Semiconductor load cabin air bag push type sealing door

Abstract

The utility model discloses an air bag push type sealing door of a semiconductor load bin. The air bag push type sealing door comprises a door frame, a door plate, an air bag, a springback component and an air pipe. The door plate blocks the opening of the door frame; the air bag is arranged between the door plate and the door frame, the air bag is communicated with the inflation and deflation equipment through an air pipe, and the inflation and deflation equipment is used for inflation and deflation of the air bag; the door plate is connected with the door frame through springback parts. The air bag is inflated to overcome the acting force of the springback component to push the door plate to move away from the door frame; and when the air bag is deflated, the door plate is pushed to move towards the door frame by acting force of the springback component. The air bag is arranged to push the door plate to be tightly attached to the sealing strip at the opening of the load bin, so that the opening of the load bin is sealed; and the door plate is separated from the sealing strip through returning of the springback component. The sealing door is simple and compact in structure and small in occupied space.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to an airbag-propelled sealing door for a semiconductor load bin. Background Art

[0002] Wafers, the fundamental material for semiconductor chip manufacturing, must be kept in a vacuum environment during production to prevent contamination from trace ions and metallic impurities. Existing semiconductor load cells typically feature a sealed door, which opens and closes to facilitate wafer placement and loading. Once closed, the sealed door seals the air path to achieve vacuum.

[0003] Existing sealed doors mostly use multi-point cylinders to push against the sealing strip to achieve sealing. This structure has problems such as large space occupation, loud abnormal noise, multiple control components, poor propulsion uniformity, and high cost. Therefore, it is necessary to design a sealed door with a simple structure and small space occupation. Utility Model Content

[0004] The utility model provides an airbag-propelled sealing door for a semiconductor load bin to solve the above technical problems.

[0005] In order to achieve the above purpose, the technical solution of the utility model is:

[0006] A semiconductor load bin airbag-propelled sealed door comprises: a door frame, a door panel, an air bladder, a rebound component and an air pipe; the door panel is used to seal the opening of the door frame; the air bladder is arranged between the door panel and the door frame, and the air bladder is connected to an inflation and deflation device through the air pipe, and the inflation and deflation device is used to inflate and deflate the air bladder; the door panel is connected to the door frame through the rebound component; when the air bladder is inflated, the force of the rebound component is overcome to push the door panel away from the door frame; when the air bladder is deflated, the force of the rebound component pushes the door panel toward the door frame.

[0007] Preferably, the airbag comprises an inner high-strength knitted fabric layer and an outer compounded rubber layer.

[0008] Preferably, the door frame is provided with an air bladder installation groove arranged around its opening, and the air bladder is installed in the air bladder installation groove; the door frame is provided with an air pipe installation groove connected to the air bladder installation groove, and the air pipe is led out through the air pipe installation groove.

[0009] Preferably, the rebound component includes a first rebound assembly, and the first rebound assembly includes a centering shaft and a first elastic member; the centering shaft includes: a connecting part, a guide part and a positioning part in sequence, and the diameters of the connecting part, the guide part and the positioning part increase in sequence; a countersunk hole is opened on the door panel from one side away from the door frame to the other side, the centering shaft passes through the countersunk hole, the connecting part is detachably connected to the door frame, and the first elastic member is sleeved on the guide part, and one end of the first elastic member abuts against the step of the countersunk hole, and the other end abuts against the step formed by the guide part and the positioning part.

[0010] Preferably, the first elastic member is a wave spring.

[0011] Preferably, the resilient component comprises a second resilient assembly, the second resilient assembly comprising a profiled spring leaf, the profiled spring leaf comprising a first fixed portion, a deformation portion and a second fixed portion; the first fixed portion being fixedly connected to the door plate, the second fixed portion being fixedly connected to the door frame, the deformation of the deformation portion having a tendency to hinder the first fixed portion and the second fixed portion from separating.

[0012] Preferably, an observation window is mounted on the door plate, the observation window being used for observation.

[0013] Preferably, a driving device is connected to the door frame, the driving device being used to drive the door frame to move linearly into and out of the chute of the load bin.

[0014] Preferably, the driving device is provided with a stroke sensor, the stroke sensor being used to control the stroke of the door frame.

[0015] Preferably, a guide assembly is further provided on the load bin, the guide assembly guiding the door frame.

[0016] Beneficial effects:

[0017] The semiconductor load bin air bag propulsion type sealing door disclosed in the present application realizes the sealing of the opening of the load bin by setting the air bag to push the door plate to tightly adhere to the sealing strip at the opening of the load bin; and realizes the disengagement of the door plate from the sealing strip by the return of the resilient component. The sealing door has simple structure, compact structure and small space occupation. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 The assembly diagram of the semiconductor load bin air bag propulsion type sealing door disclosed in the present application mounted on the load bin is shown in the figure.

