Dust filter arranged in semiconductor waste gas treatment equipment

Abstract

The utility model relates to the technical field of waste gas treatment, in particular to a dust filter arranged in semiconductor waste gas treatment equipment, which comprises a filter cartridge, a first motor is fixedly arranged at the bottom of the filter cartridge, turbine fan blades are arranged on the inner bottom wall of the filter cartridge, and the output end of the first motor is fixedly connected with the turbine fan blades. An air inlet pipeline is fixedly connected to the lower side of the side wall of the filter cartridge, a plurality of adsorption modules are arranged on the side wall of the filter cartridge, and each adsorption module comprises a filter box, an exhaust pipeline, a second motor, a first bevel gear, a barrier plate, a second bevel gear, a filter screen and a sealing plate; the filter screens in the filter boxes adsorb dust, the air inlet ends of one group of filter boxes are blocked through the barrier plate, then the sealing plate is opened to take out the filter screens in the filter boxes for cleaning, at the moment, other filter boxes can operate normally, the multiple groups of filter screens are cleaned in the same way, the filter screens are conveniently cleaned, and meanwhile, the dust removal efficiency is improved. The waste gas treatment is not influenced, and the waste gas treatment efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment technical field, concretely relates to a dust filter installed in semiconductor waste gas treatment equipment. BACKGROUND

[0002] In semiconductor process, harmful waste gas such as monosilane, chlorine, perfluorinated compound etc. is generated, in order to avoid the pollution and public hazard caused by the waste gas to the environment, the harmful substances in the waste gas must be purified and removed, which can be discharged to the outside atmosphere.

[0003] Among the announcement number CN208678690U discloses a dust filter installed in semiconductor waste gas treatment equipment, including filter shell, the inside movable mounting of filter shell has the cavity, the left side outer surface of cavity is connected with the air inlet pipe, the outer surface fixed mounting of air inlet pipe has first gas pump, one side of cavity is provided with dust collection groove, the inside fixed mounting of dust collection groove has electrostatic adsorption plate. The dust filter installed in semiconductor waste gas treatment equipment filters the dust in waste gas well, collects the dust, prevents the dust from causing pollution to the inside and outside of equipment and harm to human body, can concentrate cleaning the dust in the dust collection groove, and the dust filter is convenient to maintain and overhaul, and simple and convenient to disassemble and assemble.

[0004] In actual use, when filtering and separating the dust, the waste gas needs to be enclosed in the cavity for separation, which cannot be treated in time, resulting in low waste gas treatment efficiency, and when cleaning the dust, the waste gas generated by the equipment cannot be discharged in time, which can cause the pressure in the equipment to increase and easily cause safety accidents.

[0005] Therefore, it is necessary to provide a dust filter installed in semiconductor waste gas treatment equipment to solve the above problems. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a dust filter installed in semiconductor waste gas treatment equipment to solve the problem that the waste gas needs to be enclosed in the cavity for separation, which cannot be treated in time, resulting in low waste gas treatment efficiency, and when cleaning the dust, the waste gas generated by the equipment cannot be discharged in time, which can cause the pressure in the equipment to increase and easily cause safety accidents.

[0007] In order to achieve the above object, the utility model provides the following technical scheme: A dust filter installed in semiconductor waste gas treatment equipment, including filter cartridge, first motor is fixedly installed to the bottom of filter cartridge, the inner bottom wall of filter cartridge is provided with turbine fan blade, the output of first motor is fixedly connected with turbine fan blade, the downside of filter cartridge lateral wall is fixedly connected with air inlet pipeline, the lateral wall of filter cartridge is provided with a plurality of adsorption module, and adsorption module includes filter box, exhaust pipeline, second motor, first bevel gear, baffle, second bevel gear, filter screen and sealing plate.

[0008] Through adopting the above technical scheme, the turbine fan blade drives the airflow to rotate in the inside of the filter cartridge, and the dust and airflow are thrown into the inside of the filter box under the action of centrifugal force, the filter screen in the inside of the filter box adsorbs the dust, the airflow is discharged to the inside of the exhaust pipeline through the filter screen, the air inlet end of one group of filter boxes is blocked through the baffle, then the sealing plate is opened to take out the filter screen inside to clean, at this time, other filter boxes can normally operate, so as to reciprocally clean the filter screen of multiple groups, which is convenient for cleaning the filter screen, does not affect the treatment of waste gas, and improves the waste gas treatment efficiency.

[0009] Optionally, the filter box is fixedly connected with the lateral wall of the filter cartridge, a flow guide groove is formed at the connection between the lateral wall of the filter cartridge and the filter box, one end of the filter box away from the filter cartridge is fixedly connected with the exhaust pipeline, and a one-way valve is installed at the end of the filter box close to the exhaust pipeline.

