Splicing type air floatation shaft sleeve

Abstract

The utility model relates to a splicing type air floatation shaft sleeve which comprises an air floatation outer pipe and a throttler pipe arranged on the inner side of the air floatation outer pipe, and an air path is arranged between the air floatation outer pipe and the throttler pipe. The air floatation outer pipe and the throttler pipes form an air floatation module, and the main shaft is located on the inner side of each throttler pipe. The air floatation module comprises a first air floatation module and a second air floatation module. The second air flotation module is arranged between the two first air flotation modules, and the first air flotation modules and the second air flotation module are connected with each other. A module connecting piece is arranged at the first end of the first air floatation module, and a module sealing piece is arranged at the second end of the first air floatation module. And the module connecting pieces are arranged at the two ends of the second air floatation module. According to the utility model, through the arrangement of the module connecting pieces, the air floating modules can be mutually spliced, so that the length of the air floating shaft sleeve can be randomly adjusted, and the air floating shaft sleeve can be conveniently and quickly arranged in various products.

Description

Technical Field

[0001] The utility model relates to the field of bearings, in particular to a spliced ​​air-floating shaft sleeve. Background Art

[0002] Static pressure flotation equipment is widely used in ultra-precision industrial fields such as semiconductor processing, precision component measurement, and optical product surface treatment due to its high precision, long life, friction-free and zero pollution characteristics.

[0003] Among the current static pressure air flotation equipment, according to the form of gas support, static pressure air flotation equipment can generally be divided into guide rail type, turntable type, support type, bearing type, etc. Among them, the annular air flotation sleeve can be used in many application scenarios such as main shaft, guide rail turntable, etc. due to its unique shape.

[0004] However, the length of the air bearing sleeve currently used in spindles cannot be adjusted arbitrarily. Air bearing sleeves are typically only available in standard sizes. This limitation increases the design complexity of various products using air bearing sleeves. Utility Model Content

[0005] In view of the problems existing in the above-mentioned prior art, the purpose of the present utility model is to provide a spliced ​​air-floating sleeve to facilitate the application of the air-floating sleeve in various products.

[0006] The purpose of this utility model is achieved through the following technical solutions:

[0007] A spliced ​​air-floating sleeve for use with a main shaft, comprising an air-floating outer tube and a throttle tube arranged inside the air-floating outer tube, wherein an air path is provided between the air-floating outer tube and the throttle tube;

[0008] The air flotation outer tube and the throttle tube constitute an air flotation module;

[0009] The main shaft is located inside each of the throttle tubes, and a gap is provided between each of the throttle tubes and the main shaft;

[0010] The flotation module includes a first flotation module and a second flotation module; there are two first flotation modules, and at least one second flotation module is provided, the second flotation module is arranged between the two first flotation modules, and the first flotation module and the second flotation module are connected to each other;

[0011] A module connector is provided at the first end of the first air flotation module, and a module closure is provided at the second end of the first air flotation module, wherein the module closure closes the air path;

[0012] Both ends of the second air flotation module are provided with the module connector;

[0013] The module connectors on the two air flotation modules cooperate with each other, and the air paths in the two air flotation modules are connected to each other;

[0014] At least one of the air flotation modules is provided with an air supply connector in communication with the air path. The air supply connector is connected to an external air source, and the gas ejected from the external air source enters the air path.

[0015] Furthermore, at least two second air flotation modules are provided, and the lengths of the second air flotation modules are provided in at least two different ways.

[0016] Furthermore, the module connector includes a permanent magnet arranged at the end of the air flotation module.

[0017] Furthermore, there are a plurality of permanent magnets, and the permanent magnets are arranged at equal intervals around the axis of the throttle tube.

[0018] Furthermore, the module connector also includes a sealing ring provided at the end of the air flotation module.

[0019] Furthermore, the permanent magnet and the sealing ring are both arranged on the throttle tube, and the permanent magnet is located between the sealing ring and the throttle tube, and the permanent magnet partially covers the sealing ring.

[0020] Furthermore, the throttle tube is a tubular porous graphite throttle.

[0021] Furthermore, the sealing ring is an inflatable sealing ring, and the air path of the sealing ring is connected to the air path of the throttle tube.

[0022] Furthermore, the module connector further includes a groove provided at the end of the air flotation module, and the permanent magnet and the sealing ring are both provided in the groove.

[0023] Furthermore, the module closure is connected to the air flotation module by bolts.