[0020] Figure 2 The side view of the assembly of the semiconductor load bin air bag propulsion type sealing door disclosed in the present application mounted on the load bin is shown in the figure.

[0021] Figure 3 The structure diagram of the semiconductor load bin air bag propulsion type sealing door disclosed in the present application is shown in the figure. Figure 2 The enlarged view of part I in the figure.

[0022] Figure 4 The structure diagram of the semiconductor load bin air bag propulsion type sealing door disclosed in the present application is shown in the figure.

[0023] Figure 5 for Figure 4 Cross-sectional view of AA;

[0024] Figure 6 for Figure 4 Cross-sectional view of the middle BB;

[0025] Figure 7 for Figure 4 Cross-sectional view of CC;

[0026] Figure 8 for Figure 4 A partial enlarged view of middle II;

[0027] Figure 9 for Figure 5 A partial enlarged view of middle III;

[0028] Figure 10 for Figure 6 A partial enlarged view of middle IV;

[0029] Figure 11 for Figure 7 A partial enlarged view of middle V.

[0030] 11. Door frame; 12. Door panel; 13. Airbag; 141. Aligning shaft; 142. First elastic member; 143. Special-shaped spring leaf; 1431. First fixing portion; 1432. Deformation portion; 1433. Second fixing portion; 15. Air pipe; 16. Observation window; 2. Drive unit; 3. Load compartment; 31. Slide groove; 4. Travel sensor; 5. Guide assembly. DETAILED DESCRIPTION

[0031] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0032] Combine Figure 1 - Figure 11As shown, the airbag-propelled sealed door for a semiconductor load compartment comprises: a door frame 11, a door panel 12, an airbag 13, a resilient component, and an air tube 15. The door panel 12 is used to seal the opening of the door frame 11. The airbag 13 is disposed between the door panel 12 and the door frame 11 and is connected to an inflation / deflation device via the air tube 15, which inflates and deflates the airbag 13. The door panel 12 is connected to the door frame 11 via the resilient component. When the airbag 13 is inflated, the airbag 13 overcomes the force of the resilient component and pushes the door panel 12 away from the door frame 11. When the airbag 13 is deflated, the force of the resilient component pushes the door panel 12 toward the door frame 11. This sealed door inflates the airbag 13, causing the airbag 13 to expand and overcome the force of the resilient component, pushing the door panel 12 away from the door frame 11. This allows the door panel 12 to tightly contact the sealing strip at the opening of the load compartment 3, thereby reliably sealing the opening of the load compartment 3. By deflating the air bladder 13, the thrust of the air bladder 13 gradually decreases, and the force of the resilient component gradually pushes the door panel 12 toward the door frame 11, causing the door panel 12 to gradually disengage from the sealing strip at the opening of the load compartment 3, thereby releasing the seal. This sealed door structure requires minimal movement of the door panel 12 during the sealing and releasing processes, allowing the door panel 12, door frame 11, and air bladder 13 to be installed in a sequentially aligned manner. This reduces the thickness of the sealed door, resulting in a simple, compact structure and minimal space requirements.

[0033] Preferably, the airbag 13 includes an inner high-strength knitted fabric layer and an outer mixed rubber layer. The airbag 13 is small in size and can be embedded, has a short inflation and deflation time, and has a fast rebound and expansion speed, and can achieve an inflation and deflation life of 180,000 to 200,000 times.

[0034] Preferably, the door frame 11 is provided with an air bladder mounting slot extending around its opening, into which the air bladder 13 is mounted. Furthermore, the door frame 11 is provided with an air pipe mounting slot connected to the air bladder mounting slot, through which the air pipe 15 is led. Embedding the air bladder 13 in the air bladder mounting slot allows it to retract into the slot after deflation, allowing the door panel 12 to fit snugly against the door frame 11. This further reduces the thickness of the sealed door and helps save space.

[0035] Specifically, the door frame 11 is provided with a rectangular groove, and the door panel 12 is embedded in the rectangular groove, so that when one side of the door panel 12 fits the bottom of the rectangular groove, the other side is flush with the door frame 11, further reducing the thickness of the sealed door.

[0036] Specifically, the opening of the door frame 11 is opened from the bottom of the rectangular groove to the other side of the door frame 11, and the airbag installation groove is opened at the bottom of the rectangular groove.

[0037] Specifically, the cross-section of the airbag mounting groove is rectangular, and the cross-section of the airbag 13 is a "concave" shape after the airbag 13 is deflated and contracted. The cross-section of the airbag 13 is a rounded rectangle after the airbag 13 is inflated, and the airbag 13 protrudes out of the airbag mounting groove; the structure of the airbag 13 enables the airbag 13 to be retracted into the airbag mounting groove while achieving a high telescopic stroke to reliably push the door panel 12 to move.