[0010] Through adopting the above technical scheme, the airflow in the inside of the filter cartridge enters the inside of the filter box through the flow guide groove.

[0011] Optionally, an equipment shell is fixedly connected to the upper surface of the filter box, the second motor is fixedly installed in the inside of the filter box, and the first bevel gear is fixedly connected with the output end of the second motor.

[0012] Optionally, a rotating shaft is fixedly connected to the side surface of the baffle, the rotating shaft is rotatably connected with the inner top wall of the filter box, the upper end of the rotating shaft penetrates through the inner top wall of the filter box and is fixedly connected with the second bevel gear, and the second bevel gear is meshingly connected with the first bevel gear.

[0013] Through adopting the above technical scheme, the second motor drives the baffle to rotate under the cooperation of the first bevel gear and the second bevel gear, so that the air inlet end of the filter box is opened or blocked.

[0014] Optionally, a clamping strip is fixedly connected to the inner top wall and the inner bottom wall of the filter box, a clamping groove is formed in the side surface of the clamping strip, a clamping plate is fixedly connected to the left end of the filter screen, and the clamping plate is inserted into the clamping groove.

[0015] By adopting the technical scheme, the clamping plate is clamped in the clamping groove to fix the filter screen, and the stability of the filter screen is improved.

[0016] Optionally, the sealing plate is rotationally connected to the front surface of the filter box, two groups of connecting plates are fixedly connected to the upper end of the sealing plate, and a connecting groove is formed in the upper end of the connecting plate.

[0017] Optionally, two groups of positioning blocks are fixedly connected to the upper surface of the filter box, a connecting lead screw is rotationally connected to the inner side of the positioning block, the front end of the connecting lead screw is clamped in the connecting groove, and a fixing nut is threadedly connected to the front end of the connecting lead screw.

[0018] By adopting the technical scheme, the connecting lead screw is rotated forward and clamped in the connecting groove, and then the fixing nut is used to lock and fix the sealing plate.

[0019] Optionally, a support frame is fixedly connected to the lower surface of the filter cylinder, and an exhaust pipeline is fixedly connected to the upper end of the filter cylinder.

[0020] By adopting the technical scheme, the exhaust pipeline is used to collect and uniformly discharge the exhaust gas in the exhaust pipeline.

[0021] In the above technical scheme, the technical effects and advantages of the utility model are provided.

[0022] 1. The utility model discloses a filter box is arranged in the filter cylinder, and the filter screen in the filter box is used to adsorb dust, and the airflow is discharged to the inside of the exhaust pipeline through the filter screen, the air inlet of one filter box is blocked through the blocking plate, then the filter screen in the inside is taken out and cleaned by opening the sealing plate, at this moment, other filter boxes can normally operate, and the filter screen is cleaned, and the treatment of waste gas is not affected, and the treatment efficiency of waste gas is improved.

[0023] 2. The utility model discloses that the air inlet pipeline is arranged to be inclined, and the entering waste gas can rotate closely to the lateral wall of the filter cylinder, and under the cooperation of the first motor and turbine fan blade, the rotation speed of waste gas in the filter cylinder is accelerated, the centrifugal force of dust in waste gas and the flow speed of waste gas are improved, so that waste gas can pass through the filter box more quickly, and the treatment efficiency of dust in waste gas is improved. DRAWINGS

[0024] Figure 1 It is the whole structure schematic diagram of the utility model;

[0025] Figure 2 It is the filter cylinder structure schematic diagram of the utility model;

[0026] Figure 3 It is the filter box external structure schematic view of the utility model;

[0027] Figure 4 It is the filter box internal structure schematic view of the utility model;

[0028] Figure 5 It is the structure schematic view of the utility model Figure 3 in A place.

[0029] Mark explanation:

[0030] 1, filter drum;11, support frame;12, air inlet pipeline;13, first motor;14, turbine blade;15, flow guide groove;2, filter box;21, exhaust pipeline;22, discharge pipeline;23, equipment shell;24, second motor;25, first bevel gear;26, blocking plate;27, second bevel gear;28, clamping strip;29, clamping groove;3, filter screen;31, clamping plate;4, sealing plate;41, connecting plate;42, connecting groove;43, positioning block;44, connecting screw;45, fixed nut;5, check valve. Specific implementation

[0031] In order to make those skilled in the art better understand the technical scheme of the utility model, the utility model will be introduced further in detail below in conjunction with the drawings.

