Double-sided grinding device for quartz plate

Abstract

The utility model discloses a quartz plate double-face grinding device which comprises a lower fixed disc and a plurality of wandering star wheels used for containing quartz plates, the lower fixed disc is located on the lower side of the wandering star wheels, a liquid passing gap is formed between the lower fixed disc and the wandering star wheels, and one of the lower fixed disc and the wandering star wheels is provided with a supporting protrusion protruding towards the liquid passing gap. The supporting protrusion abuts against the other one of the two to support the wandering star wheels, a driving hole is formed in the lower fixed disc, and the wandering star wheels surround the driving hole. Grinding liquid and polishing liquid can smoothly flow in the liquid passing gaps, dead corners are reduced, and the liquid utilization rate is increased. Due to the design of the liquid flowing holes, it is guaranteed that liquid uniformly covers the whole machining area, local overheating or non-uniformity is avoided, and the machining quality is improved. In addition, a plurality of wandering star wheels can be driven by the same power source due to the design of the driving holes in the lower fixed disc, a driving system is simplified, cost and maintenance difficulty are reduced, synchronous rotation of all the wandering star wheels is ensured, and machining consistency and precision are improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the quartz plate processing field, concretely relates to a quartz plate double -sided polishing device. BACKGROUND

[0002] In recent years, with the rapid development of semiconductor industry, especially the demand and output of domestic semiconductor accessories are rising, the technical index requirement of high-precision quartz plate and optical quartz plate used as semiconductor substrate is also increasing. Under such background, the requirement of quartz plate processing technology, especially double-sided grinding and polishing process, becomes more and more strict. However, the existing double-sided grinding device still has deficiencies in liquid circulation, mechanical support and motion stability, which affects the processing efficiency and product quality.

[0003] In the traditional design, the wandering star wheel is close to the lower chuck plate, and the flow path of the grinding liquid and the polishing liquid between the wandering star wheel and the lower chuck plate is not smooth enough, which is easy to form a dead angle, resulting in local overheating or uneven processing, which affects the quality of the final product.

[0004] In addition, the relative motion between the wandering star wheel and the lower chuck plate is not coordinated, especially when multiple wandering star wheels are arranged above the lower chuck plate, multiple driving members need to be arranged to drive the wandering star wheels one by one, which leads to a relatively complicated structure design. When multiple wandering star wheels are driven by a single driving member at the same time, the rotation speed of the multiple wandering star wheels may not be consistent, which may cause excessive grinding or polishing in local areas, affecting the surface uniformity and consistency. TECHNICAL SOLUTION

[0005] The utility model provides a kind of quartz plate double-sided grinding device to solve the problem that the grinding liquid and the polishing liquid are unevenly distributed due to the flow path between the wandering star wheel and the lower chuck plate is not smooth enough in the traditional design, and the driving structure is complex when driving multiple wandering star wheels or the grinding is uneven due to the inconsistent rotation speed of multiple wandering star wheels.

[0006] The technical scheme adopted by the utility model is as follows: a quartz plate double-sided grinding device, comprising a lower chuck plate and a plurality of wandering star wheels for placing the quartz plate, the lower chuck plate is located below the wandering star wheel, a liquid passing gap is formed between the lower chuck plate and the wandering star wheel, one of the lower chuck plate and the wandering star wheel is provided with a support protrusion protruding towards the liquid passing gap, the support protrusion is in abutment with the other one to support the wandering star wheel, the lower chuck plate is provided with a driving hole, and a plurality of wandering star wheels surround the driving hole.

[0007] The quartz plate double-sided grinding device of the utility model also has the following additional technical features:

[0008] The outer edge of the planetary wheel is provided with planetary wheel teeth. At least a portion of the downward projection of the planetary wheel teeth is located within the drive hole. A drive rod is provided within the drive hole. The planetary wheel teeth abut against the drive rod so as to drive the multiple planetary wheel teeth to rotate via the drive rod.

[0009] The axes of the multiple planetary wheels are at the same distance from the center of the drive hole, so that the multiple planetary wheels have the same rotation speed.

[0010] One of the lower plate and the planetary wheel is provided with multiple support protrusions, which are arranged at intervals along the circumferential direction of the planetary wheel.

[0011] The lower plate and the planetary wheel are each provided with a support groove that mates with the support protrusion. At least a portion of the support protrusion is located within the support groove, which extends along the circumferential direction of the planetary wheel.

[0012] The upper side of the lower plate is provided with a recessed liquid passage groove, which extends along the radial direction of the planetary wheel. The planetary wheel is provided with a liquid flow hole, and the liquid passage groove is connected to the liquid flow hole.

[0013] The liquid passage extends in a curved manner along the rotation direction of the planetary wheel to form an arc-shaped groove surrounding the axis of the planetary wheel.

