Small-space large-load adjusting mechanism

Abstract

The utility model discloses a small-space large-load adjusting mechanism, which relates to the technical field of UVW platforms and comprises a base, a carrying table and a ball module. The ball module comprises a ball layer, the ball layer comprises a plurality of balls distributed in the horizontal direction, and the carrying table is arranged on the top face of the base through the ball layer. An X-direction driving module and a Y-direction driving module are arranged on the base; when in use, the platform deck is used for bearing, the X-direction driving module and the Y-direction driving module are respectively used for driving the platform deck to move towards two mutually vertical horizontal directions, and the platform deck is supported by the X-direction driving module and the Y-direction driving module and is also arranged on the base in a sliding manner through the ball layer, so that the platform deck is not only supported by the X-direction driving module and the Y-direction driving module. The load is mainly and directly applied to the base through the ball layer, so that the load of the X-direction driving module and the Y-direction driving module can be reduced, the load bearing capacity is further improved, and the cost is lower compared with the mode that a large-grade standard part is adopted or one more module is added.

Description

Technical Field

[0001] This utility model relates to the field of UVW platform technology, specifically a small-space, high-load adjustment mechanism. Background Technology

[0002] Currently, high-precision alignment technology plays an increasingly important role in the micro-machining manufacturing industry. Alignment technology is widely used in semiconductor equipment, web printing equipment, LED or LCD panel manufacturing, fiber optic connections, and microelectromechanical device (MEMS) processing and packaging. To improve part processing accuracy and accelerate alignment efficiency, these industries have placed higher demands on alignment technology, and high-precision alignment technology relies on the UVW platform.

[0003] When increasing the load-bearing capacity of the conventional configuration of the XXY adjustment platform in the existing technology, there are two ways: one is to use a larger standard part, which will increase the size and cost; the other is to add an additional set of supports at the center position on the basis of the conventional four-point or three-point support (one set of supports has three directions of mechanism in XY and angle), which will not increase the size, but the cost will increase.

[0004] In view of this, there is an urgent need for a small-space, high-load adjustment mechanism. Utility Model Content

[0005] To address the problems existing in the prior art, this utility model solves the problem using the following technical structure.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A small-space, high-load adjustment mechanism includes: a base, a platform, and a ball bearing module;

[0008] The ball module includes a ball layer, the ball layer includes a plurality of balls distributed in a horizontal direction, and the platform is disposed on the top surface of the base through the ball layer;

[0009] The base is equipped with an X-axis drive module and a Y-axis drive module, which are used to drive the platform to move in two mutually perpendicular horizontal directions.

[0010] Its further feature is that,

[0011] The ball bearing module also includes a limiting seat and a mounting seat. The limiting seat is disposed on the base, and the mounting seat is disposed on the bottom surface of the platform. The mounting seat is disposed on the limiting seat through the ball bearing layer.

[0012] The mounting base is provided with mounting plates at both the top and bottom, and the two mounting plates are arranged in parallel.

[0013] The ball bearing layer is provided in two parts, and the two ball bearing layers are respectively placed at the ends of the two mounting plates that are close to each other.

[0014] The limiting seat is U-shaped, and the mounting seat extends through the limiting seat from top to bottom. The two ball bearing layers make rolling contact with the top and bottom surfaces of the limiting seat, respectively.

[0015] The ball layer also includes a ball seat, on which a plurality of ball grooves are formed, and the balls are placed in the corresponding ball grooves.

[0016] The two ball bearing seats are respectively mounted on two mounting plates.

[0017] It also includes an installation channel that runs from bottom to top through the base, platform, mounting base, and two mounting plates.

[0018] There are two X-axis drive modules, which are respectively located on both sides of the platform.

[0019] The X-axis drive module includes a first drive cylinder, a first slide block, and a first rotary table. The bottom of the first slide block is slidably connected to the base, and the first rotary table is slidably disposed on the top of the first slide block. The platform is rotatably connected to the first rotary table, and the sliding direction of the first slide block relative to the base and the sliding direction of the first slide block relative to the first rotary table are perpendicular to each other.

[0020] The Y-axis drive module includes a second drive cylinder, a second slide block, and a second rotary table. The bottom of the second slide block is slidably connected to the base, and the second rotary table is slidably disposed on the top of the second slide block. The platform is rotatably connected to the second rotary table. The sliding direction of the second slide block relative to the base and the sliding direction of the second slide block relative to the second rotary table are perpendicular to each other.

[0021] The Y-axis drive module is located on one side of the platform.

[0022] The base is provided with several mounting holes.

