Film coating jig of semiconductor chip

Abstract

The utility model relates to the technical field of semiconductors, and discloses a film coating jig of a semiconductor chip, which comprises a base, an adsorption part and a fixing assembly, the adsorption part is arranged on the base, the adsorption part is used for adsorbing a clamp by an automatic bar arranging machine, and the adsorption part is provided with a first bearing surface and a second bearing surface, in the height direction of the base, the first bearing face is higher than the second bearing face, the first bearing face is used for bearing accompanying strips output by the automatic bar arranging machine, the second bearing face is used for bearing bars output by the automatic bar arranging machine, and the fixing assembly is used for fixing the bars and the accompanying strips. By adopting the film coating jig disclosed by the utility model, the sticking condition during film coating can be avoided, and the film coating quality is higher.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a coating fixture for semiconductor chips. Background Technology

[0002] In related technologies, semiconductor chips require coating during production. Specifically, an automatic bar-laying machine alternately arranges bar strips and auxiliary strips onto a coating fixture, and a coating machine performs the coating process. Coating is a crucial step in semiconductor chip production, and its quality directly impacts the chip's performance. Therefore, improving coating quality has become a key research area in the industry.

[0003] However, existing coating fixtures tend to cause sticking when coating the bar strips after arranging the bar strips and auxiliary strips, resulting in lower coating quality. Utility Model Content

[0004] This utility model discloses a coating fixture for semiconductor chips, which can avoid sticking during coating and achieve higher coating quality.

[0005] This utility model discloses a coating fixture for semiconductor chips, including a base, an adsorption component, and a fixing component. The adsorption component is disposed on the base and is used as an adsorption clamp for an automatic bar dispenser. The adsorption component has a first bearing surface and a second bearing surface. Along the height direction of the base, the first bearing surface is higher than the second bearing surface. The first bearing surface is used to support the strips output by the automatic bar dispenser, and the second bearing surface is used to support the bar strips output by the automatic bar dispenser. The fixing component is disposed on the base and is used to fix the bar strips and the strips.

[0006] This embodiment uses an adsorption component mounted on a base to attach the fixture to the automatic plating machine. The adsorption component has a first bearing surface and a second bearing surface that form a height difference along the height of the base. Thus, when the automatic plating machine outputs plating strips and auxiliary strips, the auxiliary strips are supported on the first bearing surface, and the plating strips are supported on the second bearing surface, with a height difference between them. This avoids sticking during the coating process, resulting in higher coating quality. Furthermore, fixing the plating strips and auxiliary strips with a fixing component before coating prevents movement and unevenness of the cavity surface, which is beneficial for semiconductor chip production.

[0007] As an optional implementation, the fixing component includes a first locking mechanism and a second locking mechanism. The first locking mechanism is disposed on the base and is used to lock the bar and the auxiliary bar along the height direction. The second locking mechanism is disposed on the first locking mechanism and is used to lock the bar and the auxiliary bar along the thickness direction of the bar.

[0008] In this way, the first locking mechanism locks the bar strip and the auxiliary strip along the height direction, while the second locking mechanism locks the bar strip and the auxiliary strip along the thickness direction. This can fix the bar strip and the auxiliary strip from multiple directions, ensuring that the position of the bar strip and the auxiliary strip remains unchanged during the coating process, and avoiding unevenness of the cavity surface due to position movement.

[0009] As an optional implementation, in this embodiment of the present invention, the first locking mechanism includes a pad, a frame, and a baffle. The pad is disposed on the side of the adsorption component away from the base. The frame is detachably disposed on the side of the pad away from the adsorption component along the height direction, forming a gap with the adsorption component. The baffle is disposed between the frame and the pad. The baffle is used to abut against the side of the bar away from the first bearing surface to lock the bar, and to abut against the side of the bar away from the second bearing surface to lock the bar.

[0010] In this way, by bearing the auxiliary strip and the bar strip on the first bearing surface and the second bearing surface respectively, and by connecting the frame to the pad block along the height direction, the frame can abut against the baffle, thereby causing the baffle to abut against the auxiliary strip and the bar strip, thus locking the bar strip and the auxiliary strip along the height direction.

