Thermal insulation structural member used in vacuum furnace body and vacuum furnace body
By setting a reinforcing layer and a dense layer on the outside of the insulation structure of the vacuum furnace, the problems of unstable pressure and gas leakage during the vacuuming process are solved, and the stability of the structure and the ability to prevent gas leakage are achieved.
Patent Information
- Application Number
- CN202422846528.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-11-21
AI Technical Summary
The insulation structure of existing vacuum furnaces is prone to problems such as unstable pressure and gas leakage during the vacuuming process.
A reinforcing layer and a dense layer are provided on the outside of the thermal insulation structure. The dense layer is used to seal the pores on the surface of the reinforcing layer to enhance structural stability and prevent gas leakage.
It improves the stability of the insulation structure, enabling it to withstand the pressure generated by vacuuming and effectively prevent gas leakage inside the vacuum furnace.
Smart Images
Figure CN223448933U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor and photovoltaic manufacturing, especially relates to a heat preservation structural member for vacuum furnace body and vacuum furnace body. BACKGROUND
[0002] Semiconductor and photovoltaic materials are widely used in electronic, new energy and other industries, and semiconductor and photovoltaic materials usually need to be processed in various ways before being applied to products, for example, sheet materials are sent into a vacuum furnace, and the required products are obtained by reacting under certain temperature and pressure process conditions. The existing heat preservation structural member in the vacuum furnace has the following two problems due to the limitation of its own structure. On the one hand, during the vacuumizing process of the vacuum furnace, the heat preservation structural member is prone to be unable to withstand the pressure generated by vacuumizing, resulting in poor stability. On the other hand, there is a problem of gas leakage inside the vacuum furnace. SUMMARY
[0003] The first object of the utility model is to provide a heat preservation structural member for use in a vacuum furnace body, which can withstand the pressure generated by vacuumizing and avoid the problem of gas leakage inside the vacuum furnace.
[0004] The second object of the utility model is to provide a vacuum furnace body, which can withstand the pressure generated by vacuumizing and avoid the problem of gas leakage inside the vacuum furnace.
[0005] To achieve this object, the utility model adopts the following technical solutions:
[0006] The utility model discloses a heat preservation structural member for use in a vacuum furnace body, comprising a structural body, the outer side of the structural body is covered with a reinforcing layer and a dense layer in turn, and the dense layer is used for sealing the pores on the surface of the reinforcing layer.
[0007] The heat preservation structural member for use in a vacuum furnace body has the following advantages: the reinforcing layer is arranged on the outer side of the structural body and plays a supporting role, which can withstand the pressure generated by vacuumizing during the process of the vacuum furnace body, thereby ensuring the stability of the heat preservation structural member during the process. The dense layer is arranged on the outer side of the reinforcing layer and is used for sealing the pores on the surface of the reinforcing layer, which can prevent the gas inside the vacuum furnace body from leaking through the heat preservation structural member during the process, and ensure that the heat preservation structural member has good air leakage prevention capability.
[0008] In some embodiments, the thickness of the reinforcing layer is 0.5mm-1.5mm.
[0009] In some embodiments, the dense layer comprises an inner dense layer and an outer dense layer, the inner dense layer is attached to the reinforcing layer and is used to seal the pores on the surface of the reinforcing layer, and the outer dense layer is attached to the surface of the inner dense layer away from the reinforcing layer and is used to seal the pores on the surface of the inner dense layer.
[0010] In some specific embodiments, the thickness of the inner dense layer is 0.5mm-1.5mm, and / or: the thickness of the outer dense layer is 0.5mm-1.5mm.
[0011] In some specific embodiments, the inner dense layer is a boron nitride layer, and the outer dense layer is a glaze layer.
[0012] In some embodiments, the reinforcing layer is a ceramic layer.
[0013] In some embodiments, the structural body is thermal insulation cotton or thermal insulation brick.
[0014] The utility model discloses still a kind of vacuum furnace body, including vacuum cavity, heating piece and the heat preservation structural member for vacuum furnace body in preceding text described, the vacuum cavity has chamber, the heating piece is set in the chamber;The heat preservation structural member for vacuum furnace body in the vacuum cavity is set between the inner side wall and the heating piece of the vacuum cavity.
[0015] The vacuum furnace body of the utility model has the heat preservation structural member for vacuum furnace body in preceding text described, which can withstand the pressure generated by vacuumizing and avoid the problem of gas leakage inside the vacuum furnace.
