Preheating structure and ALD equipment

Abstract

The utility model belongs to the technical field of thin film deposition, and discloses a preheating structure and ALD (atomic layer deposition) equipment, the preheating structure comprises a preheating chamber, a preheating device and a controller, the preheating chamber is provided with a preheating cavity, and a transmission piece and a plurality of pyrometers are arranged in the preheating cavity; the preheating device comprises a lamp tube, a reflecting cover and a driving part, the reflecting cover is rotationally connected with the preheating chamber, the reflecting cover is arranged around the peripheral wall of part of the lamp tube and forms a hot light outlet facing the transmission part, the driving part is connected with the reflecting cover to drive the reflecting cover to rotate, and the driving part rotates the reflecting cover corresponding to the normal lamp tube; a hot light outlet corresponding to a normal lamp tube is inclined towards a low-temperature area of the substrate, and the heating degree of each point on the surface of the substrate is adjusted to be consistent, so that the substrate is uniformly heated, and the uniformity and consistency of subsequent film formation of the substrate are ensured.

Description

Technical Field

[0001] This utility model relates to the field of thin film deposition technology, and in particular to a preheating structure and ALD equipment. Background Technology

[0002] Atomic Layer Deposition (ALD) is a high-precision thin film deposition technology based on chemical vapor deposition. Its principle is to deposit materials as single-atom films layer by layer onto the substrate surface using chemical vapor deposition. During ALD operation, before the substrate enters the reaction chamber for deposition, it is preheated to a specific temperature by lamps at the top of the preheating chamber. In existing ALD equipment, several lamps in the preheating chamber operate continuously, and some inevitably experience performance degradation. The inconsistent preheating performance of different lamps leads to uneven substrate preheating temperatures, resulting in inconsistent growth rates at various points on the substrate surface and poor uniformity or consistency of the deposited film. Utility Model Content

[0003] The purpose of this invention is to provide a preheating structure that can ensure uniform heating of the substrate, thereby ensuring the uniformity and consistency of film formation.

[0004] To achieve this objective, the present invention adopts the following technical solution: a preheating structure, comprising a preheating chamber, a preheating device, and a controller. The preheating chamber has a preheating cavity, within which a transmission element and multiple pyrometers are disposed at intervals above the transmission element along the transmission direction of the transmission element. The preheating device comprises a lamp, a reflector, and a driving element. The reflector is rotatably connected to the preheating chamber. The lamp is located between the transmission element and the pyrometers and is connected to the reflector. The reflector surrounds a portion of the outer peripheral wall of the lamp and forms a heat and light outlet facing the transmission element. A reflective layer is provided on the inner wall of the reflector surrounding the lamp. The driving element is connected to the reflector to drive the reflector to rotate. Multiple preheating devices are disposed at intervals along the transmission direction of the transmission element. The controller is electrically connected to the pyrometers, the lamp, and the driving element.

[0005] Preferably, the preheating device further includes a cooling component, which is installed on the side of the reflector opposite to the lamp tube.

[0006] Preferably, the cooling component includes a plurality of cooling pipes filled with refrigerant, the plurality of cooling pipes being arranged at circumferential intervals along the reflector.

[0007] Preferably, the inner diameter of the reflector gradually increases from top to bottom in the vertical direction.

[0008] Preferably, the reflector is in the shape of an arc concentric with the lamp tube.

[0009] Preferably, the lamp tube is configured as an infrared lamp tube, and the reflective layer is configured as a gold-plated layer.

[0010] Preferably, the lamp tube is configured as an infrared lamp tube, and the reflector is configured as a molybdenum metal part.

[0011] Preferably, the controller further includes a display that is electrically connected to the pyrometer.

[0012] Another objective of this invention is to provide an ALD device that ensures uniform heating of the substrate in the preheating chamber, thereby ensuring the uniformity and consistency of film formation on the substrate in the subsequent reaction chamber.

[0013] To achieve this objective, the present invention adopts the following technical solution: an ALD device, comprising a reaction chamber, a cooling chamber, and the aforementioned preheating structure, wherein the preheating chamber, the reaction chamber, and the cooling chamber are arranged sequentially along the transmission direction of the transmission component.

[0014] Preferably, the reaction chamber is also provided with a plurality of preheating devices, which are spaced apart along the transmission direction of the transmission member.

