Flow adjusting device for wafer cleaning machine

Abstract

The utility model provides a flow adjusting device for a wafer cleaning machine, and relates to the technical field of wafer cleaning. The water supply pipe communicates with and is fixedly connected to the water inlet end of the water pump to supply water to the water pump; the connecting pipe communicates with and is fixedly connected to the output end of the water pump, so that the water pump is connected with the controllable regulating valve; the controllable regulating valve is communicated with and fixedly connected to the end part of the connecting pipe so as to control the water pressure output by the water pump; the sealing device is arranged at the end part of the connecting pipe and is used for improving the sealing performance between the controllable regulating valve and the connecting pipe; and the blocking device is arranged on the surface of the connecting pipe. The utility model solves the problems that the connection between the connecting pipe and the controllable regulating valve is easy to loosen after the equipment runs for a long time, the water pressure is unstable if leakage occurs between the connecting pipe and the controllable regulating valve, and the washing efficiency of wafers is influenced.

Description

Technical Field

[0001] This utility model relates to the field of wafer cleaning technology, specifically to a flow regulating device for a wafer cleaning machine. Background Technology

[0002] Wafer cleaning is an important process step in wafer manufacturing, designed to remove various contaminants such as organic matter, particles, and metals generated during the continuous processing and polishing of wafers. If these contaminants are not cleaned properly, they will seriously affect the quality and yield of the wafers. During the polishing process, deionized water is used to rinse the wafer surface to remove larger particles and contaminants. Specific controllable water pumps are required to regulate the water pressure for rinsing.

[0003] The above technical solution has the following defects in use: after the equipment has been running for a long time, the connection between the connecting pipe and the controllable regulating valve is prone to loosening. If leakage occurs between the connecting pipe and the controllable regulating valve, the water pressure will be unstable, affecting the efficiency of rinsing the wafer. Utility Model Content

[0004] This invention provides a flow regulating device for a wafer cleaning machine, which solves the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0006] An embodiment of this utility model provides a flow regulating device for a wafer cleaning machine, comprising:

[0007] Water pump;

[0008] A water supply pipe is connected to and fixedly connected to the water inlet of the water pump to supply water to the water pump.

[0009] A connecting pipe is connected to and fixedly connected to the output end of the water pump, thereby connecting the water pump and the controllable regulating valve.

[0010] A controllable regulating valve is connected to and fixedly connected to the end of the connecting pipe to control the water pressure output by the water pump;

[0011] A sealing device, located at the end of the connecting pipe, is used to improve the sealing performance between the controllable regulating valve and the connecting pipe;

[0012] A blocking device, installed on the surface of the connecting pipe, is used to prevent water from flowing out of the water pump.

[0013] Furthermore, the sealing device includes a mounting plate, which is detachably installed with the connecting pipe, and a plurality of sealing rings are fixedly connected to the surface of the mounting plate.

[0014] Through the above technical solution, the sealing ring fits snugly against the inlet end of the controllable regulating valve and the outlet end of the connecting pipe, thereby improving the sealing performance and preventing leakage between the controllable regulating valve and the connecting pipe, which would lead to insufficient water pressure and affect the rinsing of the wafer.

[0015] Furthermore, the inner wall of the connecting pipe is threaded with a lead screw, and the surface of the mounting plate is provided with a first circular groove, the size of which is adapted to the size of the lead screw.

[0016] The above technical solution can fix the mounting plate, making it convenient for staff to fix the connecting pipe and the controllable regulating valve.

[0017] Furthermore, a round rod is detachably installed at one end of the lead screw, and a screw plate is fixedly connected to one end of the round rod.

[0018] The above technical solution makes it easier for workers to rotate the lead screw.

[0019] Furthermore, a slot is provided at one end of the round rod, and a locking block is fixedly connected to one end of the lead screw, the size of which is adapted to the size of the slot.

[0020] The above technical solution allows the round rod to be removed from the lead screw, avoiding malicious disassembly of the mounting plate.

[0021] Furthermore, the blocking device includes a fixing box, which is fixedly connected to the connecting pipe. A baffle is slidably connected to the inner wall of the fixing box, an L-plate is fixedly connected to the surface of the baffle, and a pinch plate is fixedly connected to the surface of the L-plate.

[0022] The above technical solution blocks the flow of cleaning fluid between the connecting pipes, effectively reducing the leakage of cleaning fluid remaining in the water pump, facilitating operation by staff, and improving the practicality of the device.

[0023] Furthermore, the inner wall of the L-plate is threaded with a screw rod, and the surface of the fixing box is provided with a second circular groove, the size of which is adapted to the size of the screw rod.

[0024] The above technical solution allows for the rapid fixing of the baffle.

[0025] Furthermore, a silicone strip is fixedly connected to the surface of the baffle.