[0038] Preferably, the resilient component includes a first resilient assembly, which includes a centering shaft 141 and a first elastic member 142. The centering shaft 141 includes, in sequence, a connecting portion, a guide portion, and a positioning portion, with the diameters of the connecting portion, guide portion, and positioning portion increasing in sequence. A countersunk hole is formed on the door panel 12, which is located on the side away from the door frame 11 and faces the other side. The centering shaft 141 passes through the countersunk hole, and the connecting portion is detachably connected to the door frame 11. The first elastic member 142 is sleeved on the guide portion, with one end of the first elastic member 142 abutting against a step in the countersunk hole and the other end abutting against a step formed by the guide portion and the positioning portion. When the air bladder 13 is inflated, causing it to expand, the air bladder 13 pushes the door panel 12 away from the door frame 11. The step in the countersunk hole of the door panel 12 compresses the first elastic member 142, causing it to continue moving away from the door frame 11 until the door panel 12 abuts against and squeezes the sealing strip at the opening of the load compartment 3. The air bladder 13 is deflated to gradually reduce the thrust of the air bladder 13. The force of the first elastic member 142 of the rebound component acts on the step of the countersunk hole of the door panel 12, thereby gradually pushing the door panel 12 toward the door frame 11, so that the door panel 12 gradually separates from the sealing strip at the opening of the load compartment 3 and releases the seal.

[0039] Preferably, the first elastic member 142 is a wave spring, which occupies a small volume, has high elasticity, and can be installed in an embedded manner.

[0040] Specifically, the connecting portion of the centering shaft 141 is provided with an external thread to connect with the threaded hole opened on the door frame 11; the outer diameter of the positioning portion of the centering shaft 141 matches the large diameter of the countersunk hole of the door panel 12, so that the step formed by the guide portion and the positioning portion can reliably abut the end face of the wave spring, ensuring that the wave spring is evenly stressed.

[0041] Specifically, the outer diameter of the guide portion of the centering shaft 141 matches the minor diameter of the countersunk hole of the door panel 12 to achieve a guiding function.

[0042] Specifically, the rebound component includes four groups of first rebound components, which are respectively located at the four corners of the door panel 12. The four groups of first rebound components cooperate to perform four-point uniform reverse thrust.

[0043] Preferably, the resilient component includes a second resilient assembly, which includes a shaped spring piece 143. The shaped spring piece 143 includes a first fixing portion 1431, a deformable portion 1432, and a second fixing portion 1433. The first fixing portion 1431 is fixedly connected to the door panel 12, and the second fixing portion 1433 is fixedly connected to the door frame 11. The deformation of the deformable portion 1432 tends to prevent the first fixing portion 1431 and the second fixing portion 1433 from separating. The second resilient assembly enables the door panel 12 to rebound after the airbag 13 is deflated.

[0044] Specifically, the first fixing portion 1431 of the special-shaped spring piece 143 is parallel to the second fixing portion 1433 , and the deforming portion 1432 of the special-shaped spring piece 143 is arc-shaped. The deforming portion 1432 undergoes elastic deformation to generate elastic force.

[0045] Specifically, the door panel 12 is provided with grooves on all four sides, with protrusions fixed within the grooves. The protrusions do not extend beyond the surface of the door panel 12 facing away from the door frame 11. A first fixing portion 1431 is fixedly connected to the surface of the protrusion facing away from the door frame 11 via rivets, and a second fixing portion 1433 is fixedly connected to the bottom of the rectangular groove in the door frame 11. When the airbag 13 deflates, the protrusions abut against the second fixing portion 1433, and the shaped spring pieces 143 are positioned within the grooves of the door panel 12. The four sets of shaped spring pieces 143 exert force on the door panel 12 from all four sides, thereby positioning the door panel 12 and preventing it from twisting in its plane.

[0046] Specifically, the length of the projection is shorter than the length of the groove, and the projection is positioned in the middle of the groove's lengthwise direction. The length of the first fixing portion 1431 matches the length of the projection, while the length of the second fixing portion 1433 is longer than the projection. The rivets of the second fixing portion 1433 are located on either side of the lengthwise direction of the projection, allowing them to be exposed. This helps reduce the thickness of the irregularly shaped spring piece 143, and thus the thickness of the door panel 12, and also facilitates the installation of the rivets.

[0047] Preferably, an observation window 16 is installed on the door panel 12 for observation. In this embodiment, the observation window 16 is made of a highly transparent, UV-proof and anti-static PMMA material.

[0048] Preferably, the door frame 11 is connected to a driving device 2, which is used to drive the door frame 11 to move linearly into and out of the slide slot 31 of the load compartment 3, thereby realizing the opening and closing of the sealed door.

