Storage device

Abstract

The utility model discloses a storage device. The storage device comprises a bearing plate, a fixing plate, an adjusting plate and a positioning column. The bearing plate has a bearing surface; the fixing plate is fixedly connected to one end, in the first direction, of the bearing plate; the adjusting plate is connected to the end, away from the fixing plate, of the bearing plate, the position of the adjusting plate can be adjusted in the first direction, and the adjusting plate and the fixing plate can define a storage space on the bearing face; the positioning column is arranged on the fixing plate, at least part of the positioning column extends into the storage space, the position of the positioning column can be adjusted in the second direction perpendicular to the first direction, and the positioning column is close to and away from the bearing face in the position adjusting process. By adopting the storage device, the quartz tube is placed in the storage space, the positioning column is inserted into the tube opening of the quartz tube, and the adjusting plate abuts against the end, away from the fixing plate, of the quartz tube, so that the quartz tube is fixed and is prevented from being separated from the storage space and falling off, and the quartz tube is prevented from being damaged.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor tool storage, and particularly relates to a storage device. BACKGROUND

[0002] The vertical liquid phase epitaxy technology is a common method for preparing semiconductor materials, and epitaxial growth needs to be carried out in a high-temperature environment, and is usually carried out under the protection of a quartz tube. The quartz tube has advantages of high-temperature resistance, corrosion resistance and easy cleaning, but the quartz tube is fragile. In the semiconductor mass production process, more quartz tubes need to be used, and more quartz tubes are prone to damage due to improper placement during storage. CONTENT OF THE UTILITY MODEL

[0003] The technical problem to be solved by the application is that the existing quartz tube is prone to damage due to improper placement during storage. In order to solve the above technical problem, a storage device capable of placing a quartz tube and avoiding damage to the quartz tube is provided.

[0004] The technical scheme provided by the application is as follows:

[0005] A storage device comprises:

[0006] A bearing plate has a bearing surface;

[0007] A fixed plate is fixedly connected to one end of the bearing plate along a first direction;

[0008] An adjusting plate is connected to an end of the bearing plate away from the fixed plate, the adjusting plate can adjust the position along the first direction, and the adjusting plate and the fixed plate can enclose a storage space on the bearing surface;

[0009] A positioning column is arranged on the fixed plate and at least partially extends into the storage space, the positioning column can adjust the position along a second direction perpendicular to the first direction, and the positioning column can approach and move away from the bearing surface during the adjustment of the position.

[0010] Further, the storage device further comprises a locking member connected to the fixed plate and the positioning column, and used for locking and releasing the positioning column;

[0011] When the locking member locks the positioning column, the positioning column is fixed relative to the fixed plate; when the locking member releases the positioning column, the positioning column can reciprocate along the second direction.

[0012] Further, the fixing plate is provided with an adjusting hole extending along the second direction, the locking member comprises a head and a rod, the head is located on the side of the fixing plate away from the adjusting plate, the positioning column is located in the storage space, and the rod passes through the adjusting hole and is screwed to the positioning column.

[0013] Further, the bearing surface is provided with a bearing groove extending along the first direction, the positioning column corresponds to the bearing groove in the first direction.

[0014] Further, the bearing groove is an arc-shaped groove.

[0015] Further, the storage device comprises a plurality of the positioning columns, and the plurality of the positioning columns are arranged at intervals along a third direction perpendicular to the first direction and the second direction.

[0016] Further, the surface of the positioning column is covered with a flexible pad.

[0017] Further, one end of the positioning column towards the adjusting plate is spherical.

[0018] Further, the storage device further comprises a connecting member reciprocally connected to one end of the bearing plate away from the fixing plate along the second direction, and the adjusting plate is fixedly connected to the connecting member.

[0019] A storage device for storing a process pipe, the storage device comprising:

[0020] a bearing plate having a bearing surface for bearing the process pipe;

[0021] a fixing plate fixedly connected to one end of the bearing plate along a first direction;

[0022] an adjusting plate connected to one end of the bearing plate away from the fixing plate, the adjusting plate being reciprocally movable along the first direction, and the adjusting plate and the fixing plate enclosing the storage space with the bearing surface, the storage space being used for storing the process pipe;

[0023] a positioning column arranged on the fixing plate and at least partially extending into the storage space to be inserted into a pipe opening of the process pipe in the storage space, the positioning column being capable of adjusting position along a second direction perpendicular to the first direction and approaching and away from the bearing surface during the adjustment of position.

