Pump shell assembly and molecular pump with same

Abstract

The utility model discloses a pump shell assembly and a molecular pump with the pump shell assembly, and belongs to the technical field of molecular pumps, the pump shell assembly comprises an upper shell and a lower shell, the upper shell is provided with a first medium interface, the lower shell is provided with a second medium interface, and the lower end of the upper shell and the lower shell are connected and jointly define an installation space; the first medium interface and the second medium interface are both communicated with the mounting space, the mounting space is suitable for mounting a motor and a turbine which are in transmission connection, and the material density of the upper shell is larger than that of the lower shell. According to the pump shell assembly disclosed by the embodiment of the utility model, the upper shell and the lower shell of the pump shell assembly are designed in a manner that the material density of the upper shell is greater than that of the lower shell, so that the inherent frequency of the pump shell assembly can be adjusted, the inherent frequency of the pump shell assembly is prevented from being overlapped with the working frequency of the pump shell assembly, and the resonance risk is reduced; and vibration and noise generated when the pump shell assembly works are reduced, so that the performance stability of the pump shell assembly is maintained.

Description

TECHNICAL FIELD

[0001] The utility model relates to molecular pump technical field, specifically, pump shell subassembly and molecular pump with it having it. BACKGROUND

[0002] In the related art, the rotor of the molecular pump will generate vibration and noise when running, which will be transmitted to the shell assembly of the molecular pump, causing the shell assembly to resonate, which will damage the molecular pump. SUMMARY

[0003] The utility model discloses at least one of the above technical problems in the prior art is solved to some extent. To this end, the utility model provides a pump shell subassembly, which can reduce the risk of shell assembly resonance.

[0004] The utility model discloses still provided a molecular pump with above pump shell subassembly.

[0005] According to the pump shell subassembly of the utility model embodiment, the pump shell subassembly includes: an upper shell body having a first medium interface; a lower shell body having a second medium interface, the lower end of the upper shell body is connected with the lower shell body and defines an installation space together, the first medium interface and the second medium interface are communicated with the installation space, and the installation space is suitable for installing a motor and a turbine connected in transmission; wherein the material density of the upper shell body is greater than the material density of the lower shell body.

[0006] According to the pump shell subassembly of the utility model embodiment, by designing the material density of the upper shell body of the pump shell subassembly to be greater than the material density of the lower shell body, the natural frequency of the pump shell subassembly can be adjusted to avoid the natural frequency of the pump shell subassembly from coinciding with the working frequency of the pump shell subassembly, reduce the risk of resonance, reduce the vibration and noise of the pump shell subassembly during operation, and maintain the performance stability of the pump shell subassembly.

[0007] According to some embodiments of the utility model, the lower shell body includes: a base shell including a first pipe part, a second pipe part and a connecting part, the inner diameter of the first pipe part is greater than the inner diameter of the second pipe part, the first pipe part is coaxially connected with the second pipe part through the connecting part, the pipe wall of the first pipe part is provided with the second medium interface, and one end of the first pipe part away from the connecting part is connected with the upper shell body; a rear cover, which is detachably connected with one end of the second pipe part away from the connecting part.

[0008] According to some embodiments of the utility model, the pipe wall thickness of the first pipe part is D1, which satisfies the relationship formula: 13mm≤D1≤16mm, and the pipe wall thickness of the second pipe part is D2, which satisfies the relationship formula: 18mm≤D2≤22mm.

[0009] According to some embodiments of the present application, the rear cover is configured as an arc-shaped plate, and the thickness of the middle part of the rear cover is greater than the thickness of the edge of the rear cover, and the maximum thickness of the rear cover is D3, satisfying the relationship: 20mm≤D3≤24mm.

[0010] According to some embodiments of the present application, the upper shell is a stainless steel material, and the lower shell is an aluminum alloy material.

[0011] According to some embodiments of the present application, the pump shell assembly further comprises a support leg and a damping pad, the support leg is connected with the lower shell, and the damping pad is connected with one end of the support leg away from the lower shell.

[0012] According to another aspect of the molecular pump, comprising: a pump shell assembly, the pump shell assembly is the pump shell assembly described above; motor, the motor is installed in the installation space; turbine, the turbine is installed in the installation space, and the turbine is in transmission connection with the motor.

