Evaporation device

Abstract

The utility model provides an evaporation device which comprises at least one evaporation boat arranged in an evaporation tank, at least one heating component electrically connected with the evaporation boat, and at least one wire feeding mechanism for conveying wires to be evaporated to the evaporation boat, cooling side plates are arranged at two ends of the evaporation boat, a cooling bottom plate is arranged below the evaporation boat, and the cooling bottom plate is arranged below the evaporation boat. Heat insulation plates are arranged on the sides, close to the evaporation boat, of the cooling side plates and the cooling bottom plate; the cooling side plate, the cooling bottom plate and the heat insulation plate are arranged in the evaporation device, the influence of high temperature of an evaporation area on peripheral electrical facilities is reduced through the cooling side plate and the cooling bottom plate, the influence of the cooling side plate and the cooling bottom plate on evaporation particles in the evaporation area is reduced through the heat insulation plate, the temperature in the evaporation area is increased, and the evaporation effect is improved. And the evaporation effect is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of evaporation, more specifically, relates to an evaporation device. BACKGROUND

[0002] The working principle of vacuum evaporation coating technology is to make the wire material vaporize and evaporate by heating the wire material to be evaporated under vacuum conditions, and then deposit on the flexible substrate to be coated to form a thin film. Because the temperature in the evaporation area during the evaporation process is very high, generally more than 1000 DEG C. In order to prevent damage to the substrate and reduce the impact of high temperature in the evaporation area on the surrounding electrical components, cooling plates are usually arranged on both sides of the evaporation area, but this will cause the temperature on both sides of the evaporation area and both ends of the evaporation boat to be too low, affecting the evaporation effect. SUMMARY

[0003] The utility model discloses a kind of evaporation devices, to solve the problem that existing technology exists because of the setting of cooling plate and causes evaporation effect to be poor.

[0004] To achieve the above object, the technical scheme adopted by the utility model is as follows:

[0005] The utility model discloses an evaporation device, which comprises at least one evaporation boat, at least one heating component electrically connected to the evaporation boat, at least one wire feeding mechanism for feeding the wire material to be evaporated to the evaporation boat, cooling side plates arranged at both ends of the evaporation boat, a cooling bottom plate arranged below the evaporation boat, and heat insulation plates arranged on the side of the cooling side plates and the cooling bottom plate close to the evaporation boat.

[0006] Further, the evaporation boat is multiple and arranged in an array.

[0007] Further, it further comprises at least one boat cooling gas pipe, and the gas outlet end of the boat cooling gas pipe is arranged below the evaporation boat.

[0008] Further, the wire feeding mechanism comprises two wire feeding assemblies, the wire feeding assemblies are located on the side of the cooling side plates away from the evaporation boat, the wire feeding assemblies comprise at least one wire reel on which the wire material to be evaporated is wound, at least one wire feeding conduit, and a roller assembly, the wire feeding conduit is close to the roller assembly at the wire inlet end, the wire feeding conduit extends above the evaporation boat at the wire outlet end, and the wire material to be evaporated unwound from the wire reel is fed to the evaporation boat under the traction drive of the roller assembly via the wire feeding conduit.

[0009] Further, the wire feeding conduit is internally provided with a wire feeding channel for the wire material to be evaporated to pass through, and an air inlet channel and an air outlet channel for conveying cooling gas.

[0010] Further, the evaporation boat is provided with a fuse area and an evaporation area alternately arranged along the length direction of the evaporation boat, a flow guide structure is arranged in the fuse area, and the flow guide structure is used for guiding the molten fuse material in the fuse area to flow to the evaporation area.

[0011] Further, a cover plate is arranged on the evaporation boat, the cover plate is provided with a fuse feeding hole corresponding to the fuse area and an evaporation hole corresponding to the evaporation area.

[0012] Further, the heating component comprises a fixed heating electrode and a movable heating electrode arranged on both sides of the evaporation boat, the fixed heating electrode and the movable heating electrode clamp both ends of the evaporation boat, the movable heating electrode is connected with a spring pressing structure, and the spring pressing structure makes the movable heating electrode abut against the end of the evaporation boat.

[0013] Further, the spring pressing structure comprises a support seat, an insulating connecting piece movably arranged in the support seat, and a guide shaft arranged in the insulating connecting piece and the support seat, a spring is arranged outside the guide shaft, and the insulating connecting piece is further connected with the movable heating electrode.

