Wafer conversion Casset jig

Abstract

The utility model discloses a wafer conversion Casset jig, which is applied to the technical field of semiconductor manufacturing equipment and comprises a working table, a cross rod support is welded at the top of the working table, movable sliding blocks are sleeved on two sides of the top of the cross rod support in a sliding manner, and fixed rods are welded at the bottoms of the movable sliding blocks. The wafer is transferred by using the insertion arm, so that compared with manual wafer taking, direct contact between a human body and the wafer is avoided, and the possibility of impurity pollution or adverse phenomena such as wafer cracking and scratching is reduced. Therefore, the quality of the wafer is effectively improved, and the yield of semiconductor products can be improved. And moreover, the time for converting the wafer between different Cassets is also shortened, and the production efficiency is improved. Meanwhile, only part of wafers can be transferred, the insertion arms can selectively rotate by 180 degrees, only the insertion arms needing to transfer part of the wafers are reserved, other insertion arms rotate to the rear by 180 degrees, and the flexibility and applicability of the jig are further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field, especially relates to a wafer conversion cassette fixture. BACKGROUND

[0002] In the production and processing of semiconductor wafers, Cassette is a commonly used wafer storage container, usually a Cassette has 13 compartments, and each wafer is placed in each compartment.

[0003] At present, the Chinese utility model with the publication number CN218182180U discloses a wafer conversion fixture. At present, when wafers in one Cassette are transferred to another Cassette, the manual taking method is mainly adopted. This manual transfer method has the following problems:

[0004] Quality risks: manual operation is easy to introduce impurities, such as dust, hair and other impurities carried by human body, which may contaminate the wafer surface and affect the quality of the wafer, or the personnel may collide when taking the wafer, which may cause cracking or scratching risk, thereby adversely affecting the subsequent semiconductor manufacturing process and reducing the yield of the product.

[0005] Low efficiency: the manual taking and placing of wafers is slow, especially in large-scale production process, this inefficient transfer method will become a bottleneck of the production process, increasing the production time and cost. UTILITY MODEL CONTENTS

[0006] The utility model aims to provide a wafer conversion Cassette fixture, which has the advantages of safely and efficiently transferring wafers from one Cassette to another Cassette, reducing quality risks, and flexibly selecting to transfer all or part of the wafers, thereby improving the production efficiency.

[0007] The above technical purpose of the utility model is realized by the following technical scheme: a wafer conversion Cassette fixture, comprising a workbench, a horizontal rod support is welded on the top of the workbench, a moving sliding block is slidably connected to the top of the horizontal rod support on both sides, a fixed rod is welded on the bottom of the moving sliding block, a rotating sleeve is rotatably connected to the surface of the fixed rod, an insertion arm is welded on one side of the surface of the rotating sleeve, and a locking bolt is threadedly connected to the fixed rod and clamped on the other side of the surface of the rotating sleeve away from the insertion arm.

[0008] By using the above technical scheme, compared with manually taking the wafer, the direct contact between the human body and the wafer is avoided, and the possibility of impurity pollution or causing a broken piece, scratch and other adverse effects is reduced, so that the quality of the wafer is effectively improved, and the yield of the semiconductor product is improved.

[0009] The utility model further provides: the both sides of work table top all are equipped with wafer Cassette, the inside of wafer Cassette is placed with wafer body.

[0010] By using the above technical scheme, the wafer can be moved from the wafer Cassette containing the wafer to the empty wafer Cassette inside by the inserting arm.

[0011] The utility model further provides: the both sides of wafer Cassette bottom are all connected with the positioning block welded with work table.

[0012] By using the above technical scheme, the wafer Cassette containing the wafer and the empty target wafer Cassette are placed on the work table respectively, so that the positioning block can ensure the accurate position of the two wafer Cassettes, and the inserting arm is one-to-one corresponding to the grid of the wafer Cassette.

[0013] The utility model further provides: the number of rotating sleeve and inserting arm is all thirteen, the surface of thirteen rotating sleeve all is connected with locking bolt and is penetrated with screw thread.

[0014] By using the above technical scheme, the thirteen inserting arms are corresponding to each grid of the wafer Cassette, and are used for contacting and pushing the wafer. Such design can accurately adapt to the size of the wafer and the distance between the grids of the Cassette, so that the wafer is not damaged in the pushing process.

[0015] In summary, the utility model has the following beneficial effects:

[0016] 1、 the utility model discloses by using the inserting arm wafer to transfer, compared with manually taking the wafer, the direct contact between the human body and the wafer is avoided, and the possibility of impurity pollution or causing a broken piece, scratch and other adverse effects is reduced, so that the quality of the wafer is effectively improved, and the yield of the semiconductor product is improved, simultaneously also shorten the wafer between different Cassette conversion time, improve production efficiency;

[0017] 2、The utility model discloses can select only to transfer partial wafer, and the arm can selectivity 180 degree rotation, only retains the arm of partial wafer that needs to transfer, and other arms 180 degree rotation to the back, further improve the flexibility and applicability of the fixture. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the structure schematic diagram of the utility model.

