Silicon wafer basket slewing mechanism

Abstract

The utility model discloses a silicon wafer basket slewing mechanism which comprises a mechanical arm, a connecting base is fixedly installed at the bottom end of the mechanical arm, a slewing disc is rotationally connected to the bottom of the connecting base, and a servo motor used for driving the slewing disc to rotate is fixedly installed in the connecting base. Vertical guide rails are fixedly connected to the two sides of the rotary disc, an adjusting piece is installed on the rotary disc, and movable connecting pieces are installed on the vertical guide rails. The servo motor drives the connecting base to achieve adjustment in the horizontal direction, the adjusting piece is matched to drive the side chuck to clamp, the side driving motor is used for driving the turn-over angle of the flower basket, and therefore the device can adjust the horizontal angle and the turn-over angle of the flower basket more flexibly and accurately, the stroke of the swing arm is reduced, and the work efficiency is improved. And the operation precision and efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer flower baskets, in particular to a silicon wafer flower basket rotating mechanism. Background Art

[0002] Wafer baskets are specialized containers used to hold silicon wafers during manufacturing, processing, and transportation. They play a crucial role throughout the entire silicon wafer supply chain, from wafer production (such as cutting, grinding, and polishing) to subsequent processing steps (such as photolithography, etching, and coating), as well as during transfers between different production facilities.

[0003] In the chip manufacturing process, silicon wafers need to be circulated and transported, that is, they are carried by baskets and circulated on the production line. The rotating mechanism can rotate the baskets carrying the silicon wafers and adjust their angle and direction to achieve transfer and transportation on different lines.

[0004] The silicon wafer basket rotating mechanism in the existing technology is generally connected to an industrial robot during operation to achieve grasping, transfer and angle adjustment. However, the above-mentioned angle and direction adjustment operations require the swing arm of the industrial robot to rotate, which makes the entire operation stroke larger and the travel time longer, and it is difficult to meet high-precision requirements. Utility Model Content

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide a silicon wafer basket rotation mechanism to solve the background technology problems.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A silicon wafer flower basket rotation mechanism includes a robotic arm, a connecting seat fixedly installed at the bottom end of the robotic arm, a turntable rotatably connected to the bottom of the connecting seat, a servo motor for driving the turntable to rotate fixedly installed inside the connecting seat, vertical guide rails fixedly connected to both sides of the turntable, an adjusting piece installed on the turntable, a movable connecting piece installed on the vertical guide rail, a side drive motor installed on the movable connecting piece, a side chuck fixedly connected to the output end of the side drive motor, and the adjusting piece connected and cooperated with the side drive motor.

[0008] As a further description of the above technical solution: the adjusting part includes a horizontal double-headed cylinder and two vertical cylinders, the outer side of the horizontal double-headed cylinder is fixedly connected to the inside of the turntable, the two ends of the horizontal double-headed cylinder are respectively fixedly connected to the two vertical cylinders, and the bottom ends of the two vertical cylinders are respectively fixedly connected to the bottoms of the two side drive motors.

[0009] As a further description of the above technical solution: the movable connecting piece comprises a connecting disc, a clamping block and a sliding block, one side of the connecting disc is fixedly connected with the side driving motor, one side of the clamping block is inserted into the inside of the connecting disc, the other side of the clamping block is fixedly connected with the sliding block, and the outside of the sliding block is slidingly connected to the vertical guide rail.

[0010] As a further description of the above technical solution: a square groove that matches the clamping block is formed on the connecting disc.

[0011] As a further description of the above technical solution: the side chuck is fixedly connected with a protruding block on the side away from the side driving motor.