[0014] The planetary wheel is provided with a liquid flow hole and a spacer hole. A spacer is provided in the spacer hole. The spacer is provided with a fixing hole for accommodating the quartz plate. A fixing protrusion is provided on the outer edge of the spacer to abut against the opening edge of the spacer hole. The spacer hole is circular so that the spacer can rotate relative to the planetary wheel. A rubber strip is provided on the opening edge of the fixing hole to abut against the quartz plate.

[0015] The fixing hole has a plurality of rubber strips along its rim. The rubber strips protrude relative to the rim of the fixing hole and surround the quartz plate. The rubber strips have crests and troughs on the side that abuts against the quartz plate. The crests and troughs are spaced apart. The crests protrude relative to the troughs and abut against the quartz plate.

[0016] The fixing hole has multiple grooves along its rim, and at least some of the grooves contain the rubber strip.

[0017] Due to the adoption of the above technical solution, the beneficial effects achieved by this utility model are as follows:

[0018] 1. The quartz plate double-sided grinding device provided by this utility model includes a supporting protrusion on one of the lower fixed plate and the planetary wheel, which protrudes towards the liquid passage gap. The supporting protrusion abuts against the other of the two to support the planetary wheel, and a liquid passage gap is formed between the lower fixed plate and the planetary wheel. The liquid passage gap between the lower fixed plate and the planetary wheel ensures smooth flow of grinding and polishing fluid between the upper and lower plates, reduces dead zones in the fluid flow, and improves fluid utilization. The design of the flow holes allows the fluid to evenly cover the entire processing area, avoiding local overheating or uneven processing, thereby significantly improving the processing quality.

[0019] Furthermore, the lower fixed plate is provided with a drive hole, around which multiple planetary gears surround. This drive hole design allows all planetary gears to be driven by a single power source, eliminating the need for multiple independent drive devices. This not only reduces the complexity of the drive system but also lowers equipment cost and maintenance difficulty. Moreover, driving multiple planetary gears with a single power source ensures that the planetary gears rotate at the same time and speed. This not only improves machining consistency but also reduces error accumulation caused by asynchrony, further enhancing machining accuracy.

[0020] 2. In a preferred embodiment of this utility model, one of the lower fixed plate and the planetary wheel is provided with a support groove that mates with the support protrusion. At least a portion of the support protrusion is located within the support groove, which extends circumferentially along the planetary wheel. The design of the support groove ensures that the support protrusion can be accurately embedded, achieving precise alignment between the planetary wheel and the lower fixed plate. This not only improves the overall stability of the system but also reduces machining errors caused by positional deviations. Furthermore, during planetary wheel installation, the support groove guides the support protrusion, facilitating its sliding into the groove. The interaction between the support groove and the support protrusion also allows for determination of whether the planetary wheel is properly installed, thereby improving the convenience and accuracy of planetary wheel installation.

[0021] Furthermore, the support groove extends along the circumferential direction of the planetary wheel, allowing the support protrusion to slide within the groove as the planetary wheel rotates. The support groove and the support protrusion work together to prevent mechanical damage caused by the support protrusion sliding on the planetary wheel or lower fixed plate surface, thus enhancing the stability and durability of the mechanical structure. Simultaneously, the design of the support groove restricts the radial and axial movement of the planetary wheel, ensuring that it does not shift or wobble during high-speed operation, further improving machining accuracy.

[0022] 3. In a preferred embodiment of this utility model, the planetary wheel is provided with a flow hole and a spacer hole. A spacer is provided inside the spacer hole, and the spacer has a fixing hole for accommodating the quartz plate. A fixing protrusion is provided on the outer edge of the spacer to abut against the opening edge of the spacer hole. The spacer hole is circular to allow the spacer to rotate relative to the planetary wheel. A rubber strip is provided on the opening edge of the fixing hole to abut against the quartz plate. The flow hole on the planetary wheel body ensures smooth flow of grinding fluid and polishing fluid between the upper and lower disks. This improvement helps maintain a stable processing environment, ensures consistency in the removal efficiency of the upper and lower surfaces, and further improves the processing quality.

[0023] Furthermore, the spacer hole is circular to allow the spacer to rotate relative to the main body. Because the spacer hole is circular, the spacer can rotate relative to the planetary gear body. This ensures that the quartz plate placed in the fixed hole not only revolves with the planetary gear but also rotates to a certain extent on its own axis. This dual motion helps prevent over-grinding or polishing of localized areas of the quartz plate, thereby improving the surface uniformity and precision after processing. Moreover, the outer edge of the spacer has a fixing protrusion that abuts against the edge of the spacer hole. The fixing protrusion reduces the contact area between the spacer and the main body, reducing friction during grinding and polishing, thereby increasing the rotational speed during product processing.

[0024] A rubber strip is provided along the edge of the fixing hole to abut against the quartz plate. The rubber material has good cushioning properties, which can effectively reduce the vibration and impact force on the quartz plate during processing, reduce the probability of defects such as edge chipping and cracking, and thus improve the product yield.

