Connecting assembly and process equipment

Abstract

The embodiment of the utility model provides a connecting assembly and process equipment, the process equipment comprises an equipment main body, a driving device, the connecting assembly and a cover body arranged opposite to the equipment main body, and the connecting assembly comprises a sleeve, a connecting piece and a base. The sleeve is fixed to the driving device, and the base is fixed to the cover. A channel is arranged in the sleeve, a hole groove is formed in the base, the first end of the connecting piece is movably arranged in the channel, and the second end of the connecting piece is movably arranged in the hole groove. The connecting assembly is driven by the driving device to drive the cover body to get close to the equipment body, so that the first positioning structure of the cover body is in positioning fit with the second positioning structure of the equipment body. In the positioning matching process, the first end slides and rotates in the channel, and the second end rotates in the hole groove, so that small sliding friction force is generated, and static load and impact force applied to the positioning structure by the cover body can be reduced. In addition, the gap between the first positioning structure and the second positioning structure does not need to be too large, and accurate centering can be achieved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, and in particular to a connection component and process equipment. Background Art

[0002] The process of flipping the source of the process equipment and fixing it to the positioning pin on the equipment body by means of a rotating arm is called centering. During the centering process, the positioning hole of the source will first contact the positioning pin, and then the source will be offset relative to the positioning pin so that the positioning pin fits accurately with the positioning hole, and finally the centering is achieved. The current rotating arm is usually connected to the source by a shoulder screw. During the centering process, the shoulder screw will detach from the rotating arm to allow the source to be offset relative to the positioning pin. Affected by the gravity of the source, a huge sliding friction force will be generated when the shoulder screw detaches from the rotating arm, which will cause the positioning pin to be subjected to a large static load and impact force, which may easily cause the cover to get stuck and unable to be opened after closing, and may also cause damage to the positioning pin. To avoid these problems, it is necessary to increase the matching clearance between the positioning hole and the positioning pin, resulting in the inability to achieve more precise centering. Utility Model Content

[0003] The embodiments of the present application provide a connection assembly and process equipment that can reduce the force on the locating pin, reduce the fitting clearance between the locating pin and the locating hole, and achieve more precise alignment.

[0004] In a first aspect, an embodiment of the present application proposes a connection assembly for use in a process device, wherein the process device comprises an equipment body, a drive device, and a cover body arranged opposite to the equipment body, wherein the cover body has a first positioning structure, and the equipment body has a second positioning structure that cooperates with the first positioning structure. The connection assembly is used to connect the drive device and the cover body; the connection assembly comprises a sleeve, a connection member, and a base; the sleeve is used to be fixed to the drive device, and the base is used to be fixed to the cover body; a channel is provided in the sleeve, and a hole groove is provided in the base; the connection member comprises a first end and a second end opposite to each other, the first end is movably provided in the channel, and the second end is movably provided in the hole groove; the connection assembly is used to drive the cover body close to the equipment body under the drive of the drive device, so that the first positioning structure and the second positioning structure are positioned and matched; wherein the sleeve is used to move toward the base under the drive of the drive device, so that the first end slides and rotates in the channel, and the second end rotates in the hole groove.

[0005] In the embodiment, the first end of the connecting piece is movably arranged in the passage of the sleeve, and the second end of the connecting piece is movably arranged in the hole slot of the base. During the process of driving the cover of the process chamber to be flipped and combined on the equipment main body, the first end slides and rotates in the passage, and the second end rotates in the hole slot. Therefore, the sliding friction generated between the two ends of the connecting piece and the sleeve and the base is small. Compared with the large friction generated during the process of the shoulder screw of the conventional scheme being separated from the rotating arm, the scheme of the embodiment can reduce the static load and impact force applied by the cover to the positioning structure, and reduce the risk of combination or opening of the cover being stuck and the damage risk of the positioning structure. Moreover, the gap between the first positioning structure and the second positioning structure does not need to be too large, and accurate centering can be achieved.

[0006] In an implementation form of the first aspect, the surface of the first end is a part of a spherical surface, and the surface of the first end is in sliding and rotating contact with the inner wall of the passage; and / or, the surface of the second end is a part of a spherical surface, and the surface of the second end is in rotating contact with the inner wall of the hole slot.

[0007] In the embodiment, by setting at least one surface of the first end and the second end as a part of a spherical surface, the friction generated between the connecting piece and the sleeve and the base during centering is further reduced, thereby facilitating the reduction of the static load and impact force borne by the first positioning structure or the second positioning structure.

[0008] In an implementation form of the first aspect, the caliber of the opening of the passage towards the base is smaller than the outer diameter of the first end, and / or, the caliber of the opening of the hole slot is smaller than the outer diameter of the second end.

[0009] In the embodiment, by limiting the caliber of at least one of the passage and the hole slot, the first end cannot be separated from the opening of the passage towards the base, and / or, the second end cannot be separated from the opening of the hole slot. Such design is beneficial to strengthen the connection strength of the connecting piece with the sleeve and the base, and reduce the risk of the equipment being separated during centering and causing damage to the first positioning structure or the second positioning structure.

[0010] In an implementation form of the first aspect, the connecting assembly further comprises a limiting piece arranged between the sleeve and the base, the limiting piece is located between the first end and the second end, and the limiting piece has a through hole; the connecting piece passes through the through hole, and the part of the connecting piece located between the first end and the second end is used to abut against the inner wall of the through hole.

[0011] In the embodiment, by arranging the limiting piece between the sleeve and the base, and the connecting piece passing through the through hole of the limiting piece, the maximum inclination angle of the connecting piece during centering can be limited, thereby avoiding the situation that the inclination angle of the connecting piece is too large during centering, causing uneven force distribution of multiple positioning structures, and reducing the damage risk of the first positioning structure or the second positioning structure during centering of the process equipment.

[0012] In one embodiment of the first aspect, the limit member includes a first limit member and a second limit member, the first limit member is fixed to the side of the sleeve facing the base, the first limit member has a first through hole, the second limit member is fixed to the side of the base facing the sleeve, the second limit member has a second through hole; the connecting member passes through the first through hole and the second through hole; the part of the connecting member located between the first end and the second end is used to abut against at least one of the inner wall of the first through hole and the inner wall of the second through hole.

[0013] In this embodiment, by providing a first stopper on the side of the sleeve facing the base and a second stopper on the side of the base facing the sleeve, not only can the maximum tilt angle of the connector be limited during the centering process, but also severe impact and vibration caused by direct contact between the sleeve and the base can be avoided during the centering process. Furthermore, the first and second stoppers, acting as covers for the sleeve and base, respectively, prevent the connector from falling off the sleeve and base.

