Vacuum internal gas uniformizing device

Abstract

The utility model relates to a vacuum internal gas uniformizing device. A gas outlet of a main gas uniformizing pipe is connected to the center line of one multi-stage gas uniformizing pipe; the gas outlets of the multi-stage gas uniformizing pipes on the Nth layer are connected to the center lines of the multi-stage gas uniformizing pipes on the (N + 1) th layer; and the distances from the air outlet of the main air uniformizing pipe to the air outlet of each multi-stage air uniformizing pipe are equal. Therefore, the distances from the gas outlet of the main gas uniformizing pipe to the gas outlet of each stage of gas uniformizing pipe are equal, the levels of the gas uniformizing pipes can be increased / decreased according to actual requirements, and a plurality of threaded gas outlets are uniformly distributed in the final-stage gas uniformizing pipe, so that the gas layout can be adjusted according to the actual requirements; the device has the advantages that the gas inlets of each layer are equidistant, and required process gas can be more uniformly conveyed to each gas hole of the ultimate gas outlet pipe, so that the process gas is uniformly distributed when entering the vacuum cavity, and the reaction is efficient. Process gas can be uniformly distributed in the process of conveying the process gas.

Description

TECHNICAL FIELD

[0001] The embodiment of the utility model relates to a gas uniformizing device, in particular to a vacuum internal gas uniformizing device. BACKGROUND

[0002] In the existing vacuum equipment coating, the process gas is directly transported into the cavity, and in the application process, it is found that the trajectory of the process gas movement and the direction of the gas movement are affected by the transportation mode, and finally the effect of the coating product is uneven. INNOVATION

[0003] The purpose of the embodiment of the utility model is to provide a gas conveying device which can uniformly distribute the process gas during the process gas conveying.

[0004] In order to achieve the above purpose, the embodiment of the utility model designs a vacuum internal gas uniformizing device, which comprises:

[0005] a main gas uniformizing pipe,

[0006] a plurality of multi-stage gas uniformizing pipes, the gas outlet of the main gas uniformizing pipe is connected to the center line of one of the plurality of multi-stage gas uniformizing pipes, the gas outlet of the Nth layer of the plurality of multi-stage gas uniformizing pipes is connected to the center line of the (N+1)th layer of the plurality of multi-stage gas uniformizing pipes,

[0007] The distance from the gas outlet of the main gas uniformizing pipe to the gas outlet of each multi-stage gas uniformizing pipe is equal.

[0008] Further in the vacuum internal gas uniformizing device, one elbow pipe is fixedly connected to one end of the main gas uniformizing pipe.

[0009] Further in the vacuum internal gas uniformizing device, connecting joints are arranged at both ends of the elbow pipe, and the connecting joints are connected to the main gas uniformizing pipe.

[0010] Further in the vacuum internal gas uniformizing device, the gas outlet of the main gas uniformizing pipe is fixedly connected to the center line of one of the plurality of multi-stage gas uniformizing pipes through a fixed gas uniformizing pipe connector.

[0011] Further in the vacuum internal gas uniformizing device, the gas outlet of the Nth layer of the plurality of multi-stage gas uniformizing pipes is also fixedly connected to the center line of the (N+1)th layer of the plurality of multi-stage gas uniformizing pipes through a fixed gas uniformizing pipe connector.

[0012] Further in the vacuum internal gas uniformizing device, the diameter of the main gas uniformizing pipe is smaller than the diameter of any one of the plurality of multi-stage gas uniformizing pipes.

[0013] Further in the vacuum internal gas uniformity device described in the present invention, the multi-stage gas uniformity pipe is arranged into 4 layers, namely the first-stage gas uniformity pipe, the first-stage gas uniformity pipe, the first-stage gas uniformity pipe and the final-stage gas uniformity pipe.

[0014] Furthermore, in the vacuum internal gas homogenizing device described in the present invention, a plurality of threaded air holes are evenly distributed on one side of the final gas homogenizing pipe.

