Integrated circuit test probe card fixing frame structure

Abstract

The utility model discloses an integrated circuit test probe card fixing frame structure, which comprises a first back plate, a second back plate arranged right below the first back plate, two ends of a chute are connected with sliding blocks in a sliding manner, the front ends of the sliding blocks are fixedly connected with fixing blocks, and U-shaped frames penetrate through the centers of the opposite surfaces of two groups of front plates; the two groups of fixing blocks in the second back plate are mainly used for placing the probe card, the two groups of fixing blocks in the first back plate are mainly used for fixing the probe card, when the threaded shaft rotates, the fixing plate can slide back and forth in the U-shaped frame, and meanwhile, the distance between the fixing plate and the supporting plate can be close to each other or far away from each other. When the distance between the fixing plate and the supporting plate is close to each other, the bottom end of the fixing plate can fix the corners of the two ends of the probe card again, meanwhile, the situation that the probe card inclines is also avoided, the fixing frame can drive the probe card to rotate together by arranging a connecting structure between the rotating disc and the rotating ring, and therefore overturning of the probe card is achieved.

Description

Technical Field

[0001] This utility model relates to the field of probe card testing technology, and in particular to a probe card mounting structure for integrated circuit testing. Background Technology

[0002] Integrated circuit test probe cards are specialized devices used to test integrated circuit chips during semiconductor manufacturing. They use precise probes to contact solder joints or test points on the chip to ensure that the chip's functionality and performance meet design standards before packaging. The design and manufacturing of probe cards need to consider the chip size, the layout of test points, and the electrical characteristics required for testing. During chip testing, probe cards can provide the necessary electrical connections while ensuring the accuracy and repeatability of the test.

[0003] In existing technologies, most probe card fixing devices can only provide simple fixation of the probe card. After testing one side of the probe card, operators often need to flip the probe card (after processing the front side) and fix it back to the fixing device for testing the back side. This not only slows down the testing process but also requires frequent installation and removal operations, making it inconvenient to use. To address these issues, Chinese patent CN220455368U discloses a probe card fixing device for integrated circuit testing. This device can move the probe card for integrated circuit testing between two baffles on the fixing frame, and then use a corresponding structure to move the slider... The second crossbar is moved, which in turn moves the baffles. These two baffles secure the probe card, allowing for testing of the integrated circuit. Once one side of the probe card has been tested, the external power supply to the first motor is connected, starting the motor. The motor's output shaft drives the worm gear, which in turn drives the worm wheel. The worm wheel, via the first crossbar, drives the mounting bracket, which in turn, via the baffles, rotates the probe card to test the other side. This eliminates the need for secondary disassembly and reassembly, improving testing speed and ease of use.

[0004] Firstly, when the mounting bracket is used to fix the probe card, the probe card is prone to tilting, which affects the test results. Secondly, the worm gear in the device can only drive the mounting bracket to rotate, so the probe card fixed on the baffle only rotates and does not flip the probe card. Therefore, the mounting bracket is not convenient to use. Utility Model Content

[0005] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0006] To solve the above problems, the present invention adopts the following technical solution.

[0007] An integrated circuit test probe card mounting structure includes a first back plate, a second back plate mounted directly below the first back plate, and a through-slide groove in both the first and second back plates. Slider blocks are slidably connected to both ends of the slide grooves, and fixing blocks are fixedly connected to the front ends of the sliders. First hollow blocks are fixedly connected to the top of the outer walls on both sides of the first back plate, and second hollow blocks are fixedly connected to the bottom of the outer walls on both sides of the second back plate. Front plates are fixedly connected to the front ends of the opposing faces of the two sets of first hollow blocks and the opposing faces of the two sets of second hollow blocks. U-shaped frames penetrate the center of the opposite faces of the two sets of front plates, and fixing plates are slidably connected to the inner walls of the U-shaped frames. Side plates are fixedly connected to the opposite faces of the two sets of second hollow blocks, and a rotatable base is mounted on the bottom of the side plates.

[0008] As a further description of the above technical solution:

[0009] Both ends of the opposite surfaces of the first back plate and the second back plate are fixedly connected to pads. Both sides of the rear end of the first back plate and the second back plate are fixedly connected to shaft blocks. The inner walls of the shaft blocks are rotatably connected to first shaft cores. The opposite surfaces of the two sets of first shaft cores are fixedly connected to rotating rods. The opposite surfaces of the two sets of first shaft cores are fixedly connected to threaded rods. The outer walls of the threaded rods penetrate the rear end of the slider.

[0010] As a further description of the above technical solution:

[0011] The top of the first back plate and the bottom of the second back plate are both fixedly connected to support plates. A collar passes through the support plate, and a second shaft is rotatably connected to the inner wall of the collar. A threaded shaft passes through the fixed plate, and the rear end of the threaded shaft is fixedly connected to the front end of the second shaft.