[0014] In one embodiment of the first aspect, the connecting assembly further comprises an elastic member disposed within the channel and located on a side of the first end facing away from the second end. The connecting member is configured to compress the elastic member when sliding within the channel, causing the elastic member to exert a rebound force on the connecting member. The elastic member is capable of elastic deformation and elastic damping. The elastic member includes, but is not limited to, a spring.

[0015] In this embodiment, when the connecting member slides in the channel, it will squeeze the elastic member so that the elastic member is used to apply a rebound force to the connecting member. The rebound force and elastic damping enable the connecting member to move smoothly, thereby providing a buffering effect for the positioning cooperation between the first positioning structure and the second positioning structure, avoiding the first positioning structure or the second positioning structure from being subjected to a large impact in a short period of time.

[0016] In one embodiment of the first aspect, the connecting assembly further includes a conductive member, which is slidably disposed in the channel and connected between the first end and the elastic member, and the first end is in abutment or rotational contact with the conductive member.

[0017] In this embodiment, the provision of a conductive member within the connection assembly effectively enhances the stability and safety of the device during alignment. The sliding configuration of the conductive member allows it to flexibly adapt to the movement of the first end, effectively transmitting the applied force to the elastic member and preventing damage to the connection member due to direct contact between the connection member and the elastic member.

[0018] In an embodiment of the first aspect, the connecting assembly further includes a pressing plate, which is fixedly connected to the sleeve and abuts against a side of the elastic member facing away from the first end.

[0019] In the embodiment, the pressing plate can encapsulate the elastic member in the sleeve. By setting the assembly structure of the elastic member, the conducting member and the pressing plate, buffering can be provided for the sliding of the first end in the channel during centering, so that the cover moves more stably during centering or cover opening.

[0020] In a second aspect, the embodiment of the present application provides a process equipment, which comprises a cover, an equipment body, a driving device and a connecting assembly. The cover and the equipment body are arranged oppositely. A first positioning structure is arranged on a side of the cover facing the equipment body, a second positioning structure is arranged on a side of the equipment body facing the cover, and the connecting assembly connects the cover and the equipment body. The driving device is used to drive the connecting assembly and the cover to move close to the equipment body, so that the first positioning structure and the second positioning structure are positioned and matched.

[0021] In the embodiment of the present application, the connecting assembly in the process equipment makes the stress of the positioning structure smaller, and the gap between the first positioning structure and the second positioning structure does not need to be too large, so that more accurate centering can be achieved.

[0022] In an embodiment of the second aspect, one of the first positioning structure and the second positioning structure is a positioning hole, and the other is a positioning pin.

[0023] In the embodiment, the first positioning structure and the second positioning structure have simple structure, are easy to manufacture and have reliable cooperation. The positioning pin after centering can be located in the positioning hole, so that more accurate centering can be achieved.

[0024] In an embodiment of the second aspect, the process equipment has a critical state and a centering state. In the critical state, the extension direction of the connecting member is along the direction of gravity, and the first positioning structure is located at an initial position. A part of the projection of the second positioning structure along the direction of the center line of the first positioning structure falls within the boundary of the first positioning structure, and the other part falls outside the boundary of the first positioning structure. In the centering state, the extension direction of the connecting member forms an angle with the direction of gravity, and the first positioning structure and the second positioning structure form a positioning cooperation.

[0025] It can be understood that in the critical state, the initial position of the first positioning structure can be set according to product needs. For example, the second positioning structure can be located entirely below the first positioning structure, or the top of the second positioning structure can be flush with the bottom of the first positioning structure, or a part of the second positioning structure can be located in the space of the first positioning structure.

[0026] In the embodiment, during the process that the cover contacts the second positioning structure and moves downward along the second positioning structure, the cover can also move leftward, so that the contact between the cover and the second positioning structure is flexible. The flexible contact can reduce the risk of jamming of the process equipment during cover closing or opening, and reduce the possibility of damage to the positioning structure.

[0027] In one embodiment of the second aspect, the driving device includes a rotating arm, a rotating shaft and a fixed support arm, the rotating arm is rotatably connected to the fixed support arm through the rotating shaft, the connecting assembly connects the rotating arm and the cover body, and the fixed support arm is connected to the equipment body.

[0028] In this embodiment, the rotating arm is connected to the connecting assembly to drive the movement of the connecting assembly and the cover body, thereby achieving alignment of the cover body and the device body.

[0029] In one embodiment of the second aspect, there are multiple connecting assemblies, and these connecting assemblies are respectively connected to different positions of the rotating arm.

[0030] In this embodiment, the differently distributed connection components can evenly distribute the weight of the cover body on the positioning structures at different positions, reducing the static load and impact force on the positioning structure, which is beneficial to reducing the risk of damage to the first positioning structure or the second positioning structure during the centering of the process equipment.

[0031] In one embodiment of the second aspect, the rotating arm includes a first rotating arm and a second rotating arm, the first rotating arm and the second rotating arm are arranged at intervals, the first rotating arm is connected to at least one connecting component, and the second rotating arm is connected to at least one connecting component.

[0032] In this embodiment, the first rotating arm and the second rotating arm are respectively connected to different connecting components to more smoothly drive the movement of the connecting component and the cover body, thereby achieving alignment of the cover body and the device body. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the three-dimensional structure of the process equipment of an embodiment of the present application;

[0034] Figure 2 yes Figure 1 BB cross-sectional structural diagram of the process equipment;

[0035] Figure 3 1 is a schematic diagram of the assembly structure of the connection component of an embodiment of the present application;

[0036] Figure 4 Schematic diagram of the exploded structure of the connection assembly of an embodiment of the present application;

[0037] Figure 5 yes Figure 3 AA cross-sectional structural diagram of the connecting component;

[0038] Figure 6 is a front view of a connection assembly according to an embodiment of the present application;

[0039] Figure 7 This is a schematic diagram of an exploded structure of a connection component according to an embodiment of the present application;

[0040] Figure 8 This is a schematic structural diagram of the process equipment before alignment according to an embodiment of the present application;

[0041] Figure 9 This is a schematic structural diagram of the process equipment after alignment is completed in an embodiment of the present application;

[0042] Figure 10 This is another structural schematic diagram of the process equipment of an embodiment of the present application before alignment;

[0043] Figure 11 This is another structural schematic diagram after the process equipment of an embodiment of the present application is aligned.