[0013] According to the molecular pump of the present application, by designing the material density of the upper shell of the pump shell assembly to be greater than that of the lower shell, the natural frequency of the pump shell assembly can be adjusted to avoid the natural frequency of the pump shell assembly coinciding with the working frequency of the pump shell assembly, reduce the risk of resonance to weaken the negative effects caused by resonance, reduce the vibration and noise of the pump shell assembly during operation, and maintain the performance stability of the pump shell assembly.

[0014] According to some embodiments of the present application, the motor comprises: a motor shell connected with the lower shell, and a motor cavity defined in the motor shell; a motor shaft penetrating the motor shell and in transmission connection with the turbine; a bearing rotatably connecting the motor shaft with the inner wall of the motor cavity; a damping ring clamped between the bearing and the inner wall of the motor cavity in the radial direction of the bearing.

[0015] According to some embodiments of the present application, the motor further comprises: an elastic buffer device arranged in the motor cavity, one side of the bearing is in limiting cooperation with the motor shaft in the axial direction of the motor shaft, and the other side of the bearing is connected with the inner wall of the motor cavity through the elastic buffer device.

[0016] According to some embodiments of the present application, the elastic buffer device comprises: a sleeve and an elastic member, one end of the sleeve abuts against the bearing in the axial direction of the motor shaft, and the other end of the sleeve is connected with the inner wall of the motor cavity through the elastic member.

[0017] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a structural schematic view of a pump shell assembly according to an embodiment of the present application;

[0019] Figure 2 is a structural schematic view of a molecular pump according to an embodiment of the present application, wherein the upper shell is omitted;

[0020] Figure 3 is Figure 2 a partial enlarged schematic view.

[0021] REFERENCE NUMERALS:

[0022] upper shell 1; first medium interface 11;

[0023] lower shell 2; second medium interface 21; base shell 22; first pipe portion 221; second pipe portion 222; connecting portion 223; rear cover 23;

[0024] mounting space 3; support leg 4; damping pad 5;

[0025] pump shell assembly 10;

[0026] motor 20; motor shell 201; motor cavity 2011; motor upper shell 2012; bearing support 2013; bearing cover plate 2014; bearing pressing plate 2015; motor shaft 202; shaft shoulder 2021; bearing 203; first bearing 203a; second bearing 203b; damping ring 204; elastic buffering device 205; sleeve 2051; elastic member 2052; stator 206; rotor 207;

[0027] first fastener 301; second fastener 302; third fastener 303; fourth fastener 304;

[0028] molecular pump 100. DETAILED DESCRIPTION

[0029] Embodiments of the present application are described in detail below with reference to the accompanying drawings, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0030] In the description of the utility model, it is understood that the terms "thickness", "upper", "lower", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0031] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0032] In the utility model, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0033] The utility model relates to a pump shell assembly and a molecular pump with it. Figures 1-3 The utility model relates to a pump shell assembly and a molecular pump with it.

[0034] Referring to Figure 1 and Figure 2 As shown in the utility model embodiment, the pump shell assembly 10 comprises: an upper shell 1 and a lower shell 2, the upper shell 1 is provided with a first medium interface 11, the lower shell 2 is provided with a second medium interface 21, the lower end of the upper shell 1 is connected with the lower shell 2 and defines a mounting space 3 together, the first medium interface 11 and the second medium interface 21 are communicated with the mounting space 3, and the mounting space 3 is suitable for mounting a transmission connected motor 20 and turbine, wherein the material density of the upper shell 1 is greater than that of the lower shell 2.

[0035] Specifically, the lower end of the upper shell 1 of the pump shell assembly 10 can be connected with the lower shell 2, the upper shell 1 and the lower shell 2 can be separate parts, and the upper shell 1 and the lower shell 2 can be connected by welding, clamping or bolting, etc. The upper shell 1 and the lower shell 2 jointly define a mounting space 3 for mounting a transmission-connected motor 20 and a turbine. The motor 20 can be connected with at least one of the upper shell 1 and the lower shell 2, and can be connected with at least one of the upper shell 1 and the lower shell 2 by clamping, bolting, etc. The turbine can be connected to the upper end of the motor 20, and can be arranged closer to the first medium interface 11 to improve the vacuum pumping efficiency of the molecular pump 100.