[0011] As an optional implementation, in this embodiment of the present invention, the frame is provided with a through hole that extends through the frame along the height direction, the pad is provided with a first connecting hole corresponding to the through hole, and the first locking mechanism further includes a first locking member that passes through the through hole and is detachably connected to the first connecting hole.

[0012] In this way, the first locking member is connected to the first connecting hole. The first locking member passes through the through hole and can press the frame body against the pad. At this time, the baffle located between the frame body and the pad can be pressed and abut against the bar strip and the auxiliary strip.

[0013] As an optional implementation, in this embodiment of the present invention, the baffle has a first abutting surface and a second abutting surface facing the adsorption component. Along the height direction, the first abutting surface is higher than the second abutting surface. The first abutting surface is used to abut against the side of the bar strip away from the second bearing surface to lock the bar strip. The second abutting surface is used to abut against the side of the auxiliary strip away from the first bearing surface to lock the auxiliary strip.

[0014] In this way, by forming a height difference along the height direction through the first abutting surface and the second abutting surface, the baffle can simultaneously use the first abutting surface and the second abutting surface to abut against the bar and the auxiliary bar with a height difference, making the clamping difficulty of the coating fixture lower.

[0015] As an optional implementation, in this embodiment of the invention, the surface of the frame facing away from the pad is coated with a layer of aluminum oxide film.

[0016] In this way, by coating the frame and base with an aluminum oxide film, the sodium hydroxide solution can quickly act on the surface of the fixture during cleaning, causing the dirty film layer on the fixture to fall off, reducing the contact time between the sodium hydroxide solution and the fixture, avoiding corrosion of the fixture, and thus extending the service life of the coated fixture.

[0017] As an optional implementation, in this embodiment of the present invention, the second locking mechanism includes a fixing member, a gasket, and an elastic member. The fixing member is disposed on the base, the gasket fills the space between the fixing member and the elastic member and abuts against the bar and the auxiliary bar, and the elastic member is used to provide an elastic force to lock the bar and the auxiliary bar along the thickness direction of the bar.

[0018] In this way, the elastic element provides an elastic force to the gasket, which fills the space between the fixed element and the elastic element. That is, the gasket, the bar strip, and the auxiliary strip are pressed between the elastic element and the fixed element, thereby achieving locking of the bar strip and auxiliary strip along the thickness direction. Furthermore, by using the elastic element to provide the elastic force, when the bar strip undergoes thermal expansion during the coating process, the elastic element provides expansion space, preventing the bar strip and auxiliary strip from forming a hard compression with the second locking mechanism during expansion, which could lead to cracking of the cavity surface.

[0019] As an optional implementation, in this embodiment of the invention, the elastic element is detachably disposed on the frame along the thickness direction.

[0020] In this way, by detachably setting the elastic element along the thickness direction, the interval between the elastic element and the fixed element can be adjusted, so that the appropriate interval space can be adjusted according to the overall thickness of the bar strip, the auxiliary strip and the gasket. Moreover, after adjusting the relative position between the elastic element and the fixed element, the elastic force of the elastic element can also be adjusted accordingly.

[0021] As an optional implementation, in this embodiment of the present invention, the elastic member is provided with a through groove extending through the elastic member along the height direction, the through groove extending along the thickness direction, the base is provided with a second connecting hole, and the second locking mechanism further includes a second locking member, the second locking member passing through the through groove and detachably connected to the second connecting hole.

[0022] In this way, by moving the elastic element along the thickness direction, the distance between the elastic element and the fixed element can be changed. At the same time, by using the through groove to extend along the thickness direction, the elastic elements located at different positions can always be connected to the base through the second locking element to achieve assembly.

[0023] As an optional implementation, in this embodiment of the present invention, the elastic member includes a main body and an elastic part. The main body is provided with the through groove, and the elastic part is connected to the main body. The elastic part is configured to be curved to abut against the gasket.

[0024] In this way, the main body can be fixedly connected to the base by passing through the second locking member, and the elastic part, which is configured to be curved, can undergo elastic deformation when it comes into contact with the gasket, thereby providing an elastic force to lock the bar and the auxiliary bar.