[0015] The beneficial effects of this utility model are as follows: By setting up a controller and a preheating device, the controller can detect the temperature of the substrate on the transmission component through a pyrometer. When the preheating efficiency of some lamps is low and the temperature of some parts of the substrate is low, the controller controls the drive component to start. The drive component rotates the reflector corresponding to the normal lamp adjacent to the lamp with low efficiency, so that the heat and light outlet corresponding to the normal lamp is tilted towards the area of ​​the substrate with low temperature, thereby compensating for the low temperature area and adjusting the degree of heating of each point on the substrate surface to be consistent, thereby ensuring that the substrate is heated evenly and maintaining the substrate in a state of uniform temperature distribution, thus ensuring the uniformity and consistency of subsequent film formation on the substrate.

[0016] This invention also provides an ALD device in which the substrate is heated uniformly in the preheating chamber, maintaining the substrate in a state of uniform temperature distribution, thereby ensuring the uniformity and consistency of film formation in the reaction chamber. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the preheating structure of this utility model;

[0018] Figure 2 This is a structural schematic diagram of the cooling component of this utility model;

[0019] Figure 3 This is a schematic diagram of the preheating device of this utility model;

[0020] Figure 4This is a schematic diagram of the preheating device of this utility model after it has been rotated;

[0021] Figure 5 This is a schematic diagram of the ALD device of this utility model.

[0022] In the picture:

[0023] 100. Preheating chamber; 110. Preheating cavity; 120. Transfer component; 130. High temperature gauge;

[0024] 200. Preheating device; 210. Lamp tube; 220. Reflector; 221. Heat and light outlet; 230. Driving component; 240. Cooling component; 241. Cooling pipe;

[0025] 300. Reaction chamber;

[0026] 400. Cooling chamber;

[0027] 500. Substrate. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0029] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0032] Reference Figures 1 to 4 As shown, a preheating structure according to an embodiment of the present invention includes a preheating chamber 100, a preheating device 200, and a controller. The preheating chamber 100 is provided with a preheating cavity 110, and a transmission component 120 and a plurality of pyrometers 130 are provided inside the preheating cavity 110. The plurality of pyrometers 130 are spaced apart above the transmission component 120 along the transmission direction of the transmission component 120, and the plurality of pyrometers 130 cooperate to detect the temperature of various parts of the substrate 500 transmitted on the transmission component 120. Optionally, the transmission component 120 may be provided as a plurality of rollers or a conveyor belt, etc., which will not be described in detail here.

[0033] The preheating device 200 includes a lamp tube 210, a reflector 220, and a drive unit 230. The reflector 220 is rotatably connected to the preheating chamber 100. The lamp tube 210 is located between the transmission member 120 and the pyrometer 130 and is connected to the reflector 220. The reflector 220 is arranged around a portion of the outer peripheral wall of the lamp tube 210 and forms a heat-light outlet 221 facing the transmission member 120. In other words, the reflector 220 is a semi-enclosed structure arranged on the outer peripheral wall of the lamp tube 210 with its opening facing the transmission member 120. A reflective layer is provided on the inner wall of the reflector 220 surrounding the lamp tube 210. The reflective layer is spaced apart from the outer peripheral wall of the lamp tube 210, so that the reflective layer can reflect the heat light emitted by the lamp tube 210 through the heat-light outlet 221 onto the substrate 500 transmitted by the transmission member 120. The drive unit 230 is connected to the reflector 220 to drive the reflector 220 to rotate. Optionally, the drive unit 230 is provided with a motor that is drively connected to the reflector 220. Multiple preheating devices 200 are arranged at intervals along the transmission direction of the transmission component 120. The gaps between the preheating devices 200 are such that the heat and light from the heat and light outlets 221 corresponding to the multiple lamp tubes 210 can cover the entire substrate 500. This will not be elaborated further here. The controller is electrically connected to the pyrometer 130, the lamp tubes 210 and the driver 230 respectively.

