Photoresist coating equipment
By introducing adjustment and collection mechanisms into the photoresist coating equipment, the problem that traditional equipment is difficult to evenly coat photoresists of different thicknesses is solved, achieving efficient and uniform coating effects and improving production efficiency.
Patent Information
- Application Number
- CN202423091663.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2034-12-16
AI Technical Summary
Traditional photoresist coating equipment uses only one coating roller, which makes it difficult to ensure uniform coating of photoresists of different thicknesses, resulting in uneven coating, limiting production process flexibility and increasing costs.
The adjustment mechanism includes a threaded rod, a bevel gear and a scraper roller. By adjusting the distance between the scraper roller and the bottom roller, uniform coating of photoresists of different thicknesses can be achieved. A collection mechanism is designed to collect edge leakage to reduce cleaning time.
Uniform coating of photoresists of different thicknesses is achieved, production efficiency and product yield are improved, and resource waste and non-productive time are reduced.
Smart Images
Figure CN223426994U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photoresist, in particular to a photoresist coating device. Background Art
[0002] Photoresist is an organic compound that plays a key role in microelectronics technology and is the core material for fine pattern processing. In the fields of integrated circuit manufacturing, flat panel display production, and micro-electromechanical systems, photoresist accurately transfers the pattern on the mask to the substrate surface through photochemical reactions, thereby constructing complex and delicate circuits or structural patterns. In order to ensure that the photoresist can be evenly and accurately coated on the substrate, it is extremely important to use specialized coating equipment. The quality and performance of the coating equipment are directly related to the coating effect of the photoresist, which in turn affects the quality and production efficiency of the entire product.
[0003] However, the traditional structure has a significant problem. Since only one coating roller is used for coating photoresist of different thicknesses, the fluidity of the glue makes it difficult to ensure uniform coating, and the equipment cannot be effectively adjusted. This leads to uneven coating in the actual production process, which limits the flexibility and adaptability of the production process, increases production costs and wastes resources. Therefore, a photoresist coating device is proposed to solve the above problems. Summary of the Invention
[0004] In order to make up for the above shortcomings, the utility model provides a photoresist coating device, which aims to improve the problem that in the prior art, only one coating roller is used for coating. When photoresists of different thicknesses need to be coated, it is difficult to ensure uniform coating due to the fluidity of the glue liquid.
[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:
[0006] A photoresist coating device comprises a workbench, the top of the workbench is fixedly connected to a bracket, a bottom roller is rotatably connected between the brackets, a discharge head is fixedly connected to the side wall of the bracket, a feed pipe is fixedly connected to the side wall of the discharge head, a storage box is provided on one side of the workbench, a glue pump is fixedly connected to the top of the storage box, an adjustment mechanism is provided on the top of the bracket, and a collection mechanism is provided on the top of the workbench; the adjustment mechanism comprises a threaded rod, the threaded rod is rotatably connected to the inside of the bracket, a slider is threadedly connected to the outside of the threaded rod, a scraper roller is rotatably connected between the sliders, a bevel gear 1 is fixedly connected to the top of the threaded rod, an L-shaped plate is fixedly connected to the top of the bracket, a cross bar is rotatably connected between the L-shaped plates, a bevel gear 2 is fixedly connected to the outside of the cross bar, the bevel gear 1 is meshed with the bevel gear 2, and one end of the cross bar is fixedly connected to a torsion ring;
[0007] As a further description of the above technical solution:
[0008] The collecting mechanism includes a liquid storage tank, the liquid storage tank is fixedly connected to the top of the workbench, the interior of the liquid storage tank is slidably connected to a collecting box, the side wall of the collecting box is fixedly connected to a connecting plate, and the interior of the liquid storage tank is fixedly connected to a slide rail;
[0009] As a further description of the above technical solution:
[0010] The connecting plate is slidably connected to the outside of the slide rail, and a cushion block is fixedly connected to the inside of the liquid storage tank;
[0011] As a further description of the above technical solution:
[0012] The side wall of the cushion block is fixedly connected with a clamping plate, and the side of the collection box is fixedly connected with a clamping block;
[0013] As a further description of the above technical solution:
[0014] The card plate is engaged with the card block;
[0015] As a further description of the above technical solution:
[0016] The glue pump input end is fixedly connected to the inside of the storage box, and the glue pump output end is connected to one end of the feed pipe;
[0017] As a further description of the above technical solution:
[0018] Two base rollers are arranged on the top of the workbench, and a winding roller is arranged on the top of the workbench.
