Air floatation guide rail

Abstract

The air floating guide rail comprises a guide rail assembly, a slide carriage assembly and a driving assembly, the driving assembly is installed on the guide rail assembly, the driving end of the driving assembly is connected with the slide carriage assembly, and the driving assembly is used for driving the slide carriage assembly to move in the first direction relative to the guide rail assembly; the slide carriage assembly comprises a main plate, a plurality of first air floating parts and a plurality of second air floating parts, the main plate stretches across the guide rail assembly in the second direction, the two ends of the main plate extend in the direction of the guide rail assembly to form mounting parts, the first air floating parts are arranged on the inner wall face of each mounting part, and the second air floating parts are arranged on the inner wall face of each mounting part. The first air floating piece is arranged opposite to the outer wall surface of the guide rail assembly; the multiple second air floating pieces are arranged on the lower wall face of the main plate and are all opposite to the upper wall face of the guide rail assembly. The air floating guide rail can keep high motion stability and structural rigidity under the condition that the air floating guide rail has high acceleration.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more particularly to an air-bearing guide rail. Background Technology

[0002] With the advancement of science and technology, the semiconductor R&D and manufacturing industry has developed rapidly. Wafer handling equipment plays an indispensable role in semiconductor manufacturing, and its performance directly determines the efficiency of the entire production line and the quality of products. High-acceleration air-bearing guides are a type of high-precision linear motion system that utilizes gas static pressure to support and position the load, thereby achieving high-speed and precise linear motion.

[0003] High-acceleration air-bearing guides, as a high-performance linear motion technology, are widely used in many fields such as semiconductors, micromachining, coordinate measuring machines, and optical grinding. However, they still have some drawbacks. The most significant drawback is that most high-acceleration air-bearing guides currently use single-sided air bearing, requiring separate preload in that direction. This makes it difficult to precisely control the magnitude of the preload provided on one side, resulting in preloads that are too large or too small, leading to poor rigidity and damping characteristics. Consequently, the guide rail itself becomes unstable, or fails to achieve the required high acceleration. Utility Model Content

[0004] The purpose of this application is to provide an air-bearing guide rail that can maintain high motion stability and structural rigidity under high acceleration.

[0005] To achieve the above objectives, this application adopts the following technical solution:

[0006] On one hand, an air-bearing guide rail is provided, comprising: a guide rail assembly, a slide assembly, and a drive assembly, wherein the drive assembly is mounted on the guide rail assembly and the drive end is connected to the slide assembly, for driving the slide assembly to move relative to the guide rail assembly in a first direction;

[0007] The slide assembly includes a main board, a plurality of first air-bearing components and a plurality of second air-bearing components. The main board spans the guide rail assembly along a second direction, and its two ends extend toward the guide rail assembly to form mounting portions. Each mounting portion has a first air-bearing component disposed on its inner wall surface, and the first air-bearing component is disposed opposite to the outer wall surface of the guide rail assembly. The lower wall surface of the main board is provided with a plurality of second air-bearing components, all of which are opposite to the upper wall surface of the guide rail assembly.

[0008] Furthermore, the guide rail assembly includes two protruding guide rail portions, and a guide groove is formed between the two guide rail portions; the main board is arranged across the two guide rail portions, and the first air buoy is disposed opposite to the outer wall surface of the guide rail portion; a plurality of second air buoys are disposed opposite to the upper wall surface of the guide rail portion.

[0009] Furthermore, the drive assembly includes a stator and a mover. The stator is disposed in the guide groove, and the mover is mounted on the lower wall of the main board and located in the guide groove. The mover cooperates with the stator to drive the main board to move along the length direction of the guide groove. A plurality of second air flotation components are symmetrically arranged on both sides of the mover.

[0010] Furthermore, an air supply assembly is provided on the motherboard, with the air inlet end of the air supply assembly connected to an air supply device and the air outlet end connected to each of the first air flotation components and each of the second air flotation components respectively.

