Fixing device for silicon carbide crystal ingot in machining process

Abstract

The utility model discloses a fixing device for a silicon carbide crystal ingot in the machining process, and belongs to the technical field of silicon carbide crystal ingot machining. The fixing device comprises a U-shaped support, wherein the U-shaped support comprises two vertical plates parallel to each other and a horizontal bottom plate connected between the bottoms of the two vertical plates; a plurality of connecting holes are formed in the bottoms of the two vertical plates, and the connecting holes in the two vertical plates are symmetrically formed; a first adjusting rod and a second adjusting rod are arranged between the two vertical plates; the first adjusting rod and the second adjusting rod are connected into the connecting holes of the two vertical plates; wherein one vertical plate serves as a fixed end pressing plate, the other vertical plate serves as a movable end pressing plate, the movable end pressing plate is rotationally connected with a pressing rod, the front end of the pressing rod penetrates through the movable end pressing plate to the inner side of the U-shaped support, and the front end of the pressing rod is connected with a fixed round cake. According to the utility model, the problems that the silicon carbide crystal ingot is not easy to fix and is easy to collide during marking processing are solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon carbide crystal ingot processing, in particular to a fixing device for silicon carbide crystal ingots during processing. Background Art

[0002] Silicon carbide (SiC) material exhibits high hardness and strength at high temperatures. Its vaporization temperature is at least 2000°C. Silicon carbide is chemically stable, heat-resistant, and oxidation-resistant, and possesses excellent thermal conductivity and a low coefficient of thermal expansion. Due to these properties, silicon carbide is widely used in high-temperature materials, electronic equipment, solar panels, and high-power semiconductor components. Semiconductor materials are highly brittle and have low fracture toughness, making them difficult to process with traditional machining techniques, which can easily lead to collapse and breakage. Silicon carbide ingot marking primarily refers to the process of marking or cutting silicon carbide ingots using laser technology. Laser slicing technology offers advantages such as low material loss, high wafer output, controllable yield, and high cutting efficiency. However, during the marking process of silicon carbide ingots, due to the lack of a fixing device and the inconsistent sizes and thicknesses of the crystals to be marked, there are risks associated with single-handed adjustment by one person. Marking of crystals with and without supports requires switching tooling. Moreover, due to the different thicknesses of the crystals, solid blocks are required to fix and clamp the ingots. This method is inefficient and carries the risk of the crystals being bumped.

[0003] In summary, the production line needs a marking tool that is compatible with both crystals with and without support, which can improve efficiency while reducing the risk of crystal collision. Utility Model Content

[0004] The utility model overcomes the shortcomings of the prior art and proposes a fixing device for silicon carbide ingots during processing, which solves the problem that silicon carbide ingots are difficult to fix and easily bumped during marking processing.

[0005] In order to achieve the above-mentioned purpose, the present invention is implemented through the following technical solutions.

[0006] A fixing device for silicon carbide ingots during processing includes a U-shaped support, wherein the U-shaped support includes two vertical plates parallel to each other and a horizontal bottom plate connected between the bottoms of the two vertical plates; a plurality of connecting holes are provided at the bottoms of the two vertical plates, and the connecting holes on the two vertical plates are symmetrically arranged; a first adjusting rod and a second adjusting rod are provided between the two vertical plates; the first adjusting rod and the second adjusting rod are both connected to the connecting holes of the two vertical plates; one of the vertical plates serves as a fixed end pressure plate, and the other vertical plate serves as a movable end pressure plate, the movable end pressure plate is rotatably connected to a pressure rod, the front end of the pressure rod passes through the movable end pressure plate to the inner side of the U-shaped support, and the front end of the pressure rod is connected to a fixed round cake.

[0007] Further, the inner side of the fixed end pressing plate is provided with a fixed end cushion, which is in contact with the side surface of the silicon carbide crystal ingot.

[0008] Further, the fixed end pressing plate and the fixed end cushion are both provided with a crystal holder placing groove at the corresponding position.

[0009] Further, a row of connecting holes are symmetrically arranged at the bottom of the vertical plate.

[0010] Further, a fixed hole is symmetrically arranged at the two sides of the horizontal bottom plate, and the two vertical plates are connected with the fixed hole through bolts.

[0011] Further, the pressing rod is a fixed screw rod, which is in threaded connection with the movable end pressing plate.

[0012] Further, the front end of the pressing rod is connected with a bearing seat, the bearing seat is connected with a bearing sleeve, the bearing sleeve is connected with a bearing cover, and the bearing cover is connected with the fixed disc.

[0013] Further, the fixed end cushion and the fixed disc are both made of flexible material.

[0014] Further, the rear end of the pressing rod is connected with a handle.

