Semiconductor process equipment and sealing connection assembly thereof

Abstract

The utility model discloses semiconductor process equipment and a sealing connection assembly thereof, and belongs to the technical field of semiconductors. The sealing connection assembly comprises a first bottom plate, a second bottom plate and a side plate, the first bottom plate is used for being in sealing connection with the reaction chamber, the side plate is used for being in sealing connection with the inner wall of the loading and unloading chamber, the first bottom plate is in bending connection with the side plate, the first bottom plate is provided with a communication opening, and the chamber opening communicates with the inner space of the loading and unloading chamber through the communication opening; the second bottom plate is located on the side, back on to the side plate, of the first bottom plate, and the second bottom plate is connected with the first bottom plate and the side plate. The semiconductor process equipment comprises a reaction chamber, a loading and unloading chamber and the sealing connection assembly, wherein the reaction chamber is in sealing connection with the loading and unloading chamber through the sealing connection assembly. According to the arrangement, the space formed by the second bottom plate and the side plates is large, the exhaust pipeline can be arranged in the space formed by the second bottom plate and the side plates, the exhaust pipeline can be conveniently installed, repaired and maintained, and the situation that the sealing connecting assembly influences arrangement of the exhaust pipeline is avoided.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor, and particularly relates to a semiconductor process equipment and a sealing connection assembly thereof. BACKGROUND

[0002] In the related art, the semiconductor process equipment comprises a reaction chamber and a load / unload chamber (LA), the load / unload chamber is internally provided with a boat lifting mechanism, a process door and the like, and the chamber port of the reaction chamber is sealingly connected with the load / unload chamber through a sealing connection assembly. By using the sealing connection assembly, the load / unload chamber is connected with the reaction chamber, the inside of the reaction chamber is communicated with the microenvironment of the load / unload chamber, and meanwhile, the load / unload chamber and the reaction chamber are respectively isolated from the outside.

[0003] However, one end of the reaction chamber provided with the chamber port usually needs to be provided with an exhaust port, the exhaust port is connected with an exhaust pipeline for exhaust, and the existence of the sealing connection assembly leads to a small installation space of the exhaust pipeline, so that the operable space is also small, and it is inconvenient to maintain and maintain the exhaust pipeline. CONTENT OF THE INVENTION

[0004] The purpose of the embodiments of the application is to provide a semiconductor process equipment and a sealing connection assembly thereof, which can solve the problem of small installation space of the exhaust pipeline caused by the sealing connection assembly in the related art.

[0005] In a first aspect, the embodiments of the application provide a sealing connection assembly applied to a semiconductor process equipment, the semiconductor process equipment comprising a reaction chamber and a load / unload chamber, the reaction chamber being provided with a chamber port, and the chamber port being sealingly connected with the load / unload chamber through the sealing connection assembly, characterized in that the sealing connection assembly comprises a first bottom plate, a second bottom plate and a side plate, the first bottom plate being used for sealingly connecting the reaction chamber, the side plate being used for sealingly connecting the inner wall of the load / unload chamber, the first bottom plate being bendingly connected with the side plate, and the first bottom plate being provided with a communication port, and the chamber port being communicated with the internal space of the load / unload chamber through the communication port.

[0006] The second bottom plate is located on the side of the first bottom plate away from the side plate, and the second bottom plate is connected with the first bottom plate and the side plate respectively.

[0007] In a second aspect, the embodiments of the application further provide a semiconductor process equipment comprising a reaction chamber, a load / unload chamber and the above sealing connection assembly, and the reaction chamber is sealingly connected with the load / unload chamber through the sealing connection assembly.