[0044] Reference numerals

[0045] 1-connection assembly; 1a-distal axis connection assembly; 1b-proximal axis connection assembly;

[0046] 2-connecting member; 21-first end; 22-connecting rod; 23-second end;

[0047] 4-sleeve; 41-sleeve first part; 42-sleeve second part; 43-first fixing member; 44-first fixing hole; 45-channel;

[0048] 5-base; 51-first part of the base; 52-second part of the base; 53-second fixing member; 54-second fixing hole; 55-hole groove; 56-fourth fixing hole;

[0049] 6-limiting member; 61-first limiting member; 611-first through hole; 62-second limiting member; 621-second through hole; 622-limiting member body; 623-third fixing member; 624-third fixing hole;

[0050] 7- elastic member;

[0051] 8-conducting parts;

[0052] 9-pressing plate;

[0053] 10-Process equipment;

[0054] 11-cover; 111-positioning hole; 112-first surface; 113-back plate;

[0055] 12-device body; 121-second surface; 122-adapter; 12a-inner cavity;

[0056] 13-driving device; 131-rotating arm; 1311-first rotating arm; 1312-second rotating arm, 1313-connecting portion; 132-rotating shaft; 133-fixed arm; 1331-first fixed arm; 1332-second fixed arm; 134-fixed rod;

[0057] 14- positioning pin; 141- first part; 142- second part;

[0058] 15-sealing ring;

[0059] 16-Gap. DETAILED DESCRIPTION

[0060] The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings.

[0061] Semiconductor processing equipment may include a source electrode and an equipment body. The source electrode can be covered on the equipment body, and the two together form a process chamber for performing the process. The source electrode can rotate relative to the equipment body to open and close the process chamber. The process of closing and aligning the source electrode with the equipment body is called centering. Conventional solutions typically require a flip mechanism to complete this process. The flip mechanism typically uses a shoulder screw to connect a rotating arm to the source electrode. During the centering phase of flipping and closing the cover, the rotating arm continues to move away from the shoulder screw and then from the source electrode, thereby releasing the z- and xy-axis degrees of freedom. However, this "disengagement" requires overcoming the significant sliding friction force at the shoulder screw caused by the weight of the source electrode. Conventional centering solutions can be called "hard centering." This "hard centering" often subjects the alignment pins that contact the source electrode for centering to significant static loads and impact forces. In certain situations, such as when the alignment pins cannot be made of metal and must be made of non-metal materials such as ceramic, when the weight of the source electrode is greater, or when higher positioning accuracy is required, this effect becomes more significant and unacceptable.

[0062] In view of this, embodiments of the present application propose a connection assembly and process equipment. By employing this connection assembly in the process equipment, "hard centering" is transformed into "flexible centering," significantly reducing the force applied to the locating pins. This allows for a more refined tolerance design between the locating pins and the source electrode's locating holes, achieving centering with higher precision requirements. This will be described in detail below.

[0063] Figure 1 is a schematic diagram of the three-dimensional structure of the process equipment 10 according to an embodiment of the present application. Figure 2 yes Figure 1 BB cross-sectional structural diagram of the process equipment 10. Figure 1 and Figure 2 As shown, the process equipment 10 may include a cover 11 , an equipment body 12 , a driving device 13 and a connecting assembly 1 .

[0064] The cover 11 can be fixed with a target material for performing a process. For example, the cover 11 can be a source. The device body 12 can have an inner cavity 12a. The cover 11 can be arranged on the device body 12 to form a process chamber with the device body 12. The process chamber is used to accommodate the target material and place a wafer, and perform a process on the wafer. The process includes but is not limited to physical vapor deposition (PVD), such as very high frequency (VHF) PVD. The driving device 13 can be fixedly connected with the connecting assembly 1, and the connecting assembly 1 connects the cover 11 and the driving device 13. The driving device 13 is used to provide power. The driving device 13 can drive the connecting assembly 1 and the cover 11 to move away from the device body 12 to open the process equipment 10, so as to place the target material and the wafer to be processed in the process chamber; the driving device 13 can also drive the connecting assembly 1 and the cover 11 to move close to the device body 12 to close the process equipment 10, so as to perform a process. In the closing process, the cover 11 and the device body 12 can be flexibly and precisely centered due to the connecting assembly 1. After the process is completed, the driving device 13 can again drive the connecting assembly 1 and the cover 11 to move away from the device body 12 to open the process equipment 10, so as to take out the wafer on which the target material is deposited.

[0065] The exemplary structure and working principle of the process equipment 10 will be described in detail below.

[0066] As shown in Figure 2 , the cover 11 can be arranged opposite to the device body 12. The structure of the cover 11 can be designed as needed, and the embodiment is not limited. The first face 112 of the cover 11 facing the device body 12 can be provided with a first positioning structure 111 for forming a positioning cooperation with a second positioning structure (to be described below) on the device body 12. The first positioning structure 111 can be a positioning hole, hereinafter referred to as positioning hole 111. The cover 11 can be a source in a semiconductor device. The cover 11 can be regarded as a "cover" of the process equipment 10. The cover 11 can be rotated relative to the device body 12 by the connecting assembly 1 and the driving device 13, and aligned and closed with the device body 12 to realize the centering of the cover 11 and the device body 12.

[0067] As shown in Figure 2 , in a possible implementation, the cover 11 can further include a back plate 113, which can be arranged on the first face 112 and used to fix the target material.

[0068] Referring to Figure 2In a possible implementation, the cover 11 can further include a sealing ring 15. The sealing ring 15 can be arranged on the first surface 112 of the cover 11. After the centering process is completed, the sealing ring 15 can fill the gap 16 between the cover 11 and the device body 12 to seal the entire process device 10. Illustratively, the sealing ring 15 can be an O-ring.

[0069] As shown in Figure 2 , the device body 12 can include a second positioning structure 14 arranged on the side of the device body 12 facing the cover 11. In a possible implementation, the second positioning structure 14 can be arranged on the second surface 121 of the device body 12 facing the cover 11. During the centering process, the second positioning structure 14 can cooperate with the first positioning structure 111. The second positioning structure 14 can be, for example, a columnar structure such as a positioning pin, hereinafter referred to as the positioning pin 14. The positioning pin 14 can be inserted into the positioning hole 111 to eliminate the offset error during the centering process of the cover 11 and the device body 12, thereby achieving accurate cover closing of the process device 10.