[0015] Furthermore, in the vacuum internal gas homogenizing device described in the present invention, a protective sleeve is inserted into the bent pipe.

[0016] Furthermore, in the vacuum internal gas homogenizing device described in the present invention, both ends of the multi-stage gas homogenizing pipe are sealed by welding.

[0017] Compared with the prior art, the embodiment of the present invention has the following features: the outlet of the main gas-distributing pipe is connected to the center line of one of the multi-stage gas-distributing pipes; the outlets of the multi-stage gas-distributing pipes of the Nth layer are all connected to the center line of the multi-stage gas-distributing pipes of the N+1th layer; the distance between the outlet of the main gas-distributing pipe and the outlet of each stage of the multi-stage gas-distributing pipe is equal. This ensures that the distance between the outlet of the main gas-distributing pipe and the outlet of each stage of the gas-distributing pipe is equal, and the number of gas-distributing pipe levels can be increased / decreased according to actual needs. The final stage of the gas-distributing pipe is evenly distributed with multiple threaded outlets, and the gas layout can be adjusted according to actual needs. The advantage of the embodiment of the present invention is that the air inlets of each level are equidistant, which can more evenly transmit the required process gas to the various air holes of the final outlet pipe, so that the process gas enters the vacuum chamber with a uniform layout and efficient reaction. It can achieve uniform distribution of process gas during the process of conveying process gas, which solves the problem of directly conveying process gas into the cavity during coating in existing vacuum equipment. Later, during the application process, it was found that this type of conveying method affects the trajectory and direction of process gas movement, which is ultimately reflected in the effect of the coating product, that is, the technical problem of uneven coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0019] Figure 2 for Figure 1 Schematic diagram of the main viewing direction;

[0020] Figure 3 for Figure 1 Schematic diagram of the left viewing direction. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the utility model clearer, the various embodiments of the utility model will be described in detail below with reference to the drawings. However, those skilled in the art can understand that, in the various embodiments of the utility model, many technical details are proposed in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed by the various claims of the present application can be implemented.

[0022] The embodiments of the utility model relate to a kind of vacuum internal gas distribution devices, as shown in Figure 1 、 Figure 2 、 Figure 3 It includes:

[0023] In the vacuum internal gas distribution device in the present embodiment, main gas distribution pipe 1 is used to connect external process gas;

[0024] The gas outlet of main gas distribution pipe 1 is connected to the center line of one of the multi-stage gas distribution pipes 10;The gas outlet of the Nth multi-stage gas distribution pipe 10 is connected to the center line of the N+1th multi-stage gas distribution pipe 10;Multi-stage gas distribution pipe 10 is used to convey process gas;

[0025] The distance from the gas outlet of main gas distribution pipe 1 to the gas outlet of each multi-stage gas distribution pipe 10 is equal. The vacuum internal gas distribution device in the present embodiment can increase / decrease the level of gas distribution pipe according to actual needs, and the final stage gas distribution pipe is uniformly distributed with multiple threaded gas outlets, which can be adjusted according to actual needs. The advantage of the embodiments of the utility model is that the gas inlets of each level are equidistant, which can convey the required process gas more uniformly to each gas hole of the final gas outlet pipe, so that the process gas is uniformly distributed inside the vacuum cavity, and the reaction is efficient. It can uniformly distribute process gas during the conveying of process gas, solve the technical problem of uneven coating of coating products when coating in the existing vacuum equipment by directly conveying process gas into the cavity. In the application process, it is found that the trajectory of process gas movement and the direction of gas movement are affected by using this conveying method.

[0026] In order to achieve the above technical effects, the vacuum internal gas distribution device in the present embodiment, as shown in Figure 1 、 Figure 2 、 Figure 3 One elbow pipe 8 is fixedly connected to one end of main gas distribution pipe 1. Connecting joints 9 are arranged at both ends of elbow pipe 8;Connecting joints 9 are connected to main gas distribution pipe 1.