[0023] The above-described structure of this utility model can achieve the following beneficial effects:

[0024] In use, the platform is supported by a carrier. The X-axis drive module and the Y-axis drive module are used to drive the platform to move in two mutually perpendicular horizontal directions. Since the platform is not only supported by the X-axis drive module and the Y-axis drive module, but also slidably mounted on the base through a ball bearing layer, the load is mainly applied directly to the base through the ball bearing layer. This reduces the load on the X-axis drive module and the Y-axis drive module, thereby increasing the load-bearing capacity. Compared with using larger standard parts or adding an extra set of modules, the cost is lower. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this application;

[0026] Figure 2 This is a structural side view of this application;

[0027] Figure 3 This is a structural diagram of a portion of the structure of this application;

[0028] Figure 4 This is a schematic diagram of the structure of the bottom of the limiting seat in this application;

[0029] Figure 5 This is a schematic diagram of the structure of the ball layer in this application.

[0030] In the diagram: 1. Base; 2. Platform; 3. Ball bearing; 4. Y-axis drive module; 41. Second drive cylinder; 42. Second slide; 43. Second rotary table; 5. X-axis drive module; 51. First drive cylinder; 52. First slide; 53. First rotary table; 6. Limit seat; 7. Mounting seat; 71. Mounting plate; 8. Ball bearing seat. Detailed Implementation

[0031] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0032] It should be noted that the terms "comprising" and "having" and any variations thereof in the specification, claims and accompanying drawings of this utility model are intended to cover non-exclusive inclusion. For example, a process, method, apparatus, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products or devices.

[0033] The following is in conjunction with the appendix Figures 1-2 This application will be described in further detail.

[0034] refer to Figures 1-2The small-space, high-load adjustment mechanism shown includes: a base 1, a platform 2, and a ball bearing module; the ball bearing module includes a ball bearing layer, which includes several horizontally distributed balls 3; the platform 2 is mounted on the top surface of the base 1 via the ball bearing layer; the base 1 is equipped with an X-axis drive module 5 and a Y-axis drive module 4. In use, the platform 2 bears the load, and the X-axis drive module 5 and Y-axis drive module 4 drive the platform 2 to move in two mutually perpendicular horizontal directions. Since the platform 2 is supported not only by the X-axis drive module 5 and Y-axis drive module 4 but also slidably mounted on the base 1 via the ball bearing layer, the load is mainly applied directly to the base 1 via the ball bearing layer. This reduces the load on the X-axis drive module 5 and Y-axis drive module 4, thereby increasing the load-bearing capacity. Compared to using larger standard parts or adding an extra module, the cost is lower.

[0035] like Figures 3-5 As shown, the ball bearing module also includes a limiting seat 6 and a mounting seat 7. The limiting seat 6 is disposed on the base 1, and the mounting seat 7 is disposed on the bottom surface of the platform 2. Mounting plates 71 are disposed on the top and bottom of the mounting seat 7, and the two mounting plates 71 are arranged in parallel. There are two ball bearing layers, which are respectively placed at the ends of the two mounting plates 71 that are close to each other. The limiting seat 6 is U-shaped, and the mounting seat 7 passes through the limiting seat 6 from top to bottom. The two ball bearing layers roll in contact with the top and bottom surfaces of the limiting seat 6, respectively. In order to achieve stable installation of multiple balls 3, the ball bearing layer also includes a ball bearing seat 8. The ball bearing seat 8 has several ball bearing grooves, and the balls 3 are placed in the corresponding ball bearing grooves. The two ball bearing seats 8 are respectively disposed on the two mounting plates 71. In this way, by setting two ball bearing layers and fixing the two ball bearing layers to the top and bottom surfaces of the limiting seat 6, and assembling the mounting seat 7 on the limiting seat 6, the platform 2 can move horizontally within the range limited by the limiting seat 6.

[0036] like Figure 1 As shown, in order to adapt to some application scenarios that require internal wiring, this embodiment also includes an installation channel. The installation channel runs from bottom to top through the base 1, the platform 2, the mounting base 7 and the two mounting plates 71. In this way, wiring can be carried out through the installation channel, improving the adaptability of this application.

[0037] like Figure 1 As shown, in order to stably drive the platform 2, two X-axis drive modules 5 are provided, with the two X-axis drive modules 5 respectively located on both sides of the platform 2, and the Y-axis drive module 4 located on one side of the platform 2, which improves the compactness of the overall device installation.

[0038] like Figure 1As shown, the X-axis drive module 5 specifically includes a first drive cylinder 51, a first slide block 52, and a first rotating platform 53. The bottom of the first slide block 52 is slidably connected to the base 1, and the first rotating platform 53 is slidably disposed on the top of the first slide block 52. The platform 2 is rotatably connected to the first rotating platform 53. The sliding direction of the first slide block 52 relative to the base 1 and the sliding direction of the first slide block 52 relative to the first rotating platform 53 are perpendicular to each other. The first drive cylinder 51 drives the first slide block 52 to slide on the base 1, causing the platform 2 to move in the X-axis direction. The Y-axis drive module 4 includes a second drive cylinder 41, a second slide block 42, and a second rotating platform 43. The bottom of the second slide block 42 is slidably connected to the base 1, and the second rotating platform 43 is slidably disposed on the top of the second slide block 42. The platform 2 is rotatably connected to the first rotating platform 53. The second slide 42 is rotatably connected to the second rotating platform 43. The sliding direction of the second slide 42 relative to the base 1 and the sliding direction of the second slide 42 relative to the second rotating platform 43 are perpendicular to each other. The second slide 42 is driven to slide on the base 1 by the second driving cylinder 41, so that the driving platform 2 moves in the Y-axis direction (the X-axis and Y-axis are perpendicular to each other). Since the first slide 51 is connected to the platform 2 through the first rotating platform 53, and the second slide 41 is connected to the platform 2 through the second rotating platform 43, and since there are two X-axis driving modules 5, the two first slides 51 can be driven to move relative to each other (the two first slides 51 move in the same or opposite directions) by the two X-axis driving modules 5, so that the platform 2 rotates on the horizontal plane, and has the ability to adjust the load by small-angle rotation.