[0070] It can be understood that Figure 2 the positions and structures of the positioning pin 14 and the positioning hole 111 shown in the drawings are only illustrative, and the present embodiment is not limited thereto. In another embodiment, the positions of the positioning pin and the positioning hole can be interchanged, that is, the side (the first surface 112) of the cover 11 facing the device body 12 can include the positioning pin, and the side (the second surface 121) of the device body 12 facing the cover 11 can include the positioning hole.

[0071] As shown in Figure 2 , in a possible implementation, the device body 12 can further include an adapter 122. The adapter 122 can be annular and can surround the edge of the device body 12. The structure of the adapter 122 can be designed as needed, for example, the cross section thereof can be approximately rectangular. The adapter 122 can be arranged on the second surface 121. The adapter 122 is used to assemble the positioning pin 14 and provide reliable support for the positioning pin 14, thereby reducing the risk of damage to the positioning pin 14 during the centering process.

[0072] In combination with Figure 1 , Figure 2 the driving device 13 can be connected to the outer side wall of the device body 12 and the connecting assembly 1. The driving device 13 can include a rotating arm 131, a rotating shaft 132, a fixed support arm 133, and a fixed rod 134.

[0073] In combination with Figure 1 , Figure 2 the driving device 13 can be connected to the outer side wall of the device body 12 and the connecting assembly 1. The driving device 13 can include a rotating arm 131, a rotating shaft 132, a fixed support arm 133, and a fixed rod 134. Figure 3As shown, the rotating arm 131 can be fixedly connected to the connecting assembly 1. There can be at least one rotating arm 131, and the number of rotating arms 131 can be determined as needed, for example, there can be two. Figure 1 As shown, in a possible embodiment, the rotating arm 131 may include a first rotating arm 1311 and a second rotating arm 1312, which may be arranged in parallel and spaced apart. The first rotating arm 1311 and the second rotating arm 1312 may both be in a "7" shape. The first rotating arm 1311 may be connected to at least one connecting component 1, and the second rotating arm 1312 may be connected to at least one connecting component 1. The first rotating arm 1311 and the second rotating arm 1312 are respectively connected to different connecting components 1 to drive the connecting component 1 and the cover body 11 to move, thereby achieving alignment of the cover body 11 and the device body 12, which will be described in detail later.

[0074] Combine Figure 1 and Figure 2 As shown, the fixed arm 133 can be connected to the outer side wall of the device body 12. There can be at least one fixed arm 133, and the number of fixed arms 133 can be determined as needed, for example, there can be two. Figure 1 As shown, in one possible embodiment, the fixed arm 133 may include a first fixed arm 1331 and a second fixed arm 1332, which may be arranged in parallel and spaced apart. The first fixed arm 1331, the second fixed arm 1332, the first rotating arm 1311, and the second rotating arm 1312 may each be provided with a connection hole. As will be described below, the connection hole can be used to pass through the rotating shaft 132 to achieve connection between the first fixed arm 1331 and the first rotating arm 1311, and the second fixed arm 1332 and the second rotating arm 1312.

[0075] Combine Figure 1 and Figure 2 As shown, the rotating shaft 132 can pass through the above-mentioned connecting hole to connect the first fixed arm 1331 with the first rotating arm 1311, and connect the second fixed arm 1332 with the second rotating arm 1312.

[0076] The first fixed arm 1331 and the second fixed arm 1332 are both fixedly connected or rotationally connected to the rotating shaft 132, the first rotating arm 1311 and the second rotating arm 1312 can both be rotationally connected to the rotating shaft 132, and the driving source can drive the first rotating arm 1311 and the second rotating arm 1312 to rotate around the rotating shaft 132.

[0077] Alternatively, the first fixed arm 1331 and the second fixed arm 1332 are both rotatably connected to the rotating shaft 132, and the first rotating arm 1311 and the second rotating arm 1312 can both be fixedly connected to the rotating shaft 132. The driving source can drive the rotating shaft 132 to rotate, so that the rotating shaft 132 drives the first rotating arm 1311 and the second rotating arm 1312 to rotate; or the driving source can drive the first rotating arm 1311 and the second rotating arm 1312 to rotate, so that the first rotating arm 1311 and the second rotating arm 1312 drive the rotating shaft 132 to rotate relative to the first fixed arm 1331 and the second fixed arm 1332.

[0078] The above-mentioned driving source includes but is not limited to a motor. The driving source may belong to the driving device 13 or be independent of the driving device 13. Figure 1 The fixing rod 134 can be connected between the first rotating arm 1311 and the second rotating arm 1312, so that the first rotating arm 1311 and the second rotating arm 1312 can be turned synchronously, which is beneficial to improving the movement stability of the connecting assembly 1 and the cover body 11 during the centering process. In another embodiment, the driving device 13 may not include the fixing rod 134.

[0079] refer to Figure 1 and Figure 2 As shown, through the movement of the drive device 13, the first rotating arm 1311 and the second rotating arm 1312 can drive the connecting component 1 and the cover body 11 to rotate toward the equipment body 12 or away from the equipment body 12, thereby realizing the closing and opening of the process equipment 10.

[0080] The structure and movement mode of the driving device 13 described above are merely examples and are not intended to limit this embodiment. Any device that can drive the connecting assembly 1 and the cover 11 to move can be used as the driving device 13.

[0081] Combine Figure 1 and Figure 2 As shown, the connecting component 1 can connect the driving device 13 and the cover body 11. For example, the connecting component 1 can connect the rotating arm 131 and the cover body 11. There can be at least one connecting component 1, and the number of connecting components 1 can be determined as needed. In a possible embodiment, there can be multiple connecting components 1, and these connecting components 1 are respectively connected to different positions of the rotating arm 131. For example, Figure 1 As shown, in one possible embodiment, there may be four connecting assemblies 1, two of which are connected to the first rotating arm 1311, and the other two are connected to the second rotating arm 1312. The different distribution of connecting assemblies can evenly distribute the weight of the cover body on the locating pins at different positions, reducing the static load and impact force on the locating pins, which helps reduce the risk of damage to the locating pins during the centering of the process equipment.

[0082] Figure 3 is a schematic diagram of the assembly structure of the connection component 1 of the embodiment of the present application, Figure 4 It is a schematic diagram of the exploded structure of the connection component 1 of an embodiment of the present application.

[0083] Combine Figure 3 and Figure 4 As shown, the connection assembly 1 may include a sleeve 4, a connector 2 and a base 5, wherein the connector 2 is connected to the sleeve 4 and the base 5. For example, the sleeve 4 is connected to the rotating arm 131, and the base 5 is connected to the cover 11.