[0025] 4. In a preferred embodiment of this utility model, the rubber strip has crests and troughs on the side that abuts against the quartz plate. The crests and troughs are spaced apart, with the crests protruding relative to the troughs, and abutting against the quartz plate. By providing crests on the rubber strip, not only are the excellent elasticity and cushioning properties of the rubber material fully utilized, but these properties are further enhanced. The crests can effectively absorb the vibration energy from external impacts, playing a cushioning and protective role and preventing damage to the quartz plate from hard impacts. Simultaneously, the crests are distributed across the entire rubber strip, ensuring that the pressure applied to the quartz plate is evenly distributed, guaranteeing the stable position of the quartz plate during processing, and avoiding deformation or stress concentration caused by excessive local pressure. Furthermore, the crest design increases the friction between the rubber strip and the quartz plate, effectively preventing unnecessary slippage of the quartz plate during processing. This is crucial for maintaining the correct posture of the quartz plate during double-sided grinding and polishing, thereby significantly improving processing accuracy and product quality.

[0026] Furthermore, the presence of crests and troughs creates tiny channels between the rubber strip and the quartz plate. These channels facilitate the flow of abrasive and polishing fluids, ensuring that the liquids uniformly cover the surface of the quartz plate, improving processing efficiency, and guaranteeing consistent removal from both the upper and lower surfaces.

[0027] Meanwhile, the design of the crests and troughs allows the rubber strip to adjust its shape within a certain range to accommodate quartz plates of different thicknesses or specifications. This flexibility enables the same planetary wheel to be used for processing various types of quartz plates, increasing the versatility and economy of the equipment.

[0028] 5. In a preferred embodiment of this utility model, the rim of the fixing hole is provided with multiple grooves, and at least a portion of these grooves contain the rubber strip. The presence of the grooves provides a clear installation position for the rubber strip, ensuring that it can be accurately fixed in the predetermined position. This not only simplifies the assembly process but also ensures that the rubber strip will not easily shift during use, thereby improving the accuracy and stability of the quartz plate placement. Moreover, after the rubber strip is embedded in the groove, the contact between the quartz plate and the body is tighter, increasing friction. This effectively prevents the quartz plate from sliding during processing, ensuring its correct posture during double-sided grinding and polishing, thereby improving processing accuracy.

[0029] Furthermore, the design of multiple grooves allows the rubber strips to be evenly distributed across multiple points, thus dispersing the pressure applied to the quartz plate. This avoids deformation or stress concentration caused by excessive local pressure, ensuring the flatness and consistency of the quartz plate throughout the entire processing. Attached Figure Description

[0030] The accompanying drawings, which are included to provide a further understanding of the present invention and constitute a part of this invention, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0031] Figure 1 This is a top view of the planetary wheel according to one embodiment of the present invention;

[0032] Figure 2 This is a top view of the spacer ring according to one embodiment of the present invention, wherein the quartz plate is fixed in the fixing hole;

[0033] Figure 3 for Figure 2 Enlarged view of region A in the middle;

[0034] Figure 4 This is a schematic diagram of the spacer ring according to one embodiment of the present invention;

[0035] Figure 5 This is a top view of the planetary wheel according to one embodiment of the present invention, wherein the spacer is disposed in the spacer hole;

[0036] Figure 6 This is a top view of the planetary wheel and the lower fixed plate assembly structure according to another embodiment of the present invention;

[0037] Figure 7 This is a vertical cross-sectional schematic diagram of the planetary wheel and the lower fixed plate assembly structure according to one embodiment of the present invention;

[0038] Figure 8 for Figure 7 Enlarged schematic diagram of region B in the middle.

[0039] in:

[0040] 1. Spacer hole; 2. Flow hole; 3. Support protrusion; 4. Planetary wheel; 5. Spacer; 6. Rubber strip; 61. Crest; 62. Trough; 7. Quartz plate; 8. Fixing protrusion; 9. Groove; 10. Lower plate; 11. Fixing hole; 12. Liquid passage gap; 13. Drive hole; 14. Planetary wheel teeth. Detailed Implementation

[0041] To more clearly illustrate the overall concept of this utility model, a detailed description will be provided below with reference to the accompanying drawings.

[0042] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0043] Furthermore, it should be understood in the description of this utility model that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0045] In this invention, unless otherwise expressly specified and limited, the first feature "on" or "below" the second feature may be in direct contact with the first and second features, or indirect contact through an intermediate medium. In the description of this specification, references to terms such as "implementation," "example," "aspect," or "specific example" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0046] like Figures 6 to 8 As shown, a double-sided grinding device for quartz plates includes a lower fixed plate 10 and a plurality of planetary wheels 4 for placing the quartz plates 7. The lower fixed plate 10 is located below the planetary wheels 4. A liquid passage gap 12 is formed between the lower fixed plate 10 and the planetary wheels 4. One of the lower fixed plate 10 and the planetary wheels 4 is provided with a support protrusion 3 protruding towards the liquid passage gap 12. The support protrusion 3 abuts against the other one to support the planetary wheel 4. The lower fixed plate 10 is provided with a drive hole 13, and the plurality of planetary wheels 4 surround the drive hole 13.

