Storage library

Abstract

The storage warehouse comprises a floor plate, a main body, a cross-layer transfer mechanism, a first access mechanism and a second access mechanism, the main body penetrates through the floor plate, the two ends of the main body are located on the two sides of the floor plate respectively, the main body is provided with a containing cavity, and a wafer box is stored in the containing cavity; the cross-layer transfer mechanism is arranged in the accommodating cavity and is used for transferring the wafer box in the accommodating cavity between the two sides of the floor plate; the first taking and storing mechanism communicates with the containing cavity. The second taking and storing mechanism communicates with the containing cavity, and the second taking and storing mechanism and the first taking and storing mechanism are located on the two sides of the floor plate correspondingly. Transfer of the wafer box between the two sides of the floor plate can be achieved through the cross-floor transfer mechanism, the first taking and storing mechanism is used for achieving wafer box exchange with the outside on one side of the floor plate, the second taking and storing mechanism is used for achieving wafer box exchange with the outside on the other side of the floor plate, and therefore cross-floor carrying of the wafer box in the containing cavity is achieved. And taking and placing operation can be carried out on the two sides of the floor plate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and specifically to a storage repository. Background Technology

[0002] Wafer storage repositories are widely used in the semiconductor manufacturing industry. They contain numerous wafer storage bays, primarily used to store wafer cassettes containing wafers. The repository also includes access control systems to facilitate the movement of wafer cassettes between storage bays and other process equipment.

[0003] Wafer storage facilities are typically used for storing wafer casks on a single floor. However, as semiconductor manufacturing processes become more complex, the required scale of process equipment continues to expand. Often, process equipment needs to be configured on multiple floors, requiring wafer casks to be moved to different floors. This necessitates additional handling equipment or manual handling, which reduces production efficiency and increases costs. Utility Model Content

[0004] In view of this, the present invention provides a storage warehouse to solve the problem that existing multi-floor configuration of process equipment requires the wafer cassette to be moved to different floors, which requires additional handling equipment or manual handling, resulting in reduced production efficiency and increased costs.

[0005] This utility model provides a storage repository, comprising:

[0006] Floor slab;

[0007] The main body passes through the floor slab, with both ends of the main body located on both sides of the floor slab. The main body has a receiving cavity for storing a wafer cassette.

[0008] A cross-layer transfer mechanism is provided in the receiving cavity for transferring the wafer cassette within the receiving cavity between the two sides of the floor slab.

[0009] The first retrieval mechanism is connected to the receiving cavity;

[0010] The second retrieval mechanism is connected to the receiving cavity, and the second retrieval mechanism and the first retrieval mechanism are respectively located on both sides of the floor slab.

[0011] Beneficial effects: The cross-floor transfer mechanism enables the transfer of wafer cassettes between the two sides of a floor slab. A first retrieval mechanism facilitates wafer cassette exchange with the outside environment on one side of the floor slab, while a second retrieval mechanism facilitates the same exchange on the other side. This allows for cross-floor transport of wafer cassettes within the housing, with retrieval and placement operations possible from both sides of the floor slab, meeting the requirements for configuring process equipment on different floors. Furthermore, it eliminates the need to remove wafer cassettes from one side of the floor slab and then transport them to the other side using additional wafer cassette handling equipment or manually, thereby improving efficiency, reducing costs, and minimizing the risk of contamination during transport.

[0012] In one optional implementation, the inter-level transfer mechanism includes:

[0013] A gripper for gripping the wafer cassette;

[0014] A transfer drive component is disposed on the main body and connected to the gripping component;

[0015] The transfer drive component can drive the gripper to move back and forth between the two sides of the floor slab.

[0016] Beneficial effects: When a wafer cassette needs to be transferred, the transfer drive moves the gripper to the take-out position, then the gripper grabs the wafer cassette from the take-out position, the transfer drive moves the gripper to the storage position, and then the gripper places the wafer cassette in the storage position.

[0017] In one optional implementation, the inter-level transfer mechanism further includes:

[0018] The first slide rail is fixedly connected to the inner wall of the receiving cavity and extends from one side of the floor slab to the other side.

[0019] The gripper is slidably connected to the first slide rail.

[0020] Beneficial effects: The gripper can slide along the extension direction of the first slide rail to ensure that it can move precisely to the set position and avoid deviations in its movement path. Furthermore, the first slide rail provides support for the gripper, preventing it from shaking during movement and ensuring accurate gripping of the wafer cassette.