[0016] In some embodiments, the heat preservation structural member for vacuum furnace body is multiple, and the heat preservation structural member for vacuum furnace body is sequentially arranged along the circumference of the chamber.
[0017] In some embodiments, the side wall of the vacuum cavity is provided with at least one replacement opening, the replacement opening is communicated with the chamber, and the heat preservation structural member for vacuum furnace body can enter and exit the chamber through the replacement opening.
[0018] Additional aspects and advantages of the utility model will be partially given in the following description, some will become obvious from the following description, or be understood by the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 It is the structure schematic view of heat preservation structural member for vacuum furnace body of the embodiment of the utility model;
[0020] Figure 2 It is the local enlarged schematic view of heat preservation structural member for vacuum furnace body of the embodiment of the utility model;
[0021] Figure 3 Figure 1 is a schematic diagram of a vacuum furnace body according to an embodiment of the present application.
[0022] Reference signs:
[0023] 100, structure main body; 200, reinforcing layer; 300, dense layer; 310, inner dense layer; 320, outer dense layer; 400, vacuum cavity; 410, replacement opening. DETAILED DESCRIPTION
[0024] The present application will be further described below in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present application, and not to limit the present application. In addition, it should be noted that, in order to facilitate the description, only the parts related to the present application are shown in the drawings, rather than all the structures.
[0025] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0026] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "below" the second feature can include the direct contact of the first and second features, or it can include the contact of the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes the first feature directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes the first feature directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0027] In the description of the present embodiment, the terms "up", "down", "right", and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in the description, and have no special meaning.
[0028] As Figure 1 and Figure 2As shown, the utility model discloses a kind of heat preservation structural members for vacuum furnace body (for the convenience of description, heat preservation structural members are referred to as heat preservation structural members below), heat preservation structural members include structure main body 100, the outside of structure main body 100 is covered with reinforcing layer 200 and dense layer 300 in turn, and dense layer 300 is used to seal the aperture on the surface of reinforcing layer 200.It can be understood that, since the outside of structure main body 100 is provided with reinforcing layer 200, reinforcing layer 200 plays a supporting role, can withstand the pressure generated when vacuum furnace body is vacuumized during process, to ensure the stability of heat preservation structural members during process, since dense layer 300 is provided on the outside of reinforcing layer 200, and dense layer 300 is used to seal the aperture on the surface of reinforcing layer 200, it can avoid the gas inside vacuum furnace body to leak through heat preservation structural members during process of vacuum furnace body, ensure that heat preservation structural members have good air leakage prevention capacity.In some embodiments, the thickness of reinforcing layer 200 is 0.5mm-1.5mm.Specifically, the thickness of reinforcing layer 200 can be 0.5mm, 0.55mm, 0.6mm, 0.65mm, 0.7mm, 0.75mm, 0.8mm, 0.85mm, 0.9mm, 0.95mm, 1.0mm, 1.05mm, 1.1mm, 1.15mm, 1.2mm, 1.25mm, 1.3mm, 1.35mm, 1.4mm, 1.45mm, 1.5mm.Of course, the thickness of reinforcing layer 200 can also be other numerical values in the range of 0.5mm-1.5mm, and is not limited to the above examples.It can be understood that, if the thickness of reinforcing layer 200 is too thick, it is easy to fall off, and if it is too thin, it is easy to shrink during work, so that structure main body 100 is exposed, loses protection, so that heat preservation structural members fail.In this embodiment, the thickness of reinforcing layer 200 is controlled in the range of 0.5mm-1.5mm, which can ensure that reinforcing layer 200 and structure main body 100 are stably combined, reduce the falling probability of reinforcing layer 200, and control the heat deformation amount of reinforcing layer 200, avoid structure main body 100 to be exposed, and strengthen the protection effect of structure main body 100.Of course, in other embodiments of the utility model, the thickness of reinforcing layer 200 can also be selected according to actual needs.
[0029] It needs to be supplemented that, in the embodiments of the utility model, reinforcing layer 200 can be one layer, or multiple layers, when the number of reinforcing layer 200 is multiple layers, the materials of multiple reinforcing layers 200 can be same or different.
[0030] In some embodiments, dense layer 300 includes inner dense layer 310 and outer dense layer 320, inner dense layer 310 is attached to reinforcing layer 200, and is used to seal the aperture on the surface of reinforcing layer 200, and outer dense layer 320 is attached to the surface of inner dense layer 310 away from reinforcing layer 200, and is used to seal the aperture on the surface of inner dense layer 310.