[0015] The present application has the following beneficial effects compared with the prior art:

[0016] The present application can adjust the distance between the first adjusting rod and the second adjusting rod according to the size of the crystal, play a supporting role, and make the silicon carbide crystal ingot more stable when being marked; the fixed end pressing plate, the pressing rod and the fixed disc can clamp the two side surfaces of the silicon carbide crystal ingot placed on the first adjusting rod and the second adjusting rod, fasten the crystal, and the crystal ingot will not shake during processing, and the clamping adjustment can be made according to the thickness of the crystal ingot without additional filling of solid blocks; the device is provided with a placing groove, and can be compatible with the marking of the crystal with or without a holder.

[0017] The present application is simple to operate and reduces labor; improves the protection of the silicon carbide brittle material during processing, reduces the risk of crystal bumping and cracking; and solves the problem that the silicon carbide crystal ingot is not easy to fix and is easy to be bumped during marking processing. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a side view of the fixed device of the present application fixed with a silicon carbide crystal ingot;

[0019] Figure 2 is a top view of the fixed device of the present application;

[0020] Figure 3 is a structural schematic view of the horizontal bottom plate;

[0021] Figure 4 is the structural schematic view of the fixed end pressing plate;

[0022] Figure 5 is the structural schematic view of the movable end pressing plate;

[0023] Figure 6 is the structural schematic view of the movable end screw sleeve of the embodiment;

[0024] Figure 7 is the structural schematic view of the bearing seat;

[0025] Figure 8 is the structural schematic view of the bearing cover;

[0026] Figure 9 is the structural schematic view of the fixed end cushion.

[0027] In the figure:

[0028] 1, first adjusting rod; 2, second adjusting rod; 3, connecting hole; 4, fixed end pressing plate; 5, movable end pressing plate; 6, pressing rod; 7, fixed round cake; 8, fixed end cushion; 9, silicon carbide crystal ingot; 10, placing groove; 11, horizontal bottom plate; 12, fixed hole; 13, bearing seat; 14, bearing sleeve; 15, bearing cover; 16, handle; 17, crystal support; 18, movable end screw sleeve. DETAILED DESCRIPTION

[0029] In order to make the technical problems, technical schemes and beneficial effects to be solved by the utility model more clear and apparent, the utility model is further described in detail in combination with embodiments and drawings. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model. The technical scheme of the utility model is described in detail below in combination with embodiments and drawings, but the protection scope is not limited by this.

[0030] Please refer to Figures 1 to 9 The embodiment provides a fixing device for silicon carbide crystal ingots in a machining process, which comprises a U-shaped support, wherein the U-shaped support comprises two vertical plates parallel to each other and a horizontal bottom plate 11 connected between the bottoms of the two vertical plates; fixed holes 12 are symmetrically formed on the two sides of the horizontal bottom plate 11, and the two vertical plates are connected with the fixed holes 12 through bolts; and the vertical plates and the horizontal bottom plate 11 are detachable split structures, so that the device is more easily connected and disassembled.

[0031] A row of connecting holes 3 are symmetrically arranged on both sides of the bottom of the vertical plate, and the connecting holes 3 on the two vertical plates are also symmetrically arranged, and a first adjusting rod 1 and a second adjusting rod 2 are arranged between the two vertical plates; the first adjusting rod 1 is connected to the connecting hole 3 on one side of the two vertical plates, and the second adjusting rod 2 is connected to the connecting hole 3 on the other side of the two vertical plates; the first adjusting rod 1 and the second adjusting rod 2 play the role of supporting the bottom of the silicon carbide ingot 9, and the first adjusting rod 1 and the second adjusting rod 2 can be adjusted in position according to the size of the silicon carbide ingot 9, and have a wider range of use.

[0032] One of the vertical plates serves as a fixed end pressure plate 4, with a fixed end pad 8 provided inside the fixed end pressure plate 4. The fixed end pad 8 contacts one side surface of the silicon carbide ingot 9. The other vertical plate serves as a movable end pressure plate 5. The movable end pressure plate 5 is rotatably connected to a pressure rod 6. The front end of the pressure rod 6 passes through the movable end pressure plate 5 to the inside of the U-shaped support. The front end of the pressure rod 6 is connected to a fixed disc 7.

[0033] In this embodiment, the pressure rod 6 is a fixed screw rod. A mounting hole is provided in the middle of the movable end pressure plate 5, in which a movable end screw sleeve 18 is installed. The fixed screw rod is connected to the movable end screw sleeve 18, thereby threading the fixed screw rod to the movable end pressure plate 5. The front end of the pressure rod 6 is connected to the bearing seat 13, which is connected to the bearing sleeve 14. The bearing sleeve 14 is connected to the bearing cover 15, and the bearing cover 15 is connected to the fixed disc 7. The fixed disc 7 contacts the other circular surface of the silicon carbide ingot 9. The fixed end pad 8 and the fixed disc 7 are both silicone plates, which can prevent hard contact with the silicon carbide ingot 9 when it is pressed, thereby preventing wear.

