Vacuum cavity heating device

Abstract

The utility model discloses a vacuum cavity heating device. Comprising a lower template, a vacuum bin, a heating plate, a heating mechanism and a wiring sealing mechanism, the heating mechanism comprises a heating rod, a heating rod pipeline, a thermocouple and a thermocouple pipeline, the heating rod pipeline and the thermocouple pipeline are arranged in the vacuum bin in a penetrating mode, the heating rod and the thermocouple are arranged in the heating rod pipeline and the thermocouple pipeline in a plug-and-play mode, and the heating rod and the thermocouple extend into the heating plate. The wiring end of the heating rod pipeline and the wiring end of the thermocouple pipeline are located outside the vacuum bin, the wiring sealing mechanism comprises a heating rod wiring sealing piece and a thermocouple wiring sealing piece, and the heating rod wiring sealing piece and the thermocouple wiring sealing piece are arranged at the wiring end of the heating rod pipeline and the wiring end of the thermocouple pipeline respectively. And the heating rod wiring sealing element and the thermocouple wiring sealing element are detachable structures. The sealing device is convenient and fast to disassemble and assemble, good in sealing effect and long in service life.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor packaging process, especially relates to a vacuum cavity heating device. BACKGROUND

[0002] In the semiconductor packaging process, a vacuum welding device is needed to heat and weld the product, and the product is placed on the heating plate of the vacuum cavity of the vacuum welding device for heating. The vacuum cavity needs to be sealed, and the traditional wiring sealing method usually adopts ceramic partition post welding or wiring hole glue sealing.

[0003] The ceramic partition post welding sealing method needs to thread and arrange the wire when replacing the heating rod, and then weld the wiring post, so the replacement process is relatively cumbersome. The wiring hole glue sealing method is prone to aging in a long-term high-temperature environment, which causes poor sealing effect. The aged sealing glue needs to be cleaned and then resealed, which takes a long time to clean and seal the glue, and the glue is often difficult to clean completely. Designing a wiring sealing method with convenient and fast replacement and good sealing effect is a problem to be solved.

[0004] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present utility model and should not be regarded as an acknowledgment or any form of suggestion that it forms prior art of this utility model. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a vacuum cavity heating device to overcome the defects in the prior art.

[0006] To achieve the above-mentioned purpose, the utility model provides a vacuum cavity heating device, which comprises a lower mold plate, a vacuum bin, a heating plate, a heating mechanism and a wiring sealing mechanism. The vacuum bins are symmetrically arranged in the lower mold plate, each vacuum bin is provided with a corresponding heating plate, and each heating plate is connected with the corresponding heating mechanism. The heating mechanism comprises a heating rod, a heating rod pipeline, a thermocouple and a thermocouple pipeline. The heating rod pipeline and the thermocouple pipeline are respectively arranged in the vacuum bin. The heating rod and the thermocouple are arranged in the heating rod pipeline and the thermocouple pipeline in a plug-and-play mode. The heating rod and the thermocouple extend to the inside of the heating plate. The wiring ends of the heating rod pipeline and the thermocouple pipeline are located outside the vacuum bin. The wiring sealing mechanism comprises a heating rod wiring sealing piece and a thermocouple wiring sealing piece. The heating rod wiring sealing piece and the thermocouple wiring sealing piece are arranged at the wiring ends of the heating rod pipeline and the thermocouple pipeline, respectively. The heating rod wiring sealing piece and the thermocouple wiring sealing piece are detachable structures, which facilitate the quick disassembly and assembly of the heating rod and the thermocouple.

[0007] Preferably, in the technical scheme, the heating rod wiring sealing piece comprises a flange joint, a sealing ring and a flange buckle, the flange joint is arranged at a wiring end of a heating rod pipeline, the flange joint is sleeved at an end of the heating rod, the sealing ring is arranged between the flange joint and an outer surface of the heating rod, the flange buckle is arranged outside the flange joint, and the flange joint and the sealing ring are fixed at the end of the heating rod through the flange buckle, so that the wiring end of the heating rod pipeline is sealed.

