Novel high-energy magnetron sputtering cylindrical target device

Abstract

The utility model discloses a novel high-energy magnetron sputtering cylindrical target device, and relates to the technical field of magnetron sputtering cylindrical targets. The magnetron sputtering cylindrical target comprises a magnetron sputtering cylindrical target body, a coating box shell is connected to the outer side of the magnetron sputtering cylindrical target body in an inserted mode, a mounting frame is fixedly connected to the outer side of the magnetron sputtering cylindrical target body, and a sealing assembly is arranged below the coating box shell and comprises an annular mounting shell. According to the magnetron sputtering cylindrical target, the sealing assembly is arranged, specifically, after the magnetron sputtering cylindrical target body is installed, the annular sealing gasket and the annular installation shell are inserted into the magnetron sputtering cylindrical target body, after the annular installation shell is installed, the annular installation shell can be connected with the first threaded block in an inserted mode, then the first nut is installed so that the annular installation shell can be fixed, and the annular sealing gasket is pushed and extruded; therefore, a good sealing effect is achieved, gaps at the joint of the magnetron sputtering cylindrical target body and the coating box shell are avoided, the vacuum effect in the coating box is improved, and the coating quality is improved.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering cylindrical target technology, and in particular relates to a novel high-energy magnetron sputtering cylindrical target device. Background Technology

[0002] High-energy magnetron sputtering cylindrical targets are advanced equipment used in vacuum coating technology. By optimizing the magnetic field design and structural layout, they significantly improve sputtering efficiency and target utilization.

[0003] Existing magnetron sputtering cylindrical targets are typically inserted from the top of the coating chamber and then secured with multiple bolts via a flange. This method usually lacks a sealed structure, which can easily lead to gaps between the magnetron sputtering cylindrical target and the coating chamber after installation. This results in poor vacuuming performance, allowing external air to easily enter the coating chamber through the gaps, thus affecting the vacuum effect and reducing coating quality. Therefore, we propose a novel high-energy magnetron sputtering cylindrical target device. Utility Model Content

[0004] The purpose of this invention is to provide a novel high-energy magnetron sputtering cylindrical target device. By setting a sealing assembly, specifically, after the magnetron sputtering cylindrical target body is installed, an annular sealing gasket and an annular mounting shell are respectively inserted into the magnetron sputtering cylindrical target body. After installation, the annular mounting shell is inserted into a threaded block, and then a nut is installed to fix the annular mounting shell, pushing and compressing the annular sealing gasket, thereby achieving a good sealing effect. This avoids gaps at the connection between the magnetron sputtering cylindrical target body and the coating chamber shell, thus improving the vacuum effect inside the coating chamber and improving the coating quality. It solves the problem that existing magnetron sputtering cylindrical targets have gaps between them after installation, resulting in poor vacuuming performance and allowing external air to easily enter the coating chamber through the gaps, affecting the vacuum effect and reducing coating quality.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model is a novel high-energy magnetron sputtering cylindrical target device, including a magnetron sputtering cylindrical target body, a coating box shell inserted into the outer side of the magnetron sputtering cylindrical target body, a mounting frame fixedly connected to the outer side of the magnetron sputtering cylindrical target body, and a sealing component provided below the coating box shell;

[0007] The sealing assembly includes an annular mounting shell, an annular sealing gasket is fitted inside the annular mounting shell, the top of the annular sealing gasket contacts the bottom of the coating chamber shell, the center of the annular mounting shell and the annular sealing gasket are both inserted into the outer side of the magnetron sputtering cylindrical target body, the inner wall of the annular sealing gasket contacts the outer surface of the magnetron sputtering cylindrical target body, and the top of the annular mounting shell contacts the bottom of the coating chamber shell.

[0008] Furthermore, the bottom of the annular sealing gasket is provided with three threaded holes and three positioning holes, the inner wall of the annular mounting shell is fixedly connected with three positioning blocks, and the inside of the annular mounting shell is provided with three insertion holes.

[0009] Furthermore, the positioning block is adapted to the positioning hole, the insertion hole corresponds to the insertion hole, the bottom of the annular sealing gasket contacts the inner wall of the annular mounting shell, the outer side of the bottom of the annular sealing gasket is tapered, the bottom of the coating box shell is fixedly connected to a positioning ring, the inner side is inserted into the outer side of the annular sealing gasket, and the outer side of the positioning ring is inserted into the inner side of the annular mounting shell.