[0024] The quartz tube is placed in the storage space, the positioning column is inserted into the tube opening of the quartz tube, and the adjusting plate abuts against one end of the quartz tube away from the fixed plate, so as to fix the quartz tube and avoid the quartz tube from falling out of the storage space and being damaged. Meanwhile, the positioning column in the storage device can adjust the position in the second direction, so that the storage device can be suitable for storage of quartz tubes of different sizes. BRIEF DESCRIPTION OF DRAWINGS

[0025] The accompanying drawings are included to provide a further understanding of the present application, and constitute a part of the specification, illustrate the present application, and explain the technical solutions of the present application, but do not limit the present application.

[0026] Figure 1 A structural schematic view of the storage device provided by an embodiment of the present application is shown in the figure.

[0027] Figure 2 A structural schematic view of the storage device provided by an embodiment of the present application is shown in the figure. Figure 1 A structural schematic view of the storage device provided by an embodiment of the present application is shown in the figure.

[0028] Figure 3 A structural schematic view of the storage device provided by an embodiment of the present application is shown in the figure. Figure 1 A structural schematic view of the positioning column and the locking member in the storage device provided by an embodiment of the present application is shown in the figure.

[0029] Figure 4 A structural schematic view of the storage device provided by an embodiment of the present application is shown in the figure. Figure 1

[0030] Label explanation:

[0031] 100, storage device; 200, quartz tube; 110, bearing plate; 111, bearing surface; 112, bearing groove; 113, adjusting hole; 114, connecting hole; 120, fixed plate; 130, adjusting plate; 140, positioning column; 150, locking member; 151, head; 152, rod; 160, connecting member. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0033] ​In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0034] This application provides a storage device for quartz tubes to facilitate storage of the quartz tubes and prevent damage to the quartz tubes. Of course, the storage device can also be used to store other products, such as other process tubes or process bottles, without limitation. The following description uses quartz tubes as an example.

[0035] like Figure 1 As shown, the storage device 100 includes a carrying plate 110, a fixing plate 120, and an adjustment plate 130. The carrying plate 110 has a carrying surface 111 for carrying the quartz tube 200. The fixing plate 120 is fixedly connected to one end of the carrying plate 110 along a first direction. The adjustment plate 130 is connected to the other end to form a storage space for the quartz tube 200 on the carrying surface 111 together with the fixing plate 120. The position of the adjustment plate 130 can be adjusted along the first direction. In this way, the adjustment plate 130 can be pulled apart before placing the quartz tube 200, thereby facilitating the placement of the quartz tube 200.

[0036] Furthermore, the storage device 100 includes a positioning post 140, which is disposed on the fixed plate 120 and at least partially extends into the storage space for insertion into the nozzle of the quartz tube 200 within the storage space. The positioning post 140 is adjustable in a second direction perpendicular to the first direction, and can be moved closer to and further away from the support surface 111 during the adjustment process.

[0037] For example, the second direction is the vertical direction. The quartz tubes 200 stored in the storage space are arranged horizontally. The positioning posts 140 are inserted into the tube openings of the quartz tubes 200. The adjustment plate 130 abuts against the end of the quartz tubes 200 away from the fixed plate 120, thereby securing the quartz tubes 200 within the storage space. Furthermore, because the positioning posts 140 can be adjusted vertically, quartz tubes 200 of varying sizes can be stored.

[0038] It can be understood that the height of the mouth of the quartz tube 200 is different, that is, the distance between the mouth and the bearing surface 111 is different, so the position of the positioning column 140 needs to be changed to adjust the distance between the positioning column 140 and the bearing surface 111, so that the positioning column 140 can be inserted into the mouth of the quartz tube 200 of different size specifications, and then the storage device 100 is suitable for storing quartz tubes 200 of different size specifications.

[0039] With the above storage device 100, the quartz tube 200 is placed in the storage space, the positioning column 140 is inserted into the mouth of the quartz tube 200, and the adjusting plate 130 abuts against one end of the quartz tube 200 away from the fixed plate 120 to fix the quartz tube 200, so as to avoid the quartz tube 200 from falling out of the storage space and being damaged. At the same time, the positioning column 140 in the storage device 100 can adjust the position in the second direction, so that the storage device 100 can be suitable for storing quartz tubes 200 of different size specifications.