[0031] In some specific embodiments, the thickness of the inner dense layer 310 is 0.5mm-1.5mm. Specifically, the thickness of the inner dense layer 310 can be 0.5mm, 0.55mm, 0.6mm, 0.65mm, 0.7mm, 0.75mm, 0.8mm, 0.85mm, 0.9mm, 0.95mm, 1.0mm, 1.05mm, 1.1mm, 1.15mm, 1.2mm, 1.25mm, 1.3mm, 1.35mm, 1.4mm, 1.45mm, 1.5mm. Of course, the thickness of the inner dense layer 310 can also be other values within the range of 0.5mm-1.5mm, and is not limited to the above examples. It can be understood that the thickness of the inner dense layer 310 is too thick and is easy to fall off, and too thin is easy to shrink under heat in the working process, so that the reinforcing layer 200 or even the structural body 100 is exposed and loses protection, thereby causing the thermal insulation structure to fail. In the present embodiment, the thickness of the inner dense layer 310 is controlled within the range of 0.5mm-1.5mm, which can not only ensure the stable combination of the inner dense layer 310 and the reinforcing layer 200, reduce the falling probability of the inner dense layer 310, but also control the heat deformation amount of the inner dense layer 310, avoid the exposure of the structural body 100, and strengthen the protection effect of the structural body 100. Of course, in other embodiments of the present application, the thickness of the inner dense layer 310 can also be selected according to actual needs.
[0032] In some specific embodiments, the thickness of the outer dense layer 320 is 0.5mm-1.5mm. Specifically, the thickness of the outer dense layer 320 can be 0.5mm, 0.55mm, 0.6mm, 0.65mm, 0.7mm, 0.75mm, 0.8mm, 0.85mm, 0.9mm, 0.95mm, 1.0mm, 1.05mm, 1.1mm, 1.15mm, 1.2mm, 1.25mm, 1.3mm, 1.35mm, 1.4mm, 1.45mm, 1.5mm. Of course, the thickness of the outer dense layer 320 can also be other values outside the range of 0.5mm-1.5mm, and is not limited to the above examples. It can be understood that the thickness of the outer dense layer 320 is too thick and is easy to fall off, and too thin is easy to shrink under heat in the working process, so that the reinforcing layer 200 or even the structural body 100 is exposed and loses protection, thereby causing the thermal insulation structure to fail. In the present embodiment, the thickness of the outer dense layer 320 is controlled within the range of 0.5mm-1.5mm, which can not only ensure the stable combination of the outer dense layer 320 and the inner dense layer 310, reduce the falling probability of the outer dense layer 320, but also control the heat deformation amount of the outer dense layer 320, avoid the exposure of the structural body 100, and strengthen the protection effect of the structural body 100. Of course, in other embodiments of the present application, the thickness of the outer dense layer 320 can also be selected according to actual needs.
[0033] In some specific embodiments, the inner dense layer 310 is a boron nitride layer, and the outer dense layer 320 is an enamel layer. It can be understood that the boron nitride layer and the enamel layer are both high-temperature-resistant layers, and the inner dense layer 310 is a boron nitride layer and the outer dense layer 320 is an enamel layer, which can not only ensure the sealing effect of the pores of the structural body 100 and ensure that the entire heat preservation structural member has good air leakage prevention performance, but also can keep the boron nitride layer and the enamel layer on the structural body 100 in a high-temperature working environment, which is beneficial to improving the structural stability of the heat preservation structural member and prolonging the service life of the heat preservation structural member. Of course, in other embodiments of the present application, the inner dense layer 310 and the outer dense layer 320 can be selected according to actual needs, and are not limited to the above limitations.
[0034] It should be noted that in the embodiments of the present application, the number of layers of the inner dense layer 310 and the outer dense layer 320 can be one layer or multiple layers. When the number of layers of the inner dense layer 310 is multiple layers, the materials of the multiple layers of the inner dense layer 310 can be the same or different. When the number of layers of the outer dense layer 320 is multiple layers, the materials of the multiple layers of the outer dense layer 320 can be the same or different. In actual design, the number and material of the inner dense layer 310 and the number and material of the outer dense layer 320 can be selected according to actual heat preservation needs and air leakage prevention needs.