[0010] Furthermore, three threaded blocks are fixedly connected to the bottom of the coating box shell, and nuts are threadedly connected to the outer surfaces of the three threaded blocks. The outer side of the annular mounting shell has three openings, and the annular mounting shell is inserted into the threaded blocks through the openings.

[0011] Furthermore, a positioning frame is fixedly connected to the top of the coating chamber shell, and a mounting bracket is fixedly connected to the outer surface of the magnetron sputtering cylindrical target body. The mounting bracket is inserted into the positioning frame, and the bottom of the mounting bracket contacts the top of the coating chamber shell.

[0012] Furthermore, the mounting bracket has a straight groove inside, and a threaded block two is provided inside the straight groove. The top of the threaded block two is fixedly connected to the top of the coating box shell, and a nut two is threadedly connected to the outer surface of the threaded block two.

[0013] This utility model has the following beneficial effects:

[0014] 1. This utility model, by setting a sealing component, specifically, after the magnetron sputtering cylindrical target body is installed, inserts an annular sealing gasket and an annular mounting shell into the magnetron sputtering cylindrical target body respectively. After installation, the annular mounting shell is inserted into the threaded block, and then the nut is installed to fix the annular mounting shell, pushing and squeezing the annular sealing gasket, thereby achieving a good sealing effect, avoiding gaps at the connection between the magnetron sputtering cylindrical target body and the coating chamber shell, thereby improving the vacuum effect in the coating chamber and improving the coating quality.

[0015] 2. This utility model sets up a positioning frame, specifically inserting the main body of the magnetron sputtering cylindrical target from the top of the coating box shell, so that the mounting frame is inserted into the positioning frame, and at the same time, the second threaded block is inserted into the straight slot. Then, the second nut is threadedly connected to the second threaded block to fix the mounting frame, thus completing the installation of the main body of the magnetron sputtering cylindrical target. This method is simple and convenient to operate, has higher installation efficiency, and facilitates subsequent continuous maintenance and other work.

[0016] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the bottom structure of the coated box shell of this utility model;

[0020] Figure 3 This is a front sectional view of the annular sealing gasket of this utility model;

[0021] Figure 4 This utility model Figure 3 A magnified structural diagram of A in the middle;

[0022] Figure 5 This is a schematic diagram of the bottom structure of the annular sealing gasket of this utility model;

[0023] Figure 6 This is a schematic diagram of the overall structure of the annular mounting shell of this utility model.

[0024] The attached diagram lists the components represented by each number as follows:

[0025] 1. Magnetron sputtering cylindrical target body; 11. Coating box shell; 111. Positioning frame; 112. Threaded block one; 113. Nut one; 12. Mounting bracket; 121. Straight groove; 122. Threaded block two; 123. Nut two; 13. Sealing assembly; 131. Annular mounting shell; 311. Positioning block; 312. Insertion hole; 132. Annular sealing gasket; 321. Threaded hole; 322. Positioning hole; 133. Positioning ring. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0027] Please see Figure 1-6As shown, this utility model is a novel high-energy magnetron sputtering cylindrical target device, including a magnetron sputtering cylindrical target body 1, a coating box shell 11 inserted into the outside of the magnetron sputtering cylindrical target body 1, a mounting bracket 12 fixedly connected to the outside of the magnetron sputtering cylindrical target body 1, and a sealing component 13 provided below the coating box shell 11.

[0028] The sealing assembly 13 includes an annular mounting shell 131, with an annular sealing gasket 132 fitted inside the annular mounting shell 131. The top of the annular sealing gasket 132 contacts the bottom of the coating chamber shell 11. The centers of the annular mounting shell 131 and the annular sealing gasket 132 are inserted into the outer side of the magnetron sputtering cylindrical target body 1. The inner wall of the annular sealing gasket 132 contacts the outer surface of the magnetron sputtering cylindrical target body 1, and the top of the annular mounting shell 131 contacts the bottom of the coating chamber shell 11. By setting the sealing assembly 13, specifically for the magnetron sputtering cylindrical target body 1, After the target body 1 is installed, the annular sealing gasket 132 and the annular mounting shell 131 are respectively inserted into the magnetron sputtering cylindrical target body 1. After installation, the annular mounting shell 131 will be inserted into the threaded block 112. Then, the nut 113 is installed to fix the annular mounting shell 131 and push and squeeze the annular sealing gasket 132 to achieve a good sealing effect, avoid gaps at the connection between the magnetron sputtering cylindrical target body 1 and the coating chamber shell 11, thereby improving the vacuum effect in the coating chamber and improving the coating quality.