[0040] In one embodiment, the bearing surface 111 is provided with a bearing groove 112 for bearing the quartz tube 200, the bearing groove 112 is located in the storage space and extends in the first direction, and the positioning column 140 and the bearing groove 112 correspond in the first direction, so that the positioning column 140 can be inserted into the mouth of the quartz tube 200 borne in the bearing groove 112. Optionally, the bearing groove 112 is an arc-shaped groove to match the arc-shaped outer wall of the quartz tube 200.

[0041] It can be understood that after the quartz tube 200 is placed in the bearing groove 112, the positioning column 140 is inserted into the mouth of the quartz tube 200 to position the quartz tube 200, which can limit the rolling of the positioning column 140 in the bearing groove 112. Of course, in other embodiments, the bearing groove 112 can also be triangular in cross section, that is, composed of two or more inclined surfaces, and the quartz tube 200 is supported on the inclined surface to avoid rolling of the quartz tube 200.

[0042] In one embodiment, the storage device 100 includes a plurality of positioning columns 140, and at the same time, the bearing surface 111 is provided with a plurality of bearing grooves 112, the plurality of positioning columns 140 and the plurality of bearing grooves 112 are spaced apart in a third direction perpendicular to the first direction and the second direction, and the plurality of positioning columns 140 and the plurality of bearing grooves 112 correspond one by one. In this way, the storage device 100 can store a plurality of quartz tubes 200, each quartz tube 200 is placed in the corresponding bearing groove 112, and each positioning column 140 can be inserted into the mouth of the quartz tube 200 in the corresponding bearing groove 112. It can also be determined that the fixed plate 120 and the adjusting plate 130 extend in the third direction to facilitate the installation of the plurality of positioning columns 140 and the positioning of the quartz tube 200 in each bearing groove 112.

[0043] In one embodiment, the surface of the positioning column 140 is covered with a flexible pad to avoid damaging the quartz tube 200; meanwhile, the flexible pad is elastic, and the diameter of the flexible pad covering the surface of the positioning column 140 can be slightly larger than the diameter of the tube opening of the quartz tube 200, so that the flexible pad is in close contact with the tube opening of the quartz tube 200, and the stability of the positioning of the quartz tube 200 is improved. Preferably, the end of the positioning column 140 towards the adjusting plate 130 is spherical to facilitate the insertion of the positioning column 140 into the tube opening of the quartz tube 200.

[0044] Please refer to Figure 2 and Figure 3 In one embodiment, the storage device 100 further comprises a locking member 150 connected to the fixed plate 120 and the positioning column 140, for locking and releasing the positioning column 140. When the locking member 150 locks the positioning column 140, the positioning column 140 is fixed relative to the fixed plate 120; when the locking member 150 releases the positioning column 140, the positioning column 140 can reciprocate along the second direction. In this way, the position of the positioning column 140 along the second direction can be adjusted.

[0045] It should be noted that when the quartz tube 200 is placed in the storage device 100, the locking member 150 is first released to allow the tube opening of the quartz tube 200 to be sleeved on the positioning column 140, and then the quartz tube 200 is placed flat on the bearing groove 112, the positioning column 140 moves with the tube opening, and after the quartz tube 200 is placed, the positioning column 140 no longer moves, at which time the positioning column 140 is locked and fixed by the locking member 150, and then the adjusting plate 130 is moved so that the adjusting plate 130 abuts against the end of the quartz tube 200 away from the fixed plate 120.

[0046] Further, the fixed plate 120 is provided with an adjusting hole 113 extending along the second direction. The locking member 150 comprises a head 151 and a rod 152, the head 151 is located on the side of the fixed plate 120 away from the adjusting plate 130, the positioning column 140 is located in the storage space, i.e. on the side of the fixed plate 120 towards the adjusting plate 130, and the rod 152 passes through the adjusting hole 113 and is screw-connected to the positioning column 140. In this way, the positioning column 140 can be locked and fixed to the fixed plate 120 by tightening the locking member 150, and the positioning column 140 can be released by loosening the locking member 150, so as to realize the reciprocating movement of the positioning column 140 and the locking member 150 along the second direction. It can be understood that in the embodiment, the locking member 150 is a bolt, and in other embodiments, the locking member 150 can also be a nut, at which time part of the positioning column 140 is located in the positioning space, and the other part passes through the adjusting hole 113 and is screw-connected to the locking member 150.

