Illuminating lamp special for inspection of surface defects of photomask substrate

Abstract

The utility model relates to the technical field of photomask substrate surface inspection, in particular to a special illuminating lamp for photomask substrate surface flaw inspection, which comprises an adjuster, a detector and a feeding device, the detector is mounted on the surface of the adjuster, the feeding device is arranged on the surface of the adjuster, the feeding device comprises a rotating disc, and the rotating disc is arranged on the surface of the adjuster. A driver is installed on the lower surface of the adjuster, the driving end of the driver is fixedly connected with the rotating end of the rotating disc, a feeding groove is fixedly connected to the surface of the adjuster, a guiding frame is fixedly connected to the surface of the feeding groove, a guiding groove is formed in the surface of the guiding frame, and a material pushing plate is placed on the surface of the feeding groove; the surface of the feeding groove is fixedly connected with a first motor. By arranging the feeding device, the situation that a worker needs to replace materials frequently is avoided, the working efficiency of the worker is improved, the worker can detect the materials more carefully, and the convenience of detecting the materials by the worker is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the photomask substrate surface inspection technical field especially relates to a photomask substrate surface flaw inspection special lighting lamp. BACKGROUND

[0002] The photomask substrate is the ideal photosensitive blank plate for making micro photomask patterns, and the required photomask plate can be obtained through the photoetching process. The photomask substrate is essentially a photosensitive blank plate, mainly used for making high-precision photomask patterns. The photomask substrate is mainly composed of a glass substrate, and the common materials include quartz glass and soda glass. Quartz glass is an optimal material for making high-precision photomask plates due to its high optical transmittance, low thermal expansion rate, high flatness, and wear resistance. The surface flaw inspection special lighting lamp is a lighting tool for detecting surface flaws of an object. By a specific lighting method, light is radiated onto the detected object, and then high-precision cameras and image processing technology are used to capture and identify surface defects. With the development of society, the lighting lamp is used when the surface of the photomask substrate needs to be inspected.

[0003] The existing device such as CN206546337U, a table type surface inspection lamp, includes a power supply system and a lighting assembly connected to the power supply system. The power supply system includes a power supply control box, a rotating shaft mounted on the power supply control box, and a support connected to the rotating shaft. The lighting assembly includes a lamp box, a filter mounted in the lamp box, and a bulb. The lamp box is connected to the support, and the bulb is electrically connected to the power supply control box. The filter is arc-shaped, located in front of the lighting direction of the bulb, and the front end of the bulb is provided with unevenly distributed corrugations. The corrugations at the front end of the bulb perform multi-directional diffuse reflection on the light radiated by the bulb, making the diffuse reflection of light evenly dispersed. The arc-shaped filter can expand the illumination range of the light, fully utilize the light emitted by the bulb, improve the utilization rate of the light, and improve the inspection efficiency. Multiple illumination angles can be adjusted to adapt to the angle inspection of the object.

[0004] When the worker needs to detect the surface of the material, the worker places the material under the lighting lamp so that the worker can use the device to detect the surface of the material. However, the existing lighting lamp needs to be loaded one by one by the worker during use, which causes the worker to spend a lot of time loading the material, thereby causing the worker's work efficiency to be reduced. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the problem of reduced work efficiency of workers in the prior art and provides a photomask substrate surface flaw inspection special lighting lamp.

[0006] In order to achieve the above object, the utility model discloses the following technical scheme: a kind of photomask substrate surface flaw inspection special lighting, including regulator, detector and feeding device, the detector is installed on the surface of regulator, the feeding device is arranged on the surface of regulator, the feeding device includes rotating disc, the rotating disc is rotatably connected with the surface of regulator, the lower surface of regulator is equipped with driver, the driving end of driver is fixedly connected with the rotating end of rotating disc, the surface of regulator is fixedly connected with feeding groove, the surface of feeding groove is fixedly connected with guide frame, the surface of guide frame is equipped with guide slot, the surface of feeding groove is placed with push plate, the surface of feeding groove is fixedly connected with first motor, the driving end of first motor is fixedly connected with adjusting rod, the adjusting rod is rotatably connected with the surface of feeding groove, the surface of push plate is threadedly connected with adjusting rod, the both sides of push plate are fixedly connected with limiting block, the surface of limiting block is slidably connected with guide slot, limiting block can be cooperated with push plate to reach the purpose of guiding and supporting push plate.

[0007] Preferably, the surface of the feeding groove is fixedly connected with the buffer fiber, and the buffer fiber is located on one side of the push plate. The buffer fiber can cooperate with the feeding groove to achieve the purpose of buffering materials.

[0008] Preferably, the surface of the regulator is provided with a discharging device, the discharging device includes a main frame, the main frame is fixedly connected with the surface of the regulator, the surface of the main frame is fixedly connected with a second motor, the driving end of the second motor is fixedly connected with an adjusting disc, and the main frame can cooperate with the regulator to achieve the purpose of supporting the second motor.