[0026] The above technical solutions improve the sealing performance of the baffle used for partitioning.

[0027] The above-described solution of this utility model has at least the following beneficial effects:

[0028] 1. This utility model, by setting a sealing device, installs a quick-replaceable sealing ring between the controllable regulating valve and the connecting pipe. The sealing ring fits against the water inlet end of the controllable regulating valve and the water outlet end of the connecting pipe, thereby improving the sealing performance and preventing leakage between the controllable regulating valve and the connecting pipe, which would lead to insufficient water pressure and affect the rinsing of the wafer.

[0029] 2. This utility model, by setting up a blocking device, allows the baffle to be fully inserted into the fixing box when the controllable regulating valve needs maintenance or the sealing ring needs to be replaced, blocking the flow of cleaning fluid between the connecting pipes, effectively reducing the leakage of cleaning fluid remaining in the water pump, facilitating operation by staff, and improving the practicality of the device. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0031] Figure 2 This is a utility model Figure 1 A partial structural diagram;

[0032] Figure 3 This is a schematic diagram of the disassembly structure of the mounting plate of this utility model;

[0033] Figure 4 This is a schematic diagram of the disassembled structure of the lead screw of this utility model;

[0034] Figure 5 This is a schematic diagram of the disassembly structure of the blocking device of this utility model.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. Water pump; 2. Water supply pipe; 3. Connecting pipe; 4. Controllable regulating valve; 5. Sealing device; 51. Mounting plate; 52. Sealing ring; 53. Screw rod; 54. First circular groove; 55. Circular rod; 56. Tightening plate; 57. Slot; 58. Locking block; 6. Blocking device; 61. Fixing box; 62. Baffle; 63. L-plate; 64. Pinch plate; 65. Silicone strip; 66. Tightening rod; 67. Second circular groove. Detailed Implementation

[0037] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0038] like Figures 1 to 5As shown, an embodiment of this utility model provides a flow regulating device for a wafer cleaning machine, comprising: a water pump 1; a water supply pipe 2, which is connected to and fixedly connected to the inlet end of the water pump 1 to supply water to the water pump 1; a connecting pipe 3, which is connected to and fixedly connected to the output end of the water pump 1 to connect the water pump 1 and a controllable regulating valve 4; a controllable regulating valve 4, which is connected to and fixedly connected to the end of the connecting pipe 3 to control the water pressure output by the water pump 1; a sealing device 5, which is disposed at the end of the connecting pipe 3 to improve the sealing between the controllable regulating valve 4 and the connecting pipe 3; and a blocking device 6, which is disposed on the surface of the connecting pipe 3 to prevent water from flowing out of the water pump 1.

[0039] like Figures 2 to 4 As shown, the sealing device 5 includes a mounting plate 51, which is detachably installed with the connecting pipe 3. Several sealing rings 52 are fixedly connected to the surface of the mounting plate 51. To prevent leakage between the connecting pipe 3 and the controllable regulating valve 4, the operator places the mounting plate 51 into the slot at the end of the connecting pipe 3, and then fixes the controllable regulating valve 4 to the end of the connecting pipe 3. At this time, the sealing rings 52 on both sides of the mounting plate 51 are in contact with the connecting pipe 3 and the controllable regulating valve 4. A lead screw 53 is threaded onto the inner wall of the connecting pipe 3. A first circular groove 54 is formed on the surface of the mounting plate 51, the size of which is adapted to the size of the lead screw 53. When the lead screw 53 rotates, it moves along the thread until it is inserted into the first circular groove 54 on the mounting plate 51. Then the circular rod 55 can be pulled out to fix the mounting plate 51. One end of the lead screw 53 is detachably mounted with the circular rod 55. One end of the circular rod 55 is fixedly connected to a screw plate 56. The operator inserts the circular rod 55 into the lead screw 53 and rotates the screw plate 56 to drive the lead screw 53 to rotate. One end of the circular rod 55 has a slot 57. One end of the lead screw 53 is fixedly connected to a locking block 58. The size of the locking block 58 matches the size of the slot 57. The locking block 58 on the lead screw 53 is locked in the slot 57 on the circular rod 55.

[0040] In this embodiment of the utility model, to prevent leakage between the connecting pipe 3 and the controllable regulating valve 4, the operator places the mounting plate 51 in the slot at the end of the connecting pipe 3. Then, the operator inserts the round rod 55 into the lead screw 53. The locking block 58 on the lead screw 53 is locked in the locking groove 57 on the round rod 55. The operator rotates the screw 56, causing the lead screw 53 to rotate. When the lead screw 53 rotates, it will move along the thread until it is inserted into the first round groove 54 on the mounting plate 51. Then, the round rod 55 can be pulled out to fix the mounting plate 51. Then, the controllable regulating valve 4 is fixedly installed at the end of the connecting pipe 3. At this time, the sealing rings 52 on both sides of the mounting plate 51 are in contact with the connecting pipe 3 and the controllable regulating valve 4.

