Liquid medicine recovery device and substrate etching equipment

Abstract

The utility model belongs to the technical field of semiconductor etching, and discloses a liquid medicine recovery device and substrate etching equipment. The liquid medicine recovery device is arranged on a carrying frame of a bearing base plate and comprises a fixing frame, a rotating structure, a driving assembly and a confluence groove, a rotating shaft is arranged on the fixing frame, and the carrying frame is rotationally connected with the rotating shaft; the rotating structure is rotationally connected with the carrying frame, can drive the carrying frame to rotate forwards around the rotating shaft for lifting away from the fixing frame in the first direction, and can drive the carrying frame to rotate reversely around the rotating shaft for descending close to the fixing frame in the first direction; the driving assembly is connected with the rotating structure and can drive the rotating structure to move in the first direction; the confluence groove is arranged below the carrying frame and used for containing the liquid medicine flowing down from the base plate. The liquid medicine recovery device is simple in structure and high in practicability, redundant etching liquid medicine on the substrate can be recycled, and the production cost of semiconductor products is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor etching technical field especially, it relates to a kind of liquid recovery device and substrate etching equipment. BACKGROUND

[0002] Etching is a kind of semiconductor processing technology, it refers to the technical that the partial material of substrate surface is stripped or corroded according to design pattern or grain.The traditional etching process includes wet etching and dry etching, wherein wet etching is using liquid prepared by special chemical reagent to corrode substrate surface, the excess liquid can be left on substrate after etching is completed in existing substrate wet etching equipment, cannot be reused, and liquid needs to be prepared again before etching is carried out to substrate each time, so as to cause the waste of liquid, and further improve the production cost of semiconductor product. UTILITY MODEL CONTENT

[0003] The utility model aims at providing a kind of liquid recovery device and substrate etching equipment, excess etching liquid can be recycled, to reduce manufacturing cost.

[0004] To achieve this purpose, the utility model adopts the following technical solutions:

[0005] Liquid recovery device is set on the carrier of bearing substrate, and the liquid recovery device includes:

[0006] Fixed frame is provided with rotating shaft on the fixed frame, and the carrier is rotatably connected with the rotating shaft;

[0007] Rotating structure is rotatably connected with the carrier, and the rotating structure can drive the carrier to rotate forward around the rotating shaft to lift in the first direction away from the fixed frame, and the rotating structure can drive the carrier to rotate reverse around the rotating shaft to lower in the first direction close to the fixed frame;

[0008] Driving assembly is connected with the rotating structure, and the driving assembly can drive the rotating structure to move along the first direction;

[0009] Confluence groove is arranged below the carrier, and the confluence groove is used to accommodate the liquid flowing down on the substrate.

[0010] As preferably, the rotating structure includes rocker and connecting rod extending along the first direction, the rocker is rotatably arranged on the connecting rod, the rocker is rotatably matched with the carrier, and the connecting rod is connected with the driving assembly.

[0011] As preferably, the driving assembly includes driving motor and rotary plate, the rotary plate is arranged on the output shaft of the driving motor, and the driving motor can drive the rotary plate to rotate.

[0012] The end of the connecting rod is fixedly provided with a groove plate, a through groove is formed in the groove plate and extends perpendicularly to the first direction, the swivel plate is provided with an insertion shaft, the insertion shaft is vertically offset from the output shaft of the driving motor, the insertion shaft is arranged in the through groove and abuts against the side wall of the through groove, and the swivel plate rotates to drive the insertion shaft to rotate around the axis of the output shaft of the driving motor, so that the groove plate moves along the first direction.

[0013] Preferably, a hole groove is formed in the swivel plate, the insertion shaft comprises a rod portion and a head portion connected to each other, the inner diameter of the hole groove is smaller than the outer diameter of the head portion and larger than the outer diameter of the rod portion, the rod portion sequentially passes through the hole groove and the through groove, and the head portion vertically abuts against the swivel plate.

[0014] Preferably, a plurality of hole grooves are formed, and the distances between the plurality of hole grooves and the axis of the output shaft of the driving motor are all different.