[0032] The utility model provides a kind of dust filter as Figures 1 to 4 Shown in semiconductor waste gas treatment equipment, including filter drum 1, the bottom of filter drum 1 is fixedly installed with first motor 13, the inner bottom wall of filter drum 1 is provided with turbine blade 14, the output end of first motor 13 is fixedly connected with turbine blade 14, the lower side of filter drum 1 side wall is fixedly connected with air inlet pipeline 12, the lower surface of filter drum 1 is fixedly connected with support frame 11, the upper end of filter drum 1 is fixedly connected with discharge pipeline 22, the side wall of filter drum 1 is provided with multiple adsorption modules, and the adsorption module includes filter box 2, exhaust pipeline 21, second motor 24, first bevel gear 25, blocking plate 26, second bevel gear 27, filter screen 3 and sealing plate 4, filter box 2 is fixedly connected with the side wall of filter drum 1, the side wall of filter drum 1 is connected with filter box 2 and is provided with flow guide groove 15, one end of filter box 2 away from filter drum 1 is fixedly connected with exhaust pipeline 21, one end close to exhaust pipeline 21 of filter box 2 is installed with check valve 5, and the upper end of exhaust pipeline 21 is fixedly connected with discharge pipeline 22.

[0033] The air inlet pipeline 12 is arranged in an inclined manner, so that the entering exhaust gas closely rotates along the side wall of the filter cylinder 1, and the output end of the first motor 13 drives the turbine fan blade 14 to rotate, the turbine fan blade 14 stirs the internal exhaust gas, improves the rotating speed of the exhaust gas in the filter cylinder 1, accelerates the speed of the exhaust gas entering the filter box 2, and the filter screen 3 in the filter box 2 adsorbs and processes the dust in the exhaust gas, and the exhaust gas passes through the filter screen 3 and enters the inside of the exhaust pipeline 21, and then the exhaust gas in the inside of the plurality of exhaust pipelines 21 is collected in the inside of the exhaust pipeline 22 and is discharged outward, and the inside of the exhaust pipeline 22 is provided with a fan for further improving the exhaust speed.

[0034] In addition, when the device processes a large amount of air, a plurality of filter cylinders 1 can be used in parallel to further improve the exhaust gas treatment speed, and the inside of the filter screen 3 is provided with an infrared detection module, which will alarm when detecting that the dust storage amount in the inside of the filter screen 3 is high, at this time, the second motor 24 drives the blocking plate 26 to rotate to block the air inlet end of the filter box 2, at this time, the sealing plate 4 is opened, and the filter screen 3 is taken out for cleaning, and the filter cylinder 1 can normally operate during the cleaning process, and other filter boxes 2 are used to treat the exhaust gas, and the exhaust gas can be treated without interruption, effectively improving the exhaust gas treatment efficiency.

[0035] Referring to Figures 3 to 5 The upper surface of the filter box 2 is fixedly connected with a device shell 23, the second motor 24 is fixedly installed in the inside of the filter box 2, the first bevel gear 25 is fixedly connected with the output end of the second motor 24, the side surface of the blocking plate 26 is fixedly connected with a rotating shaft, the rotating shaft is rotatably connected with the inner top wall of the filter box 2, the upper end of the rotating shaft penetrates through the inner top wall of the filter box 2 and is fixedly connected with the second bevel gear 27, the second bevel gear 27 is meshingly connected with the first bevel gear 25, the inner top wall and the inner bottom wall of the filter box 2 are fixedly connected with clamping strips 28, the side surface of the clamping strip 28 is provided with a clamping groove 29, the left end of the filter screen 3 is fixedly connected with a clamping plate 31, the clamping plate 31 is inserted into the clamping groove 29, the sealing plate 4 is rotatably connected with the front side surface of the filter box 2, the upper end of the sealing plate 4 is fixedly connected with two connecting plates 41, the upper end of the connecting plate 41 is provided with a connecting groove 42, the upper surface of the filter box 2 is fixedly connected with two positioning blocks 43, the inner side of the positioning block 43 is rotatably connected with a connecting lead screw 44, the front end of the connecting lead screw 44 is clamped in the inside of the connecting groove 42, and the front end of the connecting lead screw 44 is threadedly connected with a fixed nut 45.

[0036] Specifically, in the process of cleaning the filter screen 3, the output end of the second motor 24 drives the first bevel gear 25 to rotate, the first bevel gear 25 drives the second bevel gear 27 to rotate, the second bevel gear 27 drives the blocking plate 26 to rotate through the rotating shaft, and the blocking plate 26 is used to block the air inlet end of the filter box 2. At this time, the fixed nut 45 is turned forward, then the connecting screw rod 44 is turned upward, thereby unlocking the sealing plate 4, the sealing plate 4 is turned forward, then the internal filter screen 3 is taken down, a new filter screen 3 is replaced, the clamping plate 31 is inserted into the clamping groove 29 on the front side, and it is pushed to the rear side, so that the filter screen 3 can be installed. Next, the second motor 24 is reversely rotated to drive the blocking plate 26 to reversely rotate, the air inlet end of the filter box 2 is opened, and the exhaust gas can be treated.