[0025] As an optional implementation, in this embodiment of the invention, the thickness of the elastic portion gradually decreases from the connection point between the elastic portion and the main body portion toward the distance from the main body portion.

[0026] In this way, by gradually increasing the thickness of the elastic element, the thickness at the connection between the elastic part and the main body is larger, which improves the connection strength between the two and prevents the elastic part from breaking due to excessive stress at the connection when elastic deformation occurs. Furthermore, the portion of the elastic part farther from the main body is thinner, which facilitates elastic deformation and provides elastic force.

[0027] As an optional implementation, in this embodiment of the present invention, the elastic member further includes a gripping portion, which is disposed on the side of the main body opposite to the elastic member, and is used for a user to grip.

[0028] In this way, the grip provides a point of force application for the user, allowing them to hold the grip when disassembling and assembling the elastic component and the base, reducing the difficulty of operation. Furthermore, the grip is located away from the elastic component, preventing accidental application of force to the elastic component during disassembly and assembly, thus avoiding any impact on its elastic properties and extending the service life of the elastic component.

[0029] Compared with the prior art, the embodiments of this utility model have at least the following beneficial effects:

[0030] In this embodiment of the invention, an adsorption component is provided on the base, enabling the automatic plating machine to adsorb the clamps. The adsorption component has a first bearing surface and a second bearing surface forming a height difference along the height direction of the base. Thus, when the automatic plating machine outputs plating strips and auxiliary strips, the auxiliary strips are supported on the first bearing surface, and the plating strips are supported on the second bearing surface, with a height difference between them. This avoids sticking during the coating process, resulting in higher coating quality. Furthermore, fixing the plating strips and auxiliary strips with a fixing component before coating prevents movement and unevenness of the cavity surface, which is beneficial for semiconductor chip production. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the structure of a coating fixture disclosed in an embodiment of this utility model;

[0033] Figure 2 This is an exploded structural diagram of a coating fixture disclosed in an embodiment of the present utility model;

[0034] Figure 3 This is an exploded structural diagram of a first locking mechanism disclosed in an embodiment of the present utility model;

[0035] Figure 4 This is a schematic diagram of the structure of an elastic element disclosed in an embodiment of this utility model.

[0036] Explanation of main figure symbols

[0037] 100. Coating fixture; 10. Base; 10a. Second connecting hole; 20. Adsorption component; 21. First bearing surface; 22. Second bearing surface; 30. First locking mechanism; 31. Pad; 31a. First connecting hole; 32. Frame; 32a. Through hole; 33. Baffle; 33a. First abutment surface; 33b. Second abutment surface; 34. First locking element; 40. Second locking mechanism; 41. Fixing element; 42. Gasket; 43. Elastic element; 43a. Through groove; 431. Main body; 432. Elastic part; 433. Grip part; 44. Second locking element; a. Strip; b. Bar; x. Height direction; y. Thickness direction. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0039] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0040] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0041] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0042] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0043] This utility model discloses a coating fixture for semiconductor chips, which can avoid sticking during coating and achieve higher coating quality.

[0044] Please refer to the following: Figures 1 to 2This is a schematic diagram of the structure of a semiconductor chip coating fixture 100 provided in an embodiment of the present invention. The coating fixture 100 includes a base 10, an adsorption component 20, and a fixing component. The adsorption component 20 is disposed on the base 10 and is used as an adsorption clamp for an automatic bar dispenser. The adsorption component 20 has a first bearing surface 21 and a second bearing surface 22. Along the height direction x of the base 10, the first bearing surface 21 is higher than the second bearing surface 22. The first bearing surface 21 is used to support the strip a output by the automatic bar dispenser, and the second bearing surface 22 is used to support the bar strip b output by the automatic bar dispenser. The fixing component is disposed on the base 10 and is used to fix the strip a and the bar strip b.

[0045] In this embodiment, an adsorption component 20 is provided on the base 10. The adsorption component 20 allows the fixture to be adsorbed onto the automatic plating machine. The adsorption component 20 is provided with a first bearing surface 21 and a second bearing surface 22 forming a height difference along the height direction x of the base 10. Thus, when the automatic plating machine outputs plating strip a and accompanying strip b, accompanying strip a is supported on the first bearing surface 21, and plating strip b is supported on the second bearing surface 22. The height difference between plating strip a and accompanying strip b can prevent sticking during the coating process, resulting in higher coating quality. Furthermore, the accompanying strip a and plating strip b are fixed by a fixing component before coating, which can prevent movement and unevenness of the cavity surface, thus benefiting the production of semiconductor chips.