[0011] Furthermore, the air supply assembly includes an air inlet pipe and multiple air outlet pipes. The multiple air outlet pipes are respectively disposed at both ends of the main board and are respectively connected to the first air flotation component and the second air flotation component located at the same end. The air inlet pipe is installed at one end of the main board and is respectively connected to the multiple air outlet pipes.

[0012] Furthermore, an air storage cavity is formed inside the motherboard, the air outlet end of the air inlet pipe is connected to the air storage cavity, and the air inlet ends of the plurality of air outlet pipes are connected to the air storage cavity.

[0013] Furthermore, both ends of the motherboard are recessed inward to form mounting areas, and the air inlet pipe and the air outlet pipe are mounted in the mounting areas.

[0014] Furthermore, it also includes multiple adjustment components, which are disposed between the mounting part and the first air flotation component to compensate for assembly errors between the first air flotation component and the mounting part; the adjustment components are also disposed between the main board and the second air flotation component to compensate for assembly errors between the second air flotation component and the main board.

[0015] Furthermore, the adjustment assembly includes an adjustment rod and a hemisphere. The adjustment rod is movably disposed on both the main board and the mounting part. The end of the adjustment rod opposite to the first air flotation component or the second air flotation component is provided with a concave ball position. The first air flotation component and the second air flotation component are both provided with a hemisphere that cooperates with the concave ball position for adjustment and compensation.

[0016] Furthermore, the guide rail assembly is provided with a grating element, and the slide assembly is provided with a counter that works in conjunction with the grating element to count.

[0017] The beneficial effects of this application are as follows: The slide assembly consists of a main board, multiple first air-bearing components, and second air-bearing components. The main board spans the guide rail assembly along a second direction, with its two ends extending to form mounting portions. The inner walls of these mounting portions are respectively equipped with first air-bearing components, which are positioned opposite to the outer walls of the guide rail assembly, achieving support and positioning through gas static pressure. Simultaneously, the lower wall of the main board is equipped with multiple second air-bearing components, which are opposite to the upper wall of the guide rail assembly, also providing additional support using gas static pressure. This double-sided air-bearing design not only significantly increases the contact area between the slide assembly and the guide rail assembly but also allows for a more uniform distribution of preload, effectively avoiding motion instability and structural rigidity reduction caused by improper unilateral preload control. By precisely controlling the gas pressure and distribution, fine control of the preload can be achieved, thereby optimizing the rigidity and damping characteristics of the guide rail and ensuring stable operation under high acceleration.

[0018] In addition, the dual-sided air-bearing design enhances the load-bearing capacity and deformation resistance of the guide rail, enabling it to withstand the high requirements of linear motion systems in high-precision fields such as semiconductor manufacturing. This not only improves production efficiency but also ensures the stability and consistency of product quality. Attached Figure Description

[0019] The present application will now be described in further detail with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a perspective view of the air-bearing guide rail described in the embodiments of this application;

[0021] Figure 2 This is a perspective view of the slide assembly described in the embodiments of this application;

[0022] Figure 3 This is a cross-sectional view of the slide assembly described in the embodiments of this application;

[0023] Figure 4 This is a perspective view of the guide rail assembly described in the embodiments of this application.

[0024] In the diagram: 1. Guide rail assembly; 101. Guide rail section; 102. Grating component; 103. Handle; 104. Buffer assembly; 105. Connecting plate; 106. Encoder; 107. Pneumatic connector; 2. Slide assembly; 201. Main board; 202. Mounting section; 203. First air flotation component; 204. Second air flotation component; 3. Drive assembly; 301. Stator; 302. Mover; 4. Cable chain; 5. Air supply assembly; 501. Air inlet pipe; 502. Air outlet pipe; 6. Adjustment assembly; 601. Adjustment rod; 602. Hemisphere; 7. Mounting plate; 8. Hall effect mounting base; 9. Hall effect sensor; 10. Counter. Detailed Implementation

[0025] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application are further described in detail below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0028] like Figures 1-4 As shown, this embodiment provides an air-bearing guide rail, which includes: a guide rail assembly 1, a slide assembly 2 and a drive assembly 3. The drive assembly 3 is mounted on the guide rail assembly 1, and its drive end is connected to the slide assembly 2, for driving the slide assembly 2 to move relative to the guide rail assembly 1 in a first direction.

