Material box rotary type plasma processing device

Abstract

The utility model discloses a material box rotary type plasma processing device, and belongs to the technical field of plasma processing. The vacuum chamber comprises a vacuum chamber main body, the front surface of the vacuum chamber main body is hinged with a vacuum door, and the back surface of the vacuum chamber main body is respectively provided with a matcher and a shielding box. According to the utility model, through the arrangement of the supporting disc, a product to be treated is firstly placed on the screen plate of the double-layer bracket, then the vacuum cavity main body is started to supply power to the negative plate and the positive plate, and an electric field is generated through the high-frequency power supply, so that gas in the equipment is ionized to form plasmas to treat the product; meanwhile, the gear motor is started to drive the connecting clamping base and the rotating chuck to rotate, so that the supporting disc and the double-layer bracket at the top of the supporting disc are driven to rotate at a constant speed, products on the double-layer bracket screen plate can be treated more uniformly, meanwhile, the products rotate and make more frequent contact with plasmas, and the treatment efficiency is improved.

Description

Technical Field

[0001] This utility model belongs to the field of plasma treatment technology, specifically a rotary plasma treatment device with a material box. Background Technology

[0002] Rotary plasma treatment units are high-tech devices used for material surface treatment. They utilize plasma to modify material surfaces, improving adhesion, cleanliness, and surface properties. Most existing plasma treatment units fix the product in place before processing; however, this method results in uneven treatment and less than ideal effects, while also requiring longer processing times per cycle, thus reducing processing efficiency. Utility Model Content

[0003] To address the problems mentioned in the background art, the purpose of this utility model is to provide a rotating plasma treatment device with a material box, which has the advantages of improving the treatment effect of products and shortening the treatment time. It solves the problem that most existing plasma treatment devices fix the products before treatment, but this fixing method does not result in uniform treatment of the products and the effect is not ideal. At the same time, the single treatment time is long, which reduces the processing efficiency of the products.

[0004] This utility model provides the following technical solution: a rotary plasma treatment device for a material box, comprising a vacuum chamber body, a vacuum door hinged to the front of the vacuum chamber body, a matching device and a shielding box respectively provided on the back of the vacuum chamber body, a mounting frame fixedly connected to the bottom of the vacuum chamber body, a reduction motor fixedly connected to the bottom of the mounting frame, upright plates fixedly connected to the inner walls of the upper and lower sides of the vacuum chamber body, a connecting seat provided on the surface of the bottom upright plate, a plurality of spring clips provided on the outer side of the connecting seat, the spring clips being arranged in a circular array, a rotating chuck movably connected to the top of the connecting seat through the spring clips, a support plate fixedly connected to the top of the rotating chuck, a plurality of polytetrafluoroethylene (PTFE) pads fixedly connected to the top of the support plate, a double-layer bracket fixedly connected to the top of the PTFE pads, a negative electrode plate and a positive electrode plate respectively provided on both sides inside the vacuum chamber body, an air inlet connector provided on the front of the vacuum door, the air inlet connector extending to the back of the vacuum door and connected to a gas pipe.

[0005] The beneficial effects of this utility model are as follows:

[0006] 1. This utility model, through the setting of the support plate, first places the product to be processed on the mesh plate of the double-layer bracket, then starts the vacuum chamber body to send power to the negative and positive plates, and generates an electric field through the high-frequency power supply, which ionizes the gas inside the equipment to form plasma to process the product. At the same time, the geared motor is started to drive the connecting card seat and the rotating chuck to rotate, thereby driving the support plate and the double-layer bracket on its top to rotate at a uniform speed. This makes the product on the mesh plate of the double-layer bracket more uniformly processed, and the product rotation comes into more frequent contact with the plasma, thereby speeding up the processing efficiency.

[0007] 2. This utility model uses guide rollers to limit and fix the support plate, making it more stable when rotating in relative positions. It also facilitates quick positioning and installation after the rotating chuck and support plate are separated from the connecting seat. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the main structure of this utility model.

[0009] Figure 2 This is a rear view schematic diagram of the structure of this utility model.

[0010] Figure 3 This is a frontal sectional view of the structure of this utility model.

[0011] Figure 4 This is a rear cross-sectional view of the structure of this utility model.