[0046] In some embodiments, the fixing assembly includes a first locking mechanism 30 and a second locking mechanism 40. The first locking mechanism 30 is disposed on the base 10 and is used to lock the strip a and the bar strip b along the height direction x. The second locking mechanism 40 is disposed on the first locking mechanism 30 and is used to lock the strip a and the bar strip b along the thickness direction y of the strip a. In this way, by locking the strip a and the bar strip b along the height direction x with the first locking mechanism 30 and locking the strip a and the bar strip b along the thickness direction y with the second locking mechanism 40, the strip a and the bar strip b can be fixed from multiple directions, ensuring that the positions of the strip a and the bar strip b remain unchanged during the coating process and avoiding unevenness of the cavity surface due to position movement.

[0047] For example, the first locking mechanism 30 includes a pad 31, a frame 32, and a baffle 33. The pad 31 is disposed on the side of the adsorption member 20 away from the base 10. The frame 32 is detachably disposed on the side of the pad 31 away from the adsorption member 20 along the height direction x, so as to form a gap with the adsorption member 20. The baffle 33 is disposed between the frame 32 and the pad 31. The baffle 33 is used to abut against the side of the strip a away from the first bearing surface 21 to lock the strip a, and to abut against the side of the bar strip b away from the first bearing surface 21 to lock the bar strip b. In this way, by bearing the strip a and the bar strip b on the first bearing surface 21 and the second bearing surface 22 respectively, and connecting the frame 32 to the pad 31 along the height direction x, the frame 32 can abut against the baffle 33, thereby causing the baffle 33 to abut against the bar strip b and the strip a, thereby locking the strip a and the bar strip b along the height direction x.

[0048] Optionally, the frame 32 is provided with a through hole 32a, which extends through the frame 32 along the height direction x. The pad 31 is provided with a first connecting hole 31a corresponding to the through hole 32a. The first locking mechanism 30 also includes a first locking member 34, which passes through the through hole 32a and is detachably connected to the first connecting hole 31a. In this way, by connecting the first locking member 34 to the first connecting hole 31a, the first locking member 34 can press the frame 32 against the pad 31. At this time, the baffle 33 located between the frame 32 and the pad 31 can be pressed and abut against the strip a and the bar strip b.

[0049] In some embodiments, the baffle 33 has a first abutting surface 33a and a second abutting surface 33b facing the adsorption member 20. Along the height direction x, the first abutting surface 33a is higher than the second abutting surface 33b. The first abutting surface 33a is used to abut against the side of the bar strip b away from the first bearing surface 21 to lock the bar strip b, and the second abutting surface 33b is used to abut against the side of the auxiliary strip a away from the first bearing surface 21 to lock the auxiliary strip a. In this way, by forming a height difference along the height direction x through the first abutting surface 33a and the second abutting surface 33b, the baffle 33 can simultaneously use the first abutting surface 33a and the second abutting surface 33b to abut against the bar strip b and the auxiliary strip a with a height difference, thus reducing the clamping difficulty of the coating fixture 100.

[0050] For example, the surfaces of the frame 32 facing away from the pad 31 and the base 10 facing away from the pad 31 are coated with a thin film of aluminum oxide.

[0051] In this way, by coating the frame 32 and the base 10 with a thin film, the sodium hydroxide solution can be quickly applied to the surface of the coating fixture 100 during cleaning, causing the dirty film layer on the coating fixture 100 to fall off, reducing the contact time between the sodium hydroxide solution and the coating fixture 100, avoiding corrosion of the coating fixture 100, and thus extending the service life of the coating fixture 100.

[0052] For example, the material of the thin film can be aluminum oxide. When zinc sulfide, zinc selenide or other film materials are formed on the thin film during the coating process, the film material can be removed by a specific chemical reagent (such as sodium hydroxide). Aluminum oxide can react with sodium hydroxide to reduce the contact time between the sodium hydroxide solution and the coating fixture 100, thereby preventing the coating fixture 100 from being corroded.