[0019] The drawings are as follows: 1, workbench, 2, crossbar support, 3, moving slider, 4, fixed rod, 5, rotating sleeve, 6, arm, 7, locking bolt, 8, wafer cassette, 9, wafer body, 10, positioning block. DETAILED DESCRIPTION

[0020] The utility model will be further explained in detail in connection with the drawings.

[0021] Example 1:

[0022] Reference Figure 1 A wafer conversion cassette fixture, including workbench 1, the top of workbench 1 is welded with crossbar support 2, and the top of crossbar support 2 is slidably sleeved with moving slider 3 on both sides, and the bottom of moving slider 3 is welded with fixed rod 4, and the surface of fixed rod 4 is rotatably connected with rotating sleeve 5, and the surface of rotating sleeve 5 is welded with arm 6 on one side, and the side, away from arm 6, of the surface of rotating sleeve 5 is penetrated with locking bolt 7 that is connected with fixed rod 4. By using arm 6 wafer to transfer, compared with manually taking wafer, avoid direct contact between human body and wafer, reduce the possibility of impurity pollution or cause crack, scratch and other adverse effects. Thus effectively improve the quality of wafer, help to improve the yield of semiconductor products. And also shorten the time of wafer conversion between different cassette, improve the production efficiency. Meanwhile can select only to transfer partial wafer, and the arm can selectivity 180 degree rotation, only retains the arm of partial wafer that needs to transfer, and other arms 180 degree rotation to the back, further improve the flexibility and applicability of the fixture.

[0023] Reference Figure 1 The top of workbench 1 is installed with wafer cassette 8 on both sides, and wafer body 9 is placed in the inside of wafer cassette 8. Wafer can be moved from the wafer cassette 8 that is installed with wafer to the inside of empty wafer cassette 8 by arm 6.

[0024] Reference Figure 1The positioning block 10 welded with the workbench 1 is clamped on both sides of the bottom of the wafer cassette 8.

[0025] Reference Figure 1 The number of the rotating sleeve 5 and the inserting arm 6 is thirteen, and the surface of the thirteen rotating sleeves 5 is penetrated by the locking bolt 7 connected by threads.

[0026] The use process is briefly described as follows: when the wafer transfer is needed, the wafer cassette 8 loaded with wafers and the target wafer cassette 8 are placed on the workbench 1 respectively, so that the inserting arm 6 can be aligned with the corresponding grid of the wafer cassette 8 respectively.

[0027] When only part of the wafers need to be transferred, the corresponding inserting arm 6 is selected, the remaining inserting arms 6 are rotated by 180 degrees to the back, and the locking bolt 7 is screwed to threadedly engage with the rotating sleeve 5, so that the inserting arm 6 is locked, then the moving slider 3 drives the inserting arm 6 to transfer the required wafers to the wafer cassette 8.

[0028] Through the above specific embodiment, the wafer conversion cassette jig can efficiently and accurately complete the conversion of the wafers between different cassettes, and meet the diversified needs in the semiconductor manufacturing process.

[0029] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and the person skilled in the art can make a modification without creative contribution according to the needs after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. A wafer conversion cassette fixture, comprising a workbench (1), characterized in that: A crossbar bracket (2) is welded to the top of the workbench (1), and movable sliders (3) are slidably sleeved on both sides of the top of the crossbar bracket (2). A fixed rod (4) is welded to the bottom of the movable slider (3), and a rotating sleeve (5) is rotatably connected to the surface of the fixed rod (4). An insert arm (6) is welded to one side of the surface of the rotating sleeve (5), and a locking bolt (7) is threadedly connected to the side of the surface of the rotating sleeve (5) away from the insert arm (6) and is clamped to the fixed rod (4).

2. The wafer conversion cassette fixture according to claim 1, characterized in that: Wafer cassettes (8) are installed on both sides of the top of the workbench (1), and a wafer body (9) is placed inside the wafer cassette (8).

3. The wafer conversion cassette fixture according to claim 2, characterized in that: Both sides of the bottom of the wafer cassette (8) are clamped with positioning blocks (10) welded to the workbench (1).

4. The wafer conversion cassette fixture according to claim 1, characterized in that: The number of the rotating sleeves (5) and the insert arms (6) is thirteen, and the surfaces of the thirteen rotating sleeves (5) are all threadedly connected with locking bolts (7).

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