Rotor structure of MEMS sensor test equipment

Abstract

The utility model provides a rotor structure of MEMS sensor testing equipment, which is characterized in that the rotor structure comprises a rotating mechanism and a rotor part, and the rotating mechanism is connected with the rotor part and can drive the rotor part to rotate; the rotor part is of a cross-shaped structure formed by two rotating arms, and at least one test position used for installing a sample is arranged at the tail end of the rotor part. According to the invention, the rotation of the cross-shaped rotor part is driven by the rotating mechanism, the requirement of providing enough height excitation and acceleration excitation for the to-be-tested chip in one structure can be met at the same time, and the structure is simple, convenient to test and easy to be combined with other parts to further expand the test function.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a rotor structure of a MEMS sensor testing device. Background Art

[0002] MEMS sensors are a new type of sensor manufactured using microelectromechanical systems (MEMS). Compared to traditional sensors, they are more integrated and intelligent. Their micron-scale feature sizes enable them to break through the functional boundaries of traditional mechanical sensors. Given the unique nature of MEMS technology and the digital communications used to transmit information on MEMS sensor chips, terminal testing of MEMS sensor chips is necessary to ensure the stability and accuracy of MEMS sensor performance and to ensure quality control of sensor chips.

[0003] Common MEMS sensor chips include altimeters, accelerometers, pressure gauges, and temperature and humidity sensors. Different sensor types require corresponding test equipment. This results in a wide variety of existing test equipment, most of which is complex, costly, and lacks versatility.

[0004] Therefore, it is necessary to provide a type of testing equipment and components thereof that are simple in structure and suitable for testing various types of sensors.

[0005] It should be noted that the above introduction to the technical background is merely intended to provide a clear and complete description of the technical solutions of this application and facilitate understanding by those skilled in the art. Simply because these solutions are described in the background technology section of this application, it should not be assumed that the above technical solutions are well known to those skilled in the art. Utility Model Content

[0006] In order to solve all or part of the problems of the above-mentioned prior art, the present invention provides a rotor structure of MEMS sensor testing equipment to realize the test and verification of various sensors such as altimeters and accelerometers. The structure is simple, the verification efficiency is high and the use cost is lower.

[0007] In order to achieve the above-mentioned object, the present invention provides a rotor structure of a MEMS sensor testing device, comprising a rotating mechanism and a rotor portion, wherein the rotating mechanism is connected to the rotor portion and can drive the rotor portion to rotate;

[0008] The rotor part is a cross-shaped structure composed of two spiral arms, and the end of the rotor part is provided with at least one test position for mounting a sample.

[0009] The application can provide sufficient height excitation and acceleration excitation for the chip to be tested by rotating the cross-shaped rotor part through the rotating mechanism, and the structure is simple, convenient to test and easy to combine with other components to further expand the test function.

[0010] In some embodiments, the rotor part includes a first rotating arm and a second rotating arm, which are perpendicular to each other and connected in the middle to form the cross-shaped structure. The rotor part is composed of two structurally identical rotating arms, which can more accurately provide height and acceleration, and also provide stability of the component.

[0011] In some embodiments, the end of the first rotating arm and / or the second rotating arm is formed with a test end, and the test site is arranged on the test end. Arranging the test site at the end of the rotating arm can provide the required height and acceleration excitation requirement in a smaller size.

[0012] In some embodiments, two test sites are arranged on the test end. By arranging two test sites, equivalent tests can be performed on the sample to be tested and the standard sample to verify the performance of the sample to be tested.

[0013] In some embodiments, the test site is a fixedly arranged aging test seat and / or a detachably mounted aging test seat. The fixedly arranged aging test seat has better reliability, while the detachably mounted aging test seat can be compatible with more sizes and types of sensor chips.

[0014] In some embodiments, the rotor part is a hollow structure, and the rotor part is provided with a connection line and / or an air path. Arranging the rotor part as a hollow structure can be used to accommodate the necessary connection line and / or air path, avoiding the restriction of the connection line and / or air path on the rotation of the rotor part.

[0015] In some embodiments, a level detection device is arranged on the test end. By arranging a level gauge on the test end, the initial state of one rotating arm can be ensured to be horizontal, which can improve the accuracy of the test.

[0016] In some embodiments, a connecting seat is formed at the connection between the first rotating arm and the second rotating arm, and the rotor part is connected to the rotating mechanism through the connecting seat.