[0053] In some embodiments, the second locking mechanism 40 includes a fixing member 41, a gasket 42, and an elastic member 43. The fixing member 41 is spaced apart from the base 10 along the thickness direction y. The gasket 42 fills the space between the fixing member 41 and the elastic member 43 and abuts against the strip a and the bar strip b. The elastic member 43 provides an elastic force to lock the strip a and the bar strip b along the thickness direction y of the strip a. Thus, by the elastic member 43 providing an elastic force acting on the gasket 42, and by the gasket 42 filling the space between the fixing member 41 and the elastic member 43, that is, by pressing the gasket 42, the strip a, and the bar strip b between the elastic member 43 and the fixing member 41, the strip a and the bar strip b are locked along the thickness direction y. Furthermore, by employing the elastic element 43 to provide elastic force, when the strip a and the bar strip b undergo thermal expansion during the coating process, the elastic element 43 can provide expansion space, preventing the strip a and the bar strip b from forming a hard squeeze with the second locking mechanism 40 during expansion, which could lead to cracking of the cavity surface.

[0054] For example, the elastic element 43 is detachably disposed on the base 10 along the thickness direction y. In this way, by detachably disposing of the elastic element 43 along the thickness direction y, the interval between the elastic element 43 and the fixing element 41 is adjustable, thereby allowing the appropriate interval space to be adjusted according to the overall thickness of the strip a, the bar strip b and the gasket 42, and the elastic force of the elastic element 43 is also adjustable after adjusting the relative position between the elastic element 43 and the fixing element 41.

[0055] Optionally, the elastic member 43 is provided with a through groove 43a extending through the elastic member 43 along the height direction x, and the through groove 43a extends along the thickness direction y. The base 10 is provided with a second connecting hole 10a. The second locking mechanism 40 further includes a second locking member 44, which passes through the through groove 43a and is detachably connected to the second connecting hole 10a. In this way, by moving the elastic member 43 along the thickness direction y, the interval distance between the elastic member 43 and the fixing member 41 can be changed. At the same time, by utilizing the through groove 43a extending along the thickness direction y, the elastic member 43 located at different positions can always be connected to the base 10 through the second locking member 44 to achieve assembly.

[0056] In some embodiments, the elastic member 43 includes a main body 431 and an elastic part 432. The main body 431 is provided with a through groove 43a, and the elastic part 432 is connected to the main body 431. The elastic part 432 is configured to be curved to abut against the gasket 42. In this way, the main body 431 can be fixedly connected to the base 10 by passing through the second locking member 44, and the elastic part 432, which is configured to be curved, can undergo elastic deformation when it abuts against the gasket 42, thereby providing an elastic force to lock the strip a and the bar b.

[0057] The second connecting hole 10a can be directly provided on the base 10, or when the base 10 is provided with a frame 32, the second connecting hole 10a can be provided on the frame 32. The choice can be made according to the actual situation, and this embodiment does not make specific limitations on this.

[0058] Optionally, the thickness of the elastic portion 432 gradually decreases from the connection point between the elastic portion 432 and the main body portion 431 towards the distance from the main body portion 431. This design, with its gradually increasing thickness, results in a larger thickness at the connection point between the elastic portion 432 and the main body portion 431, improving the connection strength and preventing excessive stress at the connection point during elastic deformation, which could lead to breakage between the elastic portion 432 and the main body portion 431. Furthermore, the thinner thickness of the portion of the elastic portion 432 further away from the main body portion 431 facilitates elastic deformation and provides elastic force.

[0059] For example, the elastic member 43 also includes a gripping portion 433, which is located on the side of the main body 431 opposite to the elastic portion 432. The gripping portion 433 is for the user to hold. In this way, the gripping portion 433 provides a point for the user to apply force, allowing the user to hold the gripping portion 433 during disassembly and assembly of the elastic member 43 and the base 10, reducing the difficulty of operation. Furthermore, since the gripping portion 433 is far from the elastic portion 432, it can prevent accidental application of force to the elastic portion 432 during disassembly and assembly, thus avoiding any impact on the elastic performance of the elastic portion 432 and extending the service life of the elastic member 43.