[0009] Preferably, the surface of the adjusting disc is rotatably connected with a second adjusting strip, one end of the second adjusting strip is fixedly connected with a connecting block, and the other end of the connecting block is rotatably connected with a first adjusting strip. The second adjusting strip can cooperate with the adjusting disc, the connecting block and the first adjusting strip to achieve the purpose of adjusting the pusher frame.

[0010] Preferably, the inner surface of the main frame is slidably connected with a sliding rod, one end of the sliding rod is fixedly connected with a pusher frame, the surface of the pusher frame is slidably connected with the rotating disc, and one end of the first adjusting strip is rotatably connected with the surface of the pusher frame. The sliding rod can cooperate with the main frame, the first adjusting strip and the pusher frame to achieve the purpose of discharging.

[0011] Compared with the prior art, the utility model has the advantages and positive effects that:

[0012] 1. The utility model discloses a feeding device is set up, when the worker needs to feed the material, effectively convenient worker feeds the material, uses the equipment, and the equipment reaches the purpose of detecting the material through the mode of optical reflection, starts first motor, and first motor drives the adjusting rod, and the adjusting rod pushes the material pushing plate, and the material pushing plate drives the limiting block, and the guide groove guides the limiting block, and the material pushing plate slides and pushes the material to move, and the material enters the rotary disc, through setting up the feeding device, avoid the worker to need frequently to change the material, improve the work efficiency of worker, be favorable to the worker to the material more careful detection, improve the convenience of worker detection material. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 A three-dimensional structure schematic diagram of the utility model is provided for a special lighting lamp for checking surface flaws of a photomask plate substrate;

[0014] Figure 2 A feeding device structure schematic diagram of the utility model is provided for a special lighting lamp for checking surface flaws of a photomask plate substrate;

[0015] Figure 3 A feeding device structure schematic diagram of the utility model is provided for a special lighting lamp for checking surface flaws of a photomask plate substrate; Figure 2 A structure schematic diagram of place A in the utility model is provided;

[0016] Figure 4 A feeding device structure schematic diagram of the utility model is provided for a special lighting lamp for checking surface flaws of a photomask plate substrate;

[0017] Figure 5 A feeding device structure schematic diagram of the utility model is provided for a special lighting lamp for checking surface flaws of a photomask plate substrate; Figure 4 A structure schematic diagram of place B in the utility model is provided.

[0018] Legend:

[0019] 1, regulator, 2, detector, 3, feeding device, 31, first motor, 32, limiting block, 33, guide groove, 34, guide frame, 35, adjusting rod, 36, material pushing plate, 37, feeding groove, 38, buffer fiber, 39, rotary disc, 4, discharging device, 41, first adjusting strip, 42, material pushing frame, 43, connecting block, 44, main frame, 45, sliding rod, 46, second motor, 47, adjusting disc, 48, second adjusting strip. DETAILED DESCRIPTION

[0020] Please refer to Figures 1-5 The utility model provides a technical scheme: a special lighting lamp for checking surface flaws of a photomask plate substrate, including regulator 1, detector 2 and feeding device 3, detector 2 is installed on the surface of regulator 1, and feeding device 3 is set up on the surface of regulator 1.

[0021] The specific settings and functions of the upper feeding device 3 and the lower feeding device 4 will be described below.

[0022] In this embodiment, the upper feeding device 3 comprises a rotating disc 39, which is rotatably connected to the surface of the regulator 1. A drive is mounted on the lower surface of the regulator 1, and the driving end of the drive is fixedly connected to the rotating end of the rotating disc 39. The surface of the regulator 1 is fixedly connected with a feeding groove 37, and the surface of the feeding groove 37 is fixedly connected with a guide frame 34. The surface of the guide frame 34 is provided with a guide groove 33. The surface of the feeding groove 37 is placed with a pushing plate 36. The surface of the feeding groove 37 is fixedly connected with a first motor 31. The driving end of the first motor 31 is fixedly connected with an adjusting rod 35, which is rotatably connected to the surface of the feeding groove 37. The pushing plate 36 is threadedly connected to the surface of the adjusting rod 35.

[0023] Specifically, the two sides of the pushing plate 36 are fixedly connected with limiting blocks 32, which are slidably connected to the surface of the guide groove 33. The limiting blocks 32 can cooperate with the pushing plate 36 to guide and support the pushing plate 36.

[0024] Specifically, the surface of the feeding groove 37 is fixedly connected with a buffer fiber 38, which is located on one side of the pushing plate 36.

[0025] In this embodiment, the buffer fiber 38 can cooperate with the feeding groove 37 to achieve the purpose of buffering the material.

[0026] In this embodiment, the surface of the regulator 1 is provided with a lower feeding device 4, which comprises a main frame 44, which is fixedly connected to the surface of the regulator 1. The surface of the main frame 44 is fixedly connected with a second motor 46. The driving end of the second motor 46 is fixedly connected with an adjusting disc 47. The main frame 44 can cooperate with the regulator 1 to support the second motor 46.

