-to-one correspondence, the fastener passes through the pressure plate and the spring sheet in sequence and is fastened to the base, and the pressure plate is accommodated inside the corresponding groove.

6. The carrying device according to claim 4, characterized in that: It also includes multiple pin shafts, each of the spring sheets is provided with a first pin hole, and each of the groove walls is provided with a second pin hole. Multiple first pin holes are coaxial with multiple second pin holes, and each pin shaft passes through the first pin hole and cooperates with the corresponding second pin hole.

7. The carrying device according to claim 3, characterized in that: The portion of the spring exposed in the corresponding groove forms a stop portion, and the inner peripheral edge of the edge ring protrudes downward to form an annular convex portion; along the radial direction of the base, the stop portion is located on the outside of the annular convex portion, and the stop portion can limit the displacement of the annular convex portion toward the outside of the base along the radial direction of the base.

8. The carrying device according to claim 3, characterized in that: The first surface and the second surface intersect with the bearing surface.

9. The carrying device according to any one of claims 1 to 8, characterized in that: The base includes a first cylinder, a second cylinder, and a third cylinder stacked in sequence from top to bottom, wherein the outer diameters of the first cylinder, the second cylinder, and the third cylinder increase in sequence, and the surface of the first cylinder facing away from the second cylinder is the bearing surface; The first end of each elastic member is fixedly connected to the second cylinder, and the second end extends to the outside of the third cylinder.

10. A semiconductor process equipment, characterized in that: include: process chamber; The carrier device according to any one of claims 1 to 9, arranged in the process chamber; as well as A gas source is arranged outside the process chamber and is used to provide heat transfer gas into the process chamber.

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