[0019] The utility model has the following beneficial effects:
[0020] 1. In the utility model, the cross bar is rotated by rotating the torsion ring, so that the bevel gear 2 rotates accordingly, and the bevel gear 1 rotates accordingly to drive the threaded rod to rotate, so that the slider moves up and down, driving the scraper roller to move synchronously, adjusting the distance between the scraper roller and the bottom roller, and solving the problem of uneven glue coating when different thicknesses of coating are required. Through the above structure, it can adapt to coatings of different thicknesses and can scrape the glue evenly.
[0021] In the utility model, when the glue liquid drips into the collection box and collects to a certain volume, the handle is pulled and the collection box is taken out by sliding the connecting plate on the outside of the slide rail. At this time, the card block presses the card plate outward until the card plate is separated from the card block. At this time, the leaked glue liquid can be taken out and processed in a centralized manner, which solves the problem of leakage due to the fluidity of the glue liquid at the edge during coating, which requires a lot of time to clean up. The above structure facilitates the centralized collection of leaked liquid for cleaning, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is a three-dimensional schematic diagram of a photoresist coating device proposed by the present invention;
[0023] Figure 2 This is a schematic structural diagram of a scraper roller of a photoresist coating device proposed in the present invention;
[0024] Figure 3 This is a structural schematic diagram of a collection box for a photoresist coating device proposed in the present invention;
[0025] Figure 4 This is a structural schematic diagram of a card board of a photoresist coating device proposed by the utility model.
[0026] Legend:
[0027] 1. Workbench; 2. Bracket; 3. Bottom roller; 4. Discharge head; 5. Feed pipe; 6. Glue pump; 7. Storage box; 8. Base roller; 9. Winding roller; 10. Scraper roller; 11. Threaded rod; 12. Slider; 13. Bevel gear 1; 14. L-shaped plate; 15. Cross bar; 16. Bevel gear 2; 17. Torsion ring; 18. Liquid storage tank; 19. Collection box; 20. Connecting plate; 21. Slide rail; 22. Pad; 23. Card plate; 24. Card block. DETAILED DESCRIPTION
[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0029] Reference Figures 1-2The utility model provides an embodiment of a photoresist coating device, comprising a workbench 1, which is used to provide a stable platform for the installation and operation of other components. A bracket 2 is fixedly connected to the top of the workbench 1, and a bottom roller 3 is rotatably connected between the brackets 2, which is used to drive the substrate or film material to move so that the glue liquid is evenly distributed and transferred to the subsequent film or substrate material. A discharge head 4 is fixedly connected to the side wall of the bracket 2, which is used to output the photoresist from the storage container to the outlet of the coating area, and a feed pipe 5 is fixedly connected to the side wall of the discharge head 4, which is used to construct a channel for transporting the glue liquid from the storage box 7 to the discharge head 4. A storage box 7 is provided on one side of the workbench 1, and a glue pump 6 is fixedly connected to the top of the storage box 7, which is used to extract the photoresist in the storage box 7 and transport it to the discharge head 4 through the feed pipe 5. An adjusting mechanism is provided on the top of the bracket 2, and a collecting mechanism is provided on the top of the workbench 1; the adjusting mechanism includes a threaded rod 11, which is used to To achieve position adjustment in the height direction, the threaded rod 11 is rotatably connected to the inside of the bracket 2, and the outer thread of the threaded rod 11 is connected to a slider 12, and a scraper roller 10 is rotatably connected between the sliders 12, which is used to scrape the glue on the surface of the bottom roller 3 so that the glue is evenly applied. The top of the threaded rod 11 is fixedly connected to a bevel gear 13, and the top of the bracket 2 is fixedly connected to an L-shaped plate 14, which is used to provide an installation base for the bevel gear and play a certain protection and positioning role. A cross bar 15 is rotatably connected between the L-shaped plates 14, and the outer side of the cross bar 15 is fixedly connected to a bevel gear 2 16, which is used to enable the two bevel gears 2 16 to rotate synchronously, and the bevel gear 13 is meshed with the bevel gear 2 16. One end of the cross bar 15 is fixedly connected to a torsion ring 17, the input end of the glue pump 6 is fixedly connected to the inside of the storage box 7, and the output end of the glue pump 6 is fixedly connected to one side of the feed pipe 5. Two base rollers 8 are provided on the top of the workbench 1, and a winding roller 9 is provided on the top of the workbench 1;