[0012] As a further description of the above technical solution: the side chuck is fixedly connected with a ring-shaped rubber pad on the side away from the side driving motor, and the protruding block is located at the center of the ring-shaped rubber pad.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] The horizontal direction adjustment is realized by the servo motor driving the connecting seat, the side chuck is clamped by the adjusting part, the flower basket overturning angle is driven by the side driving motor, the device has the advantages of realizing more flexible and accurate horizontal angle and overturning angle adjustment of the flower basket, reducing the swing arm stroke, and improving the working precision and efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a front view of the sectional structure of the utility model;

[0016] Figure 2 It is a front view of the sectional structure of the utility model; Figure 1 It is an enlarged schematic view of the structure of the middle A part;

[0017] Figure 3 It is a bottom view of the utility model;

[0018] Figure 4 It is a partial three-dimensional structure schematic view of the utility model.

[0019] Explanation of reference numerals in the drawing:

[0020] 1, mechanical arm; 2, rotary disc; 3, servo motor; 4, vertical guide rail; 5, adjusting part; 51, horizontal double-head air cylinder; 52, vertical air cylinder; 6, movable connecting piece; 61, connecting disc; 611, square groove; 62, clamping block; 63, sliding block; 7, side driving motor; 8, side chuck; 81, protruding block; 82, ring-shaped rubber pad; 9, connecting seat. DETAILED DESCRIPTION

[0021] The technical scheme in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model.

[0022] Please refer to Figures 1 to 4 In the utility model, a kind of silicon wafer basket rotary mechanism, including mechanical arm 1, the bottom end of mechanical arm 1 is fixedly installed with connecting seat 9, connecting seat 9 bottom is rotatably connected with rotary disc 2, the inside of connecting seat 9 is fixedly installed with servo motor 3 for driving rotary disc 2 rotation, the both sides of rotary disc 2 are all fixedly connected with vertical guide rail 4, adjusting piece 5 is installed on rotary disc 2, movable connecting piece 6 is installed on vertical guide rail 4, side drive motor 7 is installed on movable connecting piece 6, the output end of side drive motor 7 is fixedly connected with side chuck 8, adjusting piece 5 is connected with side drive motor 7.

[0023] In the utility model, by mechanical arm 1 as device operation main body, first start mechanical arm 1 operation connecting seat 9 moves to the above of the basket of bearing silicon wafer, then vertically drop so that the side chuck 8 of two sides is respectively aligned with the two side clamping positions of basket, then start adjusting piece 5 drive two sides side drive motor 7 relative movement so that side chuck 8 is clamped with basket contact, then mechanical arm 1 drive connecting seat 9 rotary movement to the position required, and when needing to adjust the horizontal direction of basket simultaneously, start servo motor 3 drive connecting seat 9 rotation angle, to drive basket adjusting angle, and can start adjusting piece 5 drive basket vertical movement simultaneously, and start side drive motor 7 operation drive basket to horizontal axis rotation and realize overturning adjustment, to realize device with more flexible and accurate horizontal angle and overturning angle adjustment of basket, reduce swing arm stroke, improve the advantages of operation precision and efficiency, solve the problem that the angle and direction operation in the prior art need swing arm of industrial robot to rotate and realize, make the whole operation stroke larger, stroke time is long, and high precision demand is difficult to meet.

[0024] Please refer to Figure 1 Among them: adjusting piece 5 includes horizontal double head cylinder 51 and two vertical cylinders 52, the outside of horizontal double head cylinder 51 is fixedly connected to the inside of rotary disc 2, the both ends of horizontal double head cylinder 51 are respectively fixedly connected with two vertical cylinders 52, the bottom end of two vertical cylinders 52 is respectively fixedly connected with the bottom of two side drive motors 7.

[0025] In the utility model, by starting horizontal double head cylinder 51 drive two vertical cylinders 52 horizontal movement, realize adjusting side chuck 8 movement realizes the clamping and release of basket, operation flexible.

[0026] Please refer to Figure 2The movable connecting piece 6 comprises a connecting disc 61, a clamping block 62 and a sliding block 63, one side of the connecting disc 61 is fixedly connected with the side driving motor 7, one side of the clamping block 62 is inserted into the inside of the connecting disc 61, the other side of the clamping block 62 is fixedly connected with the sliding block 63, and the outside of the sliding block 63 is slidingly connected to the vertical guide rail 4.