[0084] like Figure 4 As shown, a channel 45 can be formed inside the sleeve 4, and the channel 45 can be used for the movement of the first end 21 of the connector 2, which will be described in detail below. In a possible embodiment, the sleeve 4 may include a first sleeve portion 41, a second sleeve portion 42, and a first fixing member 43. The first sleeve portion 41 and the second sleeve portion 42 may both be provided with a first fixing hole 44, and the first fixing member 43 may pass through the first fixing hole 44 on the first sleeve portion 41 and the second sleeve portion 42, and connect the first sleeve portion 41 and the second sleeve portion 42. The first sleeve portion 41 and the second sleeve portion 42 may both have a groove, and the groove of the first sleeve portion 41 and the groove of the second sleeve portion 42 may be combined to form a channel 45. Schematically, the structures of the first sleeve portion 41 and the second sleeve portion 42 may be identical or substantially identical, and the two may be arranged in a mirror-symmetrical or approximately mirror-symmetrical manner.

[0085] like Figure 4 As shown, the interior of the base 5 may be provided with a slot 55, which can be used for the movement of the second end 23 of the connector 2, as will be described in detail below. In one possible embodiment, the base 5 may include a first base portion 51, a second base portion 52, and a second fixing member 53. The first base portion 51 and the second base portion 52 may each be provided with a second fixing hole 54. The second fixing member 53 may pass through the second fixing holes 54 on the first base portion 51 and the second base portion 52, so that the first base portion 51 and the second base portion 52 can form a detachable connection. The first base portion 51 and the second base portion 52 may each have a groove, wherein the sidewalls of the groove may be discontinuous and may have a notch on the side facing the sleeve 4. The grooves of the first base portion 51 and the second base portion 52 may together form a slot 55, which has an opening facing the sleeve 4. Illustratively, the first base portion 51 and the second base portion 52 may have a symmetrical structure.

[0086] Combine Figure 2 and Figure 4 As shown, the base 5 can be fixed to the cover 11 . Schematically, the base 5 can be connected to a side of the cover 11 facing away from the device body 12 .

[0087] Combine Figure 3 and Figure 4 As shown, the connecting member 2 may include a first end 21 and a second end 23 opposite to each other, and a connecting rod 22 connected between the first end 21 and the second end 23. The first end 21 is movably disposed in the channel 45, can contact the inner wall of the channel 45, and can slide and rotate in the channel 45, wherein the sliding direction of the first end 21 can be along the length direction of the channel 45. The second end 23 is movably disposed in the hole groove 55, and the second end 23 can rotate in the hole groove 55.

[0088] See also Figure 4 In one possible embodiment, the surfaces of the first end 21 and the second end 23 of the connector 2 can each be a portion of a sphere. Schematically, the first end 21 and the second end 23 can be a hemisphere or three-quarter sphere, etc., in which case the surfaces of the first end 21 and the second end 23 can be half or three-quarter of the sphere. The ratio of the spherical surface of the first end 21 and the second end 23 to the sphere surface can be adjusted according to the actual size. In this embodiment, the connector 2 having a first end 21 and a second end 23, each of which is similar to a sphere, can be called a double-ball rod.

[0089] By configuring the first and second ends as spherical surfaces, the friction generated by the connector against the sleeve and base during the centering process is further reduced. This design helps reduce the static load and impact forces borne by the locating pin during its alignment with the locating hole, further reducing the risk of damage to the locating pin during the centering process. In another embodiment, only one surface of the first end 21 or the second end 23 is designed as a portion of a spherical surface, or the first end 21 and the second end 23 can adopt any shape that meets the product requirements.

[0090] Figure 5 yes Figure 3 AA cross-sectional structural diagram of the connecting component 1. Figure 5 In one possible embodiment, the diameter of the opening of the channel 45 toward the base 5 can be smaller than the outer diameter of the first end 21, so that the first end 21 will not separate from the channel 45 from the opening of the channel 45 toward the base 5; and / or, the diameter of the opening of the hole groove 55 can be smaller than the outer diameter of the second end 23, so that the second end 23 will not separate from the hole groove 55 from the opening of the hole groove 55.

[0091] like Figure 5 As shown, the extension direction of the connecting member 2, that is, the length direction of the connecting rod 22, can be defined as a first direction, such as a vertical direction. Any direction in a plane perpendicular to the first direction is defined as a second direction, or the second direction is a planar direction, such as a horizontal direction.

[0092] Figure 6 is a front view of the connection assembly 1 of the embodiment of the present application, Figure 7 It is a schematic diagram of the exploded structure of the connection component 1 of an embodiment of the present application.

[0093] Combine Figure 4 、 Figure 6 and Figure 7 As shown, in one possible embodiment, the connection assembly 1 may further include a stopper 6 disposed between the sleeve 4 and the base 5. The stopper 6 may have a through-hole through which the connection member 2 may pass, and the connecting rod 22 of the connection member 2 may abut against the inner wall of the through-hole of the stopper 6. As will be described below, the stopper 6 is used to limit the maximum inclination angle of the connecting rod 22 relative to the channel 45.

[0094] Combine Figure 4 、 Figure 6 and Figure 7 As shown, in one possible embodiment, the limiting member 6 may include a first limiting member 61 and a second limiting member 62. The first limiting member 61 may be fixed to the side of the sleeve 4 facing the base 5, and the second limiting member 62 may be fixed to the side of the base 5 facing the sleeve 4. The first limiting member 61 and the second limiting member 62 are arranged at intervals. Both the first limiting member 61 and the second limiting member 62 may be annular.

[0095] Combine Figure 4 、 Figure 6 and Figure 7 As shown, in one possible embodiment, the first stopper 61 may have a first through hole 611. Exemplarily, the first stopper 61 may be composed of two parts, which enclose the first through hole 611. The second stopper 62 may have a second through hole 621. Exemplarily, the second stopper 62 may be composed of two parts, which enclose the second through hole 621. Both the first through hole 611 and the second through hole 621 are through holes of the stopper 6.

[0096] Combine Figure 4 、 Figure 6 and Figure 7 As shown, the connector 2 can pass through the first through hole 611 and the second through hole 621. For example, the connecting rod 22 of the connector 2 can pass through the first through hole 611 and the second through hole 621. The portion of the connector 2 located between the first end 21 and the second end 23 (for example, the connecting rod 22) can be used to abut at least one of the inner wall of the first through hole 611 and the inner wall of the second through hole 621.