[0014] Compared with the prior art, the evaporation device has at least the following beneficial effects: the cooling side plate, the cooling bottom plate and the heat insulation plate arranged in the evaporation device can reduce the influence of the high temperature of the evaporation area on the surrounding electrical facilities through the cooling side plate and the cooling bottom plate, and can reduce the influence of the cooling side plate and the cooling bottom plate on the evaporation particles in the evaporation area through the heat insulation plate, so that the temperature in the evaporation area is improved, and the evaporation effect is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0016] Figure 1 A perspective structural schematic view of the first evaporation device provided by the present application is shown in the figure.

[0017] Figure 2 A side view structural schematic view of the first evaporation device provided by the present application is shown in the figure.

[0018] Figure 3 A side view structural schematic view of the second evaporation device provided by the present application is shown in the figure.

[0019] Figure 4The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0020] Figure 5 The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0021] Figure 6 The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0022] Figure 7 The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0023] Figure 8 The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0024] Figure 9 The third perspective structural schematic view of the evaporation device is provided with the evaporation boat and the wire feeding conduit.

[0025] Among them, the main marks of each figure in the drawing are:

[0026] 1, accommodating area; 2, evaporation boat; 5, boat cooling air pipe; 7, wire feeding conduit; 8, cover plate;

[0027] 11, bottom wall; 12, side wall;

[0028] 21, fuse area; 22, evaporation area;

[0029] 71, wire feeding channel; 72, air inlet channel; 73, air outlet channel;

[0030] 31, cooling side plate; 32, cooling bottom plate;

[0031] 40, heat insulation plate;

[0032] 61, first wire feeding assembly; 62, second wire feeding assembly;

[0033] 621, second wire disc; 623, second roller assembly;

[0034] 81, wire feeding hole; 82, evaporation hole;

[0035] 91, fixed heating electrode; 92, movable heating electrode; 93, spring pressing structure;

[0036] 921, cooling water interface; 931, support seat; 932, insulating connecting piece; 933, guide shaft; 934, spring;

[0037] 101, bottom fixed plate; 102, wire falling point. DETAILED DESCRIPTION

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0039] Please also see Figures 1 to 5 The evaporation device provided by the present invention includes: at least one evaporation boat 2, at least one heating component electrically connected to the evaporation boat 2, and at least one wire feeding mechanism for feeding the wire to be evaporated to the evaporation boat 2. Cooling side plates 31 are provided at both ends of the evaporation boat 2, and a cooling bottom plate 32 is provided under the evaporation boat 2. A heat insulation plate 40 is provided on the side of the cooling side plate 31 and the cooling bottom plate 32 close to the evaporation boat 2.

[0040] It should be understood that, in actual applications, the area above the evaporation boat 2 , the cooling side plates 31 on both sides, and the workpiece to be coated is the evaporation area 1 .

[0041] It should be noted that the cooling side plates 31 and the cooling bottom plate 32 are water-cooled plates, and the heat insulation plate 40 is made of high-temperature resistant material.

[0042] The advantage of this design is that, by installing cooling side plates 31, cooling bottom plate 32, and heat insulation plate 4 within the evaporation device, the cooling side plates 31 and cooling bottom plate 32 reduce the impact of the high temperature in the evaporation area 1 on surrounding electrical equipment. Meanwhile, the heat insulation plate 40 reduces the impact of the cooling side plates 31 and cooling bottom plate 32 on the evaporated particles in the evaporation area 1, thereby increasing the temperature in the evaporation area 1 and, in turn, improving the evaporation effect. Furthermore, in addition to its cooling function, the cooling bottom plate 32 also absorbs overflow or splashing of the evaporation boat 2, preventing damage to other equipment within the evaporation system.

[0043] It should be understood that the evaporation device provided by the present invention has various structural types.

[0044] In an optional embodiment of the present invention, Figure 1 、 Figure 2 As shown, the evaporation device includes a bottom wall 11 and two side walls 12 integrally formed to form a receiving area 1. An evaporation boat 2 is placed within the receiving area 1. The two ends of the evaporation boat 2 are connected to the two side walls 12. A heat shield 40 is provided on the side of the side wall 12 proximal to the evaporation boat 2, and a cooling side plate 31 is provided on the side of the side wall 12 distal to the evaporation boat 2. The bottom wall 11 is also provided with a heat shield 40 on the side proximal to the evaporation boat 2, and a cooling bottom plate 32 on the side of the bottom wall 11 distal to the evaporation boat 2. The evaporation device also includes a heating component electrically connected to the evaporation boat 2 and a wire feeder mechanism for delivering the wire material to be evaporated to the evaporation boat 2. The specific structures of the heating component and wire feeder mechanism are described below.