[0029] The slide assembly 2 includes a main board 201, a plurality of first air flotation components 203 and a plurality of second air flotation components 204. The main board 201 spans the guide rail assembly 1 along a second direction, and its two ends extend toward the guide rail assembly 1 to form mounting portions 202. Each mounting portion 202 has a first air flotation component 203 disposed on its inner wall surface, and the first air flotation component 203 is disposed opposite to the outer wall surface of the guide rail assembly 1. The lower wall surface of the main board 201 is provided with a plurality of second air flotation components 204, all of which are opposite to the upper wall surface of the guide rail assembly 1.

[0030] Based on the above scheme, the drive component 3 is mounted on the guide rail assembly 1, and its drive end is connected to the slide assembly 2. When the drive component 3 is activated, it generates a driving force, driving the slide assembly 2 to move linearly along the first direction (e.g., the length direction) of the guide rail assembly 1. The main board 201 is the main body of the slide assembly 2, which spans the guide rail assembly 1 along a second direction (e.g., the width direction). Both ends of the main board 201 extend towards the guide rail assembly 1 to form mounting portions 202, which provide space for the installation of the first air flotation components 203. The inner wall of each mounting portion 202 is provided with a first air flotation component 203, which is positioned opposite to the outer wall of the guide rail assembly 1. When gas is injected into the gap between the first air flotation component 203 and the outer wall of the guide rail assembly 1, static pressure is generated, supporting and positioning the slide assembly 2 so that it can slide smoothly on the guide rail assembly 1. The lower wall of the main board 201 is provided with multiple second air flotation components 204, which are opposite to the upper wall of the guide rail assembly 1. Similarly, when gas is injected into the gap between the second air-bearing component 204 and the upper wall of the guide rail assembly 1, static pressure is generated, further supporting the slide assembly 2 and enhancing its stability on the guide rail assembly 1. By providing air-bearing components on both the contact surfaces of the slide assembly 2 and the guide rail assembly 1, the air-bearing guide rail of this application achieves double-sided air-bearing. This double-sided air-bearing can be understood as the double-sided air-bearing achieved by the first air-bearing component 203 provided on the mounting portions 202 at both ends, or as the double-sided air-bearing achieved by the combined action of the first air-bearing component 203 and the second air-bearing component 204. This design not only increases the support area of ​​the guide rail but also allows the preload to be more evenly distributed in all directions of the guide rail assembly 1, thereby improving the motion stability and structural rigidity of the slide assembly 2 relative to the guide rail assembly 1.

[0031] Overall, the dual-sided air-bearing design makes the slide assembly 2 slide more smoothly on the guide rail assembly 1, reducing vibration and swaying caused by uneven preload on one side, thereby improving the motion stability of the entire system. By increasing the number and distribution range of air-bearing components, the air-bearing guide rail is structurally more robust and can withstand greater loads and accelerations without significant deformation or damage. Moreover, the dual-sided air-bearing design allows for more precise control of preload, avoiding problems with poor rigidity and damping characteristics caused by excessive or insufficient preload on one side. Because the air-bearing guide rail of this application has higher motion stability and structural rigidity, it can support higher acceleration and faster movement speeds, thereby improving the production efficiency of production lines such as semiconductor manufacturing.