[0097] like Figure 4As shown, in one possible embodiment, the second limiting member 62 may include a limiting member body 622 and a third fixing member 623. The limiting member body 622 may be provided with a third fixing hole 624. The base 5 may further have a fourth fixing hole 56 on a surface facing the sleeve 4. The third fixing member 623 may pass through the third fixing hole 624 and the fourth fixing hole 56 to connect the base 5 to the second limiting member 62. It is understandable that the first limiting member 61 may also have a similar structure and connection method.

[0098] Combine Figure 4 、 Figure 6 and Figure 7 As shown, the provision of the first stopper 61 and the second stopper 62 can prevent impact and vibration caused by direct contact between the sleeve 4 and the base 5 during the centering process. The first stopper 61 and the second stopper 62 can be made of non-metallic materials to better provide a cushioning effect. During the centering process, the connecting rod 22 can tilt, that is, the axial direction of the cylindrical connecting rod 22 can form an angle with the first direction. When the connecting rod 22 tilts to abut against the first through hole 611 of the first stopper 61 or the second through hole 621 of the second stopper 62, the connecting rod 22 can no longer tilt in a direction deviating from the first direction. At this time, the connecting rod 22 can have a maximum tilt angle relative to the extension direction of the channel 45. By coordinating the size of the first through hole 611 and the tilt angle of the inner wall of the first through hole 611, the maximum tilt angle of the connecting rod 22 can be controlled to meet different centering compensation requirements. In addition, the first stopper 61 and the second stopper 62 serve as covers for the sleeve 4 and the base 5, respectively, to prevent the connecting rod 22 from falling off the sleeve 4 and the base 5.

[0099] Combine Figure 4 、 Figure 5 and Figure 6 As shown, in a possible implementation, the connection assembly 1 may further include one or more of an elastic member 7 , a conductive member 8 and a pressing plate 9 .

[0100] Combine Figure 4 and Figure 5 As shown, the elastic member 7 can be disposed within the channel 45 and can be located on the side of the first end 21 facing away from the second end 23. The elastic member 7 can undergo elastic deformation and provide elastic damping. The elastic member 7 includes, but is not limited to, a spring. When the connecting member 2 slides within the channel 45, it compresses the elastic member 7, causing the elastic member 7 to apply a rebound force to the connecting member 2. This rebound force and elastic damping can ensure smooth movement. Alternatively, the connecting assembly 1 may not include the elastic member 7.

[0101] Combine Figure 4 and Figure 5As shown, the conductive member 8 can be slidably disposed in the channel 45 and can be connected between the first end 21 and the elastic member 7. The two opposite surfaces of the conductive member 8 can respectively abut the elastic member 7 and the first end 21. Among them, the side of the conductive member 8 facing the first end 21 can be a curved surface matching the surface of the first end 21, and the conductive member 8 and the first end 21 can be rotatably contacted. The side of the conductive member 8 facing the elastic member 7 can be roughly a flat surface to cooperate with the elastic member 7. The conductive member 8 serves as a force transmission component between the connecting member 2 and the elastic member 7, which can avoid damage to the connecting member 2 caused by direct contact between the connecting member 2 and the elastic member 7. In another embodiment, the connecting assembly 1 may not include a conductive member.

[0102] Combine Figure 5 and Figure 6 As shown, the pressing plate 9 can be fixedly connected to the sleeve 4 and abut against the end of the elastic member 7 away from the first end 21. The pressing plate 9 is used to encapsulate the elastic member 7 in the sleeve 4. In another embodiment, the connecting assembly 1 may not include the pressing plate 9.

[0103] refer to Figure 5 As shown, by setting the assembly structure of the elastic member 7, the conductive member 8 and the pressure plate 9, a buffer can be provided for the sliding of the first end 21 in the channel 45 during the centering process, so that the cover body 11 moves more smoothly during the centering process or the opening process.

[0104] The above introduces the detailed structure of each component in the process equipment. Next, the process and principle of achieving flexible and precise alignment through the process equipment will be introduced.

[0105] Figure 8 1 is a schematic diagram of the structure of the process equipment 10 before alignment in the embodiment of the present application. Figure 8 As shown, in one possible embodiment, the positioning pin 14 may have a first portion 141 and a second portion 142 connected to each other. The first portion 141 may be away from the device body 12 and may be inserted into the positioning hole 111. There may be multiple positioning pins 14, and each of the multiple positioning pins 14 may be disposed on a side of the adapter 122 facing the cover 11. The distance between the first portion 141 and the second surface 121 of any two positioning pins 14 may be equal.

[0106] like Figure 8As shown, in one possible embodiment, the second portion 142 of the positioning pin 14 can be cylindrical, and the first portion 141 can be a guiding shape, such as a cone or a truncated cone. The first portion 141 can be thinner than the second portion 142 to facilitate and accurately insert the positioning pin 14 into the positioning hole 111, thereby ensuring a smooth and guided fit between the positioning pin 14 and the positioning hole 111. It will be appreciated that in other embodiments, the configuration of the positioning pin 14 is not limited to that described above. For example, the first portion 141 and the second portion 142 can have substantially the same shape and substantially the same radial dimensions.

[0107] like Figure 8 As shown, the process equipment 10 may be in a critical state. In the critical state, the rotating arm 131 will extend in the second direction, for example, in the horizontal direction. The cover body 11 naturally droops, and the extension direction of the connector 2 of the connecting assembly 1 can be along the direction of gravity, and the positioning pin 14 can be located in the initial position. The initial position of the positioning pin 14 can be determined according to product requirements. For example, the positioning pin 14 can be entirely located below the positioning hole 111, or the top of the positioning pin 14 is just flush with the bottom of the positioning hole 111, or a portion of the positioning pin 14 is located inside the positioning hole 111. A portion of the projection of the positioning pin 14 along the direction of the center line of the positioning hole 111 (along the first direction) may fall within the boundary of the positioning hole 111, and another portion may fall outside the boundary of the positioning hole 111, that is, there is a misalignment between the positioning pin 14 and the positioning hole 111 along the second direction, and the misalignment amount x is as shown in FIG. Figure 8 shown.