[0008] In the embodiment of the present application, the first bottom plate and the second bottom plate are respectively connected to the side plates. Not only can the first bottom plate and the side plates form a certain space, but the second bottom plate and the side plates also form a certain space. Moreover, the second bottom plate is located on the side of the first bottom plate facing away from the side plates. Therefore, the space formed by the second bottom plate and the side plates is larger. The exhaust pipe can be arranged in the space formed by the second bottom plate and the side plates, which is conducive to increasing the installation space of the exhaust pipe, increasing the operating space, and making it more convenient to repair and maintain the exhaust pipe, thereby avoiding the sealing connection component affecting the setting of the exhaust pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is one of the structural diagrams of the sealed connection assembly disclosed in the embodiment of the present application;

[0010] Figure 2 is an exploded view of the sealed connection assembly disclosed in an embodiment of the present application;

[0011] Figure 3 This is the second structural diagram of the sealed connection assembly disclosed in the embodiment of the present application;

[0012] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0013] Figure 5 This is the third structural diagram of the sealed connection assembly disclosed in the embodiment of the present application;

[0014] Figure 6 yes Figure 5 Enlarged view of the middle BB;

[0015] Figure 7 yes Figure 5 Enlarged view of the middle CC;

[0016] Figure 8 It is a structural schematic diagram of the connecting structural member disclosed in the embodiment of the present application;

[0017] Figure 9 This is one of the partial structural diagrams of the semiconductor process equipment disclosed in the embodiments of the present application;

[0018] Figure 10 Schematic diagram of the cooperation between the sealing connection assembly and the reaction chamber disclosed in the embodiment of the present application;

[0019] Figure 11 This is the second partial structural diagram of the semiconductor process equipment disclosed in the embodiment of the present application;

[0020] Figure 12 This is the third partial structural diagram of the semiconductor process equipment disclosed in the embodiments of this application.

[0021] Description of reference numerals:

[0022] 10-Sealed connection components,

[0023] 100-first bottom plate, 110-bottom plate body, 120-first bending portion, 100a-communication port,

[0024] 200-second bottom plate, 210-fourth edge,

[0025] 300-side panel, 310-side panel body, 311-first edge, 320-second bending portion, 321-second edge, 322-third edge,

[0026] 400-connecting structure, 410-fastener, 411-threaded section, 420-anti-slip gasket, 421-second threaded hole,

[0027] 510-first connecting piece, 511-through hole, 520-second connecting piece, 521-first threaded hole,

[0028] 600-Exhaust mechanism,

[0029] 20-reaction chamber, 21-vent, 21a-exhaust port,

[0030] 30- loading and unloading chamber, 31- top plate. DETAILED DESCRIPTION

[0031] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0032] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0033] The semiconductor process equipment and the sealed connection assembly thereof provided by the embodiments of the present application are described in detail below with reference to specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0034] Please refer to Figures 1-12 The sealing connection assembly 10 disclosed in the embodiment of the present application is applied to semiconductor process equipment. The semiconductor process equipment includes a reaction chamber 20 and a loading and unloading chamber 30. The loading and unloading chamber 30 is provided with devices such as a boat lifting mechanism and a process door. The devices in the loading and unloading chamber 30 are used to transfer wafers into the reaction chamber 20. The internal space of the loading and unloading chamber 30 is in a microenvironment. The reaction chamber 20 is connected to the loading and unloading chamber 30 through the sealing connection assembly 10, so that the interior of the reaction chamber 20 is connected to the microenvironment of the loading and unloading chamber 30.

[0035] Specifically, the reaction chamber 20 is provided with a chamber port, and the chamber port is sealed and connected to the loading and unloading chamber 30 through a sealing connection component 10. Optionally, refer to Figure 9 and Figure 12 As shown, the reaction chamber 20 includes a chamber body and a vent 21. The vent 21 is disposed at the outlet end of the chamber body and is used to exhaust gas from the chamber body or control the pressure of the chamber body. The vent 21 has an exhaust port 21a connected to an exhaust pipeline. The vent 21 is sealedly connected to the loading and unloading chamber 30 via a sealing connection assembly 10. Thus, the exhaust port 21a and the exhaust pipeline can be used to exhaust gas from the reaction chamber 20 or create a vacuum environment in the reaction chamber 20.

