Anti-adhesion plate assembly and coating device

Abstract

The utility model relates to the technical field of coating, and provides an anti-adhesion plate assembly and a coating device, the anti-adhesion plate assembly comprises a substrate, a first anti-adhesion plate and a second anti-adhesion plate, the first anti-adhesion plate and the second anti-adhesion plate are oppositely arranged on the substrate at an interval, a target material placing area for placing a target material assembly is formed between the first anti-adhesion plate and the second anti-adhesion plate, and the first anti-adhesion plate and the second anti-adhesion plate are arranged on the substrate. The side, away from the substrate, of the first anti-adhesion plate is provided with a first bent part, the side, away from the substrate, of the second anti-adhesion plate is provided with a second bent part, and the first bent part and the second bent part are bent in the direction away from the target placing area. According to the anti-attachment plate assembly, the effective utilization rate of the coating target material and the coating uniformity can be improved.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to an anti-sticking plate assembly and a coating device. Background Technology

[0002] Physical vapor deposition (PVD) is a coating process that uses low-voltage, high-current arc discharge technology under vacuum conditions. The gas discharge evaporates the target material, causing both the evaporated material and the gas to ionize. Accelerated by an electric field, the evaporated material and its reaction products are deposited onto the workpiece. However, the utilization rate of the target material is low during the coating process; it cannot be completely deposited onto the surface of the workpiece, and some target atoms are deposited in other areas of the coating cavity, resulting in target material waste. Utility Model Content

[0003] Based on this, one embodiment of this application provides a target material shield assembly and a coating device with high target material utilization efficiency.

[0004] In a first aspect, this application provides a skid plate assembly, the skid plate assembly comprising:

[0005] Base;

[0006] A first anti-collision plate is disposed on the substrate, and the side of the first anti-collision plate away from the substrate has a first bend.

[0007] The second anti-fall plate is disposed on the base opposite to the first anti-fall plate, and the side of the second anti-fall plate away from the base has a second bend.

[0008] A target placement area for placing the target assembly is formed between the first and second anti-attachment plates; both the first and second bent portions are bent in a direction away from the target placement area.

[0009] In some embodiments, the length of the first bend is 30mm to 50mm in the direction perpendicular to the base.

[0010] In some embodiments, the length of the second bend is 30mm to 50mm in the direction perpendicular to the base.

[0011] In some embodiments, the length of the first anti-stick plate is 230mm to 300mm in the direction perpendicular to the base.

[0012] In some embodiments, the length of the second anti-stick plate is 230mm to 300mm in the direction perpendicular to the base.

[0013] In some embodiments, the first bend is an angled bend or an arc bend.

[0014] In some embodiments, the second bend is an angled bend or an arc bend.

[0015] In some embodiments, the first bend is an arc-shaped bend, and the arc of the first bend is 0~0.5π.

[0016] In some embodiments, the second bend is an arc-shaped bend, and the arc of the second bend is 0~0.5π.

[0017] In some embodiments, a protective layer is provided on the surface of both the first and second anti-spot plates near the target placement area.

[0018] In some embodiments, both the first anti-collision plate and the second anti-collision plate have mounting members at one end near the base.

[0019] Secondly, this application provides a coating apparatus, the coating apparatus comprising:

[0020] A housing having a coating cavity inside, wherein the part to be coated is placed inside the coating cavity;

[0021] A skid plate assembly, wherein the skid plate assembly is as described in the first aspect, and the skid plate assembly is disposed within the coating cavity.

[0022] In some embodiments, the target assembly includes at least two targets spaced apart; the coating apparatus further includes an auxiliary anode disposed on the housing and located between adjacent targets.

[0023] In some embodiments, the coating apparatus further includes a grounding element disposed on the housing, wherein both the first anti-stick plate and the second anti-stick plate are connected to the grounding element.