[0036] The pump shell assembly 10 is part of the structure of the molecular pump 100, which is an important device in the field of vacuum pumps. The molecular pump 100 transmits momentum to the gas by a high-speed rotating rotor 207, thereby realizing compression and discharge of the gas. The molecular pump 100 has high efficiency and stable performance, and is widely used in many fields such as semiconductor manufacturing, aerospace, scientific research and experiments. The molecular pump 100 can be used to pump the external equipment, the upper shell 1 can be connected with the external equipment, the upper shell 1 has a first medium interface 11, the first medium interface 11 can communicate the external equipment and the mounting space 3, the lower shell 2 has a second medium interface 21, the second medium interface 21 can communicate the mounting space 3 and the outside. When the molecular pump 100 pumps the external equipment, the motor 20 can be started, the motor 20 can drive the turbine to rotate, and the turbine can guide the gas in the external equipment from the first medium interface 11 to the second medium interface 21. Specifically, the gas in the external equipment can enter the mounting space 3 through the first medium interface 11 under the action of the turbine, and the gas in the mounting space 3 can be discharged from the pump shell assembly 10 through the second medium interface 21, so as to realize the effect of pumping the external equipment.

[0037] The upper shell 1 and the lower shell 2 can be made of different materials, the material density of the upper shell 1 is greater than that of the lower shell 2. For example, the upper shell 1 can be made of stainless steel material, and the lower shell 2 can be made of aluminum alloy material, or the upper shell 1 can be made of titanium alloy material, and the lower shell 2 can be made of aluminum alloy material. In this way, the natural frequency of the pump shell assembly 10 can be adjusted to avoid coincidence of the natural frequency of the pump shell assembly 10 with the working frequency of the pump shell assembly 10, reduce the risk of resonance, reduce the vibration and noise of the pump shell assembly 10 during work, and improve the safety and stability of the pump shell assembly 10, and reduce the risk of interference to the surrounding environment.

[0038] In the above embodiment, by designing the upper shell 1 and the lower shell 2 of the pump shell assembly 10 to have material densities such that the material density of the upper shell 1 is greater than the material density of the lower shell 2, the natural frequency of the pump shell assembly 10 can be adjusted to avoid coincidence of the natural frequency of the pump shell assembly 10 with the working frequency of the pump shell assembly 10, reduce the risk of resonance, reduce vibration and noise during operation of the pump shell assembly 10, and maintain the performance stability of the pump shell assembly 10.

[0039] In some embodiments of the present application, as shown in Figure 1 and Figure 2 , the lower shell 2 comprises a base shell 22 and a rear cover 23, the base shell 22 comprises a first pipe portion 221, a second pipe portion 222 and a connecting portion 223, the inner diameter of the first pipe portion 221 is greater than the inner diameter of the second pipe portion 222, the first pipe portion 221 is coaxially connected to the second pipe portion 222 through the connecting portion 223, the pipe wall of the first pipe portion 221 is provided with a second medium interface 21, and one end of the first pipe portion 221 away from the connecting portion 223 is connected to the upper shell 1.

[0040] The base shell 22 of the lower shell 2 can comprise a first pipe portion 221, a second pipe portion 222 and a connecting portion 223, the pipe wall of the first pipe portion 221 is provided with a second medium interface 21, the gas in the installation space 3 can flow to the outside from the second medium interface 21, the first pipe portion 221 is connected to the second pipe portion 222 through the connecting portion 223, and the first pipe portion 221 and the second pipe portion 222 can both be configured as circular pipes, the axis of the first pipe portion 221 is the same as the axis of the second pipe portion 222, so that the weight of the base shell 22 is evenly distributed, so that each part of the second pipe portion 222 bears approximately the same pressure, and this arrangement can also avoid stress concentration of the base shell 22 to enhance the stability of the base shell 22.

[0041] One end of the first pipe portion 221 away from the connecting portion 223 is connected to the upper shell 1, and the first pipe portion 221 can be connected to the upper shell 1 by welding, clamping or bolting, etc. The rear cover 23 is detachably connected to one end of the second pipe portion 222 away from the connecting portion 223, and the rear cover 23 and the second pipe portion 222 can be connected by clamping or bolting, etc., so that the rear cover 23 is detachable, which facilitates maintenance of the motor 20 located in the installation space 3, and also facilitates removal of the motor 20 from the installation space 3 for repair or replacement. This design is simple to disassemble and maintain, and can improve the use reliability of the pump shell assembly 10.

[0042] In addition, the inner diameter of the first pipe portion 221 is greater than the inner diameter of the second pipe portion 222, so as to increase the installation space 3, facilitate installation of components such as the motor 20 and the turbine, and leave a larger gap in the installation space 3 for gas flow, which can increase the vacuum pumping efficiency of the molecular pump 100.

