Crystal column defect detection device
By designing a crystal pillar defect detection device, which utilizes a rotating mechanism and multiple sensors for all-round detection, the problem of low efficiency and poor accuracy of manual visual inspection is solved, achieving efficient and accurate crystal pillar defect detection that is suitable for large-scale production.
Patent Information
- Application Number
- CN202422898802.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-27
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-11-27
AI Technical Summary
Current methods for detecting defects in crystal pillars rely on manual visual inspection, which is inefficient, has limited resolution, makes it difficult to detect internal defects, and results are highly subjective, leading to inconsistent test results and an increase in misjudgments.
Design a crystal pillar defect detection device that uses a rotating mechanism, a supplementary light, an industrial camera, and an ultrasonic sensor to perform all-round detection. The device takes photos of the ridge lines by rotating the crystal pillar and performs visual inspection, while the ultrasonic sensor is used to detect internal defects.
It achieves comprehensive, rapid, and accurate crystal pillar defect detection, improves detection efficiency, reduces labor costs and time, ensures crystal pillar quality, and meets the needs of large-scale production.
Smart Images
Figure CN223500901U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of crystal pillar production technology, and more specifically, to a crystal pillar defect detection device. Background Technology
[0002] Semiconductor Manufacturing Dependence: In the semiconductor industry, crystal pillars (such as single-crystal silicon pillars) are the fundamental raw materials for manufacturing core electronic components such as chips. As electronic products continue to evolve towards high performance, miniaturization, and multi-functionality, the quality requirements for chips are becoming increasingly stringent. Defects in crystal pillars, such as dislocations, microcracks, and inclusions, can further affect product yield in subsequent processes like dicing, wafer fabrication, and chip processing, leading to serious problems such as performance degradation, short circuits, or even failure. For example, a tiny internal crack in a crystal pillar, after layers of processing, can cause current leakage in the final chip during operation, affecting the stability of the entire electronic product. Therefore, accurate crystal pillar defect detection technology is essential to ensure high-quality semiconductor production.
[0003] Currently, manual visual inspection is a common method for detecting defects in crystal pillars. Professional inspectors use their naked eyes and simple optical magnification tools (such as magnifying glasses) to observe the surface of the crystal pillar and determine whether there are obvious scratches, holes, or other defects. However, this method has many drawbacks. On the one hand, the human eye has limited resolution and it is difficult to detect some tiny, internal defects, such as dislocation defects on the scale of a few micrometers inside the crystal pillar, which cannot be detected visually. On the other hand, manual inspection is inefficient, and prolonged inspection can easily lead to visual fatigue, resulting in an increase in misjudgments and missed detections. Moreover, the inspection results are highly subjective, and different inspectors may have inconsistent judgments on the defects of the same crystal pillar.
[0004] No effective solutions have yet been proposed to address the problems in the relevant technologies. Utility Model Content
[0005] In view of the problems in the related technologies, the purpose of this utility model is to propose a crystal pillar defect detection device to overcome the above-mentioned technical problems existing in the existing related technologies.
[0006] The technical solution of this utility model is implemented as follows:
[0007] A crystal pillar defect detection device includes: a light shield, wherein a support frame and a support base are disposed inside the light shield, and the support base is located on one side of the support frame;
[0008] The top of the support frame is fitted with a bearing plate, a hanging column is inserted inside the bearing plate, a linkage wheel is fitted at the bottom of the hanging column, and a drive motor is provided on one side of the bearing plate. A transmission wheel is fitted at the output end of the drive motor, and the transmission wheel is connected to the linkage wheel through a belt. An ultrasonic sensor is provided at the bottom of the support frame that is adapted to the hanging column.
[0009] The top of the support base is equipped with a fill light and an industrial camera, which are respectively adapted to the hanging column.
[0010] Furthermore, the support frame includes: a mounting plate and a limiting plate disposed within the light shield, wherein a plurality of vertically arranged sliding rods are provided between the mounting plate and the limiting plate, and the bearing plate is sleeved on the sliding rods.
[0011] Furthermore, the support plate is movably connected to the slide rod.
[0012] Furthermore, the ultrasonic sensor is located at the top of the mounting plate.