[0012] Figure 5 This is a front view of the structural upright plate and shielding plate of this utility model. Detailed Implementation

[0013] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0014] like Figures 1 to 5As shown, the rotary plasma treatment device of this embodiment includes a vacuum chamber body 1. A vacuum door 2 is hinged to the front of the vacuum chamber body 1. A matching device 3 and a shielding box 4 are respectively provided on the back of the vacuum chamber body 1. A mounting bracket 5 is fixedly connected to the bottom of the vacuum chamber body 1. A geared motor 6 is fixedly connected to the bottom of the mounting bracket 5. Vertical plates 7 are fixedly connected to the inner walls of the upper and lower sides of the vacuum chamber body 1. A connecting bracket 8 is provided on the surface of the bottom vertical plate 7. Several spring clips are provided on the outside of the connecting bracket 8. The buckles are arranged in a circular array. The top of the connecting card seat 8 is movably connected to the rotating chuck 9 by a spring buckle. The top of the rotating chuck 9 is fixedly connected to the support plate 10. The top of the support plate 10 is fixedly connected to several polytetrafluoroethylene (PTFE) pads 11. The top of the PTFE pads 11 is fixedly connected to a double-layer bracket 12. Negative electrode plate 13 and positive electrode plate 14 are respectively arranged on both sides inside the vacuum chamber body 1. An air inlet connector 15 is arranged on the front of the vacuum door 2. The air inlet connector 15 extends to the back of the vacuum door 2 and is connected to an air pipe 16.

[0015] refer to Figure 3 Several support bases 17 are fixedly connected to the bottom of the upper plate 7. The support bases 17 are rectangularly distributed. Each support base 17 has a support rod 18 fixedly connected to its bottom. Each support rod 18 has a guide roller 19 sleeved at its bottom end. The guide roller 19 is rolledly connected to the curved surface of the support plate 10.

[0016] In this embodiment, the guide roller 19 is used to limit and fix the support plate 10, making it more stable when rotating in relative positions. At the same time, it facilitates quick positioning and installation after the rotating chuck 9 and the support plate 10 are separated from the connecting bracket 8, further improving the practicality of the plasma treatment device.

[0017] refer to Figure 1 Both sides of the front of the vacuum door 2 have round holes, and door flanges 20 are fixedly connected inside the round holes. High-definition glass 21 is fixedly connected inside the door flanges 20.

[0018] This embodiment, through the setting of high-definition glass 21, facilitates users to observe the processing status of the product in real time, thereby enabling them to better grasp the processing progress and ensure the processing quality of the product.

[0019] refer to Figure 2 The output end of the geared motor 6 passes through the interior of the mounting bracket 5 and is fixedly connected to a flange-type solid shaft magnetoresistive fluid 22 via a coupling. The top end of the flange-type solid shaft magnetoresistive fluid 22 passes through the vacuum chamber body 1 and extends to the surface of the vertical plate 7. The top end of the flange-type solid shaft magnetoresistive fluid 22 is fixedly connected to the connecting bracket 8.

[0020] In this embodiment, by setting up a flange-type solid shaft magnetofluid 22, when the magnetofluid of the flange-type solid shaft magnetofluid 22 is injected into the gap of the magnetic field, it will fill the entire gap and form a "liquid O-ring seal". This structure can effectively prevent gas or liquid leakage, ensure the sealing of the vacuum chamber body 1, and make its operation more stable.

[0021] refer to Figure 3 The inner walls of the left and right sides of the vacuum chamber body 1 are fixedly connected with shielding plates 23. The left and right sides of the rear wall of the vacuum chamber body 1 are fixedly connected with shielding blocks 24. The shielding blocks 24 are located on the back of the negative electrode plate 13 and the positive electrode plate 14. The two ends of the inner side of the upright plate 7 are fixedly connected with insulating strips 25. The negative electrode plate 13 and the positive electrode plate 14 are located inside the insulating strips 25 and fixedly connected to them.

[0022] This embodiment effectively isolates the external magnetic field by setting up the shielding plate 23, the shielding block 24 and the insulating strip 25, thereby maintaining the stability of the internal magnetic field and reducing magnetic leakage inside the plasma processing device, further improving the sealing effect.

[0023] refer to Figure 4 Several locking blocks 26 are fixedly connected to the back of the vacuum door 2, and the air pipes 16 are all located inside the locking blocks 26.