[0032] Furthermore, the guide rail assembly 1 includes two protruding guide rail portions 101, with a guide groove formed between the two guide rail portions 101; the main board 201 is arranged across the two guide rail portions 101, and the first air buoyancy member 203 is disposed opposite to the outer wall surface of the guide rail portion 101; a plurality of second air buoyancy members 204 are disposed opposite to the upper wall surface of the guide rail portion 101. The guide rail assembly 1 is composed of two protruding guide rail portions 101, which are arranged in parallel and form a precise guide groove between them, providing a clear path for the movement of the slide assembly 2. The main board 201 is arranged across the two guide rail portions 101, and its design not only enhances the stability of the structure but also maximizes the support area. At both ends of the main board 201, the inner wall surface of the extended mounting portion 202 is provided with first air buoyancy members 203, which are opposite to the outer wall surface of the guide rail portion 101. When gas is injected into the tiny gap between the first air flotation component 203 and the outer wall of the guide rail 101, a strong static pressure is generated. This pressure effectively supports and positions the slide assembly 2, preventing it from shifting laterally during high-speed movement.

[0033] Meanwhile, multiple second air-bearing components 204 are arranged on the lower wall of the main board 201, opposite to the upper wall of the guide rail section 101. By injecting gas, the second air-bearing components 204 also generate static pressure, providing additional support for the slide assembly 2 and further enhancing its stability on the guide rail assembly 1. This design not only enables the air-bearing guide rail to maintain high stability and accuracy during high-speed movement, but also improves production efficiency, making it suitable for fields requiring high-precision linear motion, such as semiconductor manufacturing, micromachining, coordinate measuring machines, and optical polishing.

[0034] Furthermore, the drive assembly 3 includes a stator 301 and a mover 302. The stator 301 is disposed within the guide groove, and the mover 302 is mounted on the lower wall of the main board 201 and located within the guide groove. The mover 302 cooperates with the stator 301 to drive the main board 201 to move along the length of the guide groove. Multiple second air-bearing elements 204 are symmetrically arranged on both sides of the mover 302. This drive assembly 3 consists of a stator 301 disposed within the guide groove of the guide rail assembly 1 and a mover 302 mounted on the lower wall of the main board 201 and located within the guide groove. As the main components of an iron-core linear motor, they work closely together to drive the main board 201 to move precisely along the length of the guide groove. The multiple second air-bearing elements 204, symmetrically arranged on both sides of the mover 302, not only enhance the stability of the main board 201 but also achieve non-contact preload through the magnetic interaction between the stator 301 and the mover 302, cleverly balancing the air film stiffness. This design not only reduces vibration and sway, improving motion accuracy, but also optimizes preload control through magnetic preload, avoiding problems caused by uneven preload on one side, and further enhancing the load capacity and deformation resistance of the guide rail. Simultaneously, the precise arrangement of the stator 301 and mover 302 ensures direct and efficient transmission of driving force, improving driving efficiency, reducing energy loss, and accelerating response speed. This design is not only suitable for high-precision fields such as semiconductor manufacturing, but also widely applicable to various occasions requiring high-speed, high-precision linear motion, demonstrating its strong adaptability and practicality.

[0035] It is worth mentioning that the motherboard 201 is equipped with a Hall effect mounting base 8, on which a Hall effect sensor 9 is mounted. The Hall effect sensor 9 can detect the operating speed and current value of the drive component 3 in real time, providing crucial data for precise system control and fault diagnosis. By monitoring the operating speed in real time, the system can adjust the drive parameters in a timely manner, ensuring that the motherboard 201 maintains extremely high stability and accuracy during high-speed operation. At the same time, monitoring the current value helps to promptly detect and handle potential overload or short-circuit problems, ensuring the safe and stable operation of the system.