[0047] Understandably, in a double-sided quartz plate grinding apparatus, the lower plate 10 is a key component located below the planetary wheel 4. It works in conjunction with the planetary wheel 4 to ensure effective liquid flow, temperature control, and the stability of the mechanical support during grinding and polishing.

[0048] The fluid passage 12 between the planetary wheel 4 and the lower fixed plate 10 forms a complete fluid flow path, ensuring that the grinding and polishing fluids can flow smoothly between the lower fixed plate 10 and the planetary wheel 4, and evenly cover the entire processing area. By designing a reasonable fluid passage 12, dead zones in the fluid flow are reduced, improving fluid utilization and avoiding problems such as localized overheating or uneven processing. The presence of the fluid passage 12 allows the fluid to directly act on the high-temperature area between the planetary wheel 4 and the lower fixed plate 10, especially where the quartz plate 7 is in most frequent contact with the grinding tool, thereby improving cooling efficiency, extending tool life, and reducing the risk of thermal deformation. The flow of fluid within the fluid passage 12 helps to remove heat, maintaining a stable temperature throughout the processing environment and further improving processing quality.

[0049] Furthermore, the lower fixed plate 10 is provided with a drive hole 13, around which multiple planetary gears 4 surround. Through the design of the drive hole 13, all planetary gears 4 can be driven by the same power source, eliminating the need for multiple independent drive devices. This not only reduces the complexity of the drive system but also lowers the cost and maintenance difficulty of the equipment. Moreover, driving multiple planetary gears 4 with the same power source ensures that the planetary gears 4 rotate at the same time and speed. This not only improves machining consistency but also reduces the accumulation of errors caused by asynchrony, further enhancing machining accuracy.

[0050] Specifically, such as Figure 1 , Figure 5 , Figure 7 and Figure 8 As shown, both the lower fixed plate 10 and the planetary wheel 4 are provided with multiple support protrusions 3, which are spaced apart along the circumferential direction of the planetary wheel 4. The surrounding arrangement of the multiple support protrusions 3 ensures that the force applied to the planetary wheel 4 and the lower fixed plate 10 is evenly distributed, avoiding deformation or stress concentration caused by local overload and enhancing the overall stability of the system. The support protrusions 3 can absorb and buffer external impacts to a certain extent, reducing the possibility of vibration being transmitted to the quartz plate 7 and maintaining the smoothness of the processing.

[0051] Furthermore, the design of the support protrusion 3 helps maintain the balance of the quartz plate 7 within the spacer ring 5, promoting its smooth rotation. This is crucial for preventing localized over-grinding or over-polishing and improving the uniformity and precision of the processed surface. Appropriate support protrusions 3 can reduce the direct contact between the planetary wheel 4 and the lower fixed plate 10, lowering friction and enhancing the stability and durability of the system.

[0052] It should be noted that the support protrusion 3 can be installed and removed using clips, screws, or other quick-connect devices, reducing assembly time and complexity. Furthermore, users can quickly adjust the position or height of the support protrusion 3 according to specific processing requirements (such as changes in the thickness or specifications of the quartz plate 7) without redesigning or manufacturing the entire planetary wheel 4.

[0053] Alternatively, the support protrusion 3 and the planetary wheel 4 or the lower fixed plate 10 can be integrated into a single unit, manufactured as a whole through processes such as injection molding, casting, or welding. This design aims to enhance structural strength, simplify the manufacturing process, and improve the stability and reliability of the system.

[0054] Specifically, the support protrusion 3 has an arc-shaped transition surface, which abuts against the other of the lower fixed plate 10 and the planetary wheel 4. The arc-shaped transition surface changes the contact between the support protrusion 3 and the other of the two from point contact to line contact or surface contact, reducing local stress concentration and avoiding damage caused by hard contact. The arc-shaped transition surface can better distribute the pressure applied to the support protrusion 3, ensuring uniform support between the planetary wheel 4 and the lower fixed plate 10, and improving the overall stability of the system.

[0055] Meanwhile, the arc-shaped transition surface provides a smoother liquid flow path, reducing turbulence and resistance in the contact area and promoting smooth flow of grinding and polishing slurries. The well-designed arc shape reduces dead zones in the liquid flow, improves liquid utilization, and avoids problems such as localized overheating or uneven processing.