[0013] Furthermore, a gap is left between the support base and the support frame, and the support base is movably disposed within the light shield.
[0014] Furthermore, a control screen is provided on one side of the light shield, and the drive motor, the ultrasonic sensor, the fill light and the industrial camera are electrically connected to the control screen through wires.
[0015] Furthermore, the bottom end of the lifting column is provided with a lifting opening for suspending the upper end of the crystal column.
[0016] The beneficial effects of this utility model are:
[0017] This invention pre-connects the crystal column to the bottom of a lifting column via a lifting port. A control panel controls the drive motor to output a transmission wheel, which, in conjunction with a linkage wheel and belt, rotates the lifting column, initiating its rotation. Simultaneously, it controls the activation of supplementary lighting and the setting of a shutter speed and shooting speed for an industrial camera based on the crystal column's rotation frequency, ensuring that the edges on each face of the crystal column are captured. After capturing images of the edges on all faces, visual inspection is performed to detect any broken edges or misaligned edges. At the same time, an ultrasonic sensor sends detection signals to the crystal column, and by receiving feedback signals, it detects any point defects inside the crystal column, thus achieving crystal column defect detection. This not only enables comprehensive inspection and determination of defect types, significantly improving inspection efficiency and reducing the time and labor costs of manual inspection, but also shortens the inspection time for a single crystal column, improving overall inspection efficiency and ensuring crystal column quality, meeting the needs of large-scale production.
[0018] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 This is a schematic diagram of the structure of a crystal pillar defect detection device according to an embodiment of the present utility model;
[0022] Figure 2 This is a schematic diagram of the support frame of the crystal pillar defect detection device according to an embodiment of the present utility model.
[0023] In the picture:
[0024] 1. Sunshade; 2. Support frame; 3. Support base; 4. Load-bearing plate; 5. Hanging column; 6. Linkage wheel; 7. Drive motor; 8. Transmission wheel; 9. Belt; 10. Ultrasonic sensor; 11. Fill light; 12. Industrial camera; 13. Control panel;
[0025] 21. Mounting plate; 22. Limiting plate; 23. Sliding rod; 51. Lifting port. Detailed Implementation
[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.
[0027] According to an embodiment of the present invention, a crystal pillar defect detection device is provided.
[0028] like Figures 1-2 As shown, a crystal pillar defect detection device includes: a light shield 1, a support frame 2 and a support base 3 inside the light shield 1, the support base 3 being located on one side of the support frame 2;
[0029] The top of the support frame 2 is fitted with a bearing plate 4, a hanging column 5 is inserted inside the bearing plate 4, a linkage wheel 6 is fitted at the bottom of the hanging column 5, and a drive motor 7 is provided on one side of the bearing plate 4. A transmission wheel 8 is fitted at the output end of the drive motor 7. The transmission wheel 8 is connected to the linkage wheel 6 through a belt 9. An ultrasonic sensor 10 is provided at the bottom of the support frame 2, which is adapted to the hanging column 5.
[0030] The top of the support base 3 is equipped with a fill light 11 and an industrial camera 12, which are respectively adapted to the hanging column 5.
[0031] The bottom end of the hanging column 5 is provided with a hanging opening 51 for suspending the upper end of the crystal column.
[0032] In addition, the support frame 2 includes: a mounting plate 21 and a limiting plate 22 disposed inside the light shield 1, and a plurality of vertically arranged sliding rods 23 are provided between the mounting plate 21 and the limiting plate 22, and the bearing plate 4 is sleeved on the sliding rods 23.
[0033] The bearing plate 4 is movably connected to the slide rod 23.
[0034] The ultrasonic sensor 10 is located at the top of the mounting plate 21.
[0035] In application, this technical solution can be adapted to different testing environments by adjusting the connection position of the support plate 4 and the slide bar 23 according to the crystal column and fixing them with bolts, thus making it more versatile.
[0036] In addition, there is a gap between the support base 3 and the support frame 2, and the support base 3 is movably installed inside the light shield 1.
[0037] Specifically, by adjusting the position of the support 3, the focal length of the lens of the industrial camera 12 is adapted to meet the requirements for capturing edge line photos.
