Temperature measurement resistor mounting structure with temperature correction function

Abstract

The utility model discloses a temperature measurement resistor mounting structure with a temperature correction function, which is applied to temperature measurement resistor mounting of semiconductor processing equipment. The installation structure comprises a guide pipe, an outer pipe fixedly sleeved on the guide pipe, a base disc used for supporting the guide pipe and the outer pipe, a nut, a sealing assembly located between the guide pipe and the temperature measurement resistor, a water flow channel formed between the guide pipe and the outer pipe, and a water inlet pipe and a water outlet pipe communicated with the water flow channel. The water inlet pipe is vertically and fixedly connected to one corresponding side wall of the outer pipe in a penetrating mode, the water outlet pipe is vertically and fixedly connected to the other corresponding side wall of the outer pipe in a penetrating mode, and the water inlet pipe is higher than the water outlet pipe. The guide tube is composed of a thick tube part and a thin tube part, and the thick tube part is exposed out of the outer tube. According to the utility model, temperature correction processing can be carried out on the temperature measurement resistor in situ, the temperature measurement resistor does not need to be detached from semiconductor processing equipment, the structure is simple, and implementation is easy.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment temperature measurement technical field, especially a kind of temperature measurement resistance installation structure with temperature calibration function. BACKGROUND

[0002] Semiconductor processing equipment such as CVD, PVD, oxidation and annealing, usually work at a certain temperature, which usually has a temperature measuring device, but due to the measurement error of the temperature measuring device, the temperature measurement value needs to be corrected to ensure that the temperature measurement value output by the temperature measuring device can reflect the actual temperature, so as to carry out corresponding control or operation, however, without removing the temperature measuring device from the semiconductor processing equipment, how to carry out temperature correction of resistance is a technical difficulty to be solved. SUMMARY

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a temperature measurement resistance installation structure with temperature calibration function to realize temperature correction without removing the temperature measuring device from the semiconductor processing equipment.

[0004] A temperature measurement resistance installation structure with temperature calibration function, comprising:

[0005] A temperature measurement resistance is slidably installed in the guide pipe;

[0006] An outer pipe is fixedly sleeved on the guide pipe;

[0007] A water flow channel is formed between the guide pipe and the outer pipe; and

[0008] A water inlet pipe and a water outlet pipe are connected to the water flow channel.

[0009] In one embodiment, the water inlet pipe is used to introduce cold water, and the water inlet pipe is vertically fixed and connected through the corresponding side wall position of the outer pipe.

[0010] Further, the water outlet pipe is vertically fixed and connected through the corresponding other side wall position of the outer pipe, and the water inlet pipe is higher than the water outlet pipe.

[0011] In one embodiment, the guide pipe is composed of a thick pipe part and a thin pipe part, and the thick pipe part exposes the outer pipe.

[0012] Further, the installation structure further comprises a nut, a sealing assembly between the guide pipe and the temperature measurement resistance; the nut is threadedly connected to the upper end of the thick pipe part, and the nut is sleeved on the temperature measurement resistance, and a sealing element is arranged between the nut and the guide pipe.

[0013] Further, the sealing assembly is fixedly installed in the thick pipe part, and the sealing assembly adopts a sealing ring and a gasket.

[0014] In one embodiment, the mounting structure further includes a base plate for supporting the guide tube and the outer tube.

[0015] Furthermore, the outer tube is fixedly mounted on the base plate, and the guide tube and the base plate are vertically fixedly connected through the guide tube.

[0016] Compared with the prior art, the present invention has the advantages that the temperature correction process can be performed on the temperature measuring resistor in situ without removing the temperature measuring resistor from the semiconductor processing equipment, and the structure is simple and easy to implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are merely illustrative, and those skilled in the art can, without inventive effort, derive other implementation drawings based on the provided drawings.

[0018] The structures, proportions, sizes, etc. illustrated in this specification are intended solely to complement the contents disclosed herein and to facilitate understanding and reading by persons familiar with the art. They are not intended to limit the conditions under which the present invention may be implemented and therefore have no substantive technical significance. Any structural modifications, changes in proportions, or adjustments in size, without affecting the efficacy and objectives of the present invention, shall remain within the scope of the technical contents disclosed herein.

[0019] Figure 1 Shown is a front view of a temperature measuring resistor installation structure with a temperature calibration function provided by the present invention.

[0020] Figure 2 Shown Figure 1 Longitudinal cross-sectional view of .

[0021] Description of main component symbols

[0022] 1. Guide tube; 2. Outer tube; 3. Nut; 4. Sealing assembly; 5. Water flow channel; 6. Water inlet pipe; 7. Water outlet pipe.