[0017] In some embodiments, the test end is rotatably connected to the end of the first rotating arm and / or the second rotating arm. Through the rotatable connection, the test end and the rotating arm can be folded, providing another direction of movement during the test to realize the verification test of the attitude sensor.

[0018] In some embodiments, the rotor part is larger than the effective precision of the MEMS height sensor to be tested. In order to achieve the effective height excitation requirement, the rotor structure provides the sample to be tested with a height change exceeding the effective precision.

[0019] Compared with the prior art, the application can simultaneously achieve the requirements of providing sufficient height excitation and acceleration excitation for the chip to be tested in one structure by rotating the cross-shaped rotor part driven by the rotating mechanism, the structure is simple, the test is convenient, and the remaining components are combined to further expand the test function. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0021] Figure 1 The rotor structure schematic diagram provided for the embodiment.

[0022] Figure 2 The rotor end structure schematic diagram provided for the embodiment. DETAILED DESCRIPTION

[0023] The foregoing and other technical contents, features and effects of the present application will be clearly presented in the following detailed description of the preferred embodiments with reference to the drawings. The directions mentioned in the following embodiments, such as up, down, left, right, front or back, are only the directions of the drawings. Therefore, the directions used are used to illustrate and not to limit the present application.

[0024] Embodiment one:

[0025] As shown in Figure 1 The present application provides a rotor structure of a MEMS sensor test device, which comprises a rotating mechanism and a rotor part 1.

[0026] Referring to Figure 1 The main body of the rotor part 1 is a cross-shaped structure composed of two rotating arms, that is, it comprises a first rotating arm 10 and a second rotating arm 20. The first rotating arm 10 and the second rotating arm 20 are the same in structure, and the first rotating arm 10 and the second rotating arm 20 are perpendicular to each other and are connected in the center to form a cross-shaped structure. A test end 30 is formed at the end of the first rotating arm 10 and the second rotating arm 20, that is, there are four test ends 30 in total.

[0027] It can be understood that, in order to realize the rotating movement of the rotor part 1, the rotor part 1 needs to be connected to a rotating mechanism. In order to facilitate the connection, a connecting seat 40 is further formed at the connection between the first rotating arm 10 and the second rotating arm 20, and the connecting seat 40 can be conveniently connected to the rotating shaft of the rotating mechanism.

[0028] As shown in Figure 2 , the test end 30 is an area for placing the MEMS sensor chip and testing. In the embodiment, two test sites 31, i.e., an aging test seat A and an aging test seat B, are arranged in the test end 30, and two samples can be simultaneously installed and tested in the test end 30, for example, a standard sample is installed in the aging test seat A and a sample to be tested is installed in the aging test seat B. In other embodiments, at least one test site 31 is arranged on the test end 30, and it needs to be noted that the test site 31 arranged on the test end 30 can be a fixed aging test seat or a detachable aging test seat. Considering that the MEMS sensor chip to be tested can have differences in model and size, the aging test seat can be detachably installed, which is more convenient for replacing the test of the MEMS sensor chip of different models or sizes. Figure 2 As shown in Figure 2 , a connecting line 32 is arranged at the test site, and the internal circuit of the MEMS sensor chip can be connected out and communicated to an external processing mechanism to realize the analysis and processing of the output signal of the MEMS sensor chip. In order to better realize the arrangement of the connecting line 32 without interfering with the rotating movement of the rotor part 1, in the embodiment, the rotor part 1 is arranged as a hollow structure, i.e., a cavity is formed in the first rotating arm 10 and the second rotating arm 20, and the cavity can be used to accommodate the connecting line 32 and other structures to avoid interference with the rotation of the rotor part 1. A level detection device 33 is further arranged on the test end 30, which is used to determine that one of the first rotating arm 10 and the second rotating arm 20 is in a horizontal state, and the other is in a vertical state. In the embodiment, the level detection device is a level meter.

[0029] In the embodiment, four test ends 30 are arranged, and it can be understood that the four test ends 30 are in a symmetrical relationship, so that it is easy to realize that the structures of the four test ends 30 are the same. Of course, it is not limited that the structures of the four test ends 30 must be the same, and in other embodiments, the structures of different test ends can only include a part of them, for example, only a level meter can be arranged on a test end 30 without arranging a test site.