[0024] Compared with traditional technologies, this utility model has at least the following beneficial effects:

[0025] This application incorporates an anti-attachment plate assembly. Both the first and second anti-attachment plates are bent away from the target assembly on the side closest to the workpiece. This causes the openings in the relative regions between the first and second bends to gradually increase. During the coating process, this constrains the movement of atoms within the target assembly, increasing the atomic deposition on the workpiece surface and improving target utilization. Furthermore, the first and second anti-attachment plates also enhance the concentration stability of glow discharge, thereby improving the uniformity of the film layer on the workpiece. Attached Figure Description

[0026] Figure 1This is a schematic diagram of the structure of an anti-sticking plate assembly in a coating device according to one embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the appearance of the first anti-collision plate in an anti-collision plate assembly provided in one embodiment of the present utility model;

[0028] Figure 3 This is a schematic diagram of the anti-sticking plate assembly in another coating device provided in one embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the structure of the anti-sticking plate assembly in a coating device according to one embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the coating device in Comparative Example 1 of this utility model.

[0031] Among them, 10-first anti-attachment plate; 11-first bending part; 12-protective layer; 13-mounting part; 20-second anti-attachment plate; 21-second bending part; 30-target material assembly; 40-shell; 50-workpiece to be plated; 60-auxiliary anode. Detailed Implementation

[0032] The present invention will be further described in detail below with reference to the accompanying drawings, embodiments, and examples. These embodiments and examples are for illustrative purposes only and are not intended to limit the scope of the present invention. The purpose of providing these embodiments and examples is to enable a more thorough and comprehensive understanding of the disclosure of the present invention. It should also be understood that the present invention can be implemented in many different forms and is not limited to the embodiments and examples described herein. Those skilled in the art can make various modifications or alterations without departing from the spirit of the present invention, and the equivalent forms obtained also fall within the protection scope of the present invention. Furthermore, numerous specific details are set forth in the following description to provide a fuller understanding of the present invention. It should be understood that the present invention can be implemented without one or more of these details.

[0033] It should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," "fixed," and "set" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the meaning of the above terms in this utility model according to the specific circumstances.

[0035] In this utility model, "optionally", "optionally", and "optional" mean that they are optional, that is, they are selected from either "with" or "without". If there are multiple "options" in a technical solution, unless otherwise specified, and there are no contradictions or mutual constraints, each "option" is independent.

[0036] In this utility model, the technical features described in an open-ended manner include both closed technical solutions composed of the listed features and open technical solutions that include the listed features.

[0037] In this utility model, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or quantity, nor should they be construed as implicitly indicating the importance or quantity of the indicated technical features. Moreover, "first," "second," etc., serve only as a non-exhaustive enumeration and should be understood not to constitute a closed limitation on quantity.

[0038] All documents mentioned in this utility model are incorporated herein by reference as if each document were individually incorporated by reference. Unless they conflict with the utility model's purpose and / or technical solution, all cited documents are incorporated herein by reference in their entirety and for all purposes. When citing documents in this utility model, the definitions of relevant technical features, terms, nouns, phrases, etc., are also incorporated herein by reference. Examples and preferred embodiments of the cited technical features may also be incorporated herein by reference, but only to the extent that they enable the implementation of this utility model. It should be understood that when the cited content conflicts with the description in this utility model, this utility model shall prevail or be adapted to the description in this utility model.

[0039] In traditional technologies, to save internal space in the coating apparatus, multiple targets are placed inside, with vertical partitions separating adjacent targets to prevent sputtering and deposition onto adjacent targets during the coating process, thus affecting target quality. However, during the coating process, although the partitions can prevent sputtering between adjacent targets, target atoms can still sputter to other areas, resulting in low target utilization.

[0040] Based on this, the first aspect of this application provides an anti-collision plate assembly, such as... Figure 1 and Figure 2 As shown, the anti-collision plate assembly includes a base, a first anti-collision plate 10, and a second anti-collision plate 20.

[0041] The first anti-spot plate 10 is disposed on the substrate and has a first bend 11 on the side away from the substrate. The second anti-spot plate 20 is disposed on the substrate opposite to the first anti-spot plate 10, and has a second bend 21 on the side away from the substrate.