[0036] In some embodiments, a gas supply component 5 is provided on the main board 201. The air inlet of the gas supply component 5 is connected to a gas supply device, and the air outlet is connected to each of the first air flotation components 203 and each of the second air flotation components 204, respectively. The air inlet of the gas supply component 5 is closely connected to the gas supply device to ensure a stable and continuous gas supply, while its air outlet is connected to each of the first air flotation components 203 and each of the second air flotation components 204, forming an efficient gas transmission network. This design not only simplifies the gas supply process but also improves the efficiency and stability of gas transmission, providing a sufficient and stable gas source for the first air flotation components 203 and the second air flotation components 204, thereby ensuring that they can continuously generate strong static pressure to support and stabilize the movement of the slide assembly 2 on the guide rail assembly 1. This further enhances the load capacity and deformation resistance of the air flotation guide rail, while also improving its motion accuracy and stability, providing a more reliable and stable solution for high-precision linear motion.

[0037] Specifically, in the design of the motherboard 201, the introduction of the air supply component 5 further enhances the performance and reliability of the air-bearing guide rail. The air supply component 5 mainly consists of an inlet pipe 501 and multiple outlet pipes 502. The inlet pipe 501 is cleverly installed at one end of the motherboard 201, serving as the inlet of the entire gas supply system. It is closely connected to the gas supply equipment to ensure a stable and continuous gas supply. The outlet pipes 502 are respectively located at both ends of the motherboard 201, and each outlet pipe 502 is connected to the first air-bearing component 203 and the second air-bearing component 204 located at the same end, forming an efficient and balanced gas transmission network. This design not only simplifies the pipeline layout of the gas supply but also greatly improves the efficiency and stability of gas transmission. The air inlet pipe 501 divides the gas supplied by the gas supply equipment into multiple paths, which are then evenly distributed to each of the first air flotation components 203 and the second air flotation components 204 through multiple air outlet pipes 502. This uniform and equal-sized air intake method ensures that each air flotation component receives a sufficient and stable air source, thereby continuously generating strong static pressure to support and stabilize the movement of the slide assembly 2 on the guide rail assembly 1. In addition, this design reduces gas pressure loss and leakage risks caused by complex piping, improving gas utilization efficiency. Moreover, the uniform air intake distribution also helps maintain the stability and accuracy of the air flotation guide rail during movement, further enhancing its load capacity and deformation resistance.

[0038] Meanwhile, a gas storage chamber is formed inside the mainboard 201. The outlet end of the air inlet pipe 501 is connected to the gas storage chamber, and the inlet ends of multiple outlet pipes 502 are connected to the gas storage chamber. The outlet end of the air inlet pipe 501 is directly connected to the gas storage chamber, which serves as the central hub of the entire gas transmission system. It receives gas from the gas supply equipment and temporarily stores it within the gas storage chamber. The inlet ends of the multiple outlet pipes 502 are connected to the gas storage chamber, which draws gas from the gas storage chamber and delivers it to the first air flotation component 203 and the second air flotation component 204 located at both ends of the mainboard 201, respectively. This design not only ensures that each air flotation component receives a stable and continuous gas supply, but also further improves the efficiency and stability of gas transmission through the buffering effect of the gas storage chamber. The existence of the gas storage chamber also enables the mainboard 201 to cope with brief interruptions or fluctuations in gas supply, ensuring that the air flotation guide rail can still maintain stable operation for a period of time when the gas supply equipment malfunctions or the gas pressure is unstable. This innovative design not only enhances the reliability and stability of the air-bearing guide rail, but also provides it with broader adaptability for applications under various complex working conditions.

[0039] In the design of the motherboard 201, a more refined structural optimization method was adopted to further improve its performance and adaptability. Both ends of the motherboard 201 are cleverly recessed inwards, forming specific mounting areas. This design not only provides ideal mounting positions for the air intake pipe 501 and the air exhaust pipe 502, but also makes the overall structure of the motherboard 201 more compact and efficient. More importantly, through this recessed design, the motherboard 201 achieves weight reduction, ensuring its mass is as light as possible. This characteristic is crucial for improving the acceleration of the air bearing guide, because a lighter mass means that under the same driving force, the motherboard 201 can achieve greater acceleration, thereby improving the response speed and motion performance of the entire system. Moreover, the design of the motherboard 201 also fully considers its necessary sufficient rigidity. Despite the weight reduction design, the motherboard 201 still maintains sufficient material and structural strength in key areas to ensure stable support for loads moving under high acceleration. This rigidity design not only improves the load capacity of the air bearing guide, but also enhances its stability and accuracy during high-speed motion.