[0036] refer to Figure 1-Figure 3 as well as Figure 5 As shown, the sealing connection assembly 10 includes a first bottom plate 100, a second bottom plate 200 and a side plate 300. The first bottom plate 100 is used to seal the reaction chamber 20, and the side plate 300 is used to seal the inner wall of the loading and unloading chamber 30. Optionally, the first bottom plate 100 is used to seal the vent 21; Figure 9 As shown, the sealing connection assembly 10 and the vent 21 are located in the loading and unloading chamber 30. The loading and unloading chamber 30 includes a top plate 31. The top plate 31 is provided with a mounting port so that the chamber body and the vent 21 are connected and communicated at the mounting port. Moreover, the first bottom plate 100 is sealedly connected to the lower end of the vent 21, and the side plate 300 is sealedly connected to the top plate 31.

[0037] Further optionally, the first base plate 100 and the vent 21 can be connected by welding, bonding, etc., and a first sealing gasket is provided between the two to achieve a sealed connection between the two. Similarly, the side plate 300 and the top plate 31 can be connected by welding, bonding, etc., and a second sealing gasket is provided between the two to achieve a sealed connection between the two.

[0038] Moreover, the first bottom plate 100 is connected to the side plate 300 by bending. Optionally, the first bottom plate 100 and the side plate 300 can be connected by welding, bonding, etc. The embodiment of the present application does not limit the connection method of the first bottom plate 100 and the side plate 300; the plane where the first bottom plate 100 is located intersects with the plane where the side plate 300 is located. Further, optionally, the plane where the first bottom plate 100 is located is perpendicular to the plane where the side plate 300 is located.

[0039] The first base plate 100 is provided with a communication port 100a, through which the chamber port communicates with the interior space of the loading and unloading chamber 30, thereby establishing communication between the interior space of the reaction chamber 20 and the interior space of the loading and unloading chamber 30. Optionally, the communication port 100a may have a circular structure, a square structure, or other structures, and the specific shape of the communication port 100a is not limited in this embodiment of the present application.

[0040] In this arrangement, the sealing connection assembly 10 serves as a transition structure between the reaction chamber 20 and the loading and unloading chamber 30. The first bottom plate 100 and the side plate 300 are sealedly connected to the reaction chamber 20 and the loading and unloading chamber 30 respectively, thereby achieving a sealed connection between the reaction chamber 20 and the loading and unloading chamber 30, and communicating the interior of the reaction chamber 20 with the microenvironment of the loading and unloading chamber 30. At the same time, it ensures that the reaction chamber 20 and the loading and unloading chamber 30 are respectively isolated from the outside world.

[0041] Furthermore, the second bottom plate 200 is located on the side of the first bottom plate 100 facing away from the side plate 300, and the second bottom plate 200 is connected to the first bottom plate 100 and the side plate 300, respectively. Optionally, the second bottom plate 200 and the first bottom plate 100, and the second bottom plate 200 and the side plate 300 can be connected by welding, bonding, or the like. The embodiment of the present application does not limit the connection method between the second bottom plate 200 and the first bottom plate 100, and between the second bottom plate 200 and the side plate 300. Optionally, the plane on which the second bottom plate 200 is located can be parallel to the plane on which the first bottom plate 100 is located, and the first bottom plate 100 and the second bottom plate 200 are connected by other components. Alternatively, the plane on which the second bottom plate 200 is located can intersect with the plane on which the first bottom plate 100 is located, and the second bottom plate 200 is arranged at an angle relative to the first bottom plate 100, thereby directly connecting the first bottom plate 100 and the second bottom plate 200.

[0042] Optionally, the first base plate 100, the second base plate 200 and the side plate 300 mentioned above can all be flat structures, curved structures, or bent structures. The embodiments of the present application do not limit their specific shapes and structures.

[0043] In the embodiment of the present application, the first bottom plate 100 and the second bottom plate 200 are respectively connected to the side plate 300, not only the first bottom plate 100 and the side plate 300 can form a certain space (refer to Figure 12As shown in the area S1), the second bottom plate 200 and the side plate 300 also form a certain space (refer to Figure 12 Moreover, the second bottom plate 200 is located on the side of the first bottom plate 100 facing away from the side plate 300, so the space formed by the second bottom plate 200 and the side plate 300 is relatively large. The exhaust pipe can be arranged in the space S2 formed by the second bottom plate 200 and the side plate 300, which is conducive to increasing the installation space of the exhaust pipe, increasing the operable space, and making it more convenient to repair and maintain the exhaust pipe, thereby avoiding the sealing connection component 10 affecting the setting of the exhaust pipe.