[0024] Compared with the prior art, the beneficial effect of the present invention is that the air flotation modules can be connected to each other through the setting of the module connector, so the length of the air flotation sleeve can be adjusted arbitrarily, which facilitates the rapid arrangement of the air flotation sleeve in various products. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a three-dimensional schematic diagram of the second air flotation module of the present utility model;

[0026] Figure 2 This is a front view of the spliced ​​air-floating sleeve of the utility model;

[0027] Figure 3 is Figure 2 is a sectional view of A-A plane in figure.

[0028] in the figure:

[0029] 1-main shaft; 2-air float outer pipe; 3-throttle pipe; 4-first air float module; 5-second air float module; 6-permanent magnet; 7-sealing ring. DETAILED DESCRIPTION

[0030] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0031] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0033] The present application discloses a spliced air float shaft sleeve, like Figures 1 to 3As shown, it is used in conjunction with the main shaft 1. The spliced ​​air-floating sleeve of the present invention includes an air-floating outer tube 2 and a throttle tube 3 arranged on the inner side of the air-floating outer tube 2. An air path is provided between the air-floating outer tube 2 and the throttle tube 3. A gap is provided between the air-floating outer tube 2 and the throttle tube 3, and the gap between the air-floating outer tube 2 and the throttle tube 3 forms an air path. The main improvement of the present invention is that the air-floating outer tube 2 and the throttle tube 3 form an air-floating module, and the number of air-floating modules is at least three. The main shaft 1 is located on the inner side of each throttle tube 3, and a gap is provided between each throttle tube 3 and the main shaft 1. Therefore, when the air path is ventilated, the gas will flow through the throttle tube 3 into the gap between the throttle tube 3 and the main shaft 1, thereby forming an air film between the throttle tube 3 and the main shaft 1, and the main shaft 1 can be suspended in the throttle tube 3.

[0034] like Figure 2 As shown, the flotation module includes a first flotation module 4 and a second flotation module 5. There are two first flotation modules 4, and at least one second flotation module 5. When there are at least two second flotation modules 5, each second flotation module 5 is interconnected. The second flotation module 5 is positioned between two first flotation modules 4, and the first and second flotation modules 4 and 5 are interconnected. Therefore, by varying the number of second flotation modules 5, the length of the spliced ​​flotation sleeve of the present invention can be varied.

[0035] like Figure 2 As shown, the first end of the first flotation module 4 is provided with a module connector, and the second end of the first flotation module 4 is provided with a module closure, which seals the air path. The second flotation module 5 is provided with module connectors at both ends. The module connectors on any two flotation modules cooperate with each other, thereby interconnecting the air paths within the two flotation modules. When the module closures on the first and second flotation modules 4 and 5 cooperate with each other, the air paths within the first and second flotation modules 4 and 5 are interconnected. Furthermore, at least one flotation module is provided with an air supply connector connected to the air path. The air supply connector is connected to an external air source, and gas ejected from the external air source enters the air path. Therefore, once gas enters the air path of the flotation module provided with the air supply connector, it quickly enters the air paths of the other flotation modules. Due to the provision of the module closures, the pressure of the gas within the air paths is maintained. Gas in the air paths of each flotation module passes through the throttle tube and ultimately flows between the throttle tube 3 and the main shaft 1.

[0036] The utility model enables the air flotation modules to be connected to each other by setting the module connector, so the length of the air flotation sleeve can be adjusted arbitrarily, which facilitates the rapid arrangement of the air flotation sleeve in various products.

[0037] In the spliced ​​air flotation sleeve of the present invention, various technical features, such as the number of second air flotation modules 5 and the specific structure of the module connectors, have multiple implementation options. Below, we will describe in detail one implementation option for each of these technical features, which will be referred to as the present embodiment. Other implementation options for these features, such as the number of second air flotation modules 5, are referred to as other embodiments, which are briefly described below.

[0038] In this embodiment, at least two second flotation modules 5 are provided, and the second flotation modules 5 are provided with at least two different lengths. In actual use, the spliced ​​flotation sleeve of the present invention can have several different specifications of second flotation modules 5. The second flotation modules 5 of each specification are identical in structure except for the length. Therefore, by selecting several second flotation modules 5 of different lengths and splicing them together, an air flotation sleeve of the desired length can be obtained. The present invention limits the length of the second flotation modules 5 to several types and the number of second flotation modules 5 to several types, making it easy to quickly obtain an air flotation sleeve of the desired length. In other embodiments, in order to reduce manufacturing costs through mass production, the lengths of the second flotation modules 5 can also be the same.