[0040] Furthermore, a mounting plate 7 for mounting the cable chain 4 is provided on one end of the main board 201. The cable chain 4, as a device for protecting and supporting cables, air pipes, and other pipelines, is widely used in automated equipment and mechanical systems. It effectively prevents pipelines from being worn, stretched, or damaged during movement, thus ensuring the normal operation of the system. In the air-bearing guide rail system, the cable chain 4 also plays a crucial role. By providing the mounting plate 7 on one end of the main board 201, the cable chain 4 can be easily fixed and arranged along the extension direction of the guide rail. Thus, when the slide assembly 2 moves on the guide rail assembly 1, the cable chain 4 also moves accordingly, but always maintains a tight fit with the main board 201 and the guide rail assembly 1, ensuring not only the safety and stability of the pipeline but also avoiding interference and obstruction during pipeline movement.

[0041] To further improve the assembly accuracy and motion stability of the air bearing guide rail, this application introduces multiple adjustment components 6. These adjustment components 6 are cleverly positioned between the mounting part 202 and the first air bearing component 203, and between the main board 201 and the second air bearing component 204. Their main function is to compensate for errors that may occur during assembly, ensuring that the first air bearing component 203 and the second air bearing component 204 can be accurately installed in their predetermined positions and form a good fit with the main board 201 and the mounting part 202. The adjustment component 6 between the mounting part 202 and the first air bearing component 203 can precisely compensate for gaps or misalignments caused by assembly errors by finely adjusting the position of the first air bearing component 203. Similarly, the adjustment component 6 between the main board 201 and the second air bearing component 204 can also finely adjust the second air bearing component 204 to ensure a tight fit between it and the main board 201. This design not only improves the assembly accuracy of the air bearing guide rail but also enhances its stability and accuracy during high-speed motion. By adjusting the compensation effect of component 6, vibration and shaking caused by assembly errors can be significantly reduced, thereby improving the motion performance and reliability of the entire system.

[0042] Furthermore, the introduction of adjustment component 6 facilitates the maintenance and adjustment of the air-bearing guide rail. When the position of the air-bearing component needs to be adjusted, only fine-tuning is required through adjustment component 6, eliminating the need for large-scale disassembly and reassembly of the entire system. This not only saves time and costs but also improves the maintainability and flexibility of the system.

[0043] Specifically, the adjustment assembly 6 includes an adjustment rod 601 and a hemisphere 602. The adjustment rod 601 is movably mounted on both the main board 201 and the mounting portion 202. One end of the adjustment rod 601 opposite the first air-bearing component 203 or the second air-bearing component 204 has a concave ball position. Both the first air-bearing component 203 and the second air-bearing component 204 are provided with hemispheres 602 that cooperate with the concave ball position for adjustment and compensation. The smooth surface contact design between the hemisphere 602 and the concave ball position in the adjustment assembly 6 plays a crucial role in the air-bearing guide rail system. This design not only ensures that each air-bearing component remains parallel during installation and operation but also greatly improves the installation stability and accuracy of the air-bearing components, effectively avoiding assembly errors caused by machining errors. Simultaneously, the tight fit between the concave ball position on the adjustment rod 601 and the hemisphere 602 on the air-bearing component through their smooth surfaces forms a high-precision adjustment mechanism. When there are slight positional deviations or height inconsistencies in the air-bearing components during installation, the hemisphere 602 can make slight sliding and adjustments within the concave spherical position until the optimal mating position is achieved. This automatic adjustment capability not only simplifies the assembly process but also improves the accuracy and efficiency of assembly.

