Adjusting platform device

Abstract

The utility model discloses an adjusting platform device which comprises a bearing platform and a plurality of adjusting mechanisms installed on the bearing platform, and a plurality of vertically-through installation through holes are formed in the bearing platform. The adjusting mechanism comprises an adjusting nut, an adjusting screw and a fastening screw. The adjusting nut is mounted at the mounting through hole, and a first threaded hole penetrating up and down is formed in the adjusting nut; the adjusting screw is in threaded connection with the first threaded hole, a second threaded hole penetrating up and down is formed in the adjusting screw, the bottom of the adjusting screw is used for being attached to the base, and the position, extending out of the bearing platform downwards, of the adjusting screw can be adjusted by adjusting the position of the adjusting screw in the first threaded hole; and the fastening screw is in threaded connection with the second threaded hole and is configured to partially extend out of the second threaded hole to be in threaded connection with the base. According to the utility model, the jacking stress point and the locking stress point of the bearing platform can be positioned on the same axis, so that the stability of the bearing platform can be ensured and the locking deformation stress can be eliminated.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to an adjustment platform device. Background Technology

[0002] In semiconductor manufacturing, the adjustment platform plays a crucial role, precisely adjusting the position and height of the wafer to ensure its stability and accuracy during processing and inspection. High-precision adjustment helps improve production efficiency and guarantee product quality, making it an indispensable tool in wafer manufacturing.

[0003] Traditional methods for adjusting a platform include lifting and locking with screws, and adjusting with shims and then locking with screws. The screw-lifting and locking method involves rotating the end of the screw (usually the threaded part) to raise and lift the platform, then locking and fixing it with the screw, thus changing the platform's height or position. However, this method is prone to instability due to the locking force point and the lifting force point not being on the same axis, leading to deformation during adjustment, easy positional shifts, and greater difficulty in adjustment. The method of adjusting with shims and then locking with screws also suffers from low precision and difficulty in adjustment. Utility Model Content

[0004] The purpose of this utility model is to provide an adjustment platform device that helps eliminate the deformation stress of locking, ensures the stability of the bearing platform, and facilitates distance adjustment, thus ensuring adjustment accuracy.

[0005] To achieve the above objectives, this utility model provides an adjustment platform device, including a support platform and a plurality of adjustment mechanisms installed on the support platform, wherein the support platform is provided with a plurality of through mounting holes extending vertically.

[0006] The adjustment mechanism includes:

[0007] An adjusting nut is installed at the mounting through hole, and the adjusting nut has a first threaded hole that extends through the top and bottom.

[0008] An adjusting screw is threaded into the first threaded hole. The adjusting screw has a second threaded hole that extends vertically through it. The bottom of the adjusting screw is used to fit against the base. By adjusting the position of the adjusting screw in the first threaded hole, the position of the adjusting screw extending downward out of the support platform can be adjusted.

[0009] A fastening screw is threaded into the second threaded hole, and the fastening screw is configured to partially extend out of the second threaded hole to thread onto the base.

[0010] Optionally, the support platform has four corners, each corner is provided with a mounting through hole, and each mounting through hole is provided with an adjustment mechanism.

[0011] Optionally, the adjusting nut is a square nut.

[0012] Optionally, the adjusting screw and the fastening screw are coaxially arranged.

[0013] Optionally, the adjusting nut includes a nut base and an extension connected to the bottom of the nut base. The nut base is fixed to the upper side of the bearing platform, and the extension extends into the mounting through hole.

[0014] Optionally, the nut base is provided with a plurality of first fixing holes, and the bearing platform is provided with a plurality of second fixing holes around the mounting through hole. The plurality of first fixing holes and the plurality of second fixing holes are respectively connected to each other to connect fasteners.

[0015] Optionally, the fastening screw is an internal hex screw.

[0016] Optionally, the adjusting screw is further provided with an assembly hole, which extends upward through the adjusting screw. The second threaded hole communicates with the lower middle part of the assembly hole, and the bottom wall of the assembly hole forms a stop platform surrounding the second threaded hole. The fastening screw includes a head and a shank, the shank being threadedly connected to the second threaded hole, and the head being located in the assembly hole.