[0042] A target placement area for placing the target assembly 30 is formed between the first anti-collision plate 10 and the second anti-collision plate 20. The first bending portion 11 and the second bending portion 21 are both bent in a direction away from the target placement area.

[0043] This application incorporates a shielding plate assembly. The first shielding plate 10 and the second shielding plate 20 are both bent away from the target assembly 30 on the side closest to the workpiece 50. This causes the openings in the relative areas between the first bending portion 11 and the second bending portion 21 of the first shielding plate 10 and the second shielding plate 20 to gradually increase. During the coating process, this can constrain the movement direction of atoms in the target assembly 30, increasing the atomic deposition amount on the surface of the workpiece 50 and improving target utilization. Furthermore, the first shielding plate 10 and the second shielding plate 20 can also improve the concentration stability of glow discharge, thereby improving the uniformity of the film layer on the workpiece 50.

[0044] It is understandable that the openings of the first anti-collision plate 10 and the second anti-collision plate 20 in the relative areas between the first bend 11 and the second bend 21 gradually increase. For example, the first bend 11 and the second bend 21 are arranged in a trumpet-shaped structure to form a structure with gradually increasing openings.

[0045] It is understood that the substrate in this application can be a support plate for placing the target assembly 30, or it can be part of the housing in the coating device, as long as it can achieve relative fixation of the first anti-attachment plate 10 and the second anti-attachment plate 20.

[0046] It is understandable that, such as Figure 1 As shown, in the direction perpendicular to the substrate, the length H1 of the first anti-attachment plate 10 is greater than the length H2 of the target assembly 30. In the direction perpendicular to the substrate, the length of the second anti-attachment plate 20 is greater than the length of the target assembly 30. By setting the lengths of the first anti-attachment plate 10 and the second anti-attachment plate 20 as described above, this application can improve the constraint on the movement of atoms generated in the target assembly 30 during the coating process, thereby improving the target utilization rate.

[0047] In some embodiments, in the direction perpendicular to the substrate, the difference between the length H1 of the first anti-attachment plate 10 and the length H2 of the target assembly 30 is 30mm to 50mm, for example, it can be 30mm, 32mm, 34mm, 36mm, 38mm, 40mm, 42mm, 44mm, 46mm, 48mm or 50mm.

[0048] In some embodiments, the difference between the length of the second anti-attachment plate 20 and the length of the target assembly 30 in the direction perpendicular to the substrate is 30mm to 50mm, for example, it can be 30mm, 32mm, 34mm, 36mm, 38mm, 40mm, 42mm, 44mm, 46mm, 48mm, or 50mm. By selecting the length difference between the first anti-attachment plate 10 and the target assembly 30, and the length difference between the second anti-attachment plate 20 and the target assembly 30 as described above, this application can improve the constraint effect on target atoms and the glow discharge concentration effect during the coating process.

[0049] In some embodiments, as Figure 1 As shown, in the direction perpendicular to the base, the length H3 of the first bending portion 11 is 30mm to 50mm, for example, it can be 30mm, 32mm, 34mm, 36mm, 38mm, 40mm, 42mm, 44mm, 46mm, 48mm or 50mm.

[0050] In some embodiments, such as Figure 1 As shown, in the direction perpendicular to the base, the length of the second bend 21 is 30mm to 50mm, for example, it can be 30mm, 32mm, 34mm, 36mm, 38mm, 40mm, 42mm, 44mm, 46mm, 48mm or 50mm.

[0051] In some embodiments, the length H1 of the first anti-attachment plate 10 in the direction perpendicular to the substrate is 230mm to 300mm, for example, it can be 230mm, 240mm, 250mm, 260mm, 270mm, 280mm, 290mm or 300mm.

[0052] In some embodiments, the length of the second anti-attachment plate 20 in the direction perpendicular to the substrate is 230mm to 300mm, for example, it can be 230mm, 240mm, 250mm, 260mm, 270mm, 280mm, 290mm or 300mm.

[0053] In some embodiments, the first bending portion 11 is a folded angle or an arc-shaped bend.

[0054] In some embodiments, the second bending portion 21 has an angled bend or an arc-shaped structure.