[0030] When using the device, first rotate the torsion ring 17. The torsion ring 17 is a manually operated component. Its rotation can provide starting power for the subsequent mechanical transmission, driving the cross bar 15 to rotate. The cross bar 15 plays a role in transmitting and converting force, transmitting and changing the rotational force of the torsion ring 17, so that the bevel gear 2 16 rotates accordingly. The bevel gear 2 16 forms a meshing connection with the bevel gear 1 13. This meshing connection method can accurately transmit the rotation of the bevel gear 2 16 to the bevel gear 1 13, and realize the adjustment of the speed and torque according to the gear transmission ratio. Under the action of the meshing connection, the bevel gear 13 rotates synchronously, and the rotation of the bevel gear 13 drives the threaded rod 11 to rotate. The threaded rod 11 can rotate due to its threaded structure. It can convert rotational motion into linear motion, so that the slider 12 moves up and down. The slider 12 serves as a connecting component, and its up and down movement can drive the scraper roller 10 to move synchronously. The scraper roller 10 and the bottom roller 3 are key components in the coating process. By adjusting the distance between the scraper roller 10 and the bottom roller 3, the problem of uneven coating when the required coating thickness is different is solved. The above structure can adapt to coatings of different thicknesses. When facing coating thicknesses required by different processes, the distance between the scraper roller 10 and the bottom roller 3 can be flexibly adjusted, so that the photoresist is evenly loaded, ensuring the consistency and stability of the coating quality, improving the product yield, and laying a good foundation for the precise implementation of the subsequent photolithography process.
[0031] Reference Figures 3-4 The collecting mechanism includes a liquid storage tank 18, which is used to provide a stable and relatively closed storage space for the internal collecting components. The liquid storage tank 18 is fixedly connected to the top of the workbench 1, and a collecting box 19 is slidably connected inside the liquid storage tank 18, which is used to collect glue. The side wall of the collecting box 19 is fixedly connected to a connecting plate 20, and the inside of the liquid storage tank 18 is fixedly connected to a slide rail 21, and the connecting plate 20 is slidably connected to the outside of the slide rail 21. A pad 22 is fixedly connected inside the liquid storage tank 18 for supporting and fixing a card plate 23. The side wall of the pad 22 is fixedly connected to a card plate 23, which is used to generate a certain elastic force and engage with the card block 24 when the collecting box 19 is installed in place. A card block 24 is fixedly connected to the side of the collecting box 19, and the card plate 23 engages with the card block 24.
[0032] When coating the film, due to the flow characteristics of the glue at the edge, leakage is likely to occur. At this time, the glue will drip into the collection box 19 for collection. The collection box 19 is a container specifically for collecting the leaked glue. Its position is set on the lower path where the glue may leak. It can effectively receive the glue flowing down from the edge of the film to avoid dripping onto the workbench 1 and being difficult to clean. If the glue drips onto the workbench 1, it will not only contaminate the surface of the workbench 1, but may also penetrate into the gaps of the workbench 1 or adhere to other components on the workbench 1, making subsequent cleaning difficult. When cleaning, it is necessary to stop the coating work first, and then use special cleaning tools and solvents to wipe and rinse, which consumes a lot of manpower and time, seriously affecting the production progress. When a certain capacity is collected, pull the handle, which is convenient for the operator to apply force to give a force to pull the collection box 19 outward, and slide the connecting plate 20 on the outside of the slide rail 21 to take out the collection box 19. The connecting plate 20 serves to connect the collection box 19 and the sliding mechanism, so that the collection box 19 can move stably with the connecting plate 20, and the slide rail 21 is the collection box 19. The guide path for entering and exiting is provided accurately, ensuring that the collection box 19 can enter and exit smoothly and the position is accurate. At this time, the card block 24 squeezes the card plate 23 outward. The card plate 23 is elastic and will deform elastically when subjected to the pressure of the card block 24 until the card plate 23 is separated from the card block 24, thereby releasing the fixed restriction on the collection box 19. At this time, the leaked glue can be processed centrally. After the processing is completed, the collection box 19 is slid again on the outside of the slide rail 21 through the connecting plate 20 and pushed into the liquid storage tank 18. The liquid storage tank 18 provides a storage space for the collection box 19. It also plays a certain role of protection and isolation until the card plate 23 and the card block 24 are engaged to fix the collection box 19. The engaging structure of the card plate 23 and the card block 24 is simple and reliable, and can quickly realize the fixing and unlocking of the collection box 19. Through the above structure, the problem that leakage occurs due to the flow characteristics of the glue at the edge during coating and a lot of time is required to clean up is solved, which avoids production interruption caused by cleaning leakage and reduces the waste of non-productive time, thereby improving production efficiency and enabling the coating work to be carried out more continuously and efficiently.