[0012] As a further description of the above technical solution:

[0013] A turntable is fixedly connected to the bottom of the chassis, and a rotating ring is rotatably connected to the outer wall of the turntable. Slide rods pass through both ends of the rotating ring, and a first return spring is sleeved on the top of the outer wall of each slide rod.

[0014] As a further description of the above technical solution:

[0015] A top ring is fixedly connected to the top of the slide rod, a housing is fixedly connected to the bottom outer edge of the top ring, and a base is fixedly connected to the bottom of the housing.

[0016] As a further description of the above technical solution:

[0017] A hollow cylinder is vertically inserted through the bottom center of the second hollow block. A second return spring is sleeved on the inner wall of each hollow cylinder. A pull rod is sleeved on the inner wall of each second return spring. The top of the outer wall of the pull rod vertically penetrates the inner wall of the first hollow block.

[0018] As a further description of the above technical solution:

[0019] Both ends of the bottom of the turntable are fixedly connected to insert blocks, and the outer wall of the insert blocks penetrates vertically downward through both ends of the base.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] (1) The two sets of fixing blocks in the second back plate are mainly used for placing the probe card, and the two sets of fixing blocks in the first back plate are mainly used for fixing the probe card. When the threaded shaft rotates, the fixing plate can slide back and forth in the U-shaped frame. At the same time, the distance between the fixing plate and the support plate will move closer or further away from each other. When the distance between the fixing plate and the support plate moves closer to each other, the bottom end of the fixing plate can fix the two ends of the probe card again, and also prevent the probe card from tilting. By setting the connection structure between the turntable and the rotating ring, the fixing frame can drive the probe card to rotate together, thereby realizing the flipping of the probe card.

[0022] (2) When the rotating rod is rotated, the two sets of threaded rods will also rotate together. At this time, the slider can move back and forth on the outer wall of the rotating threaded rod, and one end of the slider can slide back and forth on the inner wall of the groove. The two sets of sliders in a set of grooves can only move in opposite directions at the same time. When the two sets of sliders move away from each other, the distance between the two sets of fixed blocks will increase. When the two sets of sliders move closer to each other, the distance between the two sets of fixed blocks will decrease. The distance between the two sets of fixed blocks can be adjusted according to the size of the probe card. The second reset spring can pull the pull rod downwards, and at the same time drive the first back plate and front plate on the opposite side of the first hollow block to move downwards together, which plays a role in fixing the probe card after it has been placed. By setting the connection structure between the insert block and the base, the fixed frame after the flipping can be fixed. Attached Figure Description

[0023] Figure 1 This is one of the structural schematic diagrams of this utility model;

[0024] Figure 2 This is the second structural schematic diagram of the present invention;

[0025] Figure 3 This is a front view of the present invention;

[0026] Figure 4 This is a front sectional view of the present invention;

[0027] Figure 5 This is a rear view of the present invention;

[0028] Figure 6 This utility model Figure 5 Enlarged view of a portion of region A in the middle;

[0029] Figure 7 This utility model Figure 4 Enlarged view of a portion of region B in the middle;

[0030] Figure 8 This utility model Figure 4 Enlarged view of a portion of region C.

[0031] The correspondence between the labels and component names in the attached figures is as follows:

[0032] 1. First back plate; 2. Second back plate; 3. Pad block; 4. Slide groove; 5. Slider; 6. Fixing block; 7. Shaft block; 8. First shaft core; 9. Rotating rod; 10. Threaded rod; 11. Support plate; 12. Shaft collar; 13. Second shaft core; 14. First hollow block; 15. Second hollow block; 16. Front plate; 17. U-shaped frame; 18. Fixing plate; 19. Threaded shaft; 20. Side plate; 21. Chassis; 22. Turntable; 23. Rotating ring; 24. Slide rod; 25. First return spring; 26. Top ring; 27. Outer shell; 28. Base; 29. ​​Hollow cylinder; 30. Second return spring; 31. Pull rod; 32. Insert block. Detailed Implementation

[0033] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0034] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0035] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments. The present invention provides the following embodiments.

[0036] Reference Figure 1-8 This utility model provides an embodiment of an integrated circuit test probe card holder structure, including a first back plate 1, a second back plate 2 installed directly below the first back plate 1, the first back plate 1 and the second back plate 2 are the same size, and pads 3 are fixedly connected to both ends of the opposite surfaces of the first back plate 1 and the second back plate 2, the first back plate 1 and the second back plate 2 are provided with a through-slide groove 4, the two ends of the slide groove 4 are slidably connected to sliders 5, the rear end of the sliders 5 is provided with threaded holes penetrating the outer walls on both sides, and the front end of the sliders 5 is fixedly connected to a fixing block 6, the fixing blocks 6 are installed at the front end of the first back plate 1 and the second back plate 2, the two sets of fixing blocks 6 in the second back plate 2 are mainly used for placing the probe card, and the two sets of fixing blocks 6 in the first back plate 1 are mainly used for fixing the probe card.