[0034] Understandably, by setting up a controller and a preheating device, the controller can detect the temperature of the substrate 500 on the transmission component 120 through the pyrometer 130. When the preheating efficiency of some lamps 210 is low and the temperature of some parts of the substrate 500 is low, the controller controls the drive component 230 to start. The drive component 230 rotates the reflector 220 corresponding to the normal lamp 210 adjacent to the lamp 210 with low efficiency, so that the heat and light outlet 221 corresponding to the normal lamp 210 tilts towards the area of ​​the substrate 500 with low temperature, thereby compensating for the temperature of the area with low temperature, adjusting the degree of heating of each point on the surface of the substrate 500 to be consistent, thereby ensuring that the substrate 500 is heated evenly and maintaining the substrate 500 in a state of uniform temperature distribution, thereby ensuring the uniformity and consistency of the subsequent film formation on the substrate 500.

[0035] It should be noted that the angle at which the drive unit 230 controls the rotation of the reflector 220 can be preset, or it can be adjusted by setting PID parameters related to the temperature detected by the pyrometer 130. Here, no specific limit is made on the rotation angle of the reflector 220, as long as the substrate 500 is heated evenly.

[0036] It should be added that after the lamp tube 210 with normal preheating power rotates with the reflector 220, the original heating position may experience a cooling problem. At this time, the preheating power of the rotating lamp tube 210 can be increased to compensate for the temperature of the heating position before rotation, so as to ensure that the substrate 500 is heated evenly.

[0037] Furthermore, the controller also includes a display unit, which is electrically connected to the pyrometer 130.

[0038] By setting up a display, the display can show the temperature of various points on the substrate 500 detected by the pyrometer 130, thereby facilitating user observation of the status of the substrate 500 and effectively improving the user experience. In addition, the display can also be set as a touch screen, allowing users to manually control the rotation of the reflector 220 or set parameters such as the power and rotation angle of the lamp 210, improving the controllability of the heating structure.

[0039] Reference Figure 1 and Figure 2 As shown, it can be understood that the preheating device 200 also includes a cooling element 240, which is installed on the side of the reflector 220 opposite to the lamp tube 210. Optionally, the cooling element 240 may be a small fan with its air inlet facing the reflector 220.

[0040] By setting up a cooling component 240, the cooling component 240 can cool down the reflector 220 without affecting the light-emitting heating substrate 500 of the heat-light outlet 221, thereby preventing the reflector 220 from aging and failing due to long-term exposure to high temperature environment and effectively extending the service life of the reflector 220.

[0041] Furthermore, the cooling component 240 includes a plurality of cooling pipes 241 filled with refrigerant, the cooling pipes 241 being parallel to the lamp tube 210 and the plurality of cooling pipes 241 being spaced apart along the circumference of the reflector 220.

[0042] Setting the cooling component 240 as a cold pipe 241 connected to the reflector 220 can simplify the structure of the cooling component 240 and facilitate its arrangement.

[0043] Reference Figure 1 and Figure 3 As shown, it can be understood that when the reflector 220 is not rotated, the inner diameter of the reflector 220 gradually increases from top to bottom in the vertical direction. Optionally, the cross-sectional shape of the reflector 220 may be a downward-opening V-shape, a flared shape, etc., which will not be elaborated here.

[0044] By gradually increasing the inner diameter of the reflector 220 from top to bottom, and making the reflector 220 completely open, the obstruction of reflected light by the reflector 220 can be greatly reduced, allowing the light at the heat outlet 221 to diffuse and increasing the heating area of ​​the heat outlet 221. This allows the reflected heat light to cover most of the areas with insufficient heating temperature even when the reflector 220 is rotated by a small angle, reducing the rotation range of the reflector 220 and facilitating the arrangement and use of the preheating device 200.

[0045] Reference Figure 3 and Figure 4 As shown, it can be understood that the reflector 220 has an arc shape concentric with the lamp tube 210.

[0046] Setting the reflector 220 to an arc shape can ensure that the reflected heat light from the reflective layer is uniform and consistent, thereby improving the preheating efficiency of the preheating device 200.

[0047] In some embodiments, the lamp tube 210 is configured as an infrared lamp tube, and the reflective layer is configured as a gold-plated layer.

[0048] By setting the reflective layer as a gold-plated layer, the material cost of the reflector 220 is reduced, while the high infrared reflectivity and low heat absorption of gold are utilized to improve the reflective efficiency of the reflective layer, making the surface temperature of the substrate 500 more uniform.