[0023] The above description of the main component symbols is combined with the accompanying drawings and specific implementation methods to further illustrate the present invention in detail. DETAILED DESCRIPTION

[0024] The following describes the implementation of the present invention through specific embodiments. Those skilled in the art can readily understand the other advantages and benefits of the present invention from the contents disclosed in this specification. Obviously, the embodiments described are only a portion of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0025] See also Figure 1-2 This embodiment provides a temperature-measuring resistor mounting structure with a temperature calibration function, which is used for mounting a temperature-measuring resistor in semiconductor processing equipment. The mounting structure includes a guide tube 1, an outer tube 2 fixedly sleeved on the guide tube 1, a base plate for supporting the guide tube 1 and the outer tube 2, a nut 3, a sealing assembly 4 positioned between the guide tube 1 and the temperature-measuring resistor, a water flow channel 5 formed between the guide tube 1 and the outer tube 2, and a water inlet pipe 6 and a water outlet pipe 7 connected to the water flow channel 5.

[0026] A temperature measuring resistor is slidably mounted within the guide tube 1. The detection end of the temperature measuring resistor is exposed from the guide tube 1. The detection end of the temperature measuring resistor enters the reaction chamber of the semiconductor processing equipment along the temperature measuring hole. The temperature at different heights in the reaction chamber is measured by moving the temperature measuring resistor up and down. In actual use, the temperature measuring resistor can be manually operated to control its movement, or it can be moved at a set time using a lifting structure (not shown). This will not be described in detail here. The guide tube 1 is composed of a thick tube portion and a thin tube portion, with the thick tube portion exposed from the outer tube 2. The nut 3 is threadedly connected to the upper end of the thick tube portion, and the nut 3 is sleeved on the temperature measuring resistor. A seal is provided between the nut 3 and the guide tube 1. The sealing assembly 4 is fixedly mounted in the thick tube portion, and the sealing assembly 4 uses a sealing ring and a gasket.

[0027] The outer tube 2 is fixedly mounted on the base, and the guide tube 1 is vertically fixedly connected to the base. In this embodiment, the base is fixed to the corresponding position of the semiconductor processing equipment by screws to realize the installation of the temperature measuring resistor. The sealing assembly 4 performs a sealing function to prevent external moisture from entering the guide tube 1 and affecting the performance of the temperature measuring resistor.

[0028] The water inlet pipe 6 is used to introduce cold water and is vertically fixedly connected to and extending through the corresponding side wall of the outer tube 2. The water outlet pipe 7 is vertically fixedly connected to and extending through the corresponding other side wall of the outer tube 2, with the water inlet pipe 6 positioned higher than the water outlet pipe 7. In this embodiment, cold water is introduced into the water inlet pipe 6, filling the water flow channel 5 and cooling the temperature measuring resistor within the guide tube 1 through thermal convection, thereby calibrating the temperature measuring resistor before the next temperature measurement to ensure the accuracy of the subsequent temperature measurement.

[0029] In summary, the mounting structure of this embodiment has the following advantages: the temperature measuring resistor can be temperature calibrated in situ without removing the temperature measuring resistor from the semiconductor processing equipment, and the structure is simple and easy to implement.

[0030] The naming of the various components involved is based on the functions described in the specification, and is not limited to the specific nouns used in the present invention. Those skilled in the art may also choose other nouns to describe the names of the various components of the present invention.

Claims

1. A temperature measuring resistor installation structure with temperature calibration function, characterized in that: include: A guide tube (1) having a temperature measuring resistor slidably mounted therein; An outer tube (2) fixedly sleeved on the guide tube (1); a water flow channel (5) formed between the guide tube (1) and the outer tube (2); and A water inlet pipe (6) and a water outlet pipe (7) connected to the water flow channel (5).

2. The temperature measuring resistor installation structure with temperature calibration function according to claim 1, characterized in that: The water inlet pipe (6) is used to introduce cold water, and the water inlet pipe (6) is vertically fixed and connected to a position on a corresponding side wall of the outer pipe (2).

3. The temperature measuring resistor installation structure with temperature calibration function according to claim 2, characterized in that: The water outlet pipe (7) is vertically fixed and connected to the corresponding other side wall position of the outer pipe (2), and the water inlet pipe (6) is arranged higher than the water outlet pipe (7).

4. The temperature measuring resistor installation structure with temperature calibration function according to claim 1, characterized in that: The guide tube (1) is composed of a thick tube portion and a thin tube portion, and the thick tube portion is exposed from the outer tube (2).

5. The temperature measuring resistor installation structure with temperature calibration function according to claim 4, characterized in that: The mounting structure further comprises a nut (3) and a sealing assembly (4) located between the guide tube (1) and the temperature measuring resistor; The nut (3) is threadedly connected to the upper end of the thick tube portion, and the nut (3) is sleeved on the temperature measuring resistor. A sealing member is provided between the nut (3) and the guide tube (1).

6. The temperature measuring resistor installation structure with temperature calibration function according to claim 5, characterized in that: The sealing assembly (4) is fixedly installed in the thick pipe portion, and the sealing assembly (4) adopts a sealing ring and a gasket.

7. The temperature measuring resistor installation structure with temperature calibration function according to claim 1, characterized in that: The mounting structure further comprises a base plate, which is used to support the guide tube (1) and the outer tube (2).

8. The temperature measuring resistor installation structure with temperature calibration function according to claim 7, characterized in that: The outer tube (2) is fixedly mounted on the base plate, and the guide tube (1) and the base plate are vertically fixedly connected through the guide tube (1).

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