[0039] Further optimization involves providing several mounting holes on the base 1 to facilitate fixing the device to the machine platform.

[0040] The working principle of this utility model is as follows: In use, the platform 2 provides support. The X-axis drive module 5 and the Y-axis drive module 4 are used to drive the platform 2 to move in two mutually perpendicular horizontal directions. Since the platform 2 is not only supported by the X-axis drive module 5 and the Y-axis drive module 4, but also slidably mounted on the base 1 through a ball bearing layer, the load is mainly applied directly to the base 1 through the ball bearing layer. This reduces the load on the X-axis drive module 5 and the Y-axis drive module 4, thereby increasing the load-bearing capacity. Compared with using larger standard parts or adding an extra set of modules, the cost is lower.

[0041] The above are merely preferred embodiments of this application, and the present invention is not limited to the above embodiments. It is understood that other improvements and variations that can be directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included within the protection scope of the present invention.

Claims

1. A small-space, high-load adjustment mechanism, characterized in that, include: Base (1), platform (2) and ball bearing module; The ball module includes a ball layer, the ball layer includes a plurality of balls (3) distributed in a horizontal direction, and the platform (2) is disposed on the top surface of the base (1) through the ball layer; The base (1) is provided with an X-axis drive module (5) and a Y-axis drive module (4), which are used to drive the platform (2) to move in two mutually perpendicular horizontal directions.

2. The small-space, large-load adjustment mechanism according to claim 1, characterized in that: The ball bearing module also includes a limiting seat (6) and a mounting seat (7). The limiting seat (6) is disposed on the base (1), and the mounting seat (7) is disposed on the bottom surface of the platform (2). The mounting seat (7) is disposed on the limiting seat (6) through the ball bearing layer.

3. The small-space, large-load adjustment mechanism according to claim 2, characterized in that: The mounting base (7) is provided with mounting plates (71) at both the top and bottom, and the two mounting plates (71) are arranged in parallel. Two ball bearing layers are provided, and the two ball bearing layers are respectively placed at the ends of the two mounting plates (71) that are close to each other; The limiting seat (6) is in the shape of a square, and the mounting seat (7) runs through the limiting seat (6) from top to bottom. The two ball bearing layers make rolling contact with the top and bottom surfaces of the limiting seat (6) respectively.

4. The small-space, large-load adjustment mechanism according to claim 3, characterized in that: The ball layer also includes a ball seat (8), on which a plurality of ball grooves are provided, and the balls (3) are placed in the corresponding ball grooves; The two ball bearing seats (8) are respectively mounted on two mounting plates (71).

5. The small-space, large-load adjustment mechanism according to claim 3, characterized in that: It also includes an installation channel that runs from bottom to top through the base (1), the platform (2), the mounting base (7), and the two mounting plates (71).

6. The small-space, large-load adjustment mechanism according to claim 1, characterized in that: There are two X-axis drive modules (5), which are respectively located on both sides of the platform (2).

7. A small-space, large-load adjustment mechanism according to any one of claims 1-6, characterized in that: The X-axis drive module (5) includes a first drive cylinder (51), a first slide block (52) and a first rotating platform (53). The bottom of the first slide block (52) is slidably connected to the base (1). The first rotating platform (53) is slidably disposed on the top of the first slide block (52). The platform (2) is rotatably connected to the first rotating platform (53). The sliding direction of the first slide block (52) relative to the base (1) and the sliding direction of the first slide block (52) relative to the first rotating platform (53) are perpendicular to each other.

8. The small-space, large-load adjustment mechanism according to claim 7, characterized in that: The Y-axis drive module (4) includes a second drive cylinder (41), a second slide (42), and a second rotary table (43). The bottom of the second slide (42) is slidably connected to the base (1), and the second rotary table (43) is slidably disposed on the top of the second slide (42). The platform (2) is rotatably connected to the second rotary table (43). The sliding direction of the second slide (42) relative to the base (1) and the sliding direction of the second slide (42) relative to the second rotary table (43) are perpendicular to each other.

9. The small-space, large-load adjustment mechanism according to claim 1, characterized in that: The Y-axis drive module (4) is located on one side of the platform (2).

10. The small-space, large-load adjustment mechanism according to claim 1, characterized in that: The base (1) is provided with several mounting holes.

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