[0029] The bottom of the annular sealing gasket 132 is provided with three threaded holes 321 and three positioning holes 322. Three positioning blocks 311 are fixedly connected to the inner wall of the annular mounting shell 131. The inside of the annular mounting shell 131 is provided with three insertion holes 312. The annular mounting shell 131 is inserted into the positioning holes 322 at the bottom of the annular sealing gasket 132 through the positioning blocks 311 to position the annular mounting shell 131, so that the insertion holes 312 on the annular mounting shell 131 are aligned with the threaded holes 321.

[0030] The positioning block 311 is adapted to the positioning hole 322, and the insertion hole 312 corresponds to the insertion hole 312. The bottom of the annular sealing gasket 132 contacts the inner wall of the annular mounting shell 131. The outer side of the bottom of the annular sealing gasket 132 is tapered. The bottom of the coating box shell 11 is fixedly connected to the positioning ring 133, which is inserted into the outer side of the annular sealing gasket 132. The outer side of the positioning ring 133 is inserted into the inner side of the annular mounting shell 131. After the annular sealing gasket 132 moves to the bottom of the coating box shell 11, it will be inserted into the positioning ring 133, and the positioning ring 133 will position the annular sealing gasket 132.

[0031] The bottom of the coating housing 11 is fixedly connected to three threaded blocks 112. Nuts 113 are threadedly connected to the outer surfaces of the three threaded blocks 112. The annular mounting housing 131 has three openings on its outer side. The annular mounting housing 131 is inserted into the threaded blocks 112 through the openings. After installation, the annular mounting housing 131 will be inserted into the threaded blocks 112. The nuts 113 are installed on the threaded blocks 112 to fix the annular mounting housing 131.

[0032] A positioning frame 111 is fixedly connected to the top of the coating chamber shell 11, and a mounting bracket 12 is fixedly connected to the outer surface of the magnetron sputtering cylindrical target body 1. The mounting bracket 12 is inserted into the positioning frame 111, and the bottom of the mounting bracket 12 contacts the top of the coating chamber shell 11. By setting the positioning frame 111, specifically by inserting the magnetron sputtering cylindrical target body 1 from the top of the coating chamber shell 11, the mounting bracket 12 is inserted into the positioning frame 111. At the same time, the threaded block 122 is inserted into the straight slot 121, and then the nut 123 is threadedly connected to the threaded block 122 to fix the mounting bracket 12. The installation of the magnetron sputtering cylindrical target body 1 is thus completed. This method is simple and convenient to operate, has higher installation efficiency, and facilitates subsequent continuous maintenance.

[0033] The mounting bracket 12 has a straight slot 121 inside, and a threaded block 122 is provided inside the straight slot 121. The top of the threaded block 122 is fixedly connected to the top of the coating box shell 11. The outer surface of the threaded block 122 is threaded with a nut 123. Both the mounting bracket 12 and the positioning frame 111 are square, which makes the magnetron sputtering cylindrical target body 1 more stable after installation.

[0034] One specific application of this embodiment is:

