Vacuum heating system for substrate heating

Abstract

The utility model relates to the technical field of substrate heating, and discloses a vacuum heating system for substrate heating, which comprises a support column and a shell fixedly arranged above the support column. A magnetic fluid is arranged on one side of the interior of the shell, and a ceramic plate is arranged on one side of the magnetic fluid. Compared with a traditional device, the device not only solves the soft installation problem and the safety problem, but also guarantees vacuum through the structure, meanwhile, installation and adjustment are more convenient through the structural design, ceramic materials can achieve heat preservation, the structure is simple, and radiation heat of the upper heater and the lower heater is combined. The heat can be concentrated in the heating chamber, the loss is reduced, and the heating efficiency is improved; the device is convenient to mount and simple to operate, ensures the stability of the structure, is convenient to mount and adjust, and has the characteristics of high temperature rise speed, high heat preservation capability, flexibility in mounting, simple structure, high safety and easiness in mounting and operation.

Description

Technical Field

[0001] This utility model relates to the field of substrate heating technology, and more specifically, to a vacuum heating system for substrate heating. Background Technology

[0002] Substrate heating is an important step in semiconductor manufacturing, coating technology, and other industrial processes. It involves heating the substrate to remove impurities, improve material properties, and promote film adhesion, among other purposes.

[0003] Vacuum heating devices are typically used when heating substrates. However, when using conventional vacuum heating devices, the internal temperature rises, causing the external temperature to also increase, making operation more complicated. Vacuum heating devices are indispensable key equipment in substrate heating processes. However, in traditional devices, the internal heating process is often accompanied by a significant increase in external temperature. This not only exacerbates the heat load on the operating environment but may also lead to operational inconvenience and even affect the safety of operators. Therefore, it is necessary to modify and optimize them. Utility Model Content

[0004] In order to overcome the shortcomings of the prior art, this utility model provides a vacuum heating system for substrate heating, which has the advantage of strong heat preservation capability.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum heating system for substrate heating, comprising a support column and a housing, characterized in that: the housing is fixedly disposed above the support column;

[0006] A magnetic fluid is provided on one side of the interior of the outer casing. A ceramic plate is provided on the side of the magnetic fluid. A ceramic heater five is provided in the middle of the ceramic plate. One end of the ceramic heater five extends to the outside of the ceramic plate. A heat-absorbing molybdenum plate is provided at the bottom of the ceramic heater five. A ceramic heater one is provided at the bottom of the heat-absorbing molybdenum plate. A ceramic heater three is provided at the bottom of the ceramic heater one. A ceramic heater two is provided at the bottom of the ceramic heater three. The bottom of the ceramic heater two extends to the bottom of the outer casing. Heater inlet and outlet electrodes are provided at the bottom of the outer casing. A ceramic block is provided at one end of the ceramic heater five. A ceramic heater four is provided above the ceramic heater five. An external drive motor is provided at the bottom of the outer casing.

[0007] As a preferred technical solution of this utility model, the number of ceramic heaters is eight, and four ceramic heaters are grouped into two groups, which are respectively arranged on the upper and lower sides of the outer shell.

[0008] As a preferred embodiment of this utility model, the top of the heater inlet and outlet electrodes extends into the interior of the housing, and two heater inlet and outlet electrodes are provided on both the upper and lower sides of the housing.

[0009] As a preferred embodiment of this utility model, the four heater inlet and outlet electrodes are respectively disposed at the two ends of the upper and lower sides of the outer casing, and one end of the magnetofluid extends into the interior of the ceramic plate.

[0010] As a preferred embodiment of this utility model, a protective shell is provided at the bottom of the outer casing, and the protective shell is located outside the inlet and outlet electrodes of the heater.

[0011] As a preferred embodiment of this utility model, the number of the support pillars is four, and the four support pillars are evenly arranged at the bottom of the outer shell.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] Powered by the heater's inlet and outlet electrodes, the ceramic heater 1 radiates heat from the upper vacuum layer; the ceramic heater 2 maintains the set temperature through temperature control; the ceramic heater 3 is insulated with sheet metal to prevent heat leakage; the ceramic heater 4 and the heat-absorbing molybdenum plate absorb heat and transfer it to the material and rollers; the ceramic heater 5 drives and conducts heat to the material; the ceramic block maintains and stabilizes the cavity temperature; and the rollers are remotely driven by a magnetic fluid and an external drive motor, allowing for flexible material movement. Compared to traditional devices, this device not only solves the problems of soft installation and safety, and ensures vacuum, but also makes installation and adjustment more convenient through its structural design. The ceramic material provides insulation and has a simple structure. Combined with the radiant heat from the upper and lower heaters, heat can be concentrated in the heating chamber, reducing heat loss and improving heating efficiency. This device is easy to install and operate, ensuring structural stability and convenient installation and adjustment. It features rapid heating, strong heat preservation capabilities, flexible installation, simple structure, high safety, and ease of installation and operation. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a side view of the present invention.