[0056] Specifically, one of the lower fixed plate 10 and the planetary wheel 4 is provided with a support groove that mates with the support protrusion 3. At least a portion of the support protrusion 3 is located within the support groove, which extends circumferentially along the planetary wheel 4. The design of the support groove ensures that the support protrusion 3 can be accurately embedded, achieving precise alignment between the planetary wheel 4 and the lower fixed plate 10. This not only improves the overall stability of the system but also reduces machining errors caused by positional deviations. Furthermore, during the installation of the planetary wheel 4, the support groove guides the support protrusion 3, facilitating its sliding into the groove. The interaction between the support groove and the support protrusion 3 also allows for the determination of whether the planetary wheel 4 is properly installed, thereby improving the convenience and accuracy of planetary wheel 4 installation.

[0057] Furthermore, the support groove extends circumferentially along the planetary wheel 4, allowing the support protrusion 3 to slide within it as the planetary wheel 4 rotates. The support groove and support protrusion 3 cooperate to prevent mechanical damage caused by the support protrusion 3 sliding on the surface of the planetary wheel 4 or the lower fixed plate 10, thus enhancing the stability and durability of the mechanical structure. Simultaneously, the design of the support groove restricts the radial and axial movement of the planetary wheel 4, ensuring it does not shift or wobble during high-speed operation, further improving machining accuracy.

[0058] As a preferred embodiment of this utility model, such as Figure 1 , Figure 5 and Figure 6 As shown, the outer edge of the planetary wheel 4 is provided with planetary wheel teeth 14. At least a portion of the downward projection of the planetary wheel teeth 14 is located within the drive hole 13. A drive rod is provided within the drive hole 13. The planetary wheel teeth 14 abut against the drive rod so as to drive the multiple planetary wheel teeth 14 to rotate through the drive rod.

[0059] In the quartz plate double-sided grinding apparatus, to achieve efficient and synchronized motion control, each planetary wheel 4 has planetary gear teeth 14 on its outer edge. The design of these planetary gear teeth 14 allows them to engage with the drive rod within the drive hole 13, ensuring precise rotation of all planetary wheels 4 during the machining process. This design not only simplifies the drive system but also improves system stability and machining accuracy.

[0060] The meshing design between the planetary gear teeth 14 and the drive rod ensures that the planetary gear 4 can be precisely driven by the drive rod, achieving stable rotational motion. This helps maintain the consistency of each planetary gear 4 and avoids errors caused by asynchrony. Through the unified drive of the drive rod, all planetary gears 4 can rotate at the same time and speed, further improving the consistency and accuracy of machining. Since all planetary gears 4 are driven by the same drive rod, the need for multiple independent drive devices is reduced, simplifying the overall structure and lowering the cost and maintenance difficulty of the equipment.

[0061] In the double-sided grinding device for quartz plates, at least a portion of the downward projection of the planetary gear teeth 14 lies within the drive hole 13 and directly contacts the drive rod within the drive hole 13. The drive rod itself does not require additional protrusions or other complex structures, reducing the number of components in the drive system. This not only simplifies the overall design but also reduces manufacturing costs and maintenance difficulty. Fewer components mean a simpler assembly process and fewer potential points of failure, making equipment installation, commissioning, and routine maintenance more convenient and efficient.

[0062] As a preferred embodiment of this implementation, such as Figure 6As shown, the axes of the multiple planetary wheels 4 are all equidistant from the center of the drive hole 13, ensuring that the multiple planetary wheels 4 have the same rotational speed. Since the distance from the axis of each planetary wheel 4 to the center of the drive hole 13 is the same, the driving torque they experience during rotation is consistent, ensuring that all planetary wheels 4 have the same rotational speed. This not only improves processing consistency but also reduces error accumulation caused by asynchrony. Synchronized rotational speeds ensure that all areas of the quartz plate 7 are uniformly processed, avoiding localized over-grinding or polishing, and improving surface uniformity and precision. By ensuring the synchronous operation of the planetary wheels 4, processing defects such as chipping and cracks caused by abnormalities in individual planetary wheels 4 can be effectively avoided, significantly improving product yield.

[0063] Furthermore, multiple planetary gears 4 are arranged around the drive hole 13, and their axes are equidistant from the center of the drive hole 13, making the entire system more symmetrical and stable in terms of mechanical structure. This uniform distribution helps maintain the system's balance and avoids overall instability caused by the misalignment of individual planetary gears 4. The consistent layout reduces vibration and shaking of the system during high-speed operation, maintains the smoothness of the processing, and improves the surface quality and precision of the product.

[0064] In a preferred embodiment of this invention, a recessed liquid-passing groove is provided on the upper side of the lower fixed plate 10. The liquid-passing groove extends radially along the planetary wheel 4, and the planetary wheel 4 is provided with a liquid flow hole 2. The liquid-passing groove is connected to the liquid flow hole 2. The recessed liquid-passing groove design allows the grinding and polishing fluids to flow smoothly in the gap between the lower fixed plate 10 and the planetary wheel 4, reducing resistance and dead zones in the fluid flow and improving fluid utilization. The extension of the liquid-passing groove along the radial direction of the planetary wheel 4 ensures that the fluid can diffuse evenly from the center outwards, covering the entire processing area and avoiding problems such as local overheating or uneven processing. In addition, the presence of the liquid-passing groove enables centralized cooling, allowing the fluid to directly act on the high-temperature area between the planetary wheel 4 and the lower fixed plate 10, especially the area where the quartz plate 7 is in most frequent contact with the grinding tool, thereby improving cooling efficiency, extending tool life, and reducing the risk of thermal deformation. The flow of fluid in the liquid-passing groove also promotes uniform heat dissipation, maintains a stable temperature in the entire processing environment, and further improves processing quality.