[0043] As some embodiments of the present invention, the outer wall of the connecting portion 223 may have a rounded structure with a radius R=15 mm, and the rounded structure may be connected between the outer wall of the first tube portion 221 and the outer wall of the second tube portion 222. By setting the rounded structure, the natural frequency of the pump casing assembly 10 and the operating frequency of the pump casing assembly 10 can be avoided from overlapping, thereby reducing the risk of resonance and reducing the vibration and noise of the pump casing assembly 10 during operation.

[0044] In some embodiments of the present invention, Figure 1 As shown, the wall thickness of the first tube portion 221 is D1, which satisfies the relationship: 13 mm ≤ D1 ≤ 16 mm, and the wall thickness of the second tube portion 222 is D2, which satisfies the relationship: 18 mm ≤ D2 ≤ 22 mm.

[0045] Among them, the tube wall thickness D1 of the first tube portion 221 can satisfy the relationship: 13mm≤D1≤16mm, D1 can be 13mm, 14.5mm, 16mm, etc., and the tube wall thickness D2 of the second tube portion 222 satisfies the relationship: 18mm≤D2≤22mm, D2 can be 18mm, 20mm, 22mm, etc. As a specific embodiment of the present invention, the tube wall thickness D1 of the first tube portion 221 can be 14.5mm, and the tube wall thickness D2 of the second tube portion 222 can be 20mm. Compared with the design of the tube wall thickness less than or equal to 12mm in the related art, the embodiment of the present invention adjusts the natural frequency of the pump casing assembly 10 by increasing the tube wall thickness of the first tube portion 221 and the second tube portion 222 to avoid the natural frequency of the pump casing assembly 10 from coinciding with the operating frequency of the pump casing assembly 10, reducing the risk of resonance, and reducing the vibration and noise of the pump casing assembly 10 during operation.

[0046] Moreover, the wall thickness of the second tube portion 222 is greater than the wall thickness of the first tube portion 221. Furthermore, the difference between the wall thickness of the second tube portion 222 and the wall thickness of the first tube portion 221 is at least 5 mm, which can lower the center of gravity of the base shell 22 to enhance the stability of the pump shell assembly 10 and enhance the vibration reduction and noise reduction effect of the pump shell assembly 10.

[0047] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the back cover 23 is constructed as an arc-shaped plate, and the thickness of the middle portion of the back cover 23 is greater than the thickness of the edge of the back cover 23. The maximum thickness of the back cover 23 is D3, which satisfies the relationship: 20mm≤D3≤24mm.

[0048] The rear cover 23 can be configured as an arc-shaped plate structure, the upper surface of the rear cover 23 can be a plane or an approximately plane, and the lower surface of the rear cover 23 can be convex downward, so that the thickness of the middle part of the rear cover 23 is greater than the thickness of the edge of the rear cover 23, and the maximum thickness D3 of the rear cover 23 satisfies the relationship: 20mm≤D3≤24mm, and D3 can be 20mm, 22mm, 24mm or the like. Compared with the design in the prior art, the thickness is less than or equal to 5mm, the thickness of the rear cover 23 is increased in the embodiment of the utility model, so as to adjust the natural frequency of the pump shell assembly 10, to avoid the natural frequency of the pump shell assembly 10 coinciding with the working frequency of the pump shell assembly 10, reduce the resonance risk, and reduce the vibration and noise of the pump shell assembly 10 during working.

[0049] In some embodiments of the utility model, the upper shell 1 is a stainless steel material piece, and the lower shell 2 is an aluminum alloy material piece.

[0050] The upper shell 1 can be a stainless steel material piece, and the lower shell 2 can be an aluminum alloy material piece. The density of the stainless steel material is about three times the density of the aluminum alloy material, or the upper shell 1 can be a titanium alloy material piece, and the lower shell 2 can be an aluminum alloy material piece. The density of the titanium alloy material is about twice the density of the aluminum alloy material. Compared with the design in the prior art, the upper shell 1 and the lower shell 2 are both aluminum alloy material pieces, the material of at least part of the structure of the pump shell assembly 10 is changed in the embodiment of the utility model, so as to increase the mass of the pump shell assembly 10, improve the damping ratio of the pump shell assembly 10, make the pump shell assembly 10 absorb more vibration energy, reduce vibration propagation, and make the whole machine modal avoid the step vibration frequency, avoid resonance, and greatly improve the overall stability and safety of the pump shell assembly 10.