[0027] In the utility model, the side driving motor 7 is horizontally connected through the connecting disc 61, and the side driving motor 7 is supported by the sliding block 63 cooperating with the clamping block 62, and the horizontal and vertical movement of the side driving motor 7 will not interfere.

[0028] Please refer to Figure 2 and Figure 4 The connecting disc 61 is provided with a square groove 611 matched with the clamping block 62.

[0029] In the utility model, the square groove 611 cooperates with the clamping block 62, so that the connecting disc 61 will not move with the side driving motor 7 when the side driving motor 7 operates.

[0030] Please refer to Figure 3 and Figure 4 The side chuck 8 is fixedly connected with a protruding block 81 on the side away from the side driving motor 7.

[0031] In the utility model, the protruding block 81 makes the side chuck 8 more accurately butt against the side of the flower basket.

[0032] Please refer to Figure 1 The side chuck 8 is fixedly connected with a ring-shaped rubber pad 82 on the side away from the side driving motor 7, and the protruding block 81 is located at the center of the ring-shaped rubber pad 82.

[0033] In the utility model, the ring-shaped rubber pad 82 makes the side chuck 8 and the flower basket buffer each other, and reduces the vibration of the flower basket during rotary movement.

[0034] The above is only the preferred specific embodiment of the utility model; however, the protection scope of the utility model is not limited to this. Any skilled person in the art can make equivalent replacement or change according to the technical scheme and improvement concept of the utility model within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A silicon wafer basket rotation mechanism, comprising a robotic arm (1), characterized in that: A connecting seat (9) is fixedly installed at the bottom end of the robotic arm (1), and a turntable (2) is rotatably connected to the bottom of the connecting seat (9). A servo motor (3) for driving the turntable (2) to rotate is fixedly installed inside the connecting seat (9), and vertical guide rails (4) are fixedly connected to both sides of the turntable (2). An adjusting member (5) is installed on the turntable (2), and a movable connecting member (6) is installed on the vertical guide rail (4). A side drive motor (7) is installed on the movable connecting member (6), and an output end of the side drive motor (7) is fixedly connected to a side chuck (8). The adjusting member (5) is connected and matched with the side drive motor (7).

2. The silicon wafer basket rotating mechanism according to claim 1, characterized in that: The adjusting member (5) comprises a horizontal double-headed cylinder (51) and two vertical cylinders (52), the outer side of the horizontal double-headed cylinder (51) is fixedly connected to the inside of the turntable (2), the two ends of the horizontal double-headed cylinder (51) are respectively fixedly connected to the two vertical cylinders (52), and the bottom ends of the two vertical cylinders (52) are respectively fixedly connected to the bottoms of the two side drive motors (7).

3. The silicon wafer basket rotating mechanism according to claim 1, characterized in that: The movable connecting member (6) includes a connecting disk (61), a clamping block (62) and a sliding block (63), one side of the connecting disk (61) is fixedly connected to the side drive motor (7), one side of the clamping block (62) is inserted into the interior of the connecting disk (61), the other side of the clamping block (62) is fixedly connected to the sliding block (63), and the outer side of the sliding block (63) is slidably connected to the vertical guide rail (4).

4. The silicon wafer basket rotating mechanism according to claim 3, characterized in that: The connecting disk (61) is provided with a square groove (611) that fits with the clamping block (62).

5. The silicon wafer basket rotating mechanism according to claim 1, characterized in that: A protrusion (81) is fixedly connected to the side of the side chuck (8) away from the side drive motor (7).

6. The silicon wafer basket rotating mechanism according to claim 5, characterized in that: An annular rubber pad (82) is fixedly connected to the side of the side chuck (8) away from the side drive motor (7), and the protrusion (81) is located at the center of the annular rubber pad (82).

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