[0037] Both the rear ends of the first back plate 1 and the second back plate 2 are fixedly connected to shaft blocks 7. Each shaft block 7 has a shaft hole penetrating its outer wall. A first shaft core 8 is rotatably connected to the inner wall of each shaft block 7. The outer wall of each first shaft core 8 is installed in the shaft hole inside the shaft block 7. Rotating rods 9 are fixedly connected to the opposite faces of the two sets of first shaft cores 8, and threaded rods 10 are fixedly connected to the opposite faces of the two sets of first shaft cores 8. The first shaft core 8 can connect the two sets of threaded rods 10 and rotating rods 9 in series. When the rotating rod 9 is rotated, the two sets of threaded rods 10 will also rotate. The outer wall of each threaded rod 10 penetrates the rear end of the slider 5. The outer wall of the 0 is threadedly connected to the inner wall of the threaded hole inside the slider 5. When the threaded rod 10 rotates, the slider 5 can move back and forth on the outer wall of the rotating threaded rod 10. At the same time, one end of the outer wall of the slider 5 can slide back and forth on the inner wall of the slide groove 4. It is worth noting that the two sets of sliders 5 in a set of slide grooves 4 can only move in opposite directions at the same time. When the two sets of sliders 5 move away from each other, the distance between the two sets of fixed blocks 6 will increase. When the two sets of sliders 5 move closer to each other, the distance between the two sets of fixed blocks 6 will decrease. The distance between the two sets of fixed blocks 6 can be adjusted according to the size of the probe card.

[0038] Support plates 11 are fixedly connected to the top of the first back plate 1 and the bottom of the second back plate 2. A collar 12 passes through the support plate 11. A round hole is opened at the front end of each support plate 11, and the outer wall of the collar 12 is installed in the round hole. A second shaft core 13 is rotatably connected to the inner wall of each collar 12. First hollow blocks 14 are fixedly connected to the top of the outer walls on both sides of the first back plate 1, and second hollow blocks 15 are fixedly connected to the bottom of the outer walls on both sides of the second back plate 2. Through holes are opened in both the first and second hollow blocks 14. Front plates 16 are fixedly connected to the opposite front ends of the two sets of first hollow blocks 14 and the two sets of second hollow blocks 15. U-shaped frames 17 pass through the center of the opposite sides of the two sets of front plates 16. The opposite sides are all provided with grooves. The outer walls of the U-shaped frame 17 are all fixed in the grooves inside the front plate 16. The inner walls of the U-shaped frame 17 are all slidably connected to the fixing plates 18. The fixing plates 18 are all provided with threaded shafts 19 passing through them. The fixing plates 18 are provided with threaded holes that pass through them from front to back. The outer walls of the threaded shafts 19 are all installed in the threaded holes inside the fixing plates 18. The rear ends of the threaded shafts 19 are all fixedly connected to the front ends of the second shaft core 13. When the threaded shafts 19 rotate, the fixing plates 18 can slide back and forth in the U-shaped frame 17. At the same time, the distance between the fixing plates 18 and the support plates 11 will move closer or further away from each other. When the distance between the fixing plates 18 and the support plates 11 moves closer to each other, the bottom end of the fixing plates 18 can fix the two ends of the probe card again.

[0039] Side plates 20 are fixedly connected to the opposite sides of the two sets of second hollow blocks 15. A base plate 21 is fixedly connected to the bottom of the side plates 20. A turntable 22 is fixedly connected to the bottom of the base plate 21. A rotating ring 23 is rotatably connected to the outer wall of the turntable 22. The turntable 22 and the rotating ring 23 are inseparable. By setting the connection structure between the turntable 22 and the rotating ring 23, the fixing frame can drive the probe card to rotate together, thereby realizing the flipping of the probe card. Slide rods 24 are passed through both ends of the rotating ring 23. A circular hole is opened at both ends of the rotating ring 23. The outer wall of the slide rod 24 is perpendicularly passed through the holes at both ends of the rotating ring 23. Therefore, the rotating ring 23 can slide up and down on the outer wall of the slide rod 24. A first return spring 25 is sleeved on the top of the outer wall of the slide rod 24. The first return spring 25 can push the rotating ring 23 downward. A top ring 26 is fixedly connected to the top of the slide rod 24. The outer wall of the base plate 21 can rotate and slide up and down in the inner wall of the top ring 26.