[0051] In some embodiments of the utility model, as shown in Figure 1 and Figure 2 The pump shell assembly 10 further comprises a support leg 4 and a damping pad 5, the support leg 4 is connected with the lower shell 2, and the damping pad 5 is connected with one end of the support leg 4 away from the lower shell 2.

[0052] The support leg 4 of the pump shell assembly 10 can be threadedly connected with the lower shell 2, the support leg 4 is used for supporting the weight of the pump shell assembly 10, and the support leg 4 can be multiple, the number of the support leg 4 can be four, six, eight or the like, the multiple support legs 4 can share the weight of the pump shell assembly 10, and the pump shell assembly 10 is more stable during working. The damping pad 5 of the pump shell assembly 10 is connected with one end of the support leg 4 away from the lower shell 2, the damping pad 5 abuts against the ground, the damping pad 5 can be made of rubber, plastic or other elastic materials with damping, and the damping pad 5 can be adhesively connected with the support leg 4 or connected through a fastener, and the fastener can be a rivet, a clamp, a bolt or the like.

[0053] The damping pad 5 can be made of an elastic material with damping, and can absorb vibration energy generated by the pump shell assembly 10 to reduce vibration and noise of the pump shell assembly 10. The damping pad 5 can also avoid the oscillation noise between the molecular pump 100 and the surrounding environment caused by the direct contact between the supporting legs 4 and the ground during the operation of the molecular pump 100.

[0054] Referring to Figure 1 and Figure 2 As shown in the figure, the molecular pump 100 according to the embodiment of the utility model comprises: a pump shell assembly 10, a motor 20 and a turbine, the pump shell assembly 10 is the pump shell assembly 10 described above, the motor 20 is installed in the installation space 3, and the turbine is installed in the installation space 3 and is in transmission connection with the motor 20.

[0055] The pump shell assembly 10 of the molecular pump 100 is the pump shell assembly 10 of the above embodiment, and the pump shell assembly 10 can define the installation space 3. The motor 20 and the turbine of the molecular pump 100 can be installed in the installation space 3, and the motor 20 and the turbine can be in transmission connection. The motor 20 can be in clamping connection or bolt connection with at least one of the upper shell 1 and the lower shell 2, and the turbine can be in clamping connection or bolt connection with at least one of the motor 20 and the upper shell 1. The turbine can be located above the motor 20, and the turbine can be arranged closer to the first medium interface 11 to improve the vacuum pumping efficiency of the molecular pump 100.

[0056] When the molecular pump 100 pumps the external device, the motor 20 can be started, and the motor 20 can drive the turbine to rotate. When the turbine rotates, the gas in the external device can be guided from the first medium interface 11 to the second medium interface 21. Specifically, the gas of the external device can enter the installation space 3 through the first medium interface 11 under the action of the turbine, and the gas in the installation space 3 can be discharged from the pump shell assembly 10 through the second medium interface 21 to achieve the effect of pumping the external device.

[0057] In the above embodiment, by designing the upper shell 1 and the lower shell 2 of the pump shell assembly 10 to have a material density of the upper shell 1 greater than that of the lower shell 2, the natural frequency of the pump shell assembly 10 can be adjusted to avoid the natural frequency of the pump shell assembly 10 coinciding with the working frequency of the pump shell assembly 10, reduce the risk of resonance, reduce the vibration and noise of the pump shell assembly 10 during operation, and maintain the performance stability of the pump shell assembly 10.

[0058] In some embodiments of the utility model, as Figure 2 and Figure 3As shown, the motor 20 comprises a motor shell 201, a motor shaft 202, a bearing 203 and a damping ring 204, the motor shell 201 is connected with the lower shell 2, the motor shell 201 defines a motor cavity 2011 in the interior, the motor shaft 202 is arranged in the motor shell 201 and is connected with the turbine in transmission, the motor shaft 202 is rotatably connected with the inner wall of the motor cavity 2011 through the bearing 203, and the damping ring 204 is clamped between the bearing 203 and the inner wall of the motor cavity 2011 in the radial direction of the bearing 203.