[0030] As mentioned above, the rotor part 1 is a hollow structure, and a gas path can also be arranged therein, through which different test environments can be changed; for example, when the rotor part 1 is arranged in a sealed cavity, the gas path can be used to realize the communication between the inside and outside of the cavity, or to provide different pressures.

[0031] In the embodiment, a test end 30 is formed at the end of each of the first and second rotary arms 10 and 20, and the test end 30 is fixedly connected to the rotary arm. In other embodiments, the rotary arm and the test end 30 at the end thereof can be rotatably connected, so that the test end 30 can be folded relative to the rotary arm.

[0032] The above provides a specific structure of the rotor of the MEMS sensor test device, and in use, the sample to be tested is installed at the test site, and the rotor part 1 is driven to rotate by the rotating mechanism to a sufficient angle, so that the height change of the sample to be tested is realized, and the excitation source requirement of the altimeter type MEMS sensor chip verification test is achieved. Similarly, by controlling the rotation speed change of the rotor part 1, different accelerations of the sample to be tested can be provided, and the excitation source requirement of the accelerometer type MEMS sensor chip verification test is achieved. Since the test end 30 can be folded relative to the rotary arm, the posture change of the sample to be tested can be provided during the rotation of the rotor part 1, and the excitation source requirement of the posture sensor chip verification test is achieved.

[0033] In the embodiment, the size of the rotor part 1 (i.e., the distance between the two ends of the rotary arm) is 1000 mm, that is, through the rotation of the rotor part 1, the excitation source requirement of the relative height accuracy of 500 mm can be realized, and the range of acceleration is also related to the rotation speed that can be provided by the rotating mechanism. The size design in the embodiment is determined by considering the balance between the test accuracy and the size of the test device. The larger the size of the rotor part 1 is, the larger the overall test device size is, the land area increases, and the controllability decreases. However, if the size is too small, it is difficult to meet the excitation source requirements of the height and acceleration. Considering that the effective accuracy of the existing altimeter is about 20-30 mm, the height change below the value is difficult to realize effective test verification, that is, the size of the rotor part 1 should provide the sample to be tested with a height change exceeding the effective accuracy of the altimeter.

[0034] Some commonly used English nouns or letters used for the convenience of clear description in the utility model are only used for exemplary reference and are not limited to the interpretation or specific use, and the protection scope of the utility model should not be limited by the possible Chinese translation or specific letters.

[0035] It should also be noted that, in the present document, relational terms such as "first" and "second", and the like, can be used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions.

Claims

1. A rotor structure of a MEMS sensor testing device, characterized in that: The rotary mechanism comprises a rotating mechanism and a rotor portion, wherein the rotating mechanism is connected to the rotor portion and can drive the rotor portion to rotate; The rotor part is a cross-shaped structure composed of two spiral arms, and the end of the rotor part is provided with at least one test position for mounting a sample.

2. The rotor structure of a MEMS sensor testing device according to claim 1, characterized in that: The rotor portion includes a first swing arm and a second swing arm, wherein the first swing arm and the second swing arm are perpendicular to each other and centrally connected to form a cross-shaped structure.

3. The rotor structure of the MEMS sensor testing equipment according to claim 2, characterized in that: A testing end is formed at the end of the first rotary arm and / or the second rotary arm, and the testing position is arranged on the testing end.

4. The rotor structure of the MEMS sensor testing equipment according to claim 3, characterized in that: Two test bits are provided on the test end.

5. The rotor structure of the MEMS sensor testing equipment according to claim 3, characterized in that: The test position is a fixed aging test seat and / or a detachably installed aging test seat.

6. The rotor structure of the MEMS sensor testing equipment according to claim 1, characterized in that: The rotor part is a hollow structure, and a connecting line and / or an air path is provided in the rotor part.

7. The rotor structure of the MEMS sensor testing equipment according to claim 3, characterized in that: The test end is provided with a level detection device.

8. The rotor structure of the MEMS sensor testing equipment according to claim 2, characterized in that: A connection seat is formed at a connection between the first swing arm and the second swing arm, and the rotor part is connected to the rotating mechanism through the connection seat.

9. The rotor structure of the MEMS sensor testing equipment according to claim 3, characterized in that: The testing end is rotatably connected to the end of the first rotary arm and / or the end of the second rotary arm.

10. The rotor structure of the MEMS sensor testing equipment according to claim 1, characterized in that: The size of the rotor portion is greater than the effective accuracy of the MEMS height sensor to be measured.

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