[0024] In this embodiment, the air pipe 16 is fixed by the setting of the locking block 26, thereby preventing the air pipe 16 from becoming unstable and leaking or falling off after long-term use, thus ensuring the stable operation of the device.

[0025] This invention places the product to be processed on the mesh plate of the double-layer bracket 12, then starts the vacuum chamber body 1 to supply power to the negative electrode plate 13 and the positive electrode plate 14, and supplies gas into the vacuum door 2 through the air inlet connector 15 and the air pipe 16. The high-frequency power supply generates an electric field, which ionizes the gas inside the equipment to form plasma to process the product. The plasma contains a large number of active particles with high energy, which can bombard and chemically react with the material surface. Through the action of plasma, the chemical composition and physical structure of the material surface change and are modified. Then, the reduction motor 6 is started to drive the connecting card seat 8 and the rotating chuck 9 to rotate, thereby driving the support plate 10 and the double-layer bracket 12 on its top to rotate at a uniform speed. This makes the product on the mesh plate of the double-layer bracket 12 more uniformly processed, and the product rotation comes into more frequent contact with the plasma, thereby speeding up the processing efficiency.

Claims

1. A rotary plasma treatment device, comprising a vacuum chamber body (1), characterized in that: A vacuum door (2) is hinged to the front of the vacuum chamber body (1). A matching device (3) and a shielding box (4) are respectively provided on the back of the vacuum chamber body (1). A mounting bracket (5) is fixedly connected to the bottom of the vacuum chamber body (1). A geared motor (6) is fixedly connected to the bottom of the mounting bracket (5). Vertical plates (7) are fixedly connected to the inner walls of the upper and lower sides of the vacuum chamber body (1). A connecting bracket (8) is provided on the surface of the bottom vertical plate (7). Several spring clips are provided on the outside of the connecting bracket (8). The spring clips are arranged in a circular array. The top of the vacuum chamber (8) is movably connected to a rotating chuck (9) via a spring clip. The top of the rotating chuck (9) is fixedly connected to a support plate (10). The top of the support plate (10) is fixedly connected to several polytetrafluoroethylene (PTFE) pads (11). The top of the PTFE pads (11) is fixedly connected to a double-layer bracket (12). Negative electrode plates (13) and positive electrode plates (14) are respectively provided on both sides inside the vacuum chamber body (1). An air inlet connector (15) is provided on the front of the vacuum door (2). The air inlet connector (15) extends to the back of the vacuum door (2) and is connected to an air pipe (16).

2. The rotary plasma treatment device according to claim 1, characterized in that: The bottom of the above-mentioned upright plate (7) is fixedly connected to several support bases (17). The support bases (17) are rectangularly distributed. The bottom of each support base (17) is fixedly connected to a support rod (18). The bottom end of each support rod (18) is fitted with a guide roller (19). The guide roller (19) is rolledly connected to the curved surface of the support plate (10).

3. The rotary plasma treatment device according to claim 2, characterized in that: The vacuum door (2) has round holes on both sides of its front side. Door flanges (20) are fixedly connected inside the round holes. High-definition glass (21) is fixedly connected inside the door flanges (20).

4. The rotary plasma treatment device according to claim 3, characterized in that: The output end of the geared motor (6) extends into the interior of the mounting bracket (5) and is fixedly connected to a flange-type solid shaft magnetoresistive fluid (22) via a coupling. The top end of the flange-type solid shaft magnetoresistive fluid (22) extends through the vacuum chamber body (1) and reaches the surface of the vertical plate (7). The top end of the flange-type solid shaft magnetoresistive fluid (22) is fixedly connected to the connecting bracket (8).

5. The rotary plasma treatment device according to claim 4, characterized in that: The inner walls of the left and right sides of the vacuum chamber body (1) are fixedly connected with shielding plates (23), and the left and right sides of the rear wall of the vacuum chamber body (1) are fixedly connected with shielding blocks (24). The shielding blocks (24) are located on the back of the negative electrode plate (13) and the positive electrode plate (14). The two ends of the inner side of the upright plate (7) are fixedly connected with insulating strips (25). The negative electrode plate (13) and the positive electrode plate (14) are located inside the insulating strips (25) and fixedly connected to them.

6. The rotary plasma treatment apparatus for material boxes according to claim 1, 2 or 5, characterized in that: Several locking blocks (26) are fixedly connected to the back of the vacuum door (2), and the air pipes (16) are all located inside the locking blocks (26).

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