[0044] It is important to note that the guide rail assembly 1 is equipped with a grating element 102, and the slide assembly 2 is equipped with a counter 10 that works in conjunction with the grating element 102 to count distances. The grating elements 102 are cleverly integrated into the guide rail assembly 1; these grating elements 102 are typically composed of a series of equally spaced transparent and opaque sections. When the slide assembly 2 moves along the guide rail assembly 1, it moves the counter 10 mounted on it. The counter 10 contains one or more photoelectric sensors that can sensitively detect the alternating changes in the transparent and opaque sections of the grating element 102. Each time a photoelectric sensor on the counter 10 passes a transparent section of the grating element 102, it records a pulse signal. By calculating the number and frequency of these pulse signals, the system can accurately determine key parameters such as the moving distance, speed, and acceleration of the slide assembly 2. This combination of the grating element 102 and the counter 10 not only offers advantages in high precision and high reliability but also provides real-time feedback on the motion state, offering strong support for system control and adjustment. In addition, since the grating element 102 and the counter 10 are usually designed to be non-contact, they also have the advantages of long service life and low maintenance cost.

[0045] Generally, the guide rail assembly 1 is equipped with handles 103 at both ends in the first direction for easy lifting of the entire guide rail assembly 1. It also includes a connecting plate 105, on which an encoder 106 and a pneumatic connector 107 are mounted. The encoder 106 is electrically connected to the counter 10, and the pneumatic connector 107 is connected to the air inlet pipe 501 via a pipeline. The design of the guide rail assembly 1 considers both functionality and convenience. The handles 103 at both ends in the first direction undoubtedly provide great convenience for the operator, allowing them to easily lift and move the entire guide rail assembly 1, improving work efficiency and reducing the potential risk of damage due to improper handling.

[0046] Furthermore, the introduction of the connecting plate 105 elevates the integration and functionality of the guide rail assembly 1 to a new level. On the connecting plate 105, the encoder 106 and the counter 10 are electrically connected, meaning that the motion data recorded by the counter 10 can be transmitted to the encoder 106 in real time for higher-level data processing and analysis. This design not only improves the accuracy and reliability of the data but also enables intelligent control of the system.

[0047] Meanwhile, the pneumatic connector 107, connected to the air inlet pipe 501 via a pipeline, ensures a stable and continuous gas supply to the air-bearing guide rail system. This design not only simplifies the structure of the gas transmission system but also improves the efficiency and stability of the gas supply, providing a strong guarantee for the high-performance operation of the air-bearing guide rail.

[0048] In air-bearing guide rail systems, safety is always a crucial factor that cannot be ignored. To ensure stable system operation and prevent damage caused by unexpected situations, buffer components 104 are specially designed at both ends of the guide groove, improving system safety. Specifically, the buffer components 104 are installed at both ends of the guide groove, and they can abut against the main board 201 when the slide assembly 2 moves to its extreme position, thus acting as a limiting buffer. This design can effectively prevent the slide assembly 2 from exceeding its safe stroke due to inertia or other reasons, resulting in collision and damage to the guide rail assembly 1 or other components. The buffer components 104 are typically made of materials with high elasticity and wear resistance to ensure that they can quickly absorb energy and return to their original shape when subjected to impact. This material selection not only improves the durability of the buffer components 104 but also ensures their stability and reliability during long-term use.

[0049] In the description herein, it should be understood that the terms "upper," "lower," "left," "right," and other orientations or positional relationships are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no special meaning.

[0050] In the description of this specification, references to terms such as "an embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0051] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0052] The technical principles of this application have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this application without inventive effort, and these embodiments will all fall within the scope of protection of this application.