[0049] Specifically, the drive device 2 utilizes a pneumatic cylinder mounted on the load compartment 3. The cylinder body is fixed to the load compartment 3, and the cylinder's output end is hingedly connected to the door frame 11. Movement of the cylinder's output end drives the door frame 11 in and out of the chute 31 of the load compartment 3, thereby allowing the sealed door to enter and exit the chute 31 of the load compartment 3. Deflation of the airbag 13 forces the door panel 12 into contact with the door frame 11, thus preventing friction between the door panel 12 and the chute 31 when the cylinder drives the door frame 11 to move. Inflation of the airbag 13 presses the door panel 12 against the sealing strip, causing the door frame 11 to press against the inner wall of the chute 31.

[0050] Preferably, the driving device 2 is provided with a travel sensor 4, which is used to control the travel of the door frame 11. In this embodiment, the travel sensor 4 includes two photoelectric sensors, which are mounted on the cylinder to monitor the position of the output end of the cylinder.

[0051] Preferably, a guide assembly 5 is further provided on the load compartment 3 , and the guide assembly 5 guides the door frame 11 to ensure stable movement of the door frame 11 .

[0052] Specifically, the guide assembly 5 includes a guide wheel and a mounting seat. The mounting seat is installed on the load compartment 3. The guide wheel is rotatably connected to the mounting seat. The outer periphery of the guide wheel abuts against the door frame 11 and rolls with the movement of the door frame 11.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. The airbag-propelled sealing door of the semiconductor load chamber is characterized by: include: A door frame (11), a door panel (12), an air bladder (13), a resilient component and an air pipe (15); the door panel (12) is used to block the opening of the door frame (11); the air bladder (13) is arranged between the door panel (12) and the door frame (11), the air bladder (13) is connected to an inflation and deflation device through the air pipe (15), and the inflation and deflation device is used to inflate and deflate the air bladder (13); the door panel (12) is connected to the door frame (11) through the resilient component; when the air bladder (13) is inflated, the force of the resilient component is overcome to push the door panel (12) away from the door frame (11); when the air bladder (13) is deflated, the force of the resilient component pushes the door panel (12) toward the door frame (11).

2. The semiconductor load silo airbag-propelled sealing door according to claim 1, characterized in that: The airbag (13) comprises an inner high-strength knitted fabric layer and an outer mixed rubber layer.

3. The semiconductor load chamber airbag-propelled sealing door according to claim 1, characterized in that: The door frame (11) is provided with an air bladder installation groove arranged around its opening, and the air bladder (13) is installed in the air bladder installation groove; the door frame (11) is provided with an air pipe installation groove connected to the air bladder installation groove, and the air pipe (15) is led out through the air pipe installation groove.

4. The semiconductor load silo airbag-propelled sealing door according to claim 1, characterized in that: The rebound component includes a first rebound assembly, which includes a centering shaft (141) and a first elastic member (142); the centering shaft (141) includes: a connecting portion, a guiding portion and a positioning portion in sequence, and the diameters of the connecting portion, the guiding portion and the positioning portion increase in sequence; the door panel (12) is provided with a countersunk hole from one side away from the door frame (11) to the other side, the centering shaft (141) is inserted into the countersunk hole, the connecting portion is detachably connected to the door frame (11), and the first elastic member (142) is sleeved on the guiding portion, and one end of the first elastic member (142) abuts against the step of the countersunk hole, and the other end abuts against the step formed by the guiding portion and the positioning portion.

5. The semiconductor load silo airbag-propelled sealing door according to claim 4, characterized in that: The first elastic member (142) is a wave spring.

6. The semiconductor load silo airbag-propelled sealing door according to claim 1, characterized in that: The resilient component includes a second resilient assembly, the second resilient assembly includes a special-shaped spring sheet (143), the special-shaped spring sheet (143) includes a first fixing portion (1431), a deforming portion (1432) and a second fixing portion (1433); the first fixing portion (1431) is fixedly connected to the door panel (12), the second fixing portion (1433) is fixedly connected to the door frame (11), and the deformation of the deforming portion (1432) has a tendency to hinder the first fixing portion (1431) and the second fixing portion (1433) from separating.

7. The semiconductor load silo airbag-propelled sealing door according to claim 1, characterized in that: An observation window (16) is installed on the door panel (12), and the observation window (16) is used for observation.

8. The semiconductor load silo airbag-propelled sealing door according to claim 1, characterized in that: The door frame (11) is connected to a driving device (2), and the driving device (2) is used to drive the door frame (11) to move in a straight line to enter and exit a slide groove (31) of a load compartment (3).

9. The semiconductor load silo airbag-propelled sealing door according to claim 8, characterized in that: The driving device (2) is provided with a stroke sensor (4), and the stroke sensor (4) is used to control the stroke of the door frame (11).

10. The semiconductor load silo airbag-propelled sealing door according to claim 8, characterized in that: The load compartment (3) is further provided with a guide assembly (5), and the guide assembly (5) guides the door frame (11).

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