[0044] Optionally, refer to Figure 1-Figure 3 as well as Figure 5 As shown, the sealed connection assembly 10 further includes an exhaust mechanism 600 , which is disposed on the side plate 300 .

[0045] In an alternative embodiment, reference Figure 2 As shown, the first base plate 100 includes a connected base plate body 110 and a first bending portion 120, the connecting port 100a is arranged on the base plate body 110, and the first bending portion 120 is bent relative to the base plate body 110 toward the side where the second base plate 200 is located. Optionally, the first bending portion 120 can be a plate-like structure, and the plane where the first bending portion 120 is located intersects with the plane where the base plate body 110 is located. Further, optionally, the plane where the first bending portion 120 is located is perpendicular to the plane where the base plate body 110 is located, and the plane where the second base plate 200 is located is parallel to the plane where the base plate body 110 is located; the first bending portion 120 and the base plate body 110 can form an integrated structure by casting or the like, or the first bending portion 120 and the base plate body 110 are split structures, and the two are connected by welding, bonding or the like.

[0046] The edge of the first bent portion 120 is connected to the second bottom plate 200, and the edges of the second bottom plate 200, the edges of the first bent portion 120, and the edges of the bottom plate body 110 are respectively connected to the side plate 300. Optionally, the edge of the first bent portion 120 is connected to the fourth edge 210 of the second bottom plate 200 by welding, bonding, or the like, and the edges of the second bottom plate 200, the edges of the first bent portion 120, and the edges of the bottom plate body 110 can be respectively connected to the side plate 300 by welding, bonding, or the like.

[0047] In this embodiment, the first base plate 100 is provided with a first bending portion 120, which facilitates the direct connection of the second base plate 200 to the first bending portion 120. Moreover, the second base plate 200 can be further away from the base plate body 110, which is conducive to increasing the space formed by the second base plate 200 and the side plate 300, so that the installation space and maintenance space of the exhaust pipe are larger, the operating space is larger, and it is more convenient to install the exhaust pipe and maintain the exhaust pipe.

[0048] In an optional embodiment, the side panel 300 includes a connected side panel body 310 and a second bent portion 320. The second bent portion 320 bends relative to the side panel body 310 toward the side where the second bottom panel 200 is located. Optionally, the side panel body 310 and the second bent portion 320 can be formed into an integral structure by casting or other methods, or the side panel body 310 and the second bent portion 320 can be separate structures and connected by welding, bonding, etc. The side panel body 310 is connected to the bottom panel body 110, and the second bent portion 320 is connected to the second bottom panel 200.

[0049] In another embodiment, reference Figure 2 As shown, the second bent portion 320 is respectively connected to the second bottom plate 200 and the first bent portion 120. Specifically, the side plate body 310 has a first edge 311, which is connected to the edge of the bottom plate body 110. The second bent portion 320 has a second edge 321 and a third edge 322 that are bent and connected. One end of the second edge 321 is connected to the first edge 311, and the other end of the second edge 321 is connected to the third edge 322. The second edge 321 is connected to the edge of the first bent portion 120, and the third edge 322 is connected to the edge of the second bottom plate 200.

[0050] Optionally, the first edge 311 can be connected to the edge of the base plate body 110 by welding, bonding, etc., the second edge 321 can be connected to the edge of the first bending portion 120 by welding, bonding, etc., and the third edge 322 can be connected to the edge of the second base plate 200 by welding, bonding, etc.

[0051] With this embodiment, the side panel 300 is conveniently connected to the second bottom plate 200, the bottom plate body 110 and the first bending portion 120 at the same time by adding a second bending portion 320. Moreover, the second bending portion 320 is simultaneously connected to the first bending portion 120 and the second bottom plate 200, so that the connection area between the side panel 300 and the first bottom plate 100 is increased, which is conducive to improving the connection stability.

[0052] In an optional embodiment, the side panel body 310 is a flat plate structure, and a second bending portion 320 is provided at one end of the side panel body 310 .