[0039] In this embodiment, the module connector includes a permanent magnet 6 disposed at the end of the air flotation module. Figure 1 As shown, permanent magnets 6 are provided at both ends of the second flotation module 5. Similarly, permanent magnets 6 are also provided at the first end of the first flotation module 4. When the first flotation module 4 and the second flotation module 5 are connected, the permanent magnets 6 located in the first flotation module 4 are connected to the permanent magnets 6 located in the second flotation module 5. The present invention facilitates quick connection and disconnection between flotation modules by providing permanent magnets 6, and by equipping each flotation module with a permanent magnet 6. In other embodiments, the module connectors may also be snap-fits or adhesive layers.

[0040] In this embodiment, if Figure 1 As shown, a plurality of permanent magnets 6 are provided, each of which is evenly spaced around the axis of the throttle tube 3. The present invention facilitates stable connection between the air flotation modules by providing multiple permanent magnets 6. In other embodiments, annular permanent magnets 6 may be used in place of the dispersed plurality of permanent magnets 6.

[0041] In this embodiment, if Figure 1As shown, the module connector further comprises a sealing ring 7 arranged at the end of the air floating module. The sealing ring 7 is arranged to prevent air from flowing out of the joint gap between the first air floating module 4 and the second air floating module 5, thereby ensuring the air tightness of the spliced air floating shaft sleeve. In other embodiments, when the first air floating module 4 and the second air floating module 5 are connected, and the module connector is a glue layer, the glue layer can be coated on one end of the first air floating module 4 and the second air floating module 5. Therefore, when the first air floating module 4 and the second air floating module 5 are bonded to each other, the glue layer can provide good air tightness for the air floating shaft sleeve, and the sealing ring 7 does not need to be additionally arranged.

[0042] In this embodiment, as shown in Figure 1 The permanent magnet 6 and the sealing ring 7 are arranged on the restrictor tube 3, and the permanent magnet 6 is located between the sealing ring 7 and the restrictor tube 3, and the permanent magnet 6 partially shields the sealing ring 7. Therefore, when the module connector on the first air floating module 4 is connected to the module connector on the second air floating module 5, the sealing ring 7 on the first air floating module 4 and the sealing ring 7 on the second air floating module 5 abut each other, and the permanent magnet 6 on the first air floating module 4 and the permanent magnet 6 on the second air floating module 5 tightly press the two sealing rings 7 together, thereby further improving the air tightness of the spliced air floating shaft sleeve. In other embodiments, the sealing ring 7 can also be arranged on the air floating outer tube 2.

[0043] In this embodiment, as shown in Figure 3 The restrictor tube 3 is a tubular porous graphite restrictor. The porous graphite restrictor can make the air pressure distribution in the air floating shaft sleeve more uniform, and the air passage in the air floating shaft sleeve is simpler, so that the spliced air floating shaft sleeve has higher carrying capacity and static stiffness, and especially has better damping characteristics when subjected to impact. In other embodiments, the restrictor tube 3 can also use a small hole restrictor or a slit restrictor.

[0044] In this embodiment, as shown in Figure 1 The sealing ring 7 is an inflatable sealing ring, and the air path of the sealing ring 7 is connected with the air path of the restrictor tube 3. When the spliced air floating shaft sleeve is used, the inflatable sealing rings on the two air floating modules abut each other when the air flows through the restrictor tube 3, so that the air tightness of the joint gap between the two air floating modules is good. In other embodiments, the sealing ring 7 can also use a common rubber sealing ring, and the rubber sealing rings abut each other by interference fit.

[0045] In this embodiment, as shown in Figure 1As shown, the modular connector also includes a groove at the end of the air flotation module, within which both the permanent magnet 6 and the sealing ring 7 are positioned. This groove improves the flatness of the end of the air flotation module where the modular connector is located. In other embodiments, the modular connectors can be mated using a male-to-female connector configuration, eliminating the need for a groove.

[0046] In this embodiment, the module closure is bolted to the flotation module. Specifically, the module closure is bolted to the flotation module, which is equipped with a module connector. Therefore, when one end of the second flotation module 5 is bolted to the module closure, the second flotation module 5 becomes the first flotation module 4, improving versatility. Alternatively, the module closure can be directly bolted to the flotation module, facilitating assembly of the module closure. In other embodiments, the module closure can also be welded to the flotation module.