[0108] Figure 9 This is a schematic diagram of the structure of the process equipment 10 after alignment is completed in the embodiment of the present application. Figure 8 and Figure 9 As shown, during the centering process, the drive device 13 drives the connecting assembly 1 and the cover body 11 to rotate toward the device body 12. The first part 141 can contact and gradually form a fit with the area of ​​the cover body 11 where the positioning hole 111 is not set (for example, the left side of the positioning hole 111). Under the guiding action of the first part 141, the cover body 11 will move downward and leftward at the same time. During this process, the positioning hole 111 can be completely aligned with the positioning pin 14, and the projection of the positioning pin 14 along the center line of the positioning hole 111 can all fall within the positioning hole 111, and the misalignment x between the positioning pin 14 and the positioning hole can be eliminated. And driven by the cover body 11, the second end 23 of the connecting member 2 will rotate in the hole groove 55 of the base 5, the first end 21 of the connecting member 2 will rotate relative to the sleeve 4 and slide along the channel 45, the connecting rod 22 of the connecting member 2 will deviate from the vertical position at the critical state, and the connecting rod 22 will tilt.

[0109] It is understandable that the change in the posture of the connecting rod 22 can be determined by the position deviation (ie, the offset x) between the positioning pin 14 and the positioning hole 111 in the critical state. Figure 8 and Figure 9 As shown, when the misalignment x between the positioning pin 14 and the positioning hole 111 is a first misalignment, after the centering process is completed, the angle at which the connecting rod 22 deviates from the first direction can be a first angle; when the misalignment x between the positioning pin 14 and the positioning hole 111 is a second misalignment, after the centering process is completed, the angle at which the connecting rod 22 deviates from the first direction can be a second angle. If the first misalignment is greater than the second misalignment, the first angle can be greater than the second angle.

[0110] Combine Figure 8 and Figure 9 As shown, the connection assembly 1 close to the rotating shaft can be called the proximal end connection assembly 1b, and the connection assembly 1 far from the rotating shaft can be called the distal end connection assembly 1a. During the centering process, the displacement of the first end 21 of the distal end connection assembly 1a in the first direction can be greater than the displacement of the first end 21 of the proximal end connection assembly 1b, resulting in different sliding distances in the channel 45. Figure 9 As shown, the distance that the first end 21 of the distal end connecting assembly 1a slides in the channel 45 may be Z1, and the distance that the first end 21 of the proximal end connecting assembly 1b moves in the channel 45 may be Z2, and Z1 may be greater than Z2. In addition, the angle at which the connecting rod 22 in the distal end connecting assembly 1a and the connecting rod 22 in the proximal end connecting assembly 1b deviate from the first direction may be equal.

[0111] like Figure 9 As shown, after the alignment is completed, most or all of the positioning pins 14 are inserted into the positioning holes 111, and the positioning pins 14 are positioned and matched with the positioning holes 111. The cover 11 contacts the adapter 122 of the device body 12, and the two form a process chamber.

[0112] As described above, during the alignment process, through the cooperation between the positioning hole 111 and the positioning pin 14, and the mechanical movement of the connecting assembly 1, the distance between the cover 11 and the device body 12 along the first direction and the misalignment x along the second direction are both reduced to zero. Therefore, the cover 11 and the device body 12 can be accurately aligned. Because the cover 11 can also move leftward while in contact with the positioning pin 14 and moving downward along the positioning pin 14, the contact between the cover 11 and the positioning pin 14 is flexible.

[0113] In the conventional solution, there is a rigid contact between the fixed cover body and the locating pin, which easily causes the locating pin to be subjected to greater force, and it is easy to get stuck when opening or closing the cover. To avoid this problem, the matching clearance between the locating pin and the locating hole of the conventional solution needs to be larger, resulting in the ultimate inability to achieve more precise alignment. Moreover, the conventional solution may cause the locating pin to be subjected to excessive force and shattered, resulting in the entire process kit equipped with the locating pin being scrapped, and the broken locating pin will contaminate the process chamber and is difficult to clean. It can be understood from the above description that the flexible contact of this embodiment makes the locating pin less stressed, which can improve the above-mentioned defects caused by rigid contact. Moreover, the matching clearance between the locating pin and the locating hole of this embodiment does not need to be too large, and more precise alignment can be achieved.

[0114] Combine Figure 8 and Figure 9 As shown, during the centering process, the positioning pins 14 at various positions (for example, the proximal end positioning pin 14 close to the rotating shaft 132 and the distal end positioning pin 14 away from the rotating shaft 132) can simultaneously enter the positioning hole 111 of the cover body 11 and reach the mating position at the same time. This makes the weight of the cover body 11 shared by each positioning pin 14 basically the same, avoiding excessive load on a certain positioning pin 14. It can also make the proximal end and the distal end of the cover body 11 contact the device body 12 at the same time, for example, the proximal end and the distal end of the sealing ring 15 in the cover body 11 can contact the device body 12 at the same time. Therefore, the problem of unilateral wear of the sealing ring 15 and sealing failure caused by the proximal end of the sealing ring 15 contacting the device body 12 first and the distal end contacting the device body 12 later in the conventional solution can be avoided.

[0115] As described above, during the rotation and sliding of the first end 21 and the second end 23, relatively small sliding friction forces are generated between the first end 21 and the channel 45 and between the second end 23 and the hole groove 55. Compared with the larger friction forces generated during the separation of the shoulder screw from the rotating arm in the conventional solution, the solution of this embodiment can reduce the static load and impact force applied by the cover body 11 to the positioning pin 14.

[0116] like Figure 9 As shown, illustratively, after the centering is completed, the end of the rotating arm 131 facing away from the rotating shaft 132 (for example, the left end) is closer to the device body 12, and the end of the rotating arm 131 close to the rotating shaft 132 (for example, the right end) is farther away from the device body 12. The rotating arm 131 is tilted at a certain angle relative to the horizontal plane, for example, the tilt angle can be the angle θ1. This centering state can be called "negative angle centering". Negative angle centering can be achieved by using the same multiple connecting components 1, so that the locating pins 14 at each position enter the locating holes 111 of the cover body 11 at the same time to achieve centering. Multiple connecting components 1 can be prepared by using a set of molds, which is conducive to reducing costs and improving production efficiency.

[0117] Figure 10This is another structural diagram of the process equipment 10 before centering according to an embodiment of the present application. Figure 11 This is another structural diagram of the process equipment 10 after the alignment of the embodiment of the present application is completed. Figure 10 and Figure 11 As shown, in a possible embodiment, the cover 11 and the positioning pin 14 can also be positioned and matched by a positive angle alignment method. In a critical state during the positive angle alignment process, the end of the rotating arm 131 away from the rotating shaft 132 (for example, the left end) is farther away from the device body 12, and the end of the rotating arm 131 close to the rotating shaft 132 (for example, the right end) is closer to the device body 12. Schematically, the portion of the rotating arm 131 connected to the sleeve 4, that is, the connecting portion 1313, can form an angle θ2 with the second direction. Figure 11 As shown, after the centering is completed, the rotating arm 131 can be parallel to the horizontal plane.