[0015] Preferably, the liquid medicine recovery device further comprises a plurality of stoppers, the plurality of stoppers are arranged on the roller shaft of the carrier in the first direction at intervals, the substrate is placed on the roller shaft between any two adjacent stoppers, and the two ends of the substrate in the first direction abut against the two adjacent stoppers, respectively.

[0016] The substrate etching equipment comprises a carrier and the above-mentioned liquid medicine recovery device.

[0017] The substrate etching equipment comprises a carrier and the above-mentioned liquid medicine recovery device.

[0018] The liquid medicine recovery device provided by the utility model has the advantages that the carrier is rotatably connected with the fixed frame and the rotating structure, the carrier can be positively rotated around the rotating shaft on the fixed frame to be lifted when the rotating structure moves away from the fixed frame along the first direction, the carrier can be reversely rotated around the rotating shaft to be lowered when the rotating structure moves close to the fixed frame along the first direction, the carrier can be turned over in the positive direction to be in an inclined state under the driving of the rotating structure, the excess etching liquid on the substrate can flow downward and converge into the converging groove under the action of gravity, the recovery and utilization of the liquid medicine are realized, the production cost of semiconductor products is reduced, the carrier can be turned over in the reverse direction to be in a horizontal state under the driving of the rotating structure, the etching treatment of the subsequent substrate is facilitated, the driving assembly is further arranged on the liquid medicine recovery device, the driving assembly is connected with the rotating structure, the driving assembly can drive the rotating structure to move along the first direction, the automatic turning over of the carrier can be realized without manual operation, the labor cost is reduced, and the production efficiency is improved.

[0019] The substrate etching equipment provided by the utility model, including the carrier, and adopting the liquid medicine recovery device, can automatically converge and recover the etched liquid medicine, is simple in structure, high in practicability, and avoids waste of etching liquid medicine. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the structural schematic diagram of the liquid medicine recovery device provided by the embodiment of the utility model;

[0021] Figure 2 It is the top view of the rotary plate and the groove plate provided by the embodiment of the utility model.

[0022] In the drawing,

[0023] 100 - substrate;

[0024] 200 - carrier;

[0025] 1 - fixed frame; 11 - rotating shaft;

[0026] 2 - rotating structure; 21 - rocker; 22 - connecting rod; 23 - groove plate; 231 - through groove;

[0027] 3 - drive assembly; 31 - drive motor; 32 - rotary plate; 321 - insertion shaft; 322 - hole groove;

[0028] 4 - convergence groove;

[0029] 5 - stop block. DETAILED DESCRIPTION

[0030] The utility model will be further described in detail below in combination with the drawings and examples.It can be understood that the specific examples described here are only used to explain the utility model, and not limit the utility model.In addition, it needs to be explained that, for the convenience of description, only the part related to the utility model is shown in the drawing, not all structures.

[0031] In the description of the utility model, unless another explicit provision and limitation, the terms "connected", "connected", "fixed" should be understood broadly, for example, can be fixed connection, can be detachable connection, or be integrated;Can be mechanical connection, can be electrical connection;Can be directly connected, can be indirectly connected through the intermediate medium, can be the communication inside two elements or the interaction relationship of two elements.For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In the utility model, unless another definite provision and limitation, first feature is in second feature "on" or "under" can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them. Moreover, first feature is in second feature "on", "above" and "upper surface" include that first feature is in second feature directly above and obliquely above, or just indicate that first feature horizontal height is higher than second feature. First feature is in second feature "under", "below" and "under" include that first feature is in second feature directly below and obliquely below, or just indicate that first feature horizontal height is less than second feature.

