Inclined swing type quick-flushing and quick-discharging flushing tank
By introducing a swing base and drive assembly into the wafer cleaning device, the wafer swings up and down during the cleaning process, solving the dead angle problem of fixed wafer tilt angle, realizing comprehensive cleaning of both sides of the wafer, and improving the cleaning effect.
Patent Information
- Application Number
- CN202422465797.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-12
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2034-10-12
AI Technical Summary
Existing wafer cleaning equipment has dead zones due to the fixed tilt angle of the wafers during the cleaning process, which prevents thorough cleaning.
A tilting, swinging, fast-rinse and fast-drain rinsing tank was designed. By setting a swinging base and a drive component inside the tank, the wafer swings up and down during the cleaning process, changing the tilt angle. Combined with a spray component and a drainage system, the front and back sides of the wafer can be effectively rinsed.
By swinging the base up and down, dead corners are avoided, improving the cleaning effect of the chip and ensuring that both sides of the chip can be effectively rinsed, thus enhancing the cleaning effect.
Smart Images

Figure CN223465193U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer cleaning technical field especially is related to a kind of fast flush fast discharge washing tank of tilting swing. BACKGROUND
[0002] The existing wafer cleaning device, rotating base is generally rotated and arranged in the washing tank, then the wafer is fixed on the rotating base by the plug, so that the wafer is rotated to clean, the rotating base is inclined in the above process, so that the wafer is also inclined at a certain angle when the plug is placed on the base, which is convenient for washing the surface of the wafer, but the wafer is fixed at an angle, and the angle cannot be changed during cleaning, so that dead angle is formed, and the wafer is not cleaned.
[0003] Therefore, a kind of fast flush fast discharge washing tank of tilting swing is needed. UTILITY MODEL CONTENT
[0004] Therefore, the utility model provides a kind of fast flush fast discharge washing tank of tilting swing to solve the problems in the above background art, and specifically discloses the following contents:
[0005] A kind of fast flush fast discharge washing tank of tilting swing, including tank body and swing base, the tank body top both sides are equipped with spray assembly, the swing base is located in the tank body interior, the swing base top is fixed with plug, the plug is used to place wafer, one end of the tank body interior is equipped with driven assembly, the other end is equipped with driving assembly, one end of the swing base is connected with the driven assembly, the other end is matched with the driving assembly, and the driving assembly is used to drive the swing base to swing up and down.
[0006] Further, the spray assembly includes spray pipes fixedly arranged on both sides of the top of the tank body, the water inlet end of the spray pipe is connected to an external water source, and the water outlet end is provided with a plurality of spray nozzles, the spray nozzles are directed towards the plug.
[0007] Further, the driven assembly includes a support plate hinged to the bottom wall of the tank body, and the support plate is hinged to one end of the swing base away from the driving assembly.
[0008] Further, the driving assembly includes a drive motor and a transmission shaft rotatably arranged in the tank body, the drive motor is located outside the tank body, one end of the transmission shaft penetrates through the side wall of the tank body and is fixedly connected to the drive end of the drive motor, the transmission shaft is located below the swing base, an eccentric wheel is fixedly sleeved on the transmission shaft, the eccentric wheel is matched with one end of the swing base away from the driven assembly, and is used to drive the swing base to swing up and down.
[0009] Further, the groove body bottom is provided with a drain port, the drain port is connected with a drain cylinder through a water pipe, and the drain port is provided with a drain valve.
[0010] The utility model discloses beneficial effect lies in:
[0011] In the utility model, the swing base can swing up and down during the cleaning process, the inclination angle of the wafer is changed, dead angles are avoided, the front and back surfaces of the wafer can be effectively flushed, and the wafer cleaning effect is improved. BRIEF DESCRIPTION OF DRAWINGS
[0012] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only the embodiment of the utility model, and for the ordinary skilled in the art, other drawings can be obtained according to the provided drawings without paying creative labor.
[0013] Figure 1 It is a perspective view of the inclined swing type quick-flushing quick-draining washing tank of the utility model. Figure 1 .
[0014] Figure 2 It is a perspective view of the inclined swing type quick-flushing quick-draining washing tank of the utility model. Figure 2 .
[0015] Figure 3 It is a front view of the inclined swing type quick-flushing quick-draining washing tank of the utility model.
[0016] In the drawing, wherein:
[0017] 1, groove body;2, spray pipe;3, swing base;4, jam;5, wafer;6, support plate;71, drive motor;72, transmission shaft;73, eccentric wheel;8, water pipe;9, drain cylinder. DETAILED DESCRIPTION
[0018] The technical scheme in the embodiment of the utility model will be clearly and completely described below, and obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.
[0019] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or components does not necessarily limit to those steps or components clearly listed, but can include other steps or components not clearly listed or inherent to these processes, methods, products or devices.