[0045] In an optional embodiment of the utility model, as shown in Figure 3 、 Figure 4 The evaporation device further comprises a plurality of heating components electrically connected with the evaporation boat 2, and a plurality of wire feeding mechanisms for feeding the wire to be evaporated to the evaporation boat 2. The specific structure of the heating components and the wire feeding mechanisms will be described below.

[0046] Preferably, the wire to be evaporated is usually a metal wire, such as an aluminum wire. For the wire to be evaporated with a high melting point, two or three heat insulation plates 40 are arranged in parallel on the side of the cooling side plate 31, and two or three heat insulation plates 40 are arranged in parallel on the top of the cooling bottom plate 32.

[0047] In some embodiments of the utility model, as shown in Figure 3 、 Figure 5 The evaporation device further comprises at least one boat cooling gas pipe 5, and the gas outlet end of the boat cooling gas pipe 5 is arranged below the evaporation boat 2. Preferably, two boat cooling gas pipes 5 are arranged for the evaporation device.

[0048] The advantage of this design is that when the evaporation boat 2 needs to be cooled after evaporation, the cooling gas can be delivered to the lower side of the evaporation boat 2 through the boat cooling gas pipe 5, thereby shortening the waiting time.

[0049] It should be understood that the wire feeding mechanism in the evaporation device provided by the utility model has various structural types.

[0050] In some embodiments of the utility model, the wire feeding mechanism comprises two wire feeding assemblies, and the wire feeding assemblies are located on the side of the cooling side plate 31 away from the evaporation boat 2. The wire feeding assembly comprises at least one wire reel on which the wire to be evaporated is wound, at least one wire feeding conduit 7, and a roller assembly. The wire feeding conduit 7 is arranged close to the roller assembly, the wire feeding conduit 7 extends above the evaporation boat 2, and the wire to be evaporated unwound from the wire reel is delivered to the evaporation boat 2 through the wire feeding conduit 7 under the traction drive of the roller assembly.

[0051] In an optional embodiment, as shown in Figure 1 、 Figure 2 The wire feeding mechanism comprises two first wire feeding assemblies 61, each of which comprises a first wire reel (not shown in the figure) on which the wire to be evaporated is wound, a wire feeding conduit 7, and a first roller assembly. The wire feeding conduit 7 extends from one side of the evaporation tank 1 to above the evaporation boat 2, and the wire to be evaporated unwound from the first wire reel is delivered to the evaporation boat 2 through the wire feeding conduit 7 under the traction drive of the first roller assembly. Moreover, the wire feeding conduit 7 has a circular arc at the wire outlet end, and the wire to be evaporated is delivered from one end of the evaporation boat 2 to the wire melting position by using the angle of the circular arc.

[0052] In another alternative embodiment, as shown in Figure 3 、 Figure 4 and Figure 5 , the wire feeding mechanism comprises two second wire feeding assemblies 62, each of which comprises two second wire reels 621 on which the wire to be evaporated is wound, two wire feeding conduits 7, and a second roller assembly 623, the wire feeding ends of the two wire feeding conduits 7 being close to the second roller assembly 623, the wire feeding ends of the two wire feeding conduits 7 extending above the evaporation boat 2, and the wire to be evaporated wound off from the two second wire reels 621 being delivered to the same evaporation boat 2 under the traction drive of the second roller assembly 623 via the corresponding wire feeding conduit 7.

[0053] Specifically, the second roller assembly 623 adopts a double-wheel driving mode in which one motor drives two wires, and comprises a rotary driving device and a driving roller and a driven roller arranged oppositely, a wire feeding gap being left between the driving roller and the driven roller, the rotary driving device being in transmission connection with the driving roller, and the rotary driving device being capable of driving the driving roller to rotate and cooperating with the driven roller to deliver the wire to be evaporated. When the second roller assembly 623 can deliver the wire to be evaporated to one evaporation boat 2 in cooperation with the two second wire reels 621 and the two wire feeding conduits 7, one wire to be evaporated is wound off from each of the two second wire reels 621, one end of the two wires to be evaporated is threaded between the driving roller and the driven roller, the rotary driving device drives the driving roller to rotate, at this time, the driving roller and the driven roller cooperate to drive the two wires to be evaporated to move, and finally the two wires to be evaporated are delivered to the evaporation boat 2 via the two wire feeding conduits 7. Moreover, the wire feeding end of the wire feeding conduit 7 is provided with a circular arc, the wire to be evaporated is fed from one end of the evaporation boat 2 to the wire melting position by using the angle of the circular arc, and the falling points 102 of the wire to be evaporated on the evaporation boat 2 can also be adjusted according to the relative position of the evaporation boat 2 and the wire feeding mechanism.