[0059] The motor 20 can be connected with the lower shell 2 by welding, clamping or the like, the motor cavity 2011 can be defined in the interior of the motor shell 201, the motor shaft 202 of the motor 20 can be arranged in the motor shell 201, the axis of the motor shaft 202 can be the same as the axis of the motor shell 201, the motor shaft 202 can be connected with the turbine in transmission, when the motor 20 is started, the motor 20 can drive the motor shaft 202 to rotate relative to the motor shell 201 around the axis of the motor shaft 202, the motor shaft 202 can drive the turbine to rotate, when the turbine rotates, the gas above the turbine can be guided to the lower side of the turbine, and then the gas of the external equipment can enter the installation space 3 through the first medium interface 11, and the gas in the installation space 3 can be discharged from the pump housing assembly 10 through the second medium interface 21, so as to achieve the effect of vacuumizing the external equipment.

[0060] The motor shaft 202 can be rotatably connected with the inner wall of the motor cavity 2011 through the bearing 203, the bearing 203 can be configured as a ceramic ball bearing to improve the wear resistance of the bearing 203, reduce friction loss and prolong the service life of the bearing 203. The bearing 203 can be one, two, three or the like, the damping ring 204 of the motor 20 can be configured as an "O" ring structure, the damping ring 204 can be sleeved outside the bearing 203 and clamped between the bearing 203 and the inner wall of the motor cavity 2011, the damping ring 204 can be multiple, at least one damping ring 204 is sleeved outside each bearing 203, the damping ring 204 has elasticity, and the damping ring 204 can be made of rubber, silicone, plastic, composite material or the like. When the motor shaft 202 rotates around its axis, the motor shaft 202 will vibrate, the damping ring 204 can deform to absorb the vibration energy of the motor shaft 202, to weaken the radial vibration of the motor shaft 202, to reduce the vibration energy transmitted to the motor shell 201 by the motor shaft 202, to reduce the vibration amplitude of the motor shell 201 and to reduce the noise.

[0061] As shown in the drawings, Figure 2 and Figure 3As shown in the figure, the motor 20 further comprises a stator 206 and a rotor 207, the rotor 207 is connected with the motor shaft 202, the stator 206 is fixedly connected to the upper motor shell 2012, the stator 206 can drive the rotor 207 to rotate around the axis of the motor shaft 202, the rotor 207 can drive the motor shaft 202 to rotate around the axis of the motor shaft 202, and then the turbine can be driven to rotate, when the turbine rotates, the gas in the external device can be guided from the first medium interface 11 to the second medium interface 21, specifically, the gas of the external device can enter the installation space 3 through the first medium interface 11 under the action of the turbine, and the gas in the installation space 3 can be discharged from the pump shell assembly 10 through the second medium interface 21, so as to realize the effect of vacuumizing the external device.

[0062] In some embodiments of the utility model, as shown in Figure 2 and Figure 3 As shown in the figure, the motor 20 further comprises an elastic buffering device 205, the elastic buffering device 205 is arranged in the motor cavity 2011, one side of the bearing 203 is limitedly matched with the motor shaft 202 in the axial direction of the motor shaft 202, and the other side of the bearing 203 is connected with the inner wall of the motor cavity 2011 through the elastic buffering device 205.

[0063] As a specific embodiment of the utility model, as shown in Figure 2 and Figure 3 As shown in the figure, the bearing 203 can be two, which are respectively a first bearing 203a and a second bearing 203b, the first bearing 203a is located above the second bearing 203b in the axial direction of the motor shaft 202, the motor shaft 202 is rotatably connected with the inner wall of the motor cavity 2011 through the first bearing 203a and the second bearing 203b, and the motor shaft 202 can have two shaft shoulders 2021 arranged at intervals along the axial direction of the motor shaft 202, the first bearing 203a and the second bearing 203b can be arranged at the corresponding shaft shoulders 2021 respectively, and the first bearing 203a and the second bearing 203b can all limit the movement of the motor shaft 202 along the axial direction of the motor shaft 202 and the radial direction of the motor shaft 202, so that the motor shaft 202 can relatively stably rotate around the axis thereof.

[0064] The elastic buffering device 205 of the motor 20 can be arranged in the motor cavity 2011. In the axial direction of the motor shaft 202, the upper side of the second bearing 203b is limited and matched with the shaft shoulder 2021 of the motor shaft 202, and the lower side of the second bearing 203b is connected with the inner wall of the motor cavity 2011 through the elastic buffering device 205. The elastic buffering device 205 can be deformed to have elasticity. The elastic buffering device 205 can be compressed between the second bearing 203b and the inner wall of the motor cavity 2011. The elastic buffering device 205 can have an upward thrust on the second bearing 203b. The second bearing 203b can have an upward thrust on the motor shaft 202 at the shaft shoulder 2021 of the motor shaft 202. The motor shaft 202 can be further limited to move in the axial direction of the motor shaft 202. The vibration of the motor shaft 202 during rotation around the axis of the motor shaft 202 is reduced. The motor shaft 202 can be relatively stably rotated around the axis of the motor shaft 202.