[0053] In another embodiment, reference Figure 2As shown, the side panel body 310 extends along the edge of the bottom panel body 110, and a second bent portion 320 is provided at each end of the side panel body 310. These two second bent portions 320 are respectively connected to the ends of the first bent portion 120 and the ends of the second bottom panel 200. Optionally, the edge of the bottom panel body 110 has an arc-shaped structure, and the side panel body 310 extends along the arc direction; or, the bottom panel body 110 has a square structure, and the side panel body 310 extends along the edge of the square structure. This embodiment of the application does not limit the structure of the side panel body 310. The ends of the side panel body 310 can extend to the ends of the second bottom panel 200, thereby facilitating the provision of the second bent portions 320.

[0054] With this embodiment, the extension length of the side panel body 310 is greater, and the area of ​​the side panel body 310 is larger, so the connection area between the side panel body 310 and the bottom plate body 110 is increased; at the same time, the number of second bending portions 320 increases, the total connection area between the second bending portions 320 and the first bending portions 120 increases, and the total connection area between the second bending portions 320 and the second bottom plate 200 also increases, which is more conducive to improving the connection stability.

[0055] In the solution of the present application, the second bottom plate 200 is detachably connected to the first bottom plate 100 and the side plate 300, respectively. Optionally, the edges of the second bottom plate 200 are detachably connected to the edge of the first bent portion 120 and the third edge 322 of the second bent portion 320, respectively. Further, optionally, the fourth edge 210 of the second bottom plate 200 and the edge of the first bent portion 120, and the edge of the second bottom plate 200 and the third edge 322 of the second bent portion 320, can be detachably connected by means of a snap connection, a bolt connection, or the like. The embodiments of the present application do not limit the method of detachable connection.

[0056] With this embodiment, when the second base plate 200 is disconnected from the first base plate 100 and the side plate 300, it can be separated from the side plate 300 and the first base plate 100, thereby enabling removal and facilitating repair and maintenance of the exhaust pipe it carries. Furthermore, the area of ​​the second base plate 200 is typically smaller than that of the first base plate 100, making it more convenient to remove the second base plate 200 than the first base plate 100. This eliminates the need to remove the first base plate 100, thereby preventing any compromise in the sealed connection between the first base plate 100 and the reaction chamber 20.

[0057] In the solution of the present application, the first bottom plate 100 is detachably connected to the side plate 300 and the second bottom plate 200, respectively. Optionally, the bottom plate body 110 is detachably connected to the first edge 311 of the side plate body 310, the first bent portion 120 is detachably connected to the second edge 321 of the second bent portion 320, and the edge of the first bent portion 120 is detachably connected to the edge of the second bottom plate 200. Further, optionally, the first edge 311 of the bottom plate body 110 and the side plate body 310, the first bent portion 120 and the second edge 321 of the second bent portion 320, and the edge of the first bent portion 120 and the fourth edge 210 of the second bottom plate 200 can all be detachably connected by means of snap-fitting, bolting, or the like. The embodiments of the present application do not limit the method of detachable connection.

[0058] With this embodiment, when the first base plate 100 is disconnected from the second base plate 200 and the side plate 300 respectively, the first base plate 100 can be separated from the side plate 300 and the second base plate 200 to achieve disassembly, making it convenient to maintain and service the exhaust pipe carried by the first base plate 100.

[0059] In this embodiment, the second bottom plate 200 is detachably connected to the first bottom plate 100 and the side plate 300, respectively. Furthermore, the first bottom plate 100 is detachably connected to the side plate 300. This arrangement allows for the removal of the second bottom plate 200, and the subsequent disconnection of the first bottom plate 100 from the side plate 300. This separation allows for easy repair and maintenance of the exhaust pipes supported by both the first and second bottom plates 100 and 200.

[0060] In a further embodiment, the sealed connection assembly 10 further includes a first connection member 510, a second connection member 520, and a connection structure 400. Any two of the first base plate 100, the second base plate 200, and the side plate 300 are respectively connected to the first connection member 510 and the second connection member 520, and the first connection member 510 and the second connection member 520 are detachably connected via the connection structure 400. In other words, the two detachably connected members are respectively connected to the first connection member 510 and the second connection member 520. The first connection member 510 and the second connection member 520 can be block-shaped structures, sheet-shaped structures, etc., and the specific structures of the first connection member 510 and the second connection member 520 are not limited in this embodiment of the application.