[0118] like Figure 10 and Figure 11 As shown, in order to ensure that the cover 11 is parallel to the device body 12 after alignment, the length of the connecting rod 22 of the distal end connecting assembly 1a needs to be greater than the length of the connecting rod 22 of the proximal end connecting assembly 1b. It can also be understood that compared to negative angle alignment, the positive angle alignment process requires the use of multiple connecting assemblies 1 of different sizes.

[0119] like Figure 11 As shown, in the centering state during the positive angle centering process, the connecting portion 1313 can extend along the second direction, the connecting portion 1313 can be parallel to both the first surface 112 and the second surface 121, the extension direction of the connecting member 2 can form an angle γ with the direction of gravity, and the positioning pin 14 can be precisely fitted into the positioning hole 111.

[0120] In the description of the embodiments of this application, unless otherwise specified, "and / or" is simply a description of an association relationship between associated objects, indicating that three relationships can exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, or B exists alone.

[0121] In the description of the embodiments of the present application, “plurality” refers to two or more than two.

[0122] In the description of the embodiments of the present application, terms such as "first" and "second" are only used to distinguish technical features for clear description, and should not be understood as implying relative importance or implicitly indicating the number of technical features indicated.

[0123] The directional terms mentioned in the embodiments of this application, such as "upper," "lower," "front," "back," "left," "right," "inner," "outer," "side," "top," and "bottom," etc., are merely references to directions in the accompanying drawings. Therefore, these directional terms are intended to better and more clearly illustrate and facilitate understanding of the embodiments of this application, and are not intended to explicitly or implicitly indicate that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the embodiments of this application.

[0124] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set on..." should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0125] Among them, the directional terms mentioned in the embodiments of the present application, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", "top", "bottom", etc., are only reference to the directions of the drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present application, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0126] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A connection assembly for use in a process device, wherein the process device comprises a device body, a drive device, and a cover arranged opposite to the device body, the cover having a first positioning structure, and the device body having a second positioning structure cooperating with the first positioning structure, characterized in that: The connecting assembly is used to connect the driving device and the cover body; The connecting assembly includes a sleeve, a connecting piece and a base; The sleeve is used to be fixed to the driving device, and the base is used to be fixed to the cover; The sleeve is provided with a channel, the base is provided with a hole groove, the connecting member includes a first end and a second end opposite to each other, the first end is movably provided in the channel, and the second end is movably provided in the hole groove; The connecting assembly is used to drive the cover body close to the equipment body under the drive of the driving device, so that the first positioning structure and the second positioning structure are positioned and matched; wherein, the sleeve is used to move toward the base under the drive of the driving device, so that the first end slides and rotates in the channel, and the second end rotates in the hole groove.

2. The connection assembly according to claim 1, characterized in that The surface of the first end is a part of a sphere, and the surface of the first end is in sliding and rotational contact with the inner wall of the channel; and / or the surface of the second end is a part of a sphere, and the surface of the second end is in rotational contact with the inner wall of the hole groove.

3. The connection assembly according to claim 2, characterized in that The opening diameter of the channel toward the base is smaller than the outer diameter of the first end, and / or the opening diameter of the hole is smaller than the outer diameter of the second end.

4. The connection assembly according to any one of claims 1 to 3, characterized in that: The connecting assembly further includes a limiting member, which is provided between the sleeve and the base and located between the first end and the second end, and has a through hole; The connecting member passes through the through hole, and a portion of the connecting member located between the first end and the second end is used to abut against an inner wall of the through hole.

5. The connection assembly according to claim 4, characterized in that The limiting member includes a first limiting member and a second limiting member, the first limiting member is fixed to a side of the sleeve facing the base, and has a first through hole, the second limiting member is fixed to a side of the base facing the sleeve, and has a second through hole; The connecting member passes through the first through hole and the second through hole; the portion of the connecting member located between the first end and the second end is used to abut against at least one of the inner wall of the first through hole and the inner wall of the second through hole.

6. The connection assembly according to any one of claims 1 to 3, characterized in that: The connecting assembly also includes an elastic member, which is arranged in the channel and located on the side of the first end facing away from the second end. The connecting member is used to squeeze the elastic member when sliding in the channel so that the elastic member applies a rebound force to the connecting member.

7. The connection assembly according to claim 6, characterized in that The connecting assembly further includes a conductive member, which is slidably disposed in the channel and connected between the first end and the elastic member; the first end is in abutment or rotational contact with the conductive member.

8. The connection assembly according to claim 7, characterized in that The connecting assembly further includes a pressing plate, which is fixedly connected to the sleeve and abuts against a side of the elastic member facing away from the first end.

9. A process equipment, characterized in that: It comprises a cover, a device body, a driving device and a connecting assembly according to any one of claims 1 to 8; The cover is arranged opposite to the device body, a first positioning structure is provided on the side of the cover facing the device body, and a second positioning structure is provided on the side of the device body facing the cover; the connecting assembly connects the driving device and the cover; The driving device is used to drive the connecting assembly and the cover body to approach the equipment body, so that the first positioning structure is positioned and matched with the second positioning structure.

10. The process equipment according to claim 9, characterized in that: One of the first positioning structure and the second positioning structure is a positioning hole, and the other is a positioning pin.

11. The process equipment according to claim 9 or 10, characterized in that: The process equipment has a critical state and a centering state; In the critical state, the connecting member extends in the direction of gravity, and the first positioning structure is located in an initial position; A portion of the projection of the second positioning structure along the center line of the first positioning structure falls within the boundary of the first positioning structure, and another portion falls outside the boundary of the first positioning structure; In the centering state, the extending direction of the connecting member forms an angle with the gravity direction, and the first positioning structure and the second positioning structure form a positioning fit.

12. The process equipment according to claim 9 or 10, characterized in that: The driving device includes a rotating arm, a rotating shaft and a fixed support arm. The rotating arm is rotatably connected to the fixed support arm through the rotating shaft. The connecting component connects the rotating arm and the cover body, and the fixed support arm is connected to the equipment body.

13. The process equipment according to claim 12, characterized in that: There are multiple connecting components, and the multiple connecting components are respectively connected to different positions of the rotating arm.

14. The process equipment according to claim 13, characterized in that: The rotating arm includes a first rotating arm and a second rotating arm, the first rotating arm and the second rotating arm are arranged at intervals, the first rotating arm is connected to at least one of the connecting components, and the second rotating arm is connected to at least one of the connecting components.

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