[0055] In this application, the first bending portion 11 and the second bending portion 21 can be either a flat plate structure or an arc-shaped plate structure, such as... Figure 3 As shown, both the first bend 11 and the second bend 21 are arc-shaped bends, as... Figure 4 As shown, both the first bending portion 11 and the second bending portion 21 are bent at an angle, which can form a trumpet-shaped arrangement with gradually increasing openings, so as to achieve the constraint of target material atoms and the glow concentration effect.

[0056] In some embodiments, such as Figure 3 As shown, the first bending portion 11 is curved, and the curvature of the first bending portion 11 is 0~0.5π, for example, it can be 0.05π, 0.10π, 0.15π, 0.20π, 0.25π, 0.30π, 0.35π, 0.40π, 0.45π or 0.50π. It can be selected as 0.15π~0.35π.

[0057] In some embodiments, such as Figure 3 As shown, the second bend 21 is arc-shaped, and the curvature of the second bend 21 is 0~0.5π, for example, it can be 0.05π, 0.10π, 0.15π, 0.20π, 0.25π, 0.30π, 0.35π, 0.40π, 0.45π or 0.50π. It can be selected as 0.15π~0.35π.

[0058] In this application, the first bending portion 11 and the second bending portion 21 are arc-shaped plate structures, which can improve the confinement of target atoms and improve glow concentration.

[0059] In some embodiments, such as Figure 1 As shown, both the first anti-attachment plate 10 and the second anti-attachment plate 20 have a protective layer 12 on the surface near the target placement area. Optionally, the material of the protective layer 12 is selected to have low adhesion to the target material and not react with the target material, so as to reduce the deposition of target atoms onto the anti-attachment plate. For example, the material of the protective layer 12 can be zinc. The thickness of the protective layer 12 is 100nm~1000nm.

[0060] In some embodiments, the thickness of the first anti-collision plate 10 is 4mm to 8mm.

[0061] In some embodiments, the thickness of the second anti-collision plate 20 is 4mm to 8mm.

[0062] In some embodiments, the first anti-collision plate 10 and the second anti-collision plate 20 are both provided with mounting members 13 at one end near the substrate.

[0063] In some embodiments, the mounting member 13 may be a fixing plate disposed on the first anti-collision plate 10 or the second anti-collision plate 20, and the fixing plate may be used to fix the anti-collision plate assembly by means of bolts or the like. Optionally, the width of the fixing plate may be 70mm to 750mm, and the thickness may be 4mm to 8mm. Further, the length of the fixing plate may be adjusted according to the length of the target assembly 30.

[0064] The second aspect of this application provides a coating apparatus, such as Figure 3 As shown, the coating apparatus includes a housing 40 and the aforementioned anti-stick plate assembly.

[0065] The housing 40 has a coating cavity, and the part to be coated 50 is placed inside the coating cavity. The anti-sticking plate assembly is also located inside the coating cavity.

[0066] In some embodiments, the target assembly 30 includes at least two targets spaced apart; the coating apparatus further includes an auxiliary anode 60 disposed on the housing 40 and located between adjacent targets.

[0067] In some embodiments, the coating apparatus further includes a grounding member (not shown in the figure), which is disposed on the housing 40, and the first anti-attachment plate 10 and the second anti-attachment plate 20 are both connected to the grounding member. In this application, the first anti-attachment plate 10 and the second anti-attachment plate 20 are connected to the grounding member, so that the first anti-attachment plate 10 and the second anti-attachment plate 20 act as anode partitions, capable of adsorbing negative oxygen ions in the plasma region during the coating process, reducing the bombardment damage of high-energy negative oxygen ions to the workpiece 50 to form the film, thereby improving the film quality.

[0068] It is understandable that after the target assembly 30 is placed, the position of the target assembly 30 or the aforementioned anti-attachment plate assembly is adjusted so that the length of the first anti-attachment plate 10 and the length of the second anti-attachment plate 20 are greater than the length of the target assembly 30 in the direction perpendicular to the shell.