[0035] In some embodiments, the reinforcing layer 200 is a ceramic layer. It can be understood that the ceramic layer has good density, hardness and high-temperature resistance, and the reinforcing layer 200 is a ceramic layer, which is beneficial to sealing the pores of the structural body 100, ensuring that the entire heat preservation structural member has good air leakage prevention performance, and improving the structural stability of the heat preservation structural member and prolonging the service life of the heat preservation structural member. Of course, in other embodiments of the present application, the reinforcing layer 200 can be selected according to actual needs, and is not limited to the above limitations.
[0036] In some embodiments, the structural body 100 is heat preservation cotton or heat preservation brick. It can be understood that the heat preservation cotton and the heat preservation brick have good heat preservation performance and low cost, and the structural body 100 is heat preservation cotton or heat preservation brick, which is beneficial to ensuring the heat preservation performance of the heat preservation structural member, thereby reducing the heating energy consumption of the vacuum furnace body, and reducing the manufacturing cost of the vacuum furnace body.
[0037] As shown in Figure 3 The utility model discloses a vacuum furnace body, including vacuum cavity 400, heating piece and the heat preservation structural member of preceding text, vacuum cavity 400 has the chamber, and heating piece sets up between the inner side wall of vacuum cavity 400 and heating piece. Since the heat preservation structural member is located in the vacuum cavity 400, the heat preservation performance can be improved.
[0038] In some embodiments, the plurality of heat preservation structural members are arranged along the circumference of the chamber. It can be understood that, when the plurality of heat preservation structural members are sequentially arranged inside the vacuum chamber 400, the assembly is facilitated, and the manufacturing efficiency of the heat preservation structure of the vacuum furnace body is improved.
[0039] In some alternative embodiments, the side wall of the vacuum chamber 400 is provided with at least one replacement opening 410, the replacement opening 410 is in communication with the chamber, and the heat preservation structural member can enter or exit the chamber through the replacement opening 410. It can be understood that, during the actual assembly or operation, the heat preservation structural member can be installed and replaced through the replacement opening 410, and the maintenance of the vacuum furnace body is facilitated.
[0040] In the description of the present specification, the description of the terms "some embodiments", "other embodiments", and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0041] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to enumerate all the implementation modes. Any modification, equivalent substitution and improvement within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.
Claims
1. A heat-insulating structural member for use in a vacuum furnace, characterized in that: The invention comprises a structural body, the outer side of which is sequentially covered with a reinforcement layer and a dense layer, and the dense layer is used for sealing the pores on the surface of the reinforcement layer.
2. The heat-insulating structural member for use in a vacuum furnace according to claim 1, characterized in that: The thickness of the reinforcement layer is 0.5 mm to 1.5 mm.
3. The heat-insulating structural member for use in a vacuum furnace according to claim 1, characterized in that: The dense layer includes an inner dense layer and an outer dense layer. The inner dense layer is adhered to the reinforcement layer and is used to seal the pores on the surface of the reinforcement layer. The outer dense layer is adhered to the surface of the inner dense layer away from the reinforcement layer and is used to seal the pores on the surface of the inner dense layer.
4. The heat-insulating structural member for use in a vacuum furnace according to claim 3, characterized in that: The thickness of the inner dense layer is 0.5 mm to 1.5 mm, and / or the thickness of the outer dense layer is 0.5 mm to 1.5 mm.
5. The heat-insulating structural member for use in a vacuum furnace according to claim 3, characterized in that: The inner dense layer is a boron nitride layer, and the outer dense layer is a glaze layer.
6. The heat-insulating structural member for use in a vacuum furnace according to any one of claims 1 to 5, characterized in that: The reinforcement layer is a ceramic layer.
7. The heat-insulating structural member for use in a vacuum furnace according to claim 1, characterized in that: The main structure is thermal insulation cotton or thermal insulation bricks.
8. A vacuum furnace body, characterized in that: It comprises a vacuum chamber, a heating element and a heat-insulating structural member for use in a vacuum furnace body as described in any one of claims 1 to 7, wherein the vacuum chamber has a chamber, and the heating element is arranged in the chamber; the heat-insulating structural member for use in a vacuum furnace body is arranged between the inner wall of the vacuum chamber and the heating element.
9. The vacuum furnace body according to claim 8, characterized in that: There are a plurality of heat-insulating structural members used in the vacuum furnace body, and the plurality of heat-insulating structural members used in the vacuum furnace body are arranged in sequence along the circumference of the chamber.
10. The vacuum furnace body according to claim 8, characterized in that: The side wall of the vacuum chamber is provided with at least one replacement port, which is communicated with the chamber. The heat-insulating structural member used in the vacuum furnace body can enter and exit the chamber through the replacement port.