[0033] In the description of the present embodiment, the terms "upper", "lower", "right", "left" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0034] As Figures 1 to 2The utility model provides a kind of liquid recovery device, the liquid recovery device is set in the carrier 200 of bearing substrate 100, the liquid recovery device includes fixed bracket 1, rotating structure 2, drive assembly 3 and confluence groove 4, fixed bracket 1 is provided with rotating shaft 11, carrier 200 is rotatably connected with rotating shaft 11;Rotating structure 2 is rotatably connected with carrier 200, rotating structure 2 can drive carrier 200 to rotate forward around rotating shaft 11 to lift along the first direction away from fixed bracket 1, rotating structure 2 can drive carrier 200 to rotate reverse around rotating shaft 11 to lower along the first direction close to fixed bracket 1;Drive assembly 3 is connected with rotating structure 2, and drive assembly 3 can drive rotating structure 2 to move along the first direction;Confluence groove 4 is arranged below carrier 200, and confluence groove 4 is used to accommodate the liquid flowing down on substrate 100.In the embodiment, since carrier 200 is rotatably connected with fixed bracket 1 and rotating structure 2 respectively, rotating structure 2 can drive carrier 200 to rotate forward around rotating shaft 11 on fixed bracket 1 to lift when it is away from fixed bracket 1 along the first direction, so carrier 200 can be flipped to be in inclined state along positive direction under the driving of rotating structure 2, and since confluence groove 4 for accommodating liquid is also arranged below carrier 200, the excess etching liquid on substrate 100 can flow down under the action of gravity and converge into confluence groove 4, so that the recycling of liquid is realized, and the production cost of semiconductor product is reduced;Since rotating structure 2 can also drive carrier 200 to rotate reverse around rotating shaft 11 to lower when it is close to fixed bracket 1 along the first direction, carrier 200 can be flipped to be in horizontal state along reverse direction under the driving of rotating structure 2, so as to facilitate subsequent etching treatment of substrate 100;Since the liquid recovery device is also provided with drive assembly 3, drive assembly 3 is connected with rotating structure 2, and drive assembly 3 can drive rotating structure 2 to move along the first direction, so that automatic flipping of carrier 200 can be realized without manual operation, labor cost is reduced, and production efficiency is improved.Specifically, carrier 200 and the liquid recovery device are both arranged in the spray area formed by wallboard, the top of spray area is provided with spray head, and the spray head sprays etching liquid on the substrate 100 of carrier 200 below;One end of carrier 200 is hingedly connected with fixed bracket 1 through rotating shaft 11, and rotating structure 2 is also hingedly connected with carrier 200, when rotating structure 2 is away from fixed bracket 1 along the first direction, rotating structure 2 can drive carrier 200 to rotate around rotating shaft 11, so that the end of carrier 200 away from fixed bracket 1 is lifted, so that carrier 200 drives substrate 100 to rotate and be in inclined state, at this time, the excess liquid on substrate 100 will drop into confluence groove 4 under the action of gravity.

[0035] Further, as Figure 1As shown, the rotating structure 2 comprises a rocker 21 and a connecting rod 22 extending along the first direction, the rocker 21 is rotatably arranged on the connecting rod 22, the rocker 21 is rotatably connected with the carrier 200, and the connecting rod 22 is connected with the driving assembly 3. In the embodiment, the rocker 21 and the connecting rod 22 are both long rod structures, the connecting rod 22 is arranged through the wall plates on both sides along the first direction, and the end of the connecting rod 22 is connected with the driving assembly 3, the connecting rod 22 can move along the first direction under the driving of the driving assembly 3; the two ends of the rocker 21 are respectively hingedly connected with the connecting rod 22 and the carrier 200, when the connecting rod 22 moves away from the fixed frame 1 along the first direction under the driving of the driving assembly 3, the rocker 21 starts to rotate, and gradually turns from the initial horizontal state to the vertical state, at this time, the carrier 200 rotates to the maximum inclination state; then the connecting rod 22 moves towards the fixed frame 1 along the first direction under the driving of the driving assembly 3, the rocker 21 rotates in the opposite direction and returns to the initial horizontal state from the vertical state, at this time, the carrier 200 also returns to the horizontal state, and the upper shower head continues to spray the liquid medicine on the substrate 100. Specifically, the connecting rod 22 is arranged through the wall plates and can only move along the first direction, and when the connecting rod 22 moves along the first direction, the connecting end of the rocker 21 and the connecting rod 22 will also move along the first direction, since the length of the rocker 21 is unchanged and cannot be compressed, and the carrier 200 connected with the rocker 21 also cannot move along the first direction, so that the other end of the rocker 21 will be lifted upward or lowered along with the movement of the connecting rod 22.