[0061] Optionally, refer to Figure 7 As shown, when the first bottom plate 100 is connected to the second bottom plate 200, one of the first bending portion 120 of the first bottom plate 100 and the second bottom plate 200 is connected to the first connecting member 510, and the other is connected to the second connecting member 520; when the first bottom plate 100 is connected to the side plate 300, Figure 4As shown, one of the bottom plate body 110 and the side plate body 310 is connected to the first connecting member 510, and the other is connected to the second connecting member 520, or one of the first bending portion 120 and the second bending portion 320 is connected to the first connecting member 510, and the other is connected to the second connecting member 520; Figure 6 As shown, when the second bottom plate 200 is connected to the side plate 300 , one of the second bottom plate 200 and the second bending portion 320 is connected to the first connecting member 510 , and the other is connected to the second connecting member 520 .

[0062] Further optionally, the bottom plate body 110 and the side plate body 310, the first bending portion 120 and the second bending portion 320, the second bottom plate 200 and the first bending portion 120, and the second bottom plate 200 and the second bending portion 320 are all connected by the first connecting member 510, the connecting structural member 400 and the second connecting member 520.

[0063] The connecting structure 400 includes a fastener 410, which can be a component with external threads such as a screw or a bolt. The first connecting member 510 is provided with a through hole 511, and the second connecting member 520 is provided with a first threaded hole 521. The fastener 410 passes through the through hole 511 and extends into the first threaded hole 521. The fastener 410 is threadedly engaged with the first threaded hole 521. Specifically, refer to Figure 8 As shown, the fastener 410 has a threaded section 411 that is threadedly engaged with the first threaded hole 521. When the first base plate 100, the second base plate 200, or the side plate 300 needs to be disassembled, the first connecting member 510 and the second connecting member 520 can be separated by screwing the fastener 410 out of the corresponding first threaded hole 521.

[0064] In this embodiment, the first connecting member 510 and the second connecting member 520 are connected by the fastener 410, thereby connecting two of the first base plate 100, the second base plate 200 and the side plate 300 to achieve a detachable connection. Moreover, a tight connection is achieved by screwing the fastener 410, and the connection stability is stronger.

[0065] In a further embodiment, reference Figure 8 As shown, the connecting structure 400 also includes an anti-slip gasket 420, which is connected to the first connecting member 510. Optionally, the anti-slip gasket 420 and the first connecting member 510 can be connected by welding, bonding, etc.; moreover, the anti-slip gasket 420 is provided with a second threaded hole 421, which is opposite to the through hole 511, and the fastener 410 can be threadedly engaged with the second threaded hole 421. Optionally, the fastener 410 also includes a rod body, a threaded section 411 is located at the end of the rod body, the diameter of the threaded section 411 is larger than the diameter of the rod body, the rod body passes through the through hole 511, and the diameter of the rod body is smaller than the aperture of the second threaded hole 421.

[0066] In this embodiment, the connecting structure 400 is provided with an anti-slip washer 420. When the fastener 410 is disengaged from the first threaded hole 521, the fastener 410 can be limitedly engaged with the anti-slip washer 420. The anti-slip washer 420 prevents the fastener 410 from directly disengaging and falling out of the through hole 511, making it easier for the fastener 410 to be inserted into the first threaded hole 521 for threaded connection, thereby improving the convenience of assembly and disassembly. In addition, the anti-slip washer 420 is provided with a second threaded hole 421 that is threadedly engaged with the fastener 410, so that the fastener 410 can be smoothly installed and removed through a screwing operation.

[0067] Of course, in other embodiments, the connection structure 400 may not be provided with the anti-detachment gasket 420 , and the fastener 410 may be directly detached from the through hole 511 after detaching from the first threaded hole 521 .

[0068] In an optional embodiment, one connecting structure 400 is provided in the direction in which the edge of the second bottom plate 200 extends.