[0047] In summary, the present invention, through the provision of modular connectors, allows for interconnected air flotation modules. This allows for the air flotation sleeve to be arbitrarily adjusted in length, facilitating its rapid deployment in various products. Furthermore, by limiting the lengths and number of second air flotation modules 5 to a variety, an air flotation sleeve of the desired length can be quickly obtained. Furthermore, the provision of permanent magnets 6 facilitates rapid connection and disconnection between air flotation modules. Furthermore, the provision of multiple permanent magnets 6 ensures stable connection between air flotation modules. Furthermore, the provision of sealing rings 7 ensures the airtightness of the spliced ​​air flotation sleeve. Furthermore, by positioning the permanent magnets 4 between the sealing rings 7 and the throttle tube 3, with the permanent magnets 6 partially shielding the sealing rings, the airtightness of the spliced ​​air flotation sleeve is further enhanced. Furthermore, the use of porous graphite throttles gives the present invention's spliced ​​air flotation sleeve a higher load-bearing capacity and static stiffness. Furthermore, the use of inflatable sealing rings ensures improved airtightness at the joints between two interconnected air flotation modules. The grooves improve the flatness of the ends of the air flotation modules with module connectors. The module closure is bolted to the air flotation module, and the module closure is mounted on the module connector, enhancing the versatility of the air flotation module. The module closure is directly bolted to the air flotation module, facilitating assembly of the module closure.

[0048] It should be emphasized that the above are only preferred embodiments of the present invention and do not constitute any form of limitation to the present invention. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A spliced ​​air-floating sleeve for use with a main shaft (1), comprising an air-floating outer tube (2), a throttle tube (3) arranged inside the air-floating outer tube (2), an air path being provided between the air-floating outer tube (2) and the throttle tube (3), characterized in that: The air flotation outer tube (2) and the throttle tube (3) constitute an air flotation module; The main shaft (1) is located inside each of the throttle tubes (3), and a gap is provided between each of the throttle tubes (3) and the main shaft (1); The air flotation module comprises a first air flotation module (4) and a second air flotation module (5); the number of the first air flotation modules (4) is two, the number of the second air flotation module (5) is at least one, the second air flotation module (5) is arranged between the two first air flotation modules (4), and the first air flotation module (4) and the second air flotation module (5) are connected to each other; A module connector is provided at the first end of the first air flotation module (4), and a module closure is provided at the second end of the first air flotation module (4), wherein the module closure closes the air path; Both ends of the second air flotation module (5) are provided with the module connectors; The module connectors on the two air flotation modules cooperate with each other, and the air paths in the two air flotation modules are connected to each other; At least one of the air flotation modules is provided with an air supply connector in communication with the air path. The air supply connector is connected to an external air source, and the gas ejected from the external air source enters the air path.

2. The spliced ​​air-floating bushing according to claim 1, characterized in that: At least two of the second air flotation modules (5) are provided, and the lengths of the second air flotation modules (5) are provided in at least two different ways.

3. The spliced ​​air-floating bushing according to claim 1, characterized in that: The module connector includes a permanent magnet (6) arranged at the end of the air flotation module.

4. The spliced ​​air-floating bushing according to claim 3, characterized in that: A plurality of permanent magnets (6) are provided, and the permanent magnets (6) are arranged at equal intervals around the axis of the throttle tube (3).

5. The spliced ​​air-floating bushing according to claim 4, characterized in that: The module connector also includes a sealing ring (7) arranged at the end of the air flotation module.

6. The spliced ​​air-floating bushing according to claim 5, characterized in that: The permanent magnet (6) and the sealing ring (7) are both arranged on the throttle tube (3), and the permanent magnet (6) is located between the sealing ring (7) and the throttle tube (3), and the permanent magnet (6) partially covers the sealing ring (7).

7. The spliced ​​air-floating bushing according to claim 6, characterized in that: The throttle tube (3) is a tubular porous graphite throttle.

8. The spliced ​​air-floating bushing according to claim 7, characterized in that: The sealing ring (7) is an inflatable sealing ring, and the air path of the sealing ring (7) is connected to the air path of the throttle tube (3).

9. The spliced ​​air-floating bushing according to claim 6, characterized in that: The module connector also includes a groove arranged at the end of the air flotation module, and the permanent magnet (6) and the sealing ring (7) are both arranged in the groove.

10. The spliced ​​air-floating bushing according to claim 1, characterized in that: The module closure is connected to the air flotation module with bolts.

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