[0036] Specifically, as Figure 1 and Figure 2As shown, the driving assembly 3 comprises a driving motor 31 and a rotating plate 32, the rotating plate 32 is arranged on the output shaft of the driving motor 31, and the driving motor 31 can drive the rotating plate 32 to rotate; the end of the connecting rod 22 is fixedly provided with a slot plate 23, the slot plate 23 is provided with a through slot 231 extending perpendicularly to the first direction, the rotating plate 32 is provided with an insertion shaft 321, the insertion shaft 321 is arranged vertically offset to the output shaft of the driving motor 31, the insertion shaft 321 is arranged in the through slot 231 and abuts against the side wall of the through slot 231, and the rotating plate 32 can drive the insertion shaft 321 to rotate around the axis of the output shaft of the driving motor 31, so as to drive the slot plate 23 to move along the first direction. In the embodiment, the rotating plate 32 is fixedly connected with the output shaft of the driving motor 31, and the driving motor 31 can drive the rotating plate 32 to rotate; the rotating plate 32 is provided with the insertion shaft 321, the insertion shaft 321 is arranged vertically in the through slot 231 of the slot plate 23, when the driving motor 31 is started, the insertion shaft 321 will follow the rotating plate 32 to perform circular motion around the axis of the output shaft of the driving motor 31, and then drive the slot plate 23 to move; and since the slot plate 23 is fixedly connected with the connecting rod 22 and the through slot 231 of the slot plate 23 extends perpendicularly to the first direction, when the insertion shaft 321 rotates, the slot plate 23 can convert the circular motion of the insertion shaft 321 into linear reciprocating motion, so as to drive the connecting rod 22 to displace along the first direction. Specifically, when the driving motor 31 drives the rotating plate 32, the rotating plate 32 can rotate in one direction of clockwise or counterclockwise all the time, or rotate 180° along the clockwise / counterclockwise direction and then rotate 180° along the counterclockwise / clockwise direction, and the above two modes can both realize the reciprocating motion of the connecting rod 22 along the first direction, which is not limited herein.

[0037] Specifically, as shown in the figure, Figure 2 the rotating plate 32 is provided with a hole slot 322, the insertion shaft 321 comprises a rod portion and a head portion connected with each other, the inner diameter of the hole slot 322 is smaller than the outer diameter of the head portion and larger than the outer diameter of the rod portion, the rod portion sequentially passes through the hole slot 322 and the through slot 231, and the head portion abuts against the rotating plate 32 vertically. In the embodiment, the rotating plate 32 is connected with and driven by the slot plate 23 through the insertion shaft 321, and the structure is simple and convenient to disassemble and assemble.

[0038] Specifically, as shown in the figure, Figure 2As shown, the plurality of holes 322 are arranged on the rotating plate 32, and the distance between each of the holes 322 and the axis of the output shaft of the driving motor 31 is different. In the embodiment, the plurality of holes 322 are arranged on the rotating plate 32, and the distance between each of the holes 322 and the axis of the output shaft of the driving motor 31 is different. Therefore, when the shaft 321 is inserted into different holes 322, the radius of the circular motion of the shaft 321 is different, and the distance of the movement of the slot plate 23 along the first direction is also different, so as to adjust the range of the rotation angle of the carrier 200, and the maximum angle of the inclination of the substrate 100 on the carrier 200 can be adjusted according to the actual situation.

[0039] Further, as shown, Figure 1 The liquid medicine recovery device further comprises a plurality of blocks 5, and the plurality of blocks 5 are arranged on the roller shaft of the carrier 200 along the first direction. The substrate 100 is placed on the roller shaft between two adjacent blocks 5, and the two ends of the substrate 100 along the first direction are respectively abutted against the two adjacent blocks 5. In the embodiment, a plurality of roller shafts are arranged on the carrier 200, and the roller shafts extend along the first direction. The roller shafts rotate under the driving of the motor to transport the substrate 100 placed thereon. A plurality of blocks 5 are arranged on each roller shaft, and the two ends of the substrate 100 are respectively abutted against the two adjacent blocks 5, so as to limit the substrate 100 along the first direction, and prevent the substrate 100 from sliding off the roller shaft when the carrier 200 is rotated to the inclined state.