[0069] In another embodiment, a plurality of connecting structural members 400 are disposed at intervals along the direction in which the edge of the second bottom plate 200 extends. Alternatively, a plurality of connecting structural members 400 are disposed at intervals along the direction in which the third edge 322 extends and along the direction in which the edge of the second bottom plate 200 connects to the first bent portion 120.

[0070] With this embodiment, the number of connecting structural members 400 increases, and the connection area between the second bottom plate 200 and the side plate 300 and the connection area between the second bottom plate 200 and the first bottom plate 100 are larger, which is conducive to further improving the connection stability.

[0071] Optionally, in the extension direction of the first edge 311 and the second edge 321, multiple connecting structural members 400 are respectively arranged at intervals, that is, the bottom plate body 110 and the side plate body 310 are connected by multiple connecting structural members 400, and the first bending portion 120 and the second bending portion 320 are also connected by multiple connecting structural members 400.

[0072] With such a configuration, the number of the connecting structural members 400 between the first bottom plate 100 and the side plate 300 increases, and the connection area between the first bottom plate 100 and the side plate 300 increases, which is beneficial to further improve the connection stability.

[0073] In an optional embodiment, the sealed connection assembly 10 further includes a seal, wherein a seal is provided between the first bottom plate 100 and the side plate 300, and / or between the first bottom plate 100 and the second bottom plate 200, and / or between the second bottom plate 200 and the side plate 300. In other words, a seal may be provided only between the first bottom plate 100 and the side plate 300, or only between the first bottom plate 100 and the second bottom plate 200, or only between the second bottom plate 200 and the side plate 300, or at two of these three locations, or at all three locations.

[0074] Optionally, the sealing member is a sealing gasket, which may be a strip-shaped structure and extend along the edges of the two connected components. Further, optionally, the material of the sealing gasket may be, but is not limited to, rubber.

[0075] Optionally, a sealing gasket is provided between the bottom plate body 110 and the side plate body 310, and the sealing gasket extends along the first edge 311; a sealing gasket is provided between the first bending portion 120 and the second bending portion 320, and the sealing gasket extends along the second edge 321; a sealing gasket is provided between the second bottom plate 200 and the first bending portion 120, and the sealing gasket extends along the fourth edge 210 of the second bottom plate 200; a sealing gasket is also provided between the second bottom plate 200 and the second bending portion 320, and the sealing gasket extends along the third edge 322.

[0076] With this embodiment, a sealing member is added between the first bottom plate 100 and the side plate 300, which is beneficial to improving the connection sealing between the first bottom plate 100 and the side plate 300; a sealing member is added between the first bottom plate 100 and the second bottom plate 200, which is beneficial to improving the connection sealing between the first bottom plate 100 and the second bottom plate 200; a sealing member is added between the second bottom plate 200 and the side plate 300, which is beneficial to improving the connection sealing between the second bottom plate 200 and the side plate 300.

[0077] Of course, in other embodiments, no seal may be provided between the first bottom plate 100 and the side plate 300. The connection tightness between the first bottom plate 100 and the side plate 300 can be improved by increasing the connection area between the two, thereby improving the sealing performance. Of course, the gap between the two can also be sealed by other means; the same applies to the gap between the first bottom plate 100 and the second bottom plate 200 and between the second bottom plate 200 and the side plate 300.

[0078] Based on the sealing connection component 10 disclosed in the present application, an embodiment of the present application also discloses a semiconductor process equipment, which includes a reaction chamber 20, a loading and unloading chamber 30 and the sealing connection component 10 in the above embodiment. The reaction chamber 20 and the loading and unloading chamber 30 are sealed and connected through the sealing connection component 10.

[0079] According to this embodiment, the sealing connection assembly 10 used in the semiconductor process equipment is combined with the first base plate 100, the second base plate 200 and the side plate 300, so that the installation space of the exhaust pipe is larger and the operating space is also larger, which facilitates the repair and maintenance of the exhaust pipe.