[0017] In this embodiment of the invention, the adjusting platform device includes a supporting platform and several adjusting mechanisms installed at the mounting through holes of the supporting platform. Each adjusting mechanism includes an adjusting nut, an adjusting screw, and a fastening screw. The adjusting nut is installed at the mounting through hole and has a first threaded hole extending vertically. The adjusting screw is threaded into the first threaded hole, with its bottom fitting against the base. The adjusting screw has a second threaded hole extending vertically, and the fastening screw is threaded into the second threaded hole. The lower end of the fastening screw can extend downwards through the second threaded hole and be threadedly fixed to the base. By adjusting the position of the adjusting screw at the first threaded hole, the position of the fastening screw extending downwards from the supporting platform can be adjusted. This invention uses the adjusting screw to lift the supporting platform, adjusting its height or position relative to the base, and then locks it in place using the fastening screw installed in the second threaded hole of the adjusting screw. These actions work together to adjust and fix the position of the supporting platform, ensuring that the lifting force point and the locking force point are on the same axis. This helps guarantee the stability of the supporting platform and eliminates deformation stress during locking. Furthermore, the combined adjustment of the adjusting screw and the fastening screw facilitates control of the adjustment distance and ensures adjustment accuracy. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the adjustment platform device in an embodiment of this utility model.

[0019] Figure 2 This is an exploded view of the adjustment platform device in an embodiment of the present invention.

[0020] Figure 3 This is a cross-sectional structural diagram of the adjustment platform device in an embodiment of this utility model.

[0021] Figure 4 This is a cross-sectional structural diagram of the adjustment platform device assembled on the base in an embodiment of this utility model. Detailed Implementation

[0022] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0023] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0024] It should be noted that when an element is said to be "fixed" to another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly" on another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0025] See also Figures 1 to 4This utility model discloses an adjustment platform device 1, including a support platform 10 and several adjustment mechanisms 20 mounted on the support platform 10. The support platform 10 has several through-holes 11 extending vertically. Each adjustment mechanism 20 includes an adjustment nut 21, an adjustment screw 22, and a fastening screw 23. The adjustment nut 21 is installed at the through-hole 11 and has a first threaded hole 24 extending vertically. The adjustment screw 22 is threaded into the first threaded hole 24 and has a second threaded hole 25 extending vertically. The bottom of the adjustment screw 22 is used to fit against a base 2. By adjusting the position of the adjustment screw 22 in the first threaded hole 24, the downward extension position of the adjustment screw 22 beyond the support platform 10 can be adjusted. The fastening screw 23 is threaded into the second threaded hole 25 and is configured to partially extend out of the second threaded hole 25 to thread-connect to the base 2.

[0026] In this embodiment of the invention, the adjusting platform device includes a supporting platform 10 and several adjusting mechanisms 20 installed at mounting through holes 11 on the supporting platform 10. Each adjusting mechanism 20 includes an adjusting nut 21, an adjusting screw 22, and a fastening screw 23. The adjusting nut 21 is installed at the mounting through hole 11 and has a first threaded hole 24 extending vertically. The adjusting screw 22 is threaded into the first threaded hole 24, and its bottom is used to fit against the base 2. The adjusting screw 22 has a second threaded hole 25 extending vertically, and the fastening screw 23 is threaded into the second threaded hole 25. The lower end of the fastening screw 23 extends downwards out of the second threaded hole 25 and is threadedly fixedly connected to the base 2. By adjusting the position of the adjusting screw 22 at the first threaded hole 24, the position of the fastening screw 23 extending downwards out of the supporting platform 10 can be adjusted. This utility model adjusts the height or position of the support platform 10 relative to the base 2 by adjusting the screw 22 to lift the support platform 10, and then locks it by fastening the screw 23 at the second threaded hole 25 inside the adjusting screw 22. Together, they complete the adjustment and fixation of the position of the support platform 10. This ensures that the lifting force point and the locking force point of the support platform 10 are on the same axis, which helps to ensure the stability of the support platform 10 and eliminate the deformation stress of locking. Furthermore, the adjustment distance can be easily controlled by adjusting the screw 22 and fastening screw 23, which helps to ensure the adjustment accuracy.

[0027] In some embodiments, the support platform 10 has four corners, each corner having a mounting through hole 11, and each mounting through hole 11 having an adjustment mechanism 20. The mounting through holes 11 are distributed at the four corners of the support platform 10, and the adjustment mechanism 20 is installed at each of the four corners of the support platform 10 for adjustment, which helps to maintain the force balance of the support platform 10 in the horizontal direction.

[0028] Specifically, the adjusting nut 21 is a square nut. Of course, the adjusting nut 21 is not limited to being a square nut.

[0029] In some embodiments, the adjusting screw 22 and the fastening screw 23 are coaxially arranged. By coaxially arranging the adjusting screw 22 and the fastening screw 23, it is beneficial to ensure that the stress points are on the same axis and to eliminate the deformation stress of locking, and it is also beneficial to improve the stability of the bearing platform 10.

[0030] In some embodiments, the adjusting nut 21 includes a nut base 211 and an extension 212 connected to the bottom of the nut base 211. The nut base 211 is disposed on the upper side of the support platform 10, and the extension 212 extends into the mounting through hole 11.