[0034] In order to be compatible with marking of both crystals with and without a crystal holder, a crystal holder placement groove 10 is provided at the corresponding positions of the fixed end pressure plate 4 and the fixed end pad 8. The silicon carbide ingot 9 with the crystal holder 17 can be placed in the placement groove 10.

[0035] The rear end of the pressure rod 6 is connected to a handle 16, which makes it more convenient to rotate the pressure rod 6.

[0036] The method for using the fixing device for silicon carbide ingot during processing proposed in this embodiment is as follows:

[0037] According to the diameter of the silicon carbide ingot 9, the first adjusting rod 1 and the second adjusting rod 2 are connected into the appropriate connecting holes 3, the first adjusting rod 1 and the second adjusting rod 2 are symmetrically arranged and located at the lower part of the silicon carbide ingot 9, the silicon carbide ingot 9 is placed on the first adjusting rod 1 and the second adjusting rod 2 and one side is attached to the fixed end cushion 8 of the fixed end pressing plate 4, if there is a crystal holder 17, the crystal holder 17 can be placed in the placing groove 10 from the top; then the handle 16 is rotated, the pressing rod 6 is rotated until the circular surface of the fixed circular cake 7 at the front end is in contact with and tightly presses the other circular surface of the silicon carbide ingot 9; after the silicon carbide ingot 9 is fixed, the silicon carbide ingot 9 can be subjected to the marking processing.

[0038] The above is the further detailed description of the utility model made in combination with the specific preferred embodiments, and the specific embodiments of the utility model cannot be limited to this, for the ordinary skilled in the art to which the utility model belongs, under the premise of not departing from the utility model, a number of simple deductions or substitutions can also be made, and all should be regarded as belonging to the utility model, and the patent protection scope is determined by the submitted claims.

Claims

1. A device for fixing a silicon carbide ingot during processing, characterized in that: The invention comprises a U-shaped support, wherein the U-shaped support comprises two vertical plates parallel to each other and a horizontal bottom plate (11) connected between the bottoms of the two vertical plates; a plurality of connection holes (3) are provided at the bottoms of the two vertical plates, and the connection holes (3) on the two vertical plates are symmetrically arranged; a first adjustment rod (1) and a second adjustment rod (2) are provided between the two vertical plates; the first adjustment rod (1) and the second adjustment rod (2) are both connected to the connection holes (3) of the two vertical plates; one of the vertical plates serves as a fixed end pressure plate (4), and the other vertical plate serves as a movable end pressure plate (5), and the movable end pressure plate (5) is rotatably connected to a pressure rod (6), and the front end of the pressure rod (6) passes through the movable end pressure plate (5) to the inner side of the U-shaped support, and the front end of the pressure rod (6) is connected to a fixed round cake (7).

2. The device for fixing a silicon carbide ingot during processing according to claim 1, wherein: A fixed end pad (8) is provided on the inner side of the fixed end pressure plate (4), and the fixed end pad (8) is in contact with one side surface of the silicon carbide ingot (9).

3. The device for fixing a silicon carbide ingot during processing according to claim 2, wherein: A placement groove (10) for the crystal holder is provided at corresponding positions of the fixed end pressure plate (4) and the fixed end cushion (8).

4. The device for fixing a silicon carbide ingot during processing according to claim 1, wherein: A row of connection holes (3) is symmetrically provided on both sides of the bottom of the vertical plate.

5. The device for fixing a silicon carbide ingot during processing according to claim 1, characterized in that: Fixing holes (12) are symmetrically provided on both sides of the horizontal bottom plate (11), and the two vertical plates are connected to the fixing holes (12) via bolts respectively.

6. The device for fixing a silicon carbide ingot during processing according to claim 1, characterized in that: The pressure rod (6) is a fixed screw rod, and the fixed screw rod is threadedly connected to the movable end pressure plate (5).

7. The device for fixing a silicon carbide ingot during processing according to claim 6, characterized in that: The front end of the pressure rod (6) is connected to a bearing seat (13), the bearing seat (13) is connected to a bearing sleeve (14), the bearing sleeve (14) is connected to a bearing cover (15), and the bearing cover (15) is connected to the fixed disc (7).

8. The device for fixing a silicon carbide ingot during processing according to claim 2, wherein: The fixed end pad (8) and the fixed round cake (7) are both made of flexible materials.

9. The device for fixing a silicon carbide ingot during processing according to claim 1, wherein: The rear end of the pressure rod (6) is connected to a handle (16).

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