Translation discharging mechanism of graphite boat

Abstract

The utility model discloses a graphite boat translation blanking mechanism which comprises a blanking bin and a goods shelf, and the bottom of the goods shelf is fixedly connected with a lower-layer bracket through an upper-layer bracket. According to the goods shelf, the driving part drives the driving gear to rotate, the driving gear is meshed with the rack to enable the supporting frame to horizontally move, the supporting frame is in linkage with the goods shelf, so that horizontal movement of the goods shelf is achieved, the tensioning alignment block is combined with the positioning pin, the blocking plate abuts against the adjacent face of the limiting strip and the positioning strip, and therefore the positioning bottom plate and the goods shelf are fixedly matched; in the stepping moving process of the goods shelf, the graphite boat can be laid on the top of the goods shelf, then after the supporting frame is horizontally moved to the initial position, the air cylinder pulls and pulls the alignment block to be separated from the positioning pin, at the moment, the goods shelf is independently pulled, the goods shelf can independently move outwards, and horizontal moving discharging of the graphite boat is achieved through the goods shelf moving in a sectional mode; and the convenience of translation blanking of the graphite boat is ensured.

Description

Technical Field

[0001] This utility model relates to the field of graphite boat processing technology, and in particular to a translational feeding mechanism for graphite boats. Background Technology

[0002] Graphite boats are high-temperature processing equipment used in semiconductor manufacturing processes. They are mainly used to heat-treat wafers or other materials placed inside the graphite boat. This equipment is commonly used in diffusion, oxidation, annealing and other process steps, and is a very critical link in the semiconductor production line.

[0003] The finished graphite boat is usually removed from the unloading port by the operator. Since the unloading port is vertical and the graphite boat has a large volume, the unloading process is inconvenient. Therefore, there is an urgent need to propose a corresponding translational unloading mechanism for the graphite boat to solve the above problems. Utility Model Content

[0004] The purpose of this utility model is to provide a translational feeding mechanism for a graphite boat in order to solve the above-mentioned problems.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A graphite boat translational unloading mechanism includes an unloading bin and a shelf. The bottom of the shelf is fixedly connected to a lower shelf via an upper bracket. The bottom of the lower bracket is integrated with casters. The upper and lower brackets each include a limit strip and a positioning strip. The inner wall of the unloading bin is integrated with a support frame and a drive assembly for translating the support frame. The outer wall of the support frame is fixedly connected to a positioning base plate via a connecting plate. The top of the positioning base plate is provided with a blocking plate that abuts against the outer wall of the limit strip. A fixing assembly for fixing the shelf to the positioning base plate is provided between the side of the positioning strip near the limit strip and the positioning base plate.

[0007] Preferably, a guide block is fixedly connected to the top of the positioning base plate, and the guide block abuts against the side of the limiting strip away from the blocking plate.

[0008] Preferably, a lower extension plate is fixedly connected to the bottom of the limiting strip, and the lower extension plate abuts against the blocking plate.

[0009] Preferably, the drive assembly includes a drive member and a sliding part that maintains the sliding stability of the support frame. The drive member is fixedly connected to the connecting plate. A drive gear is fixedly connected to the output end of the drive member. A rack that meshes with the drive gear is fixedly connected to the inner wall of the feeding bin.

[0010] Preferably, the sliding part includes a track and a sliding sleeve that are fixedly connected to the feeding bin and the support frame respectively, and the sliding sleeve and the track are slidably engaged.

[0011] Preferably, the fixing component includes a positioning pin and a cylinder that are fixedly connected to the positioning strip and the positioning base plate respectively. The output end of the cylinder is fixedly connected to a tensioning and alignment block through a series plate, and the positioning pin engages with the tensioning and alignment block.

[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0013] 1. In this application, the entire rack mechanism is equivalent to a set of AGV trolleys. The driving component drives the driving gear to rotate. The driving gear meshes with the rack, causing the support frame to move horizontally. The support frame is linked with the rack, thereby realizing the horizontal movement of the rack. The tensioning alignment block is engaged with the positioning pin, and the blocking plate abuts against the adjacent surfaces of the limit strip and the positioning strip, thereby realizing the fixed engagement between the positioning base plate and the rack. During the stepping movement of the rack, the graphite boat will be placed on the top of the rack. Then, after the support frame moves to the initial position, the cylinder pulls the alignment block closer to separate the positioning pin. At this time, the rack can be moved independently by pulling it. The rack can be moved outward independently. Through the segmented movement of the rack, the horizontal movement and unloading of the graphite boat is realized, and the convenience of the horizontal movement and unloading of the graphite boat is ensured.