[0041] like Figure 5As shown, the blocking device 6 includes a fixing box 61, which is fixedly connected to the connecting pipe 3. A baffle 62 is slidably connected to the inner wall of the fixing box 61. An L-plate 63 is fixedly connected to the surface of the baffle 62, and a pinch plate 64 is fixedly connected to the surface of the L-plate 63. When the controllable regulating valve 4 needs to be removed for maintenance or the sealing ring 52 needs to be replaced, the operator rotates the screw rod 66 on the L-plate 63 to unscrew it from the second circular groove 67 above the fixing box 61, and presses the L-plate 63 with the pinch plate 64. Then the baffle 6... 2. The L plate 63 is fully inserted into the fixing box 61. The inner wall of the L plate 63 is threaded with a screw rod 66. The surface of the fixing box 61 is provided with a second circular groove 67. The size of the second circular groove 67 is adapted to the size of the screw rod 66. Then, the screw rod 66 on the L plate 63 is rotated into the second circular groove 67 inserted below the fixing box 61, thereby fixing the baffle 62 that is fully inserted into the fixing box 61. The surface of the baffle 62 is fixedly connected with a silicone strip 65. The silicone strip 65 on the baffle 62 fits against the inner wall of the fixing box 61.

[0042] In this embodiment of the utility model, when the controllable regulating valve 4 needs to be removed for maintenance or the sealing ring 52 needs to be replaced, the operator rotates the screw rod 66 on the L plate 63 to unscrew it from the second circular groove 67 above the fixed box 61, presses the L plate 63 with the pinch plate 64, and then the baffle 62 is fully inserted into the fixed box 61. The silicone strip 65 on the baffle 62 is in contact with the inner wall of the fixed box 61. Then the screw rod 66 on the L plate 63 is rotated to the second circular groove 67 below the fixed box 61, thereby fixing the baffle 62 that is fully inserted into the fixed box 61.

[0043] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A flow regulating device for a wafer cleaning machine, characterized in that, include: Water pump (1); Water supply pipe (2), which is connected and fixedly connected to the water inlet of water pump (1) to supply water to water pump (1); Connecting pipe (3), which is connected to and fixedly connected to the output end of water pump (1) to connect water pump (1) and controllable regulating valve (4); A controllable regulating valve (4) is connected to and fixedly connected to the end of the connecting pipe (3) to control the water pressure output by the water pump (1); A sealing device (5) is provided at the end of the connecting pipe (3) to improve the sealing between the controllable regulating valve (4) and the connecting pipe (3); A blocking device (6) is installed on the surface of the connecting pipe (3) to prevent water from flowing out of the water pump (1).

2. The flow regulating device for a wafer cleaning machine according to claim 1, characterized in that, The sealing device (5) includes a mounting plate (51), which is detachably installed with the connecting pipe (3), and a plurality of sealing rings (52) are fixedly connected to the surface of the mounting plate (51).

3. The flow regulating device for a wafer cleaning machine according to claim 2, characterized in that, The inner wall of the connecting pipe (3) is threaded with a lead screw (53), and the surface of the mounting plate (51) is provided with a first circular groove (54), the size of which is adapted to the size of the lead screw (53).

4. The flow regulating device for a wafer cleaning machine according to claim 3, characterized in that, One end of the lead screw (53) is detachably mounted with a round rod (55), and one end of the round rod (55) is fixedly connected with a screw plate (56).

5. The flow regulating device for a wafer cleaning machine according to claim 4, characterized in that, One end of the round rod (55) is provided with a slot (57), and one end of the lead screw (53) is fixedly connected with a locking block (58). The size of the locking block (58) is adapted to the size of the slot (57).

6. The flow regulating device for a wafer cleaning machine according to claim 2, characterized in that, The blocking device (6) includes a fixing box (61), which is fixedly connected to the connecting pipe (3). A baffle (62) is slidably connected to the inner wall of the fixing box (61), and an L-plate (63) is fixedly connected to the surface of the baffle (62). A pinch plate (64) is fixedly connected to the surface of the L-plate (63).

7. The flow regulating device for a wafer cleaning machine according to claim 6, characterized in that, The inner wall of the L plate (63) is threaded with a screw rod (66), and the surface of the fixing box (61) is provided with a second circular groove (67), the size of which is adapted to the size of the screw rod (66).

8. The flow regulating device for a wafer cleaning machine according to claim 6, characterized in that, A silicone strip (65) is fixedly connected to the surface of the baffle (62).

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