[0031] Specifically, the nut base 211 is provided with several first fixing holes 213, and the support platform 10 is provided with several second fixing holes 12 around the mounting through hole 11. The several first fixing holes 213 and several second fixing holes 12 are respectively connected to fasteners (not shown in the figure). The nut base 211 can be locked and fixed on the support platform 10 by multiple fasteners, which helps to ensure that the adjusting nut 21 is stably installed on the support platform 10.

[0032] Specifically, the fastening screw 23 is an internal hex screw. Of course, the fastening screw 23 of this utility model is not limited to an internal hex screw.

[0033] It should be explained that, in this embodiment of the present invention, the second threaded hole 25 passing through the adjusting screw 22 is not limited to the second threaded hole 25 directly passing through the adjusting screw 22. It is not excluded that at least one end of it is connected to a hole / slot and communicates with the outside through the hole / slot.

[0034] See also Figure 3 Specifically, the adjusting screw 22 also has a mounting hole 26, which extends upward through the adjusting screw 22. The second threaded hole 25 connects to the lower middle part of the mounting hole 26, and the bottom wall of the mounting hole 26 forms a stop platform 261 surrounding the second threaded hole 25. The fastening screw 23 includes a head 231 and a rod 232. The rod 232 is threadedly connected to the second threaded hole 25, and the head 231 is located in the mounting hole 26. By stopping the head 231 through the stop platform 261, and connecting the lower end of the rod 232 to the base 2, the adjusting screw 22 can be fixed between the head 231 and the base 2 to more reliably support the bearing platform 10. Of course, when the adjusting screw 22 is locked and fixed on the base 2, the head 231 of the fastening screw 23 is not limited to stopping at the stop platform 231, and a certain distance may be excluded. In addition, the fastening screw 23 is not limited to including the head 231, and may include only the rod 232. In this case, in order to facilitate the operation of the fastening screw 23, an internal hexagonal socket or similar groove can be provided on the rod 232 to facilitate screw tightening.

[0035] See also Figure 4 The adjustment platform device is mounted on the base 2, which has corresponding third threaded holes 3. The position of the support platform 10 relative to the base 2 is adjusted by adjusting the distance by which the adjustment screw 22 extends downward from the first threaded hole 24. During the adjustment process, when each adjustment screw 22 extends downward to the required length, the fastening screw 23 is tightened so that the lower end of the fastening screw 23 is threadedly connected to the third threaded hole 3, so that the bottom of the adjustment screw 22 is firmly attached to the upper surface of the base 2, thereby firmly fixing the support platform 10 to the base 2.

[0036] The above-disclosed examples are merely preferred embodiments of the present utility model, intended to facilitate understanding and implementation by those skilled in the art. They should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the scope of the present utility model patent shall still fall within the scope of the present utility model.

Claims

1. An adjustment platform device, characterized in that, It includes a support platform and several adjustment mechanisms installed on the support platform, and the support platform has several through holes running vertically through it; The adjustment mechanism includes: An adjusting nut is installed at the mounting through hole, and the adjusting nut has a first threaded hole that extends through the top and bottom. An adjusting screw is threaded into the first threaded hole. The adjusting screw has a second threaded hole that extends vertically through it. The bottom of the adjusting screw is used to fit against the base. By adjusting the position of the adjusting screw in the first threaded hole, the position of the adjusting screw extending downward out of the support platform can be adjusted. A fastening screw is threaded into the second threaded hole, and the fastening screw is configured to partially extend out of the second threaded hole to thread onto the base.

2. The adjustment platform device as described in claim 1, characterized in that, The support platform has four corners, each corner is provided with a mounting through hole, and each mounting through hole is provided with an adjustment mechanism.

3. The adjustment platform device as described in claim 1, characterized in that, The adjusting nut is a square nut.

4. The adjustment platform device as described in claim 1, characterized in that, The adjusting screw and the fastening screw are coaxially arranged.

5. The adjustment platform device as described in claim 1, characterized in that, The adjusting nut includes a nut base and an extension connected to the bottom of the nut base. The nut base is fixed to the upper side of the bearing platform, and the extension extends into the mounting through hole.

6. The adjustment platform device as described in claim 5, characterized in that, The nut base has a plurality of first fixing holes, and the bearing platform has a plurality of second fixing holes around the mounting through hole. The plurality of first fixing holes and the plurality of second fixing holes are respectively connected to each other to connect fasteners.

7. The adjustment platform device as described in claim 1, characterized in that, The fastening screw is an internal hex screw.

8. The adjustment platform device as described in claim 1, characterized in that, The adjusting screw is also provided with an assembly hole, which extends upward through the adjusting screw. The second threaded hole is connected to the lower middle part of the assembly hole, and the bottom wall of the assembly hole forms a stop platform around the second threaded hole. The fastening screw includes a head and a shank, the shank being threadedly connected to the second threaded hole, and the head being located in the assembly hole.

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