[0014] 2. In this application, the guide block abuts against the side of the limit strip away from the blocking plate. The guide block and the blocking plate are always mounted on both sides of the limit strip. In this way, the independent horizontal movement of the shelf is not affected, and the shelf will not shift longitudinally after the alignment block and the positioning pin are separated. This improves the stability of the graphite boat's horizontal feeding mechanism. Attached Figure Description

[0015] Figure 1 A schematic diagram of the overall structure according to an embodiment of the present utility model is shown;

[0016] Figure 2 A schematic diagram of a rack structure according to an embodiment of the present invention is shown;

[0017] Figure 3 A schematic diagram of a drive gear structure according to an embodiment of the present invention is shown;

[0018] Figure 4 A schematic diagram of a tensioning alignment block structure according to an embodiment of the present invention is shown.

[0019] Legend:

[0020] 1. Feeding bin; 2. Shelf; 3. Upper bracket; 4. Lower bracket; 5. Limiting strip; 6. Positioning strip; 7. Track; 8. Rack; 9. Support frame; 10. Connecting plate; 11. Driving component; 12. Driving gear; 13. Positioning base plate; 14. Cylinder; 15. Guide block; 16. Connecting plate; 17. Tensioning and alignment block; 18. Positioning pin; 19. Blocking plate. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4 This utility model provides a technical solution:

[0023] A graphite boat translation unloading mechanism includes a loading bin 1 and a shelf 2. The bottom of the shelf 2 is fixedly connected to a lower shelf 4 via an upper shelf 3. The bottom of the lower shelf 4 is integrated with casters. The upper shelf 3 and the lower shelf 4 respectively include a limit strip 5 and a positioning strip 6. The inner wall of the loading bin 1 is integrated with a support frame 9 and a drive assembly for translating the support frame 9. The outer wall of the support frame 9 is fixedly connected to a positioning base plate 13 via a connecting plate 10. The top of the positioning base plate 13 is provided with a baffle plate 19 that abuts against the outer wall of the limit strip 5. A fixing assembly for fixing the shelf 2 and the positioning base plate 13 is provided between the side of the positioning strip 6 near the limit strip 5 and the positioning base plate 13.

[0024] In this application, the entire rack mechanism is equivalent to a set of AGV trolleys. The drive component 11 drives the drive gear 12 to rotate. The drive gear 12 meshes with the rack 8, causing the support frame 9 to move horizontally. The support frame 9 is linked to the rack 2, thereby realizing the horizontal movement of the rack 2. The tensioning alignment block 17 is engaged with the positioning pin 18. The blocking plate 19 abuts against the adjacent surfaces of the limit strip 5 and the positioning strip 6, thereby achieving a fixed fit between the positioning base plate 13 and the rack 2. During the stepping movement of the rack 2, the graphite boat will be placed on top of the rack 1. Then, after the rack 2 moves to the initial position, the cylinder 14 pulls the tensioning alignment block 17 to separate the positioning pin 18. At this time, the rack 2 can be independently moved outward by pulling it independently. Through the segmented movement of the rack 2, the horizontal movement and unloading of the graphite boat are realized, and the convenience of the horizontal movement and unloading of the graphite boat is ensured.

[0025] Specifically, such as Figure 2 and Figure 4As shown, a guide block 15 is fixedly connected to the top of the positioning base plate 13. The guide block 15 abuts against the side of the limiting strip 5 away from the blocking plate 19. The guide block 15 and the blocking plate 19 are always mounted on both sides of the limiting strip 5. In this way, the shelf 2 will not shift longitudinally after the alignment block 17 is separated from the positioning pin 18 without affecting the independent horizontal movement of the shelf 2. This improves the stability of the graphite boat's horizontal unloading mechanism. A lower extension plate is fixedly connected to the bottom of the limiting strip 5, and the lower extension plate abuts against the blocking plate 19 to compensate for the height difference between the limiting strip 5 and the blocking plate 19.