Claims

1. An air-bearing guide rail, characterized in that, include: The guide rail assembly (1), the slide assembly (2), and the drive assembly (3) are provided. The drive assembly (3) is mounted on the guide rail assembly (1) and its drive end is connected to the slide assembly (2) for driving the slide assembly (2) to move relative to the guide rail assembly (1) in a first direction. The slide assembly (2) includes a main board (201), a plurality of first air flotation components (203) and a plurality of second air flotation components (204). The main board (201) spans the guide rail assembly (1) along a second direction, and its two ends extend toward the guide rail assembly (1) to form mounting portions (202). Each mounting portion (202) has a first air flotation component (203) on its inner wall surface, and the first air flotation component (203) is disposed opposite to the outer wall surface of the guide rail assembly (1). The lower wall surface of the main board (201) is provided with a plurality of second air flotation components (204), and all of them are opposite to the upper wall surface of the guide rail assembly (1).

2. The air-bearing guide rail according to claim 1, characterized in that, The guide rail assembly (1) includes two protruding guide rail portions (101), and a guide groove is formed between the two guide rail portions (101); the main board (201) is arranged across the two guide rail portions (101), and the first air flotation member (203) is disposed opposite to the outer wall surface of the guide rail portion (101); a plurality of second air flotation members (204) are disposed opposite to the upper wall surface of the guide rail portion (101).

3. The air-bearing guide rail according to claim 2, characterized in that, The drive assembly (3) includes a stator (301) and a mover (302). The stator (301) is disposed in the guide groove, and the mover (302) is mounted on the lower wall of the main board (201) and located in the guide groove. It cooperates with the stator (301) to drive the main board (201) to move along the length direction of the guide groove. A plurality of second air flotation components (204) are symmetrically arranged on both sides of the mover (302).

4. The air-bearing guide rail according to any one of claims 1-3, characterized in that, The motherboard (201) is provided with an air supply component (5). The air inlet of the air supply component (5) is connected to the air supply device, and the air outlet is connected to each of the first air flotation components (203) and each of the second air flotation components (204).

5. The air-bearing guide rail according to claim 4, characterized in that, The air supply assembly (5) includes an air inlet pipe (501) and a plurality of air outlet pipes (502). The plurality of air outlet pipes (502) are respectively disposed at both ends of the main board (201) and are respectively connected to the first air flotation component (203) and the second air flotation component (204) located at the same end. The air inlet pipe (501) is installed at one end of the main board (201) and is respectively connected to the plurality of air outlet pipes (502).

6. The air-bearing guide rail according to claim 5, characterized in that, An air storage cavity is formed inside the motherboard (201), the air outlet end of the air inlet pipe (501) is connected to the air storage cavity, and the air inlet ends of the plurality of air outlet pipes (502) are connected to the air storage cavity.

7. The air-bearing guide rail according to claim 5, characterized in that, The motherboard (201) has inwardly recessed mounting areas at both ends, and the air inlet pipe (501) and the air outlet pipe (502) are mounted in the mounting areas.

8. The air-bearing guide rail according to any one of claims 1-3, characterized in that, It also includes multiple adjustment components (6), which are disposed between the mounting part (202) and the first air flotation component (203) to compensate for the assembly error between the first air flotation component (203) and the mounting part (202); the adjustment components (6) are also disposed between the main board (201) and the second air flotation component (204) to compensate for the assembly error between the second air flotation component (204) and the main board (201).

9. The air-bearing guide rail according to claim 8, characterized in that, The adjustment component (6) includes an adjustment rod (601) and a hemisphere (602). The adjustment rod (601) is movably disposed on both the main board (201) and the mounting part (202). The adjustment rod (601) has a concave ball position at one end opposite to the first air flotation component (203) or the second air flotation component (204). The first air flotation component (203) and the second air flotation component (204) are each provided with the hemisphere (602) that cooperates with the concave ball position for adjustment and compensation.

10. The air-bearing guide rail according to any one of claims 1-3, characterized in that, The guide rail assembly (1) is provided with a grating element (102), and the slide assembly (2) is provided with a counter (10) that works in conjunction with the grating element (102) to count.

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