[0040] The utility model also provides a kind of substrate etching equipment, and the substrate etching equipment includes carrier 200 and above-mentioned liquid medicine recovery device. The substrate etching equipment can use liquid medicine to etch substrate 100, and can automatically converge and recycle after etching liquid medicine, with simple structure and strong practicality, avoiding the waste of etching liquid medicine.

[0041] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not the limitation of the implementation mode of the utility model. For ordinary skilled person in the art, various obvious changes, re-adjustment and replacement can be carried out without departing from the protection scope of the utility model. Here, it is unnecessary and impossible to exhaust all implementation modes. Any modification, equivalent replacement and improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A chemical liquid recovery apparatus characterized by comprising: The liquid medicine recovery device is arranged on a carrier (200) of a bearing substrate (100), and comprises: A fixing frame (1) is provided with a rotating shaft (11), and the carrier (200) is rotationally connected with the rotating shaft (11); A rotating structure (2) is rotationally connected with the carrier (200), and the rotating structure (2) can drive the carrier (200) to rotate forward around the rotating shaft (11) to lift up in a first direction away from the fixing frame (1), and the rotating structure (2) can drive the carrier (200) to rotate reversely around the rotating shaft (11) to lower down in the first direction close to the fixing frame (1); A driving assembly (3) is connected with the rotating structure (2), and the driving assembly (3) can drive the rotating structure (2) to move in the first direction; A converging groove (4) is arranged below the carrier (200), and the converging groove (4) is used for accommodating the liquid medicine flowing down on the substrate (100).

2. The liquid medicine recovery device according to claim 1, characterized by The rotating structure (2) comprises a rocker (21) and a connecting rod (22) extending in the first direction, the rocker (21) is rotationally arranged on the connecting rod (22), the rocker (21) is rotationally matched with the carrier (200), and the connecting rod (22) is connected with the driving assembly (3).

3. The liquid medicine recovery device according to claim 2, characterized by The driving assembly (3) comprises a driving motor (31) and a rotating plate (32), the rotating plate (32) is arranged on an output shaft of the driving motor (31), and the driving motor (31) can drive the rotating plate (32) to rotate; An end portion of the connecting rod (22) is fixedly provided with a groove plate (23), a through groove (231) is formed in the groove plate (23), the through groove (231) extends perpendicularly to the first direction, a plug shaft (321) is arranged on the rotating plate (32), the plug shaft (321) is vertically staggered with the output shaft of the driving motor (31), the plug shaft (321) is arranged in the through groove (231) and abuts against the side wall of the through groove (231), and the rotating plate (32) can drive the plug shaft (321) to rotate around the axis of the output shaft of the driving motor (31) to drive the groove plate (23) to move in the first direction.

4. The liquid medicine recovery device according to claim 3, characterized by A hole groove (322) is formed in the rotating plate (32), the plug shaft (321) comprises a rod portion and a head portion connected with each other, the inner diameter of the hole groove (322) is smaller than the outer diameter of the head portion and larger than the outer diameter of the rod portion, the rod portion sequentially passes through the hole groove (322) and the through groove (231), and the head portion vertically abuts against the rotating plate (32).

5. The liquid medicine recovery device according to claim 4, characterized by A plurality of hole grooves (322) are formed, and the distances between the plurality of hole grooves (322) and the axis of the output shaft of the driving motor (31) are all different.

6. The liquid medicine recovery apparatus according to claim 1, characterized by The liquid medicine recovery device further comprises a plurality of stop blocks (5) which are arranged on the roller shaft of the carrier (200) in the first direction, and the substrate (100) is placed on the roller shaft between two adjacent stop blocks (5), and the two ends of the substrate (100) in the first direction respectively abut against two adjacent stop blocks (5).

7. A substrate etching apparatus characterized by, The liquid medicine recovery device comprises a carrier (200) and the liquid medicine recovery device according to any one of claims 1-6.

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