[0008] Preferably, in the technical scheme, the thermocouple wiring sealing piece is a sealing nut, the sealing nut is arranged at a wiring end of a thermocouple pipeline, and the sealing nut is sleeved at an end of the thermocouple, so that the thermocouple is fixed in the thermocouple pipeline through the sealing nut, and the wiring end of the thermocouple pipeline is sealed.

[0009] Preferably, in the technical scheme, the thermocouple is located at the center of the width direction of the heating plate, and the heating rods are symmetrically arranged on both sides of the thermocouple.

[0010] Compared with the prior art, the utility model has the advantages of the following beneficial effects:

[0011] The detachable wiring sealing mechanism replaces the original ceramic partition column welding sealing mode, the heating rods and the thermocouples are arranged in the corresponding pipelines in a plug-and-play mode, and the detachable wiring sealing mechanism does not need to be filled with glue for sealing at the wiring end, so that the aging problem is avoided, the sealing effect is good, and the service life is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a front view of the vacuum cavity heating device of the utility model;

[0013] Figure 2 It is a left view of the vacuum cavity heating device of the utility model;

[0014] Figure 3 It is a top view of the vacuum cavity heating device of the utility model;

[0015] Figure 4 It is a perspective view of the vacuum cavity heating device of the utility model;

[0016] Figure 5 It is an enlarged view of A part of the utility model; Figure 4

[0017] Figure 6 It is an assembly schematic view of the vacuum cavity heating device of the utility model. DETAILED DESCRIPTION

[0018] The specific embodiments of the utility model are described in detail below, but it should be understood that the protection scope of the utility model is not limited by the specific embodiments.​

[0019] Unless expressly stated otherwise, throughout the specification and claims, the term "comprise" or variations such as "include" or "comprising", etc., will be understood to include the stated elements or components but not to exclude other elements or other components.

[0020] like Figures 1-5 As shown, a vacuum cavity heating device includes a lower template 1, a vacuum chamber 2, a heating plate 3, a heating mechanism, and a wiring sealing mechanism; the vacuum chamber 2 is symmetrically arranged in the lower template 1, and a corresponding heating plate 3 is arranged in each vacuum chamber 2, and each heating plate 3 is connected to the corresponding heating mechanism; the heating mechanism includes a heating rod 4, a heating rod pipeline 5, a thermocouple 6, and a thermocouple pipeline 7, the heating rod pipeline 5 and the thermocouple pipeline 7 are respectively inserted into the vacuum chamber 2, the thermocouple 6 is located at the center in the width direction of the heating plate 3, the heating rod 4 is symmetrically arranged on both sides of the thermocouple 6, the heating rod 4 and the thermocouple 6 are respectively arranged in the heating rod pipeline 5 and the thermocouple pipeline 7 in a plug-and-play manner, and the heating rod 4 and the thermocouple 6 extend to the interior of the heating plate 3;

[0021] The wiring terminals of the heating rod pipeline 5 and the thermocouple pipeline 7 are located outside the vacuum chamber 2. The wiring sealing mechanism includes a heating rod wiring seal and a thermocouple wiring seal. The heating rod wiring seal includes a flange joint 8, a sealing ring 9, and a flange clip 10. The flange joint 8 is arranged at the wiring terminal of the heating rod pipeline 5, and the flange joint 8 is sleeved on the end of the heating rod 4. A sealing ring 9 is arranged between the flange joint 8 and the outer surface of the heating rod 4. A flange clip 10 is arranged on the outside of the flange joint 8. The flange joint 8 and the sealing ring 9 are fixed to the end of the heating rod 4 by the flange clip 10 to achieve the sealing of the wiring terminal of the heating rod pipeline 5; the thermocouple wiring seal is a sealing nut 11, which is arranged at the wiring terminal of the thermocouple pipeline 7 and sleeved on the end of the thermocouple 6. The thermocouple 6 is fixed in the thermocouple pipeline 7 by the sealing nut 11 to seal the wiring terminal of the thermocouple pipeline 7.