[0065] It is understood that the liquid-passing groove extends along the radial direction of the planetary wheel 4, and the planetary wheel 4 is provided with a liquid-flowing hole 2, with the liquid-passing groove connected to the liquid-flowing hole 2. That is to say, during the rotation of the planetary wheel 4, the quartz plate 7 disposed on the planetary wheel 4 repeatedly passes through the liquid-flowing hole 2, thereby repeatedly picking up the grinding fluid and polishing fluid in the liquid-passing groove, improving the grinding efficiency of the quartz plate 7.

[0066] Specifically, the liquid-passing groove extends and curves along the rotation direction of the planetary wheel 4 to form an arc-shaped groove surrounding the axis of the planetary wheel 4, allowing the grinding and polishing fluids to flow more smoothly in the gap between the lower platen 10 and the planetary wheel 4. This design reduces resistance and dead zones in the liquid flow, improving liquid utilization. The arc-shaped groove design avoids turbulence that may occur in a straight path, ensuring smooth liquid flow and reducing energy loss.

[0067] The arc-shaped groove design increases the flow area of ​​the grinding and polishing slurry on the lower plate 10. During the rotation of the planetary wheel 4, the contact between the quartz plate 7 and the grinding and polishing slurry is increased, and the quartz plate 7 picks up the grinding and polishing slurry more frequently, which further improves the grinding efficiency of the quartz plate 7.

[0068] Moreover, the liquid-passing tank extends and bends along the rotation direction of the planetary wheel 4. During the rotation of the planetary wheel 4, the quartz plate 7 picks up the grinding liquid and polishing liquid, and at the same time gives the grinding liquid and polishing liquid kinetic energy along the rotation direction, pushing the grinding liquid and polishing liquid to flow outward along the liquid-passing tank, thereby promoting the continuous renewal of the grinding liquid and polishing liquid.

[0069] As a preferred embodiment of this utility model, such as Figures 1 to 5 As shown, the planetary wheel 4 is provided with a liquid flow hole 2 and a spacer hole 1. A spacer 5 is provided inside the spacer hole 1. The spacer 5 is provided with a fixing hole 11 for accommodating the quartz plate 7. A fixing protrusion 8 is provided on the outer edge of the spacer 5 to abut against the opening edge of the spacer hole 1. The spacer hole 1 is circular so that the spacer 5 can rotate relative to the planetary wheel 4. A rubber strip 6 is provided on the opening edge of the fixing hole 11 to abut against the quartz plate 7.

[0070] It should be noted that the rubber strip 6 in this invention is a structure made of rubber material. Flexible materials (such as silicone or other high-performance elastomers) can also be used to replace the traditional rubber strip 6 as a buffer layer; this invention does not limit this. The rubber strip 6 typically possesses excellent elasticity and durability, providing more effective cushioning protection. Furthermore, for irregularly shaped or specially designed quartz plates 7, the rubber strip 6 can better conform to the surface, ensuring stable support.

[0071] Furthermore, the spacer ring 5 and planetary wheel 4 are modular, allowing users to quickly replace different spacer rings 5 ​​according to actual needs, simplifying the assembly and disassembly process and facilitating daily maintenance and cleaning. Users can select the most suitable spacer rings 5 ​​for combination based on the specific grinding task of the quartz plate 7, improving the system's adaptability and efficiency.

[0072] The planetary wheel 4 is equipped with a flow hole 2 and a spacer hole 1. The flow hole 2 is used to guide the abrasive and polishing fluid to be evenly distributed throughout the processing area, ensuring consistent removal efficiency on the upper and lower surfaces, while also providing cooling and lubrication. The spacer hole 1 is circular, allowing the spacer 5 to rotate relative to it, thereby promoting the rotational movement of the quartz plate 7 during processing and preventing localized over-grinding or over-polishing.

[0073] The spacer ring 5 is placed in the spacer ring hole 1, and has multiple fixing protrusions 8 along its outer edge. These fixing protrusions 8 abut against the edge of the spacer ring hole 1, ensuring a stable connection between the spacer ring 5 and the planetary wheel 4, preventing displacement or wobbling, and improving the stability of the system. The fixing protrusions 8 reduce the total contact area between the spacer ring 5 and the planetary wheel 4, reducing friction, promoting smooth rotation of the spacer ring 5 and its internal quartz plate 7, reducing wear, and extending service life.