[0069] The embodiments of this application will be described in detail below with reference to examples. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of this application. For experimental methods in the following embodiments where specific conditions are not specified, please refer to the guidelines given in this application, or follow experimental manuals or conventional conditions in the art, or follow the conditions recommended by the manufacturer, or refer to experimental methods known in the art.

[0070] Example 1

[0071] This embodiment provides a coating apparatus, such as Figure 3As shown, it includes a housing 40 and an anti-stick plate assembly. The housing 40 has a coating cavity, and the workpiece to be coated 50 and the target assembly 30 are placed inside the coating wall; wherein, the target assembly 30 includes two targets spaced apart and an auxiliary anode 60 disposed between the two targets.

[0072] The anti-attachment plate assembly is disposed in the coating cavity, including a first anti-attachment plate 10 and a second anti-attachment plate 20 that are arranged opposite to each other and spaced apart. The first anti-attachment plate 10 and the second anti-attachment plate 20 are fixedly installed in the housing 40 by mounting plate bolts. The target material assembly 30 is located in the target material placement area between the first anti-attachment plate 10 and the second anti-attachment plate 20. The surface of the first anti-attachment plate 10 and the second anti-attachment plate 20 near the target material placement area is provided with a zinc layer with a thickness of 500nm. In the direction perpendicular to the substrate, the length of the first anti-attachment plate 10 and the second anti-attachment plate 20 is 300mm, the length of the first bend 11 and the second bend 21 is 40mm, the first bend 11 and the second bend 21 are both arc-shaped bends, the arc of the first bend 11 and the second bend 21 is π / 3, and the height refers to the length in the direction perpendicular to the housing.

[0073] The coating device also includes a grounding wire disposed on the housing 40, which is connected to the first anti-stick plate 10 and the second anti-stick plate 20 respectively.

[0074] Example 2

[0075] It is basically the same as the coating device in Example 1, except that the curvature of the first bending part 11 and the second bending part 21 is π / 6.

[0076] Example 3

[0077] It is basically the same as the coating device in Example 1, except that the curvature of the first bending part 11 and the second bending part 21 is π / 4.

[0078] Example 4

[0079] It is basically the same as the coating device in Example 1, except that the curvature of the first bending part 11 and the second bending part 21 is π / 2.

[0080] Example 5

[0081] The coating apparatus is basically the same as that in Example 1, except that, for example... Figure 4 As shown, both the first bend 11 and the second bend 21 are angled bends, and the inclination angle of the first bend 11 and the second bend 21 is 60°.

[0082] Comparative Example 1

[0083] The coating apparatus is basically the same as that in Example 1, except that, for example... Figure 5As shown, both the first anti-fall plate 10 and the second anti-fall plate 20 are replaced with flat plates of the same height.

[0084] Comparative Example 2

[0085] It is basically the same as the coating device in Example 1, except that the first anti-stick plate 10 is replaced with a flat plate of the same height.

[0086] Comparative Example 3

[0087] The coating apparatus is basically the same as that in Example 1, except that the second anti-stick plate 20 is replaced with a flat plate of the same height.

[0088] The coating apparatus described in the above embodiments and comparative examples was used for coating tests. An ITO ceramic target with a length of 1922 mm and an outer diameter of 153 mm was used, with an indium oxide to tin oxide mass ratio of 9:1. The substrate 50 consisted of crystalline silicon solar cells arranged in 9 rows and 8 columns within a carrier plate, i.e., 9 × 12 crystalline silicon solar cells were placed within one carrier plate. The power supply during the coating process was 12 kW, the argon flow rate was 1200 sccm, and the oxygen flow rate was 20 sccm. The coated crystalline silicon solar cells were tested, and the effective utilization rate of the target material and the uniformity of the film layer were calculated. The effective utilization rate of the target material was the ratio of the total mass of the film layer on the substrate 50 to the initial mass of the target material. The uniformity of the film layer was calculated based on the dispersion of the film thickness difference among different crystalline silicon solar cells within the same carrier plate. The thickness of the crystalline silicon solar cells was measured using an ellipsometry (T-Solar M2000). The test results are shown in Table 1.