[0022] like Figure 6As shown, the product is placed on the heating plate 3, the upper die plate 12 is pressed down, the upper die plate 12 is combined with the lower die plate 1, the vacuum chamber 2 forms a closed cavity, the vacuumizing device on the upper die plate 12 performs vacuumizing on the vacuum chamber 2, after the vacuumizing is completed, the heating rod 4 and the thermocouple 6 heat the heating plate 3 to the set temperature, the product is heated and welded in the vacuum chamber 2, after the vacuum heating and welding are completed, the upper die plate 12 is reset through the vacuum breaking, and the product completed the vacuum welding is taken out from the heating plate 3. When it is necessary to replace and maintain the heating rod 4 and the thermocouple 6, only the flange buckle 10 is loosened, the flange joint 8 and the sealing ring 9 are taken out, the heating rod 4 can be taken out from the heating rod pipeline 5, only the sealing nut 11 is loosened, the thermocouple 6 can be taken out from the thermocouple pipeline 7, and the dismounting is convenient and fast.

[0023] The foregoing description of specific exemplary embodiments of the present application is intended to be illustrative only and is not intended to limit the present application to the precise forms described. Many modifications and variations are possible in light of the above teachings without departing from the spirit or essential characteristics of the present application. The exemplary embodiments are chosen and described in order to explain the principles of the present application and its practical application and to allow others skilled in the art to understand the present application for various exemplary embodiments with various modifications as are suited to the particular use contemplated. The scope of the present application is intended to be defined by the claims and their equivalents.

Claims

1. A vacuum chamber heating apparatus, characterized by: The utility model relates to a vacuum heat pressing machine, including lower mould plate, vacuum chamber, heating plate, heating mechanism, wiring sealing mechanism, symmetry is provided with vacuum chamber in lower mould plate, is provided with corresponding heating plate in each vacuum chamber, and each heating plate is connected with corresponding heating mechanism, heating mechanism includes heating rod, heating rod pipeline, thermocouple, thermocouple pipeline, and heating rod pipeline, thermocouple pipeline are respectively arranged in vacuum chamber, and heating rod, thermocouple are respectively set in heating rod pipeline, thermocouple pipeline with plug and play mode, and heating rod, thermocouple extend to the inside of heating plate, and the wiring end of heating rod pipeline, thermocouple pipeline is located outside vacuum chamber, and the wiring sealing mechanism includes heating rod wiring sealing piece, thermocouple wiring sealing piece, and heating rod wiring sealing piece, thermocouple wiring sealing piece are set respectively in the wiring end of heating rod pipeline, thermocouple pipeline, and heating rod wiring sealing piece, thermocouple wiring sealing piece are detachable structure.

2. The vacuum chamber heating apparatus of claim 1, wherein: The heating rod wiring sealing piece includes a flange joint, a sealing ring, and a flange buckle. The flange joint is arranged at the wiring end of the heating rod pipeline, is sleeved on the end of the heating rod, and a sealing ring is arranged between the flange joint and the outer surface of the heating rod. A flange buckle is arranged outside the flange joint to fix the flange joint and the sealing ring on the end of the heating rod.

3. The vacuum chamber heating apparatus of claim 1, wherein: The thermocouple wiring sealing piece is a sealing nut. The sealing nut is arranged at the wiring end of the thermocouple pipeline, is sleeved on the end of the thermocouple, and fixes the thermocouple in the thermocouple pipeline through the sealing nut.

4. The vacuum chamber heating apparatus of claim 1, wherein: The thermocouple is located at the center of the width direction of the heating plate, and the heating rods are symmetrically arranged on both sides of the thermocouple.

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