[0027] Specifically, the surface of the adjusting disc 47 is rotatably connected with a second adjusting strip 48. One end of the second adjusting strip 48 is fixedly connected with a connecting block 43. One end of the connecting block 43 is rotatably connected with a first adjusting strip 41.

[0028] In this embodiment, the second adjusting strip 48 can cooperate with the adjusting disc 47, the connecting block 43, and the first adjusting strip 41 to adjust the pushing frame 42.

[0029] Specifically, the inner surface of the main frame 44 is slidably connected with a sliding rod 45. One end of the sliding rod 45 is fixedly connected with a pushing frame 42, which is slidably connected to the surface of the rotating disc 39. One end of the first adjusting strip 41 is rotatably connected to the surface of the pushing frame 42.

[0030] In this embodiment: slide rod 45 can be matched with the main frame 44, the first adjusting strip 41, push material frame 42 to achieve the purpose of discharging.

[0031] Working principle: by setting the feeding device 3, when the worker needs to feed the material, effectively facilitate the worker to feed the material, use equipment, equipment through the way of optical reflection, in order to achieve the purpose of detecting the material, start the first motor 31, the first motor 31 drive adjusting rod 35, adjusting rod 35 push the push plate 36, push plate 36 drive limit block 32, guide groove 33 guide limit block 32, push plate 36 slide and push the material movement, the material into the rotating disc 39, by setting the feeding device 3, avoid the worker needs to frequently change the material, improve the work efficiency of the worker, is favorable to the worker to carry on the more careful detection of material, improve the convenience of the worker to detect material, in addition, through the setting of discharging device 4, when the worker needs to discharge the material, effectively facilitate the worker to discharge the material, use equipment, equipment through the way of optical reflection, in order to achieve the purpose of detecting the material, start the second motor 46, the second motor 46 drive adjusting disc 47 rotation, adjusting disc 47 rotation and push the second adjusting strip 48, the second adjusting strip 48 push the connecting block 43, connecting block 43 push the first adjusting strip 41, the first adjusting strip 41 push the push material frame 42, push material frame 42 drive slide rod 45, main frame 44 guide slide rod 45, push material frame 42 slide and push the material from the rotating disc 39, through the setting of discharging device 4, improve the convenience of the worker to discharge, improve the work efficiency of the worker, reduce the labor intensity of the worker.

Claims

1. A special lighting lamp for inspecting surface defects of a photomask substrate, comprising a regulator (1), a detector (2) and a loading device (3), characterized in that: The detector (2) is mounted on the surface of the regulator (1); the feeding device (3) is arranged on the surface of the regulator (1); the feeding device (3) comprises a rotating disk (39); the rotating disk (39) is rotatably connected to the surface of the regulator (1); a driver is mounted on the lower surface of the regulator (1); the driving end of the driver is fixedly connected to the rotating end of the rotating disk (39); the surface of the regulator (1) is fixedly connected to a feeding trough (37); the surface of the feeding trough (37) is fixedly connected to a guide frame (34); the surface of the guide frame (34) is provided with a guide groove (33); a pushing plate (36) is placed on the surface of the feeding trough (37); the surface of the feeding trough (37) is fixedly connected to a first motor (31); the driving end of the first motor (31) is fixedly connected to an adjusting rod (35); the adjusting rod (35) is rotatably connected to the surface of the feeding trough (37); the pushing plate (36) is threadedly connected to the surface of the adjusting rod (35).

2. The special lighting lamp for inspecting surface defects of a photomask substrate according to claim 1, characterized in that: The two sides of the push plate (36) are fixedly connected to the limiting blocks (32), and the limiting blocks (32) are slidably connected to the surface of the guide groove (33).

3. The special lighting lamp for inspecting surface defects of a photomask substrate according to claim 2, characterized in that: The surface of the feeding trough (37) is fixedly connected with a buffer fiber (38), and the buffer fiber (38) is located on one side of the pushing plate (36).

4. The special lighting lamp for inspecting surface defects of a photomask substrate according to claim 1, characterized in that: The surface of the regulator (1) is provided with a blanking device (4), the blanking device (4) comprises a main frame (44), the main frame (44) is fixedly connected to the surface of the regulator (1), a second motor (46) is fixedly connected to the surface of the main frame (44), and a driving end of the second motor (46) is fixedly connected to an adjusting disk (47).

5. The special lighting lamp for inspecting surface defects of a photomask substrate according to claim 4, characterized in that: The surface of the adjusting disk (47) is rotatably connected to a second adjusting bar (48), one end of the second adjusting bar (48) is fixedly connected to a connecting block (43), and one end of the connecting block (43) is rotatably connected to the first adjusting bar (41).

6. The special lighting lamp for inspecting surface defects of a photomask substrate according to claim 5, characterized in that: The inner surface of the main frame (44) is slidably connected to a slide rod (45), one end of the slide rod (45) is fixedly connected to a pusher rack (42), the pusher rack (42) is slidably connected to the surface of the rotating disk (39), and one end of the first adjustment bar (41) is rotatably connected to the surface of the pusher rack (42).

Images