[0089] Table 1

[0090]

[0091] As can be seen from the table above:

[0092] (1) Compared with Examples 2-4, it can be seen that by controlling the curvature of the first bending part 11 and the second bending part 21, this application can improve the effective utilization rate of the target material and improve the uniformity of the coating.

[0093] (2) Compared with Example 5, Example 1 shows that by using arc bending in the first bending part 11 and the second bending part 21, this application has better target material utilization and film uniformity.

[0094] (3) Compared with Comparative Examples 1-3, it can be seen that by setting the anti-attachment plate assembly, the first anti-attachment plate 10 and the second anti-attachment plate 20 are both bent away from the target material assembly 30 on the side near the workpiece 50 to be coated. This makes the opening of the relative area between the first anti-attachment plate 10 and the second anti-attachment plate 20 between the first bending portion 11 and the second bending portion 21 gradually larger. During the coating process, the movement direction of atoms in the target material assembly 30 can be constrained, the amount of atomic deposition on the surface of the workpiece 50 to be coated can be increased, and the utilization rate of the target material can be improved. In addition, the first anti-attachment plate 10 and the second anti-attachment plate 20 can also improve the concentration stability of glow discharge, thereby improving the uniformity of the film layer on the workpiece 50 to be coated.

[0095] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0096] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the appended claims.

Claims

1. A protective plate assembly, characterized in that, The anti-fall plate assembly includes: Base; A first anti-collision plate (10) is disposed on the substrate, and the first anti-collision plate (10) has a first bend (11) on the side away from the substrate. The second anti-collision plate (20) is disposed on the base opposite to the first anti-collision plate (10), and the second anti-collision plate (20) has a second bend (21) on the side away from the base. A target placement area for placing the target assembly (30) is formed between the first anti-attachment plate (10) and the second anti-attachment plate (20); the first bending portion (11) and the second bending portion (21) are both bent in a direction away from the target placement area.

2. The anti-collision plate assembly as described in claim 1, characterized in that, In the direction perpendicular to the base, the length of the first bend (11) is 30mm~50mm; and / or, In the direction perpendicular to the base, the length of the second bend (21) is 30mm to 50mm.

3. The anti-collision plate assembly as described in claim 1, characterized in that, In the direction perpendicular to the base, the length of the first anti-collision plate (10) is 230mm~300mm; and / or, In the direction perpendicular to the base, the length of the second anti-stick plate (20) is 230mm~300mm.

4. The anti-collision plate assembly as described in claim 1, characterized in that, The first bend (11) is an angled bend or an arc bend; and / or, The second bend (21) is a bend at an angle or an arc bend.

5. The anti-collision plate assembly as described in claim 4, characterized in that, The first bend (11) is arc-shaped, and the curvature of the first bend (11) is 0~0.5π; and / or, The second bend (21) is curved, and the curvature of the second bend (21) is 0~0.5π.

6. The anti-collision plate assembly as described in claim 1, characterized in that, The first anti-attachment plate (10) and the second anti-attachment plate (20) are both provided with a protective layer (12) on the side surface near the target placement area.

7. The anti-collision plate assembly as described in any one of claims 1-6, characterized in that, Both the first anti-fall plate (10) and the second anti-fall plate (20) have mounting parts (13) at one end near the base.

8. A coating apparatus, characterized in that, The coating apparatus includes: The housing (40) has a coating cavity inside, and the part to be coated (50) is placed inside the coating cavity. A skid plate assembly, wherein the skid plate assembly is the skid plate assembly according to any one of claims 1-7, and the skid plate assembly is disposed in the coating cavity.

9. The coating apparatus as described in claim 8, characterized in that, The target assembly (30) includes at least two targets spaced apart; the coating apparatus also includes an auxiliary anode (60), which is disposed on the housing (40) and located between adjacent targets.

10. The coating apparatus as described in claim 8 or 9, characterized in that, The coating device further includes a grounding component, which is disposed on the housing (40). The first anti-stick plate (10) and the second anti-stick plate (20) are both connected to the grounding component.

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