[0040] A housing 27 is fixedly connected to the outer edge of the bottom of the top ring 26. The housing 27 provides shielding and protection for the structure of the first return spring 25. A base 28 is fixedly connected to the bottom of the housing 27. A hollow cylinder 29 is vertically inserted through the center of the bottom of the second hollow block 15. The top of the outer wall of the hollow cylinder 29 is installed in a perforation inside the second hollow block 15. Second return springs 30 are fitted onto the inner walls of the hollow cylinder 29. Pull rods 31 are fitted onto the inner walls of the second return springs 30. The top of the outer wall of the pull rods 31 vertically penetrates the inner wall of the first hollow block 14. The top of the outer wall of the pull rod 31 is installed in the through hole inside the first hollow block 14. The second return spring 30 can pull the pull rod 31 downward, and at the same time drive the first back plate 1 and the front plate 16 opposite to the first hollow block 14 to move downward together, which plays a role in fixing the probe card after it is placed. Both ends of the bottom of the turntable 22 are fixedly connected with the insert block 32. The outer wall of the insert block 32 penetrates vertically downward through both ends of the base 28. By setting the connection structure between the insert block 32 and the base 28, the fixed frame after flipping can be fixed.

[0041] The above description, in conjunction with specific embodiments, provides a further detailed explanation of the present utility model. It should not be construed that the specific implementation of the present utility model is limited to these descriptions. For those skilled in the art, several simple deductions or substitutions can be made without departing from the concept of the present utility model, and all such deductions or substitutions should be considered to fall within the scope of protection defined by the claims submitted by the present utility model.

Claims

1. An integrated circuit test probe card holder structure, comprising a first backplate (1), characterized in that: A second back plate (2) is installed directly below the first back plate (1). Both the first back plate (1) and the second back plate (2) have through-slide grooves (4). Both ends of the slide grooves (4) are slidably connected to sliders (5). The front ends of the sliders (5) are fixedly connected to fixing blocks (6). The top of the outer walls on both sides of the first back plate (1) are fixedly connected to first hollow blocks (14). The bottom of the outer walls on both sides of the second back plate (2) are fixedly connected to second hollow blocks (15). Front plates (16) are fixedly connected to the front ends of the two sets of first hollow blocks (14) and the front ends of the two sets of second hollow blocks (15). U-shaped frames (17) are passed through the center of the opposite sides of the two sets of front plates (16). Fixed plates (18) are slidably connected to the inner walls of the U-shaped frames (17). Side plates (20) are fixedly connected to the opposite sides of the two sets of second hollow blocks (15). A rotatable chassis (21) is installed at the bottom of the side plates (20).

2. The integrated circuit test probe card holder structure according to claim 1, characterized in that: Both ends of the opposite surfaces of the first back plate (1) and the second back plate (2) are fixedly connected to pads (3). Both sides of the rear ends of the first back plate (1) and the second back plate (2) are fixedly connected to shaft blocks (7). The inner walls of the shaft blocks (7) are rotatably connected to first shaft cores (8). The opposite surfaces of the two sets of first shaft cores (8) are fixedly connected to rotating rods (9). The opposite surfaces of the two sets of first shaft cores (8) are fixedly connected to threaded rods (10). The outer walls of the threaded rods (10) penetrate the rear end of the slider (5).

3. The integrated circuit test probe card holder structure according to claim 1, characterized in that: A support plate (11) is fixedly connected to the top of the first back plate (1) and the bottom of the second back plate (2). A collar (12) passes through the support plate (11). A second shaft core (13) is rotatably connected to the inner wall of the collar (12). A threaded shaft (19) passes through the fixing plate (18). The rear end of the threaded shaft (19) is fixedly connected to the front end of the second shaft core (13).

4. The integrated circuit test probe card holder structure according to claim 1, characterized in that: The bottom of the chassis (21) is fixedly connected to a turntable (22), and a rotating ring (23) is rotatably connected to the outer wall of the turntable (22). Both ends of the rotating ring (23) are connected to sliding rods (24), and the top of the outer wall of the sliding rods (24) is fitted with a first return spring (25).

5. The integrated circuit test probe card holder structure according to claim 4, characterized in that: A top ring (26) is fixedly connected to the top of the slide rod (24), a housing (27) is fixedly connected to the bottom outer edge of the top ring (26), and a base (28) is fixedly connected to the bottom of the housing (27).

6. The integrated circuit test probe card holder structure according to claim 1, characterized in that: A hollow cylinder (29) is vertically inserted through the bottom center of the second hollow block (15). A second return spring (30) is sleeved on the inner wall of the hollow cylinder (29). A pull rod (31) is sleeved on the inner wall of the second return spring (30). The top of the outer wall of the pull rod (31) vertically penetrates the inner wall of the first hollow block (14).

7. The integrated circuit test probe card holder structure according to claim 5, characterized in that: Both ends of the bottom of the turntable (22) are fixedly connected to the insert (32), and the outer wall of the insert (32) penetrates vertically downward through both ends of the base (28).

Images