[0020] In the present application, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. is based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.
[0021] In addition, in addition to being used to indicate the orientation or positional relationship, the above-mentioned partial terms may also be used to indicate other meanings, for example, the term "upper" may also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.
[0022] In addition, the terms "mount", "set", "provided with", "connected", "connected", "sleeved" should be broadly understood. For example, it can be a fixed connection, a detachable connection, or a monolithic structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0023] Referring to the accompanying Figures 1-3 The utility model discloses a kind of fast flush fast flush washing tank of tilting swing, including tank 1 and swing base 3, tank 1 top both sides are equipped with spray assembly, swing base 3 is located in tank 1 inside, swing base 3 top is fixed with plug 4, plug 4 is used to place wafer 5, one end of tank 1 inside is equipped with driven assembly, the other end is equipped with driving assembly, swing base 3 one end connects driven assembly, the other end cooperates with driving assembly, driving assembly is used to drive swing base 3 swing up and down.
[0024] The spraying assembly comprises spraying pipes 2 fixedly arranged at two sides of the top of the tank body 1, the spraying pipes 2 are connected with external water source at the water inlet end, and a plurality of spraying openings are arranged at the water outlet end, and the spraying openings are directed to the plug 4.
[0025] The driven assembly comprises a support plate 6 hinged to the bottom wall of the tank body 1, and the support plate 6 is hinged to the end of the swing base 3 away from the driving assembly.
[0026] The driving assembly comprises a driving motor 71 and a transmission shaft 72 rotatably arranged in the tank body 1, the driving motor 71 is arranged outside the tank body 1, one end of the transmission shaft 72 penetrates through the side wall of the tank body 1 and is fixedly connected to the driving end of the driving motor 71, the transmission shaft 72 is arranged below the swing base 3, an eccentric wheel 73 is fixedly sleeved on the transmission shaft 72, the eccentric wheel 73 cooperates with the end of the swing base 3 away from the driven assembly, and is used for driving the swing base 3 to swing up and down.
[0027] In the embodiment, the driving motor 71 can be fixedly arranged outside the tank body 1 through a mounting frame (not shown in the figure), and through external PLC program setting, when the spraying assembly sprays, the driving motor 71 drives the transmission shaft 72 to rotate, the eccentric wheel 73 cooperates with the swing base 3, so that the swing base 3 swings up and down, and the plug 4 and the wafer 5 are driven to swing up and down, and the swing amplitude is between 8-12°, so that the front and back surfaces of the wafer 5 can be effectively washed when spraying.
[0028] A drain port is arranged at the bottom of the tank body 1, the drain port is connected with a drain cylinder 9 through a water pipe 8, and a drain valve is arranged at the drain port.
[0029] In the embodiment, the washing time is set, then the waste water is quickly discharged through the drain cylinder 9, and 2-4 washing cycles can be set to ensure that the wafer is washed clean.
[0030] The above is only a preferred embodiment of the application, and is not used to limit the application, and the application can have various changes and variations for those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the application shall be included in the protection scope of the application.
Claims
1. A tilt swing rapid flush rapid drain rinse sink, characterized by, Including groove body (1) and swing base (3), both sides of the top of the groove body (1) are provided with spray assembly, the swing base (3) is located in the groove body (1), the swing base (3) is fixedly provided with a cap (4) on the top, the cap (4) is used for placing wafer (5), one end of the groove body (1) is provided with a driven assembly, the other end is provided with a driving assembly, one end of the swing base (3) is connected with the driven assembly, the other end is matched with the driving assembly, the driving assembly is used for driving the swing base (3) to swing up and down. The driven assembly comprises a support plate (6) hinged to the bottom wall of the groove body (1), and the support plate (6) is hinged to the end of the swing base (3) away from the driving assembly. The driving assembly comprises a driving motor (71) and a transmission shaft (72) rotatably arranged in the groove body (1), the driving motor (71) is located outside the groove body (1), one end of the transmission shaft (72) penetrates the side wall of the groove body (1) and is fixedly connected to the driving end of the driving motor (71), the transmission shaft (72) is located below the swing base (3), the eccentric wheel (73) is fixedly sleeved on the transmission shaft (72), the eccentric wheel (73) is matched with the end of the swing base (3) away from the driven assembly, and is used for driving the swing base (3) to swing up and down. The bottom of the groove body (1) is provided with a drain port, the drain port is connected with a drain cylinder (9) through a water pipe (8), and the drain port is provided with a drain valve.
2. A tilt-and-swivel rapid fill and rapid drain sink according to claim 1, wherein, The spray assembly comprises a spray pipe (2) fixedly arranged on both sides of the top of the groove body (1), the water inlet end of the spray pipe (2) is connected with an external water source, the water outlet end is provided with a plurality of spray openings, and the spray openings are directed to the cap (4).