[0074] The spacer 5 has a fixing hole 11 inside to accommodate the quartz plate 7 to be processed. A rubber strip 6 is provided along the edge of the fixing hole 11. The rubber strip 6 abuts against the quartz plate 7, providing a cushioning protection and reducing the risk of damage to the edge of the quartz plate 7. The rubber strip 6 increases the friction between the rubber strip 6 and the quartz plate 7, preventing the quartz plate 7 from slipping, maintaining the correct processing posture, and improving processing accuracy.

[0075] Through the rotational function of spacer 5 and the cushioning protection of rubber strip 6, quartz plate 7 maintains a stable and uniform movement during processing, effectively avoiding localized over-grinding or over-polishing and significantly improving the surface quality of the final product. The presence of rubber strip 6 not only reduces the direct contact area between quartz plate 7 and tooling, lowering the probability of defects such as edge chipping and cracking, but also significantly improves product yield. This design optimizes the support and protection mechanism of quartz plate 7, providing a reliable guarantee for high-precision machining.

[0076] As one embodiment of this implementation, such as Figures 2 to 5 As shown, a plurality of rubber strips 6 are provided on the edge of the fixing hole 11. The rubber strips 6 protrude relative to the edge of the fixing hole 11 and surround the quartz plate 7. The rubber strips 6 are provided with crests 61 and troughs 62 on the side that abuts against the quartz plate 7. The crests 61 and troughs 62 are spaced apart. The crests 61 protrude relative to the troughs 62 and abut against the quartz plate 7.

[0077] The raised design of the rubber strip 6 relative to the edge of the fixing hole 11 increases the contact height between it and the quartz plate 7, enabling it to more effectively absorb the vibration energy from external impacts and providing better cushioning to prevent damage to the quartz plate 7 from hard impacts. Multiple rubber strips 6 surround the quartz plate 7, reducing the actual contact area between the rubber strips 6 and the quartz plate 7. The smaller contact area reduces the risk of edge damage to the quartz plate 7, especially avoiding scratches or chipping that might occur with large-area contact.

[0078] Furthermore, multiple rubber strips 6 surround the quartz plate 7, ensuring that the pressure applied to the quartz plate 7 is evenly distributed across all support points. This not only helps maintain the stable position of the quartz plate 7 during processing but also prevents deformation or stress concentration caused by excessive local pressure, ensuring the flatness and consistency of the quartz plate 7 throughout the entire processing. The design of the rubber strips 6 increases the friction between the rubber strips and the quartz plate 7, effectively preventing unnecessary slippage of the quartz plate 7 during processing. This is crucial for maintaining the correct posture of the quartz plate 7 during double-sided grinding and polishing, thereby improving processing accuracy and product quality.

[0079] Furthermore, the design of the surrounding rubber strip 6 provides flexibility, allowing for adjustments to the position of the rubber strip 6 or replacement with rubber strips of different thicknesses to accommodate quartz plates 7 of different sizes or shapes. This flexibility enhances the versatility and adaptability of the planetary wheel 4 system and reduces production costs.

[0080] It should be noted that this utility model does not limit the connection method between the rubber strip 6 and the edge of the fixing hole 11. It can be installed using any of the following methods: embedded installation (multiple grooves 9 are provided on the edge of the fixing hole 11 of the spacer 5, and the rubber strip 6 is embedded in these grooves 9), adhesive fixing (using a high-strength adhesive to directly paste the rubber strip 6 onto the edge of the fixing hole 11 of the spacer 5), or mechanical fixing (fixing the rubber strip 6 to the spacer 5 using mechanical means such as clips, screws, or other fasteners).

[0081] The crest 61 is in direct contact with the quartz plate 7, while the trough 62 is not in contact with the quartz plate 7. This reduces the actual contact area between the rubber strip 6 and the quartz plate 7. The smaller contact area reduces the risk of damage to the edge of the quartz plate 7, and in particular avoids scratches or edge chipping that may be caused by large-area contact.

[0082] Furthermore, the design of the crest section 61 enhances the elasticity of the rubber strip 6, enabling it to more effectively absorb the vibration energy from external impacts and provide better cushioning protection, preventing damage to the quartz plate 7 from hard collisions. The crest section 61 also increases the friction between the rubber strip 6 and the quartz plate 7, effectively preventing unnecessary slippage of the quartz plate 7 during processing. This is crucial for maintaining the correct posture of the quartz plate 7 during double-sided grinding and polishing, thereby improving processing accuracy and product quality.

[0083] Furthermore, multiple crests 61 are distributed across the entire rubber strip 6, allowing the pressure applied to the quartz plate 7 to be evenly distributed across each support point. This not only helps maintain the stable position of the quartz plate 7 during processing but also avoids deformation or stress concentration caused by excessive local pressure, ensuring the flatness and consistency of the quartz plate 7 throughout the entire processing.