[0035] In use, the magnetron sputtering cylindrical target body 1 is inserted from the top of the coating chamber shell 11, allowing the mounting bracket 12 to engage with the positioning frame 111. The positioning frame 111 positions the mounting bracket 12, enabling quick docking. Simultaneously, the threaded block 122 engages with the straight slot 121, and then the nut 123 is threaded onto the threaded block 122 to secure the mounting bracket 12. This completes the installation of the magnetron sputtering cylindrical target body 1. This method is simple and convenient, with higher installation efficiency, and facilitates subsequent maintenance. After the magnetron sputtering cylindrical target body 1 is installed, the annular sealing gasket 132 is inserted from the bottom of the magnetron sputtering cylindrical target body 1. The annular sealing gasket 132 is moved to the bottom of the coating chamber shell 11 and engaged with the positioning ring 133. Then, the annular mounting shell 131 is inserted from the bottom of the magnetron sputtering cylindrical target body 1, and the annular mounting shell 133 is then engaged with the positioning ring 133. The housing 131 slides upward to contact the annular sealing gasket 132. The annular housing 131 is then inserted into the positioning hole 322 at the bottom of the annular sealing gasket 132 via the positioning block 311, thus positioning the annular housing 131. At this time, the insertion hole 312 on the annular housing 131 will align with the threaded hole 321, facilitating the installation of bolts. After installation, the annular housing 131 will be inserted into the threaded block 112. Then, the nut 113 is installed on the threaded block 112 to fix the annular housing 131. After being fixed, the annular housing 131 will push and squeeze the annular sealing gasket 132, making the annular sealing gasket 132 fit tightly against the coating chamber housing 11, thereby achieving a good sealing effect and avoiding gaps at the connection between the magnetron sputtering cylindrical target body 1 and the coating chamber housing 11, thus improving the vacuum effect inside the coating chamber and improving the coating quality.

[0036] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0037] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the present utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the present utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A novel high-energy magnetron sputtering cylindrical target device, comprising a magnetron sputtering cylindrical target body (1), a coating box shell (11) inserted into the outside of the magnetron sputtering cylindrical target body (1), a mounting bracket (12) fixedly connected to the outside of the magnetron sputtering cylindrical target body (1), and a sealing component (13) provided below the coating box shell (11). Its characteristics are: The sealing assembly (13) includes an annular mounting shell (131), an annular sealing gasket (132) is sleeved on the inner side of the annular mounting shell (131), the top of the annular sealing gasket (132) contacts the bottom of the coating chamber shell (11), the center of the annular mounting shell (131) and the annular sealing gasket (132) are inserted into the outer side of the magnetron sputtering cylindrical target body (1), the inner wall of the annular sealing gasket (132) contacts the outer surface of the magnetron sputtering cylindrical target body (1), and the top of the annular mounting shell (131) contacts the bottom of the coating chamber shell (11).

2. The novel high-energy magnetron sputtering cylindrical target device according to claim 1, characterized in that, The bottom of the annular sealing gasket (132) is provided with three threaded holes (321) and three positioning holes (322). The inner wall of the annular mounting shell (131) is fixedly connected with three positioning blocks (311). The inside of the annular mounting shell (131) is provided with three insertion holes (312).

3. The novel high-energy magnetron sputtering cylindrical target device according to claim 2, characterized in that, The positioning block (311) is adapted to the positioning hole (322), the insertion hole (312) corresponds to the insertion hole (312), the bottom of the annular sealing gasket (132) contacts the inner wall of the annular mounting shell (131), and the outer side of the bottom of the annular sealing gasket (132) is tapered.

4. A novel high-energy magnetron sputtering cylindrical target device according to claim 3, characterized in that, The bottom of the coating housing (11) is fixedly connected to a positioning ring (133), the inner side of which is inserted into the outer side of the annular sealing gasket (132), and the outer side of the positioning ring (133) is inserted into the inner side of the annular mounting shell (131).

5. A novel high-energy magnetron sputtering cylindrical target device according to claim 4, characterized in that, The bottom of the coating box shell (11) is fixedly connected to three threaded blocks (112), and the outer surfaces of the three threaded blocks (112) are all threaded with nuts (113). The outer side of the annular mounting shell (131) has three openings, and the annular mounting shell (131) is inserted into the threaded blocks (112) through the openings.

6. A novel high-energy magnetron sputtering cylindrical target device according to claim 4, characterized in that, The top of the coating chamber (11) is fixedly connected to a positioning frame (111), and the outer surface of the magnetron sputtering cylindrical target body (1) is fixedly connected to a mounting bracket (12). The mounting bracket (12) is inserted into the positioning frame (111), and the bottom of the mounting bracket (12) is in contact with the top of the coating chamber (11).

7. A novel high-energy magnetron sputtering cylindrical target device according to claim 6, characterized in that, The mounting bracket (12) has a straight slot (121) inside, and a threaded block (122) is provided inside the straight slot (121). The top of the threaded block (122) is fixedly connected to the top of the coating box shell (11), and a nut (123) is threadedly connected to the outer surface of the threaded block (122).

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