[0054] In an alternative embodiment of the present application, as shown in Figure 6 、 Figure 7 , the wire feeding conduit 7 is internally provided with a wire feeding channel 71 for threading the wire to be evaporated, and an air inlet channel 72 and an air outlet channel 73 for delivering cooling gas.

[0055] It should be noted that the wire to be evaporated is fed to the evaporation boat 2 through the wire feeding channel 71, and the cooling gas enters the wire feeding conduit 7 through the air inlet channel 72, so as to reduce the temperature in the wire feeding conduit 7 and prevent the wire to be evaporated from melting before reaching the evaporation boat 2, and the cooled gas is fed out of the wire feeding conduit 7 via the air outlet channel 73. The shapes of the air inlet channel 72 and the air outlet channel 73 can be double helix or other structures, which can meet the effect of preventing the wire to be evaporated from melting in advance.

[0056] The benefit of such design is that the wire feeding guide tube 7 adopts a sandwiched air-cooled wire feeding tube to prevent pre-melting of the wire to be evaporated, and the air volume for cooling can be adjusted.

[0057] In some embodiments of the present application, as shown in Figure 8 , the evaporation boat 2 is alternately provided with a melting wire area 21 and an evaporation area 22 along its length direction, the melting wire area 21 is provided with a flow guide structure, and the flow guide structure is used to guide the wire to be evaporated in the melting state in the melting wire area 21 to flow to the evaporation area 22.

[0058] For the convenience of illustration, the wire to be evaporated in the melting state is taken as metal liquid as an example.

[0059] In an optional embodiment, as shown in Figure 8 , the evaporation boat 2 is provided with two melting wire areas 21 and three evaporation areas 22, and the melting wire areas 21 and the evaporation areas 22 are alternately arranged, and each melting wire area 21 is provided with a flow guide structure so that the metal liquid in the melting wire area 21 can flow to the evaporation areas 22 on both sides.

[0060] In another optional embodiment, as shown in Figure 5 , the evaporation boat 2 is provided with four melting wire areas 21 and five evaporation areas 22, and the melting wire areas 21 and the evaporation areas 22 are alternately arranged, and each melting wire area 21 is provided with a flow guide structure so that the metal liquid in the melting wire area 21 can flow to the evaporation areas 22 on both sides.

[0061] In some embodiments of the present application, as shown in Figure 8 , Figure 9 , the evaporation boat 2 is provided with a cover plate 8, the cover plate 8 is provided with a wire feeding hole 81 corresponding to the melting wire area 21 and an evaporation hole 82 corresponding to the evaporation area 22. The wire feeding hole 81 is a circular hole, the evaporation hole 82 is a square hole, the wire feeding hole 81 corresponds to the melting wire area 21 one by one, the evaporation hole 82 has a many-to-one relationship with the evaporation area 22, and the plurality of evaporation holes 82 corresponding to one evaporation area 22 are arranged in an array.

[0062] The benefit of such design is that the cover plate 8 is covered on the evaporation boat 2, and the cover plate 8 is provided with a wire feeding hole 81 for wire feeding and an evaporation hole for metal vapor overflow. The cover plate 8 can prevent the metal liquid in the evaporation boat 2 from splashing out, reduce the loss of metal liquid and damage the substrate.

[0063] In a preferred embodiment of the present application, as shown in Figure 3 , the heating component includes a fixed heating electrode 91 and a movable heating electrode 92 located on both sides of the evaporation boat 2, the fixed heating electrode 91 and the movable heating electrode 92 clamp both ends of the evaporation boat 2, the movable heating electrode 92 is connected with a spring pressing structure 93, and the spring pressing structure 93 makes the movable heating electrode 92 abut against the end of the evaporation boat 2.

[0064] The spring pressing structure 93 comprises a support seat 931, an insulating connecting piece 932 movably arranged in the support seat 931, and a guide shaft 933 arranged through the insulating connecting piece 932 and the support seat 931, and a spring 934 is arranged outside the guide shaft 933, and the insulating connecting piece 932 is further connected with the movable heating electrode 92.