[0047] Please refer to Figure 4In one embodiment, the storage device 100 further comprises a connecting piece 160, which is reciprocally connected to one end of the bearing plate 110 away from the fixing plate 120 along the second direction, and the adjusting plate 130 is fixedly connected to the connecting piece 160 to move along the second direction with the connecting piece 160. Further, the one end of the bearing plate 110 away from the fixing plate 120 is provided with a connecting hole 114, and the connecting piece 160 is connected to the connecting hole 114. It should be noted that a damping structure, such as a rubber pad to increase friction, can be arranged between the connecting piece 160 and the connecting hole 114, so as to improve the stability of the adjusting plate 130 relative to the bearing plate 110, avoid the shaking of the adjusting plate 130, and improve the limiting ability of the adjusting plate 130 to the quartz tube 200.

[0048] The above embodiments have described the structure of the storage device 100. In order to facilitate the understanding of the technical solutions of the present application, the storage process of the storage device 100 will be described in combination with the structure of the storage device 100. Figure 1 The storage process of the storage device 100 will be described.

[0049] First, the adjusting plate 130 is pulled away from the fixing plate 120, and the locking piece 150 is loosened, then the mouth of the quartz tube 200 is sleeved on the positioning column 140, and the quartz tube 200 is placed in the bearing groove 112. After the quartz tube 200 is placed flat, the positioning column 140 is locked and fixed by the locking piece 150, and then the adjusting plate 130 is pushed to abut against the quartz tube 200.

[0050] It can be understood that when the same size specification quartz tube 200 is placed subsequently, the positioning column 140 and the locking piece 150 can remain fixed, and the quartz tube 200 can be directly inserted along the bearing groove 112.

[0051] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A storage device, characterized by, The storage device comprises: a carrier plate having a carrier surface; a fixed plate fixedly connected to one end of the carrier plate along a first direction; an adjusting plate connected to the end of the carrier plate away from the fixed plate, the adjusting plate being capable of adjusting position along the first direction, and the adjusting plate being capable of enclosing a storage space with the fixed plate on the carrier surface; a positioning column arranged on the fixed plate and at least partially extending into the storage space, the positioning column being capable of adjusting position along a second direction perpendicular to the first direction, and approaching and moving away from the carrier surface during adjustment of position.

2. The storage device of claim 1, wherein, Further comprising a locking member connected to the fixed plate and the positioning column, for locking and releasing the positioning column; when the locking member locks the positioning column, the positioning column is fixed relative to the fixed plate; when the locking member releases the positioning column, the positioning column is capable of reciprocating along the second direction.

3. The storage device of claim 2, wherein, The fixed plate is provided with an adjusting hole extending along the second direction, the locking member comprises a head portion and a rod portion, the head portion is located on the side of the fixed plate away from the adjusting plate, the positioning column is located in the storage space, and the rod portion passes through the adjusting hole and is threadedly connected to the positioning column.

4. The storage device of claim 1, wherein, The carrier surface is provided with a carrier groove, the carrier groove is located in the storage space and extends along the first direction, and the positioning column corresponds to the carrier groove in the first direction.

5. The storage device of claim 4, wherein, The carrier groove is an arc-shaped groove.

6. The storage device of claim 1, wherein The storage device comprises a plurality of positioning columns, and the plurality of positioning columns are arranged at intervals along a third direction perpendicular to the first direction and the second direction.

7. The storage device of claim 1, wherein The surface of the positioning column is covered with a flexible pad.

8. The storage device of claim 1, wherein, The end of the positioning column facing the adjusting plate is spherical.

9. The storage device of claim 1, wherein, Further comprising a connecting member reciprocally movably connected to the end of the carrier plate away from the fixed plate along the second direction, and the adjusting plate is fixedly connected to the connecting member.

10. A storage device, characterized by The storage device for storing process pipes comprises: a carrier plate having a carrier surface for carrying the process pipes; a fixed plate fixedly connected to one end of the carrier plate along a first direction; an adjusting plate connected to the end of the carrier plate away from the fixed plate, the adjusting plate being capable of reciprocally moving along the first direction, and the adjusting plate being capable of enclosing a storage space with the fixed plate on the carrier surface, the storage space being used for storing the process pipes; a positioning column arranged on the fixed plate and at least partially extending into the storage space to insert into the pipe opening of the process pipe in the storage space, the positioning column being capable of adjusting position along a second direction perpendicular to the first direction, and approaching and moving away from the carrier surface during adjustment of position.

Images