[0021] In one optional implementation, the transfer drive includes:

[0022] The motor is fixedly connected to the outer side wall of the main body;

[0023] A counterweight is slidably connected to the first slide rail, and the counterweight and the gripping member are respectively located on both sides of the first slide rail;

[0024] The pulley is fixedly connected to the output shaft of the motor;

[0025] The timing belt extends into the receiving cavity after passing over the pulley at one end and is fixedly connected to the gripping member at the other end.

[0026] Beneficial effects: Precise synchronous transmission is achieved by using a motor to drive a synchronous belt, ensuring that the gripper can move accurately to the set position. Furthermore, during the movement of the gripper, the counterweight pulls the synchronous belt with its own weight to ensure belt tension.

[0027] In one alternative implementation, the gripper includes:

[0028] The second slide rail is slidably connected to the first slide rail, and the extension direction of the second slide rail is perpendicular to the extension direction of the first slide rail;

[0029] The robotic arm is slidably connected to the second slide rail.

[0030] Beneficial effects: The robotic arm can move along the extension direction of the second slide rail, and the second slide rail can move along the extension direction of the first slide rail. The extension direction of the second slide rail is perpendicular to the extension direction of the first slide rail. On the one hand, this expands the working range of the robotic arm, and on the other hand, it makes full use of the space inside the cavity.

[0031] In one alternative implementation, it further includes:

[0032] Multiple placement racks are spaced apart along a direction perpendicular to the floor slab. Each placement rack is fixedly connected to the inner sidewall of the receiving cavity, and each placement rack is used to place the wafer cassette.

[0033] The multiple placement racks are arranged in groups, and the multiple placement rack groups are spaced apart along a direction parallel to the floor slab.

[0034] Beneficial effects: Each rack can hold a wafer cassette, increasing the wafer cassette storage capacity within the housing.

[0035] In one optional implementation, the main body is any one of an elevator shaft, a pipe shaft, or a ventilation shaft.

[0036] In one alternative implementation, it further includes:

[0037] A first transparent observation window is detachably connected to the main body;

[0038] The second transparent observation window is detachably connected to the main body, and the second transparent observation window and the first transparent observation window are respectively located on both sides of the floor slab.

[0039] Beneficial effects: The first transparent observation window is used to observe the inside of the cavity from one side of the floor slab, and the second transparent observation window is used to observe the inside of the cavity from the other side of the floor slab. By disassembling the first or second transparent observation window, it is convenient to inspect and maintain other equipment inside the cavity.

[0040] In one optional embodiment, the system includes a plurality of floor slabs, which are spaced apart along the length of the cavity, and a retrieval mechanism is provided between any two adjacent floor slabs.

[0041] In one alternative embodiment, a bracket is further included, which is fixedly connected to the main body and the floor slab respectively.

[0042] Beneficial effect: The bracket supports the main body, preventing it from tipping over. Attached Figure Description

[0043] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0044] Figure 1 This is a schematic diagram of the structure of the storage repository in this utility model;

[0045] Figure 2 This is a front view of the storage repository in this utility model;

[0046] Figure 3 This is a cross-sectional view of the storage unit AA after the support bracket is removed in this utility model.

[0047] Figure 4 This is a cross-sectional view of the storage unit along line B in this utility model;

[0048] Figure 5 This is a structural schematic diagram of the transfer drive component, part of the first slide rail, and part of the synchronous belt provided by the storage unit in this utility model;

[0049] Figure 6 This is a structural schematic diagram of the gripping component, part of the first slide rail, and part of the first synchronous belt provided by the storage unit in this utility model.

[0050] Explanation of reference numerals in the attached figures:

[0051] 100. Main body; 101. Receiving cavity;

[0052] 200. Floor slab;

[0053] 301. Gripping component; 3011. Second slide rail; 3012. Robotic arm; 302. Transfer drive component; 3021. Motor; 3022. Counterweight; 3023. Pulley; 3024. Synchronous belt; 303. First slide rail;

[0054] 401. First depositary; 402. Second depositary;

[0055] 500. Shelf;

[0056] 601. First transparent observation window; 602. Second transparent observation window;

[0057] 700, bracket;

[0058] 800, wafer box; Detailed Implementation

[0059] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0060] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0061] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0062] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0063] Example 1

[0064] This utility model provides a storage repository, such as Figures 1 to 6 As shown, the system includes a floor slab 200, a