[0065] The advantage of the design is that the spring pressing structure 93 cooperates with the movable heating electrode 92 and the fixed heating electrode 91 to clamp the evaporation boat 2, which is convenient for disassembly and replacement, and the movable heating electrode 92 is fixed by the spring 934 pressing the insulating connecting piece 932, so that the clamping force can be improved.

[0066] In addition, the movable heating electrode 92 is further provided with a cooling water interface 921, and the movable heating electrode 92 can also be used as a water-cooled plate. The support seat 931 is installed on the bottom fixed plate 101, and the evaporation device can also be installed on a rack as a whole to form an independent component, which is convenient for installation and maintenance.

[0067] In an optional embodiment of the utility model, as shown in Figure 4 and Figure 5 The evaporation boat 2 is arranged in an array in the width direction of the workpiece, and the distance between the evaporation boats 2 is about 100 mm. The number of evaporation boats 2 is determined according to the width, and is slightly larger than the width. The wire feeding mechanism also has a plurality of wire feeding conduits 7, and the wire outlet ends of the wire feeding conduits 7 correspond to the fuse wire areas 21 on the evaporation boats 2. The evaporation boat 2 can accommodate at least two wire falling points in the length direction, and at most four wire falling points 102.

[0068] In summary, the utility model discloses a cooling side plate, a cooling bottom plate and a heat insulation plate are arranged in the evaporation device. The cooling side plate and the cooling bottom plate reduce the influence of the high temperature of the evaporation area on the surrounding electrical facilities, and the heat insulation plate reduces the influence of the cooling side plate and the cooling bottom plate on the evaporation particles in the evaporation area, thereby improving the temperature in the evaporation area and the evaporation effect. In addition, the air inlet channel and the air outlet channel are arranged in the wire feeding conduit, which avoids the premature melting of the wire material due to high temperature during wire feeding, thereby avoiding the failure of material supply.

[0069] The above description is only a preferred embodiment of the utility model, and is not intended to limit the utility model. Any modification, equivalent replacement and improvement made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An evaporation device, characterized in that include: At least one evaporation boat, at least one heating component electrically connected to the evaporation boat, and at least one wire feeding mechanism for feeding the wire to be evaporated to the evaporation boat. Cooling side plates are provided at both ends of the evaporation boat, a cooling bottom plate is provided under the evaporation boat, and a heat insulation plate is provided on the side of the cooling side plate and the cooling bottom plate close to the evaporation boat.

2. The evaporation device according to claim 1, characterized in that There are multiple evaporation boats arranged in an array.

3. The evaporation device according to claim 1, wherein It also includes at least one boat cooling air pipe, wherein the air outlet end of the boat cooling air pipe is arranged below the evaporation boat.

4. The evaporation device according to claim 1, wherein The wire feeding mechanism includes two wire feeding assemblies, which are located on the side of the cooling side plate away from the evaporation boat. The wire feeding assembly includes at least one wire reel wound with the wire to be evaporated, at least one wire feeding duct, and a roller assembly. The wire inlet end of the wire feeding duct is close to the roller assembly, and the wire outlet end of the wire feeding duct extends above the evaporation boat. The wire to be evaporated unwound from the wire reel is transported to the evaporation boat via the wire feeding duct under the traction drive of the roller assembly.

5. The evaporation device according to claim 4, characterized in that The wire feeding conduit is provided with a wire feeding channel for the wire to be evaporated to pass through, and an air inlet channel and an air outlet channel for conveying cooling gas.

6. The evaporation device according to claim 1, wherein The evaporation boat is provided with fuse areas and evaporation areas alternately arranged along its length. A guide structure is provided in the fuse area for guiding the molten wire to be evaporated in the fuse area to flow to the evaporation area.

7. The evaporation device according to claim 6, characterized in that The evaporation boat is provided with a cover plate, and the cover plate is provided with a wire feeding hole corresponding to the fuse area and an evaporation hole corresponding to the evaporation area.

8. The evaporation device according to claim 1, wherein The heating component includes a fixed heating electrode and a movable heating electrode located on both sides of the evaporation boat, the fixed heating electrode and the movable heating electrode clamp the two ends of the evaporation boat, the movable heating electrode is connected to a spring compression structure, and the spring compression structure makes the movable heating electrode abut against the end of the evaporation boat.

9. The evaporation device according to claim 8, characterized in that The spring compression structure includes a support seat, an insulating connector movably arranged in the support seat, and a guide shaft passing through the insulating connector and the support seat. A spring is sleeved on the outside of the guide shaft, and the insulating connector is also connected to the movable heating electrode.

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