[0016] Figure 3 This is a schematic diagram of the cross-sectional structure of the utility model;

[0017] Figure 4 This is a schematic diagram of the bottom structure of this utility model;

[0018] Figure 5 This is a cross-sectional structural diagram of the present invention.

[0019] In the diagram: 1. Heater inlet and outlet electrodes; 2. Ceramic heater one; 3. Ceramic heater two; 4. Ceramic heater three; 5. Ceramic heater four; 6. Ceramic heater five; 7. Ceramic block; 8. Magnetorheological fluid; 9. External drive motor; 10. Heat-absorbing molybdenum plate; 11. Ceramic plate; 12. Support column; 13. Outer shell; 14. Protective shell. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] like Figures 1 to 5 As shown, this utility model provides a vacuum heating system for substrate heating, including a support column 12 and a housing 13, with the housing 13 fixedly disposed above the support column 12;

[0022] A magnetic fluid 8 is provided on one side inside the outer casing 13. A ceramic plate 11 is provided on one side of the magnetic fluid 8. A ceramic heater 6 is provided in the middle of the ceramic plate 11. One end of the ceramic heater 6 extends to the outside of the ceramic plate 11. A heat-absorbing molybdenum plate 10 is provided at the bottom of the ceramic heater 6. A ceramic heater 2 is provided at the bottom of the heat-absorbing molybdenum plate 10. A ceramic heater 4 is provided at the bottom of the ceramic heater 2. A ceramic heater 3 is provided at the bottom of the ceramic heater 4. The bottom of the ceramic heater 3 extends to the bottom of the outer casing 13. A heater inlet / outlet electrode 1 is provided at the bottom of the outer casing 13. A ceramic block 7 is provided at one end of the ceramic heater 6. A ceramic heater 5 is provided above the ceramic heater 6. An external drive motor 9 is provided at the bottom of the outer casing 13.

[0023] Ceramic heater 1 is powered by the heater inlet / outlet electrodes 1. Ceramic heater 1 operates in the upper layer inside the vacuum chamber, radiating heat downwards. Ceramic heater 2 monitors the temperature in real time and adjusts the heater power according to feedback to maintain the set temperature. Ceramic heater 3 effectively blocks excess radiant heat to prevent heat leakage. Ceramic heater 4 and the heat-absorbing molybdenum plate 10 absorb the radiant heat from ceramic heater 1, ensuring that the heat is evenly distributed and then transferred to the material below or the material above and the ceramic rollers. Ceramic heater 5 absorbs heat while moving the material and transferring heat to the material to be heated through contact. Ceramic block 7 plays a role in heat preservation, maintaining a stable temperature inside the chamber. Magnetofluid 8 works in conjunction with the external drive motor 9 to achieve remote driving of the ceramic rollers on the vacuum side from the atmospheric side, allowing the material to move flexibly within the vacuum chamber. The entire system works in concert to form a highly efficient and precise transmissive substrate heating vacuum heating system.

[0024] Power is supplied through the heater inlet / outlet electrodes 1. Ceramic heater 1 (2) radiates heat from the upper vacuum layer. Ceramic heater 2 (3) maintains the set temperature through temperature control. Ceramic heater 3 (4) is insulated with sheet metal to prevent heat leakage. Ceramic heater 4 (5) and the heat-absorbing molybdenum plate 10 absorb heat and transfer it to the material and rollers. Ceramic heater 5 (6) drives and conducts heat to the material. Ceramic block 7 maintains and stabilizes the cavity temperature. Magnetic fluid 8 and an external drive motor 9 remotely drive the rollers, allowing for flexible material movement. Compared to traditional devices, this device not only solves the problems of soft installation and safety, and ensures vacuum, but also makes installation and adjustment more convenient through its structural design. The ceramic material provides insulation and has a simple structure. Combined with the radiant heat from the upper and lower heaters, heat can be concentrated in the heating chamber, reducing losses and improving heating efficiency. This device is easy to install and operate, ensuring structural stability and convenient installation and adjustment. It features rapid heating, strong heat preservation, flexible installation, simple structure, high safety, and easy installation and operation.

[0025] The number of ceramic heaters 23 is eight, and they are divided into two groups of four ceramic heaters 23, which are respectively set on the upper and lower sides of the outer shell 13.

[0026] The eight ceramic heaters are arranged in two groups, one above the other, with precise temperature control of the two groups of heaters to ensure uniform and stable temperature in the cavity, thereby improving heating efficiency and quality.