[0065] As some embodiments of the utility model, Figure 2 and Figure 3 As shown in the utility model, the motor shell 201 can include a motor upper shell 2012, a bearing support 2013, a bearing cover plate 2014 and a bearing pressing plate 2015. The motor shell 201 is fixedly connected to the lower shell 2 through the motor upper shell 2012. The motor upper shell 2012 and the lower shell 2 can be connected through a plurality of first fasteners 301. The first fasteners 301 can be bolts, screws, expansion screws, etc. The bearing support 2013 can be connected with the motor upper shell 2012 through a plurality of second fasteners 302. The second fasteners 302 can be bolts, screws, expansion screws, etc. The motor shaft 202 is rotatably connected with the bearing support 2013 through the second bearing 203b. The second bearing 203b and the bearing support 2013 have a certain gap for installing the damping ring 204. The bearing pressing plate 2015 can be connected with the bearing support 2013 through a plurality of third fasteners 303. The third fasteners 303 can be bolts, screws, expansion screws, etc. The bearing pressing plate 2015 abuts against the lower end of the elastic buffering device 205. The bearing pressing plate 2015 is used for supporting the elastic buffering device 205. The bearing cover plate 2014 is located above the first bearing 203a. The bearing cover plate 2014 can abut against the upper end of the first bearing 203a. The bearing cover plate 2014 can limit the movement of the first bearing 203a in the axial direction of the motor shaft 202. The bearing cover plate 2014 can be connected with the motor upper shell 2012 through a plurality of fourth fasteners 304. The fourth fasteners 304 can be bolts, screws, expansion screws, etc.

[0066] In some embodiments of the utility model, Figure 2 and Figure 3As shown, the elastic buffering device 205 comprises a sleeve 2051 and an elastic member 2052, in the axial direction of the motor shaft 202, one end of the sleeve 2051 abuts against the bearing 203, and the other end of the sleeve 2051 is connected to the inner wall of the motor cavity 2011 through the elastic member 2052.

[0067] In the axial direction of the motor shaft 202, the upper end of the sleeve 2051 of the elastic buffering device 205 abuts against the lower side of the second bearing 203b, and the lower end of the sleeve 2051 is connected to the inner wall of the motor cavity 2011 through the elastic member 2052 of the elastic buffering device 205. The elastic member 2052 can be configured as a thrust spring, a gas spring, etc. The elastic member 2052 has an elastic force, and can be compressed between the sleeve 2051 and the inner wall of the motor cavity 2011. The elastic member 2052 can have an upward thrust on the sleeve 2051, so that the sleeve 2051 has an upward thrust on the second bearing 203b, so that the second bearing 203b can have an upward thrust on the motor shaft 202 at the shaft shoulder 2021.

[0068] In the above embodiment, by arranging the sleeve 2051, the contact area of the elastic buffering device 205 and the second bearing 203b can be increased, so that the elastic buffering device 205 can more stably have an upward thrust on the second bearing 203b, and the direction of the thrust is not easy to change, so as to better limit the movement of the motor shaft 202 along the axial direction of the motor shaft 202, so that the motor shaft 202 can relatively stably rotate around its own axis.

[0069] By arranging the elastic buffering device 205 and the damping ring 204 in the motor 20, the rotor 207 and the pump shell assembly 10 can be in a soft connection state, the movement of the motor shaft 202 along the axial direction of the motor shaft 202 and the radial direction of the motor shaft 202 can be limited, the radial and axial vibrations of the motor shaft 202 can be adjusted accordingly, and the vibration of the rotor 207 during the operation of the molecular pump 100 can be greatly attenuated under the action of the elastic buffering device 205 and the damping ring 204, so as to reduce the vibration energy transmitted to the outside during the operation of the molecular pump 100, to ensure the stability of the operating environment of the rotor 207, to achieve the effect of low noise and low vibration during the high-speed operation of the molecular pump 100, to effectively protect the molecular pump 100, to reduce the influence of vibration on the use reliability of the molecular pump 100, and to reduce the influence of vibration on the service life of the molecular pump 100. In addition, the elastic member 2052 and the damping ring 204 have simple structure, reliable effect and low cost, can simplify the design, save the cost, and can improve the production capacity.