[0038] In addition, a control panel 13 is provided on one side of the light shield 1, and the drive motor 7, ultrasonic sensor 10, supplementary light 11 and industrial camera 12 are electrically connected to the control panel 13 through wires.
[0039] Using the above solution, the crystal column is pre-connected to the bottom of the hanging column 5 via the lifting port 51. The control panel 13 controls the drive motor 7 to output the transmission wheel 8, which, in conjunction with the linkage wheel 6 and belt 9, drives the hanging column 5 to rotate, thus initiating the rotation of the crystal column. Simultaneously, the supplementary light is turned on, and the industrial camera 12 is controlled to set the shutter speed and shooting speed according to the crystal column's rotation frequency, ensuring that the edges on each side of the crystal column can be photographed. After photographing the edges on all sides, visual inspection is performed to detect any broken edges or misaligned edges. At the same time, the ultrasonic sensor 10 sends detection signals to the crystal column, and by receiving feedback signals, it detects any point defects inside the crystal column, thereby achieving crystal column defect detection. This not only enables comprehensive inspection and determination of defect types, greatly improving inspection efficiency and reducing the time and labor costs of manual inspection, but also shortens the inspection time for a single crystal column, improving overall inspection efficiency and ensuring crystal column quality, meeting the needs of large-scale production.
[0040] In addition, it should be noted that the visual inspection of the above-mentioned edge line photos is carried out by connecting the industrial camera 12 to the industrial control computer (not shown in the diagram) and connecting the industrial control computer to the image inspection application. The image inspection application is a conventional technology known to those skilled in the art and will not be described here.
[0041] In summary, by utilizing the above-mentioned technical solution of this utility model, the following effects can be achieved: comprehensive detection and determination of defect types can be realized, greatly improving detection efficiency, reducing the time and labor costs of manual inspection, and shortening the detection time of a single crystal pillar, thereby improving overall detection efficiency and ensuring crystal pillar quality, and meeting the needs of large-scale production.
[0042] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.
Claims
1. A crystal pillar defect detection device, characterized in that, include: A light shield (1) is provided inside the light shield (1), which is equipped with a support frame (2) and a support base (3), wherein the support base (3) is located on one side of the support frame (2); The support frame (2) is fitted with a bearing plate (4) at the top, and a hanging column (5) is inserted inside the bearing plate (4). A linkage wheel (6) is fitted at the bottom of the hanging column (5), and a drive motor (7) is provided on one side of the bearing plate (4). A transmission wheel (8) is fitted at the output end of the drive motor (7). The transmission wheel (8) is connected to the linkage wheel (6) through a belt (9). An ultrasonic sensor (10) is provided at the bottom of the support frame (2) to fit the hanging column (5). The top of the support base (3) is equipped with a fill light (11) and an industrial camera (12), respectively, and the fill light (11) and the industrial camera (12) are respectively adapted to the hanging column (5).
2. The crystal pillar defect detection device according to claim 1, characterized in that, The support frame (2) includes: a mounting plate (21) and a limiting plate (22) disposed inside the light shield (1), and a plurality of vertically arranged sliding rods (23) are provided between the mounting plate (21) and the limiting plate (22), and the bearing plate (4) is sleeved on the sliding rods (23).
3. The crystal pillar defect detection device according to claim 2, characterized in that, The support plate (4) is movably connected to the slide bar (23).
4. The crystal pillar defect detection device according to claim 2, characterized in that, The ultrasonic sensor (10) is located at the top of the mounting plate (21).
5. The crystal pillar defect detection device according to claim 1, characterized in that, There is a gap between the support base (3) and the support frame (2), and the support base (3) is movably disposed inside the light shield (1).
6. The crystal pillar defect detection device according to claim 1, characterized in that, A control screen (13) is provided on one side of the light shield (1). The drive motor (7), the ultrasonic sensor (10), the fill light (11) and the industrial camera (12) are electrically connected to the control screen (13) through wires.
7. The crystal pillar defect detection device according to claim 1, characterized in that, The bottom end of the hanging column (5) is provided with a hanging port (51) for suspending the upper end of the crystal column.