[0033] Working principle: When using the device, first rotate the torsion ring 17 to drive the cross bar 15 to rotate, so that the bevel gear 2 16 rotates accordingly. Under the action of the meshing connection, the bevel gear 13 rotates synchronously to drive the threaded rod 11 to rotate, so that the slider 12 moves up and down, thereby driving the scraper roller 10 to move synchronously, thereby adjusting the distance between the scraper roller 10 and the bottom roller 3, solving the problem of uneven glue coating when different coating thicknesses are required. Through the above structure, it can adapt to coatings of different thicknesses and make the photoresist loading uniform;
[0034] When coating the film, leakage is likely to occur due to the flow characteristics of the glue at the edge. At this time, the glue will drip into the collection box 19 for collection to prevent it from dripping onto the workbench 1 and being difficult to clean. When a certain volume is collected, pull the handle and slide the collection box 19 out of the slide rail 21 through the connecting plate 20. At this time, the card block 24 presses the card plate 23 outward until the card plate 23 is separated from the card block 24. At this time, the leaked glue can be concentrated for processing. After the processing is completed, the collection box 19 is slid again outside the slide rail 21 through the connecting plate 20 and pushed into the liquid storage tank 18 until the card plate 23 is engaged with the card block 24 to fix the collection box 19. Through the above structure, the problem of taking a lot of time to clean up the leakage due to the flow characteristics of the glue at the edge during coating is solved, thereby improving production efficiency.
[0035] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A photoresist coating device, comprising a workbench (1), characterized in that: The top of the workbench (1) is fixedly connected to a bracket (2), a bottom roller (3) is rotatably connected between the brackets (2), a discharge head (4) is fixedly connected to the side wall of the bracket (2), a feed pipe (5) is fixedly connected to the side wall of the discharge head (4), a storage box (7) is provided on one side of the workbench (1), a glue pump (6) is fixedly connected to the top of the storage box (7), an adjustment mechanism is provided on the top of the bracket (2), and a collection mechanism is provided on the top of the workbench (1); The adjustment mechanism includes a threaded rod (11), the threaded rod (11) is rotatably connected to the inside of the bracket (2), the threaded rod (11) is externally threadedly connected to a slider (12), the sliders (12) are rotatably connected to a scraper roller (10), the top of the threaded rod (11) is fixedly connected to a bevel gear 1 (13), the top of the bracket (2) is fixedly connected to an L-shaped plate (14), the L-shaped plates (14) are rotatably connected to a cross bar (15), the cross bar (15) is externally fixedly connected to a bevel gear 2 (16), the bevel gear 1 (13) is meshed with the bevel gear 2 (16), and one end of the cross bar (15) is fixedly connected to a torsion ring (17).
2. A photoresist coating device according to claim 1, characterized in that: The collecting mechanism comprises a liquid storage box (18), the liquid storage box (18) is fixedly connected to the top of the workbench (1), a collecting box (19) is slidably connected inside the liquid storage box (18), a connecting plate (20) is fixedly connected to the side wall of the collecting box (19), and a slide rail (21) is fixedly connected inside the liquid storage box (18).
3. A photoresist coating device according to claim 2, characterized in that: The connecting plate (20) is slidably connected to the outside of the slide rail (21), and a cushion block (22) is fixedly connected to the inside of the liquid storage tank (18).
4. A photoresist coating device according to claim 3, characterized in that: A clamping plate (23) is fixedly connected to the side wall of the cushion block (22), and a clamping block (24) is fixedly connected to the side of the collection box (19).
5. The photoresist coating device according to claim 4, characterized in that: The clamping plate (23) is engaged with the clamping block (24).
6. The photoresist coating device according to claim 1, characterized in that: The input end of the glue pump (6) is fixedly connected to the inside of the storage box (7), and the output end of the glue pump (6) is connected to one end of the feed pipe (5).
7. The photoresist coating device according to claim 1, wherein: Two base rollers (8) are provided on the top of the workbench (1), and a winding roller (9) is provided on the top of the workbench (1).