[0070] In the description of the present specification, the description referring to the terms "one embodiment", "some embodiments", "an example", "a specific example" or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and integrate different embodiments or examples described in the present specification.

[0071] Although the embodiments of the present application have been shown and described above, it is understood that the above-described embodiments are exemplary and are not to be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-described embodiments within the scope of the present application.

Claims

1. A pump housing assembly, characterized in that: The pump housing assembly comprises: An upper housing (1), the upper housing (1) having a first medium interface (11); A lower housing (2), the lower housing (2) having a second medium interface (21), the lower end of the upper housing (1) being connected to the lower housing (2) and jointly defining an installation space (3), the first medium interface (11) and the second medium interface (21) both being in communication with the installation space (3), the installation space (3) being suitable for installing a motor (20) and a turbine in a transmission connection; Wherein, the material density of the upper shell (1) is greater than the material density of the lower shell (2).

2. The pump housing assembly according to claim 1, characterized in that The lower housing (2) comprises: A base shell (22), the base shell (22) comprising: a first tube portion (221), a second tube portion (222) and a connecting portion (223); the inner diameter of the first tube portion (221) is larger than the inner diameter of the second tube portion (222); the first tube portion (221) is coaxially connected to the second tube portion (222) via the connecting portion (223); the tube wall of the first tube portion (221) is provided with the second medium interface (21); and one end of the first tube portion (221) away from the connecting portion (223) is connected to the upper shell (1); A rear cover (23) is detachably connected to an end of the second tube portion (222) away from the connecting portion (223).

3. The pump housing assembly according to claim 2, characterized in that The wall thickness of the first tube portion (221) is D1, which satisfies the relationship: 13mm≤D1≤16mm; the wall thickness of the second tube portion (222) is D2, which satisfies the relationship: 18mm≤D2≤22mm.

4. The pump housing assembly according to claim 3, characterized in that The rear cover (23) is constructed as an arc-shaped plate, and the thickness of the middle portion of the rear cover (23) is greater than the thickness of the edge of the rear cover (23). The maximum thickness of the rear cover (23) is D3, which satisfies the relationship: 20mm≤D3≤24mm.

5. The pump housing assembly according to claim 1, wherein: The upper shell (1) is made of stainless steel, and the lower shell (2) is made of aluminum alloy.

6. The pump housing assembly according to any one of claims 1 to 5, characterized in that: The pump casing assembly further comprises: a support leg (4) and a vibration damping pad (5), wherein the support leg (4) is connected to the lower casing (2), and the vibration damping pad (5) is connected to an end of the support leg (4) away from the lower casing (2).

7. A molecular pump, characterized in that: include: A pump casing assembly, wherein the pump casing assembly is the pump casing assembly according to any one of claims 1 to 6; a motor (20), the motor (20) being installed in the installation space (3); A turbine is installed in the installation space (3), and the turbine is transmission-connected to the motor (20).

8. The molecular pump according to claim 7, characterized in that The motor (20) comprises: A motor housing (201), the motor housing (201) being connected to the lower housing (2), and a motor cavity (2011) being defined within the motor housing (201); a motor shaft (202), the motor shaft (202) passing through the motor housing (201) and being transmission-connected to the turbine; a bearing (203), wherein the motor shaft (202) is rotatably connected to the inner wall of the motor cavity (2011) via the bearing (203); A vibration damping ring (204) is sandwiched between the bearing (203) and the inner wall of the motor cavity (2011) in the radial direction of the bearing (203).

9. The molecular pump according to claim 8, characterized in that The motor (20) further comprises an elastic buffer device (205), wherein the elastic buffer device (205) is arranged in the motor cavity (2011), and in the axial direction of the motor shaft (202), one side of the bearing (203) is limitedly matched with the motor shaft (202), and the other side of the bearing (203) is connected to the inner wall of the motor cavity (2011) through the elastic buffer device (205).

10. The molecular pump according to claim 9, characterized in that The elastic buffer device (205) comprises: a sleeve (2051) and an elastic member (2052); in the axial direction of the motor shaft (202), one end of the sleeve (2051) abuts against the bearing (203), and the other end of the sleeve (2051) is connected to the inner wall of the motor cavity (2011) via the elastic member (2052).

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