[0080] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A sealing connection assembly, applied to semiconductor process equipment, the semiconductor process equipment comprising a reaction chamber (20) and a loading and unloading chamber (30), the reaction chamber (20) being provided with a chamber opening, the chamber opening being sealedly connected to the loading and unloading chamber (30) via the sealing connection assembly (10), characterized in that: The sealing connection assembly (10) comprises a first bottom plate (100), a second bottom plate (200) and a side plate (300), wherein the first bottom plate (100) is used for sealingly connecting the reaction chamber (20), and the side plate (300) is used for sealingly connecting the inner wall of the loading and unloading chamber (30), the first bottom plate (100) and the side plate (300) are bent and connected, and the first bottom plate (100) is provided with a communication port (100a), and the chamber port is communicated with the internal space of the loading and unloading chamber (30) through the communication port (100a). The second bottom plate (200) is located on a side of the first bottom plate (100) facing away from the side plate (300), and the second bottom plate (200) is connected to the first bottom plate (100) and the side plate (300) respectively.

2. The sealing connection assembly according to claim 1, characterized in that: The first bottom plate (100) comprises a bottom plate body (110) and a first bending portion (120) connected to each other. The first bending portion (120) is bent relative to the bottom plate body (110) toward the side where the second bottom plate (200) is located. The edge of the first bending portion (120) is connected to the second bottom plate (200), and the edge of the second bottom plate (200), the edge of the first bending portion (120) and the edge of the bottom plate body (110) are respectively connected to the side plate (300).

3. The sealing connection assembly according to claim 2, characterized in that: The side plate (300) comprises a connected side plate body (310) and a second bending portion (320), wherein the second bending portion (320) is bent relative to the side plate body (310) toward the side where the second bottom plate (200) is located. The side panel body (310) is provided with a first edge (311), the first edge (311) is connected to the edge of the bottom panel body (110), the second bending portion (320) has a second edge (321) and a third edge (322) connected by bending, the second edge (321) is connected to the edge of the first bending portion (120), and the third edge (322) is connected to the edge of the second bottom panel (200).

4. The sealing connection assembly according to claim 3, characterized in that: The side plate body (310) extends along the edge of the bottom plate body (110), and the second bending portion (320) is provided at both ends of the side plate body (310).

5. The sealing connection assembly according to claim 1, characterized in that: The second bottom plate (200) is detachably connected to the first bottom plate (100) and the side plate (300), respectively.

6. The sealing connection assembly according to claim 1, characterized in that: The first bottom plate (100) is detachably connected to the side plate (300) and the second bottom plate (200), respectively.

7. The sealing connection assembly according to claim 5 or 6, characterized in that: The sealing connection assembly (10) further comprises a first connection member (510), a second connection member (520) and a connection structure member (400), wherein any two of the first bottom plate (100), the second bottom plate (200) and the side plate (300) are respectively connected to the first connection member (510) and the second connection member (520), and the first connection member (510) and the second connection member (520) are detachably connected via the connection structure member (400). The connecting structure (400) comprises a fastener (410), the first connecting member (510) is provided with a through hole (511), the second connecting member (520) is provided with a first threaded hole (521), and the fastener (410) passes through the through hole (511) and is threadably engaged with the first threaded hole (521).

8. The sealing connection assembly according to claim 7, characterized in that: The connecting structure (400) further includes an anti-slip gasket (420), the anti-slip gasket (420) is connected to the first connecting member (510), and the anti-slip gasket (420) is provided with a second threaded hole (421), the second threaded hole (421) is opposite to the through hole (511), and the fastener (410) can be threadedly matched with the second threaded hole (421).

9. The sealing connection assembly according to claim 7, characterized in that: In the direction in which the edge of the second bottom plate (200) extends, a plurality of the connecting structural members (400) are arranged at intervals.

10. The sealing connection assembly according to claim 1, characterized in that: The sealing connection assembly (10) further comprises a sealing member, wherein the sealing member is provided between the first bottom plate (100) and the side plate (300), and / or the sealing member is provided between the first bottom plate (100) and the second bottom plate (200), and / or the sealing member is provided between the second bottom plate (200) and the side plate (300).

11. A semiconductor process equipment, characterized in that: The invention comprises a reaction chamber (20), a loading and unloading chamber (30), and a sealing connection assembly (10) according to any one of claims 1 to 10, wherein the reaction chamber (20) and the loading and unloading chamber (30) are sealedly connected via the sealing connection assembly (10).

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