[0027] In order to achieve the above technical effects, the vacuum internal gas distribution device in the present embodiment, as shown in Figure 1 、 Figure 2 、 Figure 3As shown, the air outlet of the main air-distributing pipe 1 is fixedly connected to the center line of one of the multi-stage air-distributing pipes 10 via a fixed air-distributing pipe connector 2 .

[0028] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, the gas outlet of the multi-stage gas uniforming pipe 10 of the Nth layer is also fixedly connected to the center line of the multi-stage gas uniforming pipe 10 of the N+1th layer through the fixed gas uniforming pipe connector 2.

[0029] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, the diameter of the main gas-distributing pipe 1 is smaller than the diameter of any layer of the multi-stage gas-distributing pipe 10. This mainly plays the role of gradually reducing the gas pressure.

[0030] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, the multi-stage air-homogenizing pipe 10 is arranged into four layers, namely the first-stage air-homogenizing pipe 3 , the first-stage air-homogenizing pipe 4 , the first-stage air-homogenizing pipe 5 and the final-stage air-homogenizing pipe 6 .

[0031] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, a plurality of threaded air holes 7 are evenly distributed on one side of the final gas uniformity pipe 6. Such a structure can better achieve the technical effect of gas uniformity.

[0032] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, a protective sleeve 11 is inserted into the elbow 8 to provide protection during installation.

[0033] In order to achieve the above technical effects, the vacuum internal gas homogenizing device in this embodiment is as follows: Figure 1 、 Figure 2 、 Figure 3 As shown, both ends of the multi-stage gas-distributing pipe 10 are sealed by welding.

[0034] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A vacuum internal gas homogenizing device, characterized in that: include: Main air pipe, Multi-stage air-distributing pipes, wherein the air outlet of the main air-distributing pipe is connected to the center line of one of the multi-stage air-distributing pipes; the air outlets of the multi-stage air-distributing pipes of the Nth layer are all connected to the center line of the multi-stage air-distributing pipes of the N+1th layer; The distances from the air outlet of the main air-distributing pipe to the air outlets of each stage of the multi-stage air-distributing pipes are equal.

2. The vacuum internal gas homogenizing device according to claim 1, characterized in that: A bent pipe is fixedly connected to one end of the main air-distributing pipe.

3. The vacuum internal gas homogenizing device according to claim 2, characterized in that: Connecting joints are respectively provided at both ends of the bent pipe; the bent pipe is connected to the main air-distributing pipe via the connecting joints.

4. The vacuum internal gas homogenizing device according to claim 1, characterized in that: The air outlet of the main air-distributing pipe is fixedly connected to the center line of one of the multi-stage air-distributing pipes via a fixed air-distributing pipe connector.

5. The vacuum internal gas homogenizing device according to claim 1, characterized in that: The gas outlet of the multi-stage gas uniforming pipe of the Nth layer is also fixedly connected to the center line of the multi-stage gas uniforming pipe of the N+1th layer through a fixed gas uniforming pipe connector.

6. The vacuum internal gas homogenizing device according to claim 4, characterized in that: The diameter of the main air-distributing pipe is smaller than the diameter of any layer of the multi-stage air-distributing pipes.

7. The vacuum internal gas homogenizing device according to claim 6, characterized in that: The multi-stage air-uniform pipe is arranged into 4 layers, namely the first-stage air-uniform pipe, the first-stage air-uniform pipe, the first-stage air-uniform pipe and the final-stage air-uniform pipe.

8. The vacuum internal gas homogenizing device according to claim 7, characterized in that: A plurality of threaded air holes are evenly distributed on one side of the final-stage air-distributing pipe.

9. The vacuum internal gas homogenizing device according to claim 2, characterized in that: A protective sleeve is inserted into the elbow.

10. The vacuum internal gas homogenizing device according to claim 7, characterized in that: Both ends of the multi-stage gas uniforming pipe are sealed by welding.

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