[0037] The working principle of the utility model is: the first motor 13 drives the turbine fan blade 14 to rotate, drives the internal exhaust gas to rotate at high speed, sends the exhaust gas into the inside of a plurality of filter boxes 2, the filter screen 3 in the filter box 2 adsorbs dust, the airflow passes through the filter screen 3 and is discharged to the inside of the exhaust pipe 21, the air inlet end of one of the filter boxes 2 is blocked by the blocking plate 26, then the sealing plate 4 is opened to take out the internal filter screen 3 for cleaning, at this time, the other filter boxes 2 can normally operate, and the plurality of filter screens 3 are cleaned in the same way. The filter screen 3 is cleaned, the treatment of the exhaust gas is not affected, and the treatment efficiency of the exhaust gas is improved.

[0038] The basic principle, main features and advantages of the utility model are shown and described above. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only preferred examples of the utility model and do not limit the utility model. Without departing from the spirit and scope of the utility model, the utility model can have various changes and improvements, and these changes and improvements all fall within the scope of the utility model.

Claims

1. A dust filter installed in a semiconductor exhaust gas treatment apparatus, comprising a filter cartridge (1), characterized by: The bottom of the filter cartridge (1) is fixedly provided with a first motor (13), the inner bottom wall of the filter cartridge (1) is provided with a turbine blade (14), the output end of the first motor (13) is fixedly connected with the turbine blade (14), the lower side of the side wall of the filter cartridge (1) is fixedly connected with an air inlet pipeline (12), and the side wall of the filter cartridge (1) is provided with a plurality of adsorption modules.

2. A dust filter to be installed in a semiconductor exhaust gas treatment apparatus according to claim 1, characterized by: The filter cartridge (1) is fixedly connected with the filter cartridge (1), and the side wall of the filter cartridge (1) is provided with a guide groove (15) at the connection position of the filter cartridge (1) and the filter cartridge (2). The end of the filter cartridge (2) away from the filter cartridge (1) is fixedly connected with the exhaust pipeline (21), and the end of the filter cartridge (2) close to the exhaust pipeline (21) is provided with a one-way valve (5).

3. The dust filter to be installed in a semiconductor exhaust gas treatment apparatus according to claim 1, characterized by: The upper surface of the filter cartridge (2) is fixedly connected with an equipment shell (23), the second motor (24) is fixedly installed in the filter cartridge (2), and the first bevel gear (25) is fixedly connected with the output end of the second motor (24).

4. A dust filter to be installed in a semiconductor exhaust gas treatment apparatus according to claim 3, characterized in that: The side surface of the blocking plate (26) is fixedly connected with a rotating shaft, the rotating shaft is rotatably connected with the inner top wall of the filter cartridge (2), the upper end of the rotating shaft penetrates through the inner top wall of the filter cartridge (2) and is fixedly connected with the second bevel gear (27), and the second bevel gear (27) is meshedly connected with the first bevel gear (25).

5. The dust filter according to claim 1, wherein: The inner top wall and the inner bottom wall of the filter cartridge (2) are fixedly connected with clamping strips (28), the side surface of the clamping strip (28) is provided with a clamping groove (29), the left end of the filter screen (3) is fixedly connected with a clamping plate (31), and the clamping plate (31) is inserted into the clamping groove (29).

6. The dust filter according to claim 1, wherein: The front side surface of the filter cartridge (2) is rotatably connected with the sealing plate (4), the upper end of the sealing plate (4) is fixedly connected with two groups of connecting plates (41), and the upper end of the connecting plate (41) is provided with a connecting groove (42).

7. A dust filter to be installed in a semiconductor exhaust gas treatment apparatus according to claim 6, characterized in that: The upper surface of the filter cartridge (2) is fixedly connected with two groups of positioning blocks (43), the inner side of the positioning block (43) is rotatably connected with a connecting lead screw (44), the front end of the connecting lead screw (44) is clamped in the connecting groove (42), and the front end of the connecting lead screw (44) is threadedly connected with a fixed nut (45).

8. The dust filter according to claim 1, wherein: The lower surface of the filter cartridge (1) is fixedly connected with a support frame (11), the upper end of the filter cartridge (1) is fixedly connected with a discharge pipeline (22), and the upper end of the exhaust pipeline (21) is fixedly connected with the discharge pipeline (22).

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