[0084] The design of the crests 61 and troughs 62 provides a degree of flexibility, allowing the rubber strip 6 to adjust its shape within a certain range to accommodate quartz plates 7 of different thicknesses or specifications. This flexibility enhances the versatility and adaptability of the planetary wheel 4 system and reduces production costs.

[0085] As another embodiment of this implementation, such as Figures 2 to 5 As shown, the fixing hole 11 has multiple grooves 9 along its edge, and at least some of the grooves 9 contain the rubber strip 6. The grooves 9 provide a clear installation position for the rubber strip 6, ensuring it is accurately fixed in the predetermined position and will not easily shift. By embedding the rubber strip 6 into the grooves 9, installation can be completed quickly, reducing assembly time and complexity.

[0086] Furthermore, the rubber strip 6, embedded in the groove 9, forms a more stable buffer layer. When the quartz plate 7 is subjected to external impact or vibration, the rubber strip 6 can more effectively absorb energy, reducing the vibration transmitted to the quartz plate 7 and providing better protection. Moreover, the groove 9 design allows the rubber strip 6 to contact the quartz plate 7 at specific points, reducing the possibility of large-area direct contact and lowering the probability of defects such as chipping and cracking. The design of multiple grooves 9 allows the rubber strip 6 to be evenly distributed at multiple points, thereby dispersing the pressure applied to the quartz plate 7. This avoids deformation or stress concentration caused by excessive local pressure, ensuring the flatness and consistency of the quartz plate 7 throughout the entire processing.

[0087] It is understandable that the thickness of the rubber strip 6 is greater than the groove depth of the groove 9 so that the rubber strip 6 protrudes relative to the edge of the fixing hole 11.

[0088] For any parts not mentioned in this utility model, existing technologies can be used or referenced.

[0089] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0090] The above description is merely an embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of this utility model should be included within the scope of the claims of this utility model.

Claims

1. A double-sided grinding device for quartz plates, characterized in that, The device includes a lower plate and multiple planetary wheels for placing the quartz plate. The lower plate is located below the planetary wheels, and a liquid-passing gap is formed between the lower plate and the planetary wheels. One of the lower plate and the planetary wheels is provided with a support protrusion that protrudes towards the liquid-passing gap. The support protrusion abuts against the other one to support the planetary wheel. The lower plate is provided with a drive hole, and the multiple planetary wheels surround the drive hole.

2. The quartz plate double-sided grinding device according to claim 1, characterized in that, The outer edge of the planetary wheel is provided with planetary wheel teeth. At least a portion of the downward projection of the planetary wheel teeth is located within the drive hole. A drive rod is provided within the drive hole. The planetary wheel teeth abut against the drive rod so as to drive the multiple planetary wheel teeth to rotate via the drive rod.

3. The quartz plate double-sided grinding device according to claim 2, characterized in that, The axes of the multiple planetary wheels are at the same distance from the center of the drive hole, so that the multiple planetary wheels have the same rotation speed.

4. The quartz plate double-sided grinding device according to claim 1, characterized in that, One of the lower plate and the planetary wheel is provided with multiple support protrusions, which are arranged at intervals along the circumferential direction of the planetary wheel.

5. The quartz plate double-sided grinding device according to claim 4, characterized in that, The lower plate and the planetary wheel are each provided with a support groove that mates with the support protrusion. At least a portion of the support protrusion is located within the support groove, which extends along the circumferential direction of the planetary wheel.

6. The quartz plate double-sided grinding device according to claim 1, characterized in that, The upper side of the lower plate is provided with a recessed liquid passage groove, which extends along the radial direction of the planetary wheel. The planetary wheel is provided with a liquid flow hole, and the liquid passage groove is connected to the liquid flow hole.

7. The quartz plate double-sided grinding device according to claim 6, characterized in that, The liquid passage extends in a curved manner along the rotation direction of the planetary wheel to form an arc-shaped groove surrounding the axis of the planetary wheel.

8. The quartz plate double-sided grinding device according to claim 1, characterized in that, The planetary wheel is provided with a liquid flow hole and a spacer hole. A spacer is provided in the spacer hole. The spacer is provided with a fixing hole for accommodating the quartz plate. A fixing protrusion is provided on the outer edge of the spacer to abut against the opening edge of the spacer hole. The spacer hole is circular so that the spacer can rotate relative to the planetary wheel. A rubber strip is provided on the opening edge of the fixing hole to abut against the quartz plate.

9. The quartz plate double-sided grinding device according to claim 8, characterized in that, The fixing hole has a plurality of rubber strips along its rim. The rubber strips protrude relative to the rim of the fixing hole and surround the quartz plate. The rubber strips have crests and troughs on the side that abuts against the quartz plate. The crests and troughs are spaced apart. The crests protrude relative to the troughs and abut against the quartz plate.

10. The quartz plate double-sided grinding device according to claim 8, characterized in that, The fixing hole has multiple grooves along its rim, and at least some of the grooves contain the rubber strip.

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