[0049] In other embodiments, lamp 210 is configured as an infrared lamp and reflector 220 is configured as a molybdenum metal component.

[0050] The reflector 220 is made of molybdenum. The reflective layer of the reflector 220 is naturally formed by the smooth surface of the molybdenum reflector 220. While reducing the material cost of the reflector 220, the reflective efficiency of the reflective layer is improved by taking advantage of the high infrared reflection efficiency and low heat absorption of molybdenum, so that the surface temperature of the substrate 500 is more uniform.

[0051] Reference Figure 5 As shown, this utility model embodiment also provides an ALD device, including a reaction chamber 300, a cooling chamber 400 and the above-mentioned preheating structure, wherein the preheating chamber 100, the reaction chamber 300 and the cooling chamber 400 are arranged sequentially along the transmission direction of the transmission member 120.

[0052] The ALD device provided in this embodiment of the present invention includes the aforementioned preheating structure. Therefore, the ALD device provided in this embodiment of the present invention also possesses the beneficial effects described in the above embodiments, which will not be repeated here.

[0053] Furthermore, the reaction chamber 300 is also equipped with multiple preheating devices 200, which are spaced apart along the transmission direction of the transmission member 120.

[0054] When the substrate 500 is subjected to ALD in the reaction chamber 300, it also needs to be heated and kept warm to a certain extent. By setting a preheating device 200 in the reaction chamber 300, the preheating device 200 can ensure that the substrate 500 is heated evenly in the reaction chamber 300, thereby further improving the uniformity and consistency of the subsequent film formation of the substrate 500.

[0055] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A preheating structure, characterized in that, include: A preheating chamber (100) is provided with a preheating cavity (110). The preheating cavity (110) is provided with a transmission component (120) and a plurality of high temperature gauges (130). The plurality of high temperature gauges (130) are arranged at intervals above the transmission component (120) along the transmission direction of the transmission component (120). A preheating device (200) includes a lamp tube (210), a reflector (220), and a drive unit (230). The reflector (220) is rotatably connected to the preheating chamber (100). The lamp tube (210) is located between the transmission unit (120) and the pyrometer (130) and is connected to the reflector (220). The reflector (220) is arranged around a portion of the outer peripheral wall of the lamp tube (210) and forms a heat and light outlet (221) facing the transmission unit (120). A reflective layer is provided on the inner wall of the reflector (220) surrounding the lamp tube (210). The drive unit (230) is connected to the reflector (220) to drive the reflector (220) to rotate. Multiple preheating devices (200) are arranged at intervals along the transmission direction of the transmission unit (120). The controller is electrically connected to the pyrometer (130), the lamp (210), and the drive unit (230), respectively.

2. The preheating structure according to claim 1, characterized in that, The preheating device (200) further includes a cooling component (240), which is installed on the side of the reflector (220) away from the lamp tube (210).

3. The preheating structure according to claim 2, characterized in that, The cooling component (240) includes a plurality of refrigerant-filled cooling pipes (241), which are spaced apart circumferentially along the reflector (220).

4. The preheating structure according to any one of claims 1-3, characterized in that, The inner diameter of the reflector (220) gradually increases from top to bottom in the vertical direction.

5. The preheating structure according to claim 4, characterized in that, The reflector (220) is in the shape of an arc concentric with the lamp tube (210).

6. The preheating structure according to any one of claims 1-3, characterized in that, The lamp tube (210) is configured as an infrared lamp tube, and the reflective layer is configured as a gold-plated layer.

7. The preheating structure according to any one of claims 1-3, characterized in that, The lamp tube (210) is configured as an infrared lamp tube, and the reflector (220) is configured as a molybdenum metal part.

8. The preheating structure according to claim 1, characterized in that, The controller also includes a display that is electrically connected to the pyrometer (130).

9. An ALD device, characterized in that, It includes a reaction chamber (300), a cooling chamber (400), and a preheating structure as described in any one of claims 1-8, wherein the preheating chamber (100), the reaction chamber (300), and the cooling chamber (400) are arranged sequentially along the transmission direction of the transmission member (120).

10. The ALD device according to claim 9, characterized in that, The reaction chamber (300) is also provided with a plurality of preheating devices (200), which are spaced apart along the transmission direction of the transmission member (120).

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