[0027] The top of the heater inlet / outlet electrode 1 extends into the interior of the housing 13, and two heater inlet / outlet electrodes 1 are provided on both the upper and lower sides of the housing 13.

[0028] By designing the heater inlet and outlet electrodes 1, which extend into the outer casing 13, two electrodes on each side ensure comprehensive heating and improve system stability and heat transfer efficiency.

[0029] The four heater inlet and outlet electrodes 1 are respectively located at the two ends of the upper and lower sides of the outer casing 13, and one end of the magnetic fluid 8 extends into the interior of the ceramic plate 11.

[0030] The four outer casings 13 at the top and bottom ensure uniform power supply, while the magnetic fluid 8-connected ceramic plate 11 enables remote power transmission and enhances system flexibility.

[0031] The bottom of the outer casing 13 is provided with a protective shell 14, which is located outside the heater inlet and outlet electrodes 1.

[0032] The protective shell 14 at the bottom of the outer shell 13 protects the heater's inlet and outlet electrodes 1 from direct contact, enhancing system safety and stability while optimizing heat distribution.

[0033] There are four pillars 12, which are evenly arranged at the bottom of the outer shell 13.

[0034] Four pillars 12 are evenly distributed at the bottom of the outer shell 13 to ensure stable support and balanced load-bearing, thereby improving the overall stability and heating efficiency of the system.

[0035] Working principle and usage process of this utility model:

[0036] Ceramic heater 1 is powered by the heater inlet / outlet electrodes 1. Ceramic heater 1 operates in the upper layer inside the vacuum chamber, radiating heat downwards. Ceramic heater 2 monitors the temperature in real time and adjusts the heater power according to feedback to maintain the set temperature. Ceramic heater 3 effectively blocks excess radiant heat to prevent heat leakage. Ceramic heater 4 and the heat-absorbing molybdenum plate 10 absorb the radiant heat from ceramic heater 1, ensuring that the heat is evenly distributed and then transferred to the material below or the material above and the ceramic rollers. Ceramic heater 5 absorbs heat while moving the material and transferring heat to the material to be heated through contact. Ceramic block 7 plays a role in heat preservation, maintaining a stable temperature inside the chamber. Magnetofluid 8 works in conjunction with the external drive motor 9 to achieve remote driving of the ceramic rollers on the vacuum side from the atmospheric side, allowing the material to move flexibly within the vacuum chamber. The entire system works in concert to form a highly efficient and precise transmissive substrate heating vacuum heating system.

[0037] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum heating system for heating a substrate, comprising a support column (12) and a housing (13), characterized in that: The outer casing (13) is fixedly mounted above the support column (12); A magnetic fluid (8) is provided on one side inside the outer shell (13). A ceramic plate (11) is provided on one side of the magnetic fluid (8). A ceramic heater five (6) is provided in the middle of the ceramic plate (11). One end of the ceramic heater five (6) extends to the outside of the ceramic plate (11). A heat-absorbing molybdenum plate (10) is provided at the bottom of the ceramic heater five (6). A ceramic heater one (2) is provided at the bottom of the heat-absorbing molybdenum plate (10). A ceramic heater three (4) is provided at the bottom of the ceramic heater one (2). A ceramic heater two (3) is provided at the bottom of the ceramic heater three (4). The bottom of the ceramic heater two (3) extends to the bottom of the outer shell (13). A heater inlet and outlet electrode (1) is provided at the bottom of the outer shell (13). A ceramic block (7) is provided at one end of the ceramic heater five (6). A ceramic heater four (5) is provided above the ceramic heater five (6). An external drive motor (9) is provided at the bottom of the outer shell (13).

2. The vacuum heating system for substrate heating according to claim 1, characterized in that: The number of ceramic heaters (3) is eight, and they are divided into two groups of four ceramic heaters (3) each, which are respectively set on the upper and lower sides of the outer shell (13).

3. The vacuum heating system for substrate heating according to claim 1, characterized in that: The top of the heater inlet / outlet electrode (1) extends into the interior of the housing (13), and two heater inlet / outlet electrodes (1) are provided on both the upper and lower sides of the housing (13).

4. A vacuum heating system for substrate heating according to claim 3, characterized in that: The four heater inlet and outlet electrodes (1) are respectively disposed at the two ends of the upper and lower sides of the outer casing (13), and one end of the magnetic fluid (8) extends into the interior of the ceramic plate (11).

5. A vacuum heating system for substrate heating according to claim 1, characterized in that: The bottom of the outer casing (13) is provided with a protective shell (14), which is located outside the heater inlet and outlet electrodes (1).

6. A vacuum heating system for substrate heating according to claim 1, characterized in that: The number of the pillars (12) is four, and the four pillars (12) are evenly arranged at the bottom of the outer shell (13).

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