[0060] This invention provides a semiconductor chip coating fixture 100. An adsorption component 20 is provided on a base 10 to adsorb the coating fixture 100 onto an automatic plating machine. The adsorption component 20 has a first bearing surface 21 and a second bearing surface 22 forming a height difference along the height direction x of the base 10. Thus, when the automatic plating machine outputs strip a and strip b, strip a rests on the first bearing surface 21, and strip b rests on the second bearing surface 22, with a height difference between them. This avoids adhesion during the coating process, resulting in higher coating quality. Furthermore, fixing strip a and strip b with a fixing component before coating prevents movement and unevenness of the cavity surface, which is beneficial for semiconductor chip production.

[0061] The above provides a detailed description of a semiconductor chip coating fixture disclosed in the embodiments of this utility model. This article uses specific examples to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the semiconductor chip coating fixture and its core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A coating fixture for semiconductor chips, characterized in that, include: Base; An adsorption component is disposed on the base and is used as an adsorption fixture for an automatic bar dispenser. The adsorption component has a first bearing surface and a second bearing surface. Along the height direction of the base, the first bearing surface is higher than the second bearing surface. The first bearing surface is used to support the bar strips output by the automatic bar dispenser, and the second bearing surface is used to support the bar strips output by the automatic bar dispenser. as well as A fixing component is provided on the base and is used to fix the bar and the accompaniment bar.

2. The coating fixture according to claim 1, characterized in that, The fixing component includes a first locking mechanism and a second locking mechanism. The first locking mechanism is disposed on the base and is used to lock the bar and the auxiliary bar along the height direction. The second locking mechanism is disposed on the first locking mechanism and is used to lock the bar and the auxiliary bar along the thickness direction of the bar.

3. The coating fixture according to claim 2, characterized in that, The first locking mechanism includes a pad, a frame, and a baffle. The pad is located on the side of the adsorption component away from the base. The frame is detachably located on the side of the pad away from the adsorption component along the height direction to form a gap with the adsorption component. The baffle is located between the frame and the pad. The baffle is used to abut against the side of the bar away from the first bearing surface to lock the bar, and to abut against the side of the auxiliary strip away from the first bearing surface to lock the auxiliary strip.

4. The coating fixture according to claim 3, characterized in that, The frame is provided with a through hole that extends through the frame along the height direction. The pad is provided with a first connecting hole corresponding to the through hole. The first locking mechanism also includes a first locking member that passes through the through hole and is detachably connected to the first connecting hole.

5. The coating fixture according to claim 3, characterized in that, The baffle has a first abutting surface and a second abutting surface facing the adsorption component. Along the height direction, the first abutting surface is higher than the second abutting surface. The first abutting surface is used to abut against the side of the bar strip away from the first bearing surface to lock the bar strip. The second abutting surface is used to abut against the side of the auxiliary strip away from the first bearing surface to lock the auxiliary strip.

6. The coating fixture according to any one of claims 2 to 5, characterized in that, The second locking mechanism includes a fixing member, a washer, and an elastic member. The fixing member and the elastic member are spaced apart on the base along the thickness direction. The washer fills the space between the fixing member and the elastic member and abuts against the bar and the auxiliary bar. The elastic member provides an elastic force to lock the bar and the auxiliary bar along the thickness direction of the bar.

7. The coating fixture according to claim 6, characterized in that, The elastic element is provided with a through groove extending through the elastic element along the height direction and the through groove extending along the thickness direction. The base is provided with a second connecting hole. The second locking mechanism further includes a second locking member, which passes through the through groove and is detachably connected to the second connecting hole.

8. The coating fixture according to claim 7, characterized in that, The elastic element includes a main body and an elastic part. The main body is provided with the through groove, and the elastic part is connected to the main body. The elastic part is configured to be curved to abut against the gasket.

9. The coating fixture according to claim 8, characterized in that, The thickness of the elastic portion gradually decreases from the connection point between the elastic portion and the main body portion toward the distance from the main body portion.

10. The coating fixture according to claim 8, characterized in that, The elastic element also includes a gripping part, which is located on the side of the main body opposite to the elastic element, and is used for a user to grip.

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