[0026] Specifically, such as Figure 2 and Figure 3 As shown, the drive assembly includes a drive component 11 and a sliding part that maintains the sliding stability of the support frame 9. The drive component 11 is fixedly connected to the connecting plate 10. A drive gear 12 is fixedly connected to the output end of the drive component 11. A rack 8 that meshes with the drive gear 12 is fixedly connected to the inner wall of the feeding bin 1. The drive component 11 drives the drive gear 12 to rotate. The drive gear 12 causes the support frame 9 to translate by meshing with the rack 8. The sliding part includes a track 7 that is fixedly connected to the feeding bin 1 and the support frame 9 respectively. The sleeve and the sliding sleeve slide in conjunction with the track 7 to ensure the stability of the movement of the support frame 9. The fixing components include positioning pins 18 and cylinders 14, which are fixedly connected to positioning strips 6 and positioning base plates 13 respectively. The output end of cylinder 14 is fixedly connected to tensioning and alignment block 17 through series plate 16. Positioning pin 18 is engaged with tensioning and alignment block 17. After the support frame 9 moves to the limit distance, cylinder 14 pulls tensioning and alignment block 17 to separate positioning pin 18. At this time, the shelf 2 can be moved outward independently by pulling it independently.

[0027] Working principle: The entire rack mechanism is equivalent to a set of AGV trolleys. The drive component 11 drives the drive gear 12 to rotate. The drive gear 12 meshes with the rack 8, causing the support frame 9 to move horizontally. The support frame 9 is linked to the rack 2, thereby realizing the horizontal movement of the rack 2. The tensioning and alignment block 17 engages with the positioning pin 18, and the blocking plate 19 abuts against the adjacent surfaces of the limit strip 5 and the positioning strip 6, thereby achieving a fixed fit between the positioning base plate 13 and the rack 2. During the stepping movement of the rack 2, the graphite boat will be placed on top of the rack 1. Then, after the rack 2 moves to the initial position, the cylinder 14 pulls the tensioning and alignment block. When block 17 separates from positioning pin 18, the shelf 2 can be independently moved outward by pulling it independently. Through the segmented movement of shelf 2, the graphite boat is moved horizontally and unloaded, ensuring the convenience of the graphite boat's horizontal movement and unloading. Guide block 15 abuts against the side of limit strip 5 away from the blocking plate 19. Guide block 15 and blocking plate 19 are always mounted on both sides of limit strip 5. In this way, without affecting the independent horizontal movement of shelf 2, after the alignment block 17 is pulled and separated from positioning pin 18, shelf 2 will not have longitudinal deviation, thereby improving the stability of the graphite boat's horizontal movement and unloading mechanism.

[0028] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A translational unloading mechanism for a graphite boat, comprising an unloading bin (1) and a shelf (2), characterized in that, The bottom of the shelf (2) is fixedly connected to the lower bracket (4) via the upper bracket (3). The bottom of the lower bracket (4) is integrated with casters. The upper bracket (3) and the lower bracket (4) respectively include a limit strip (5) and a positioning strip (6). The inner wall of the unloading bin (1) is integrated with a support frame (9) and a drive component for the translation of the support frame (9). The outer wall of the support frame (9) is fixedly connected to a positioning base plate (13) via a connecting plate (10). The top of the positioning base plate (13) is provided with a blocking plate (19) that abuts against the outer wall of the limit strip (5). The side of the positioning strip (6) near the limit strip (5) is provided with a fixing component for fixing the shelf (2) and the positioning base plate (13).

2. The translational feeding mechanism for a graphite boat according to claim 1, characterized in that, The top of the positioning base plate (13) is fixedly connected to a guide block (15), which abuts against the side of the limiting strip (5) away from the blocking plate (19).

3. The translational feeding mechanism for a graphite boat according to claim 2, characterized in that, The bottom of the limiting strip (5) is fixedly connected to a lower extension plate, and the lower extension plate abuts against the blocking plate (19).

4. The translational feeding mechanism for a graphite boat according to claim 3, characterized in that, The drive assembly includes a drive component (11) and a sliding part that maintains the stability of the support frame (9). The drive component (11) is fixedly connected to the connecting plate (10). The output end of the drive component (11) is fixedly connected to a drive gear (12). The inner wall of the feeding bin (1) is fixedly connected to a rack (8) that meshes with the drive gear (12).

5. The translational feeding mechanism for a graphite boat according to claim 4, characterized in that, The sliding part includes a track (7) and a sliding sleeve that are fixedly connected to the feeding bin (1) and the support frame (9) respectively, and the sliding sleeve is slidably engaged with the track (7).

6. The translational feeding mechanism for a graphite boat according to claim 5, characterized in that, The fixing assembly includes positioning pins (18) that are fixedly connected to the positioning strip (6) and the positioning base plate (13), respectively. The cylinder (14) has a tensioning and alignment block (17) fixedly connected to its output end via a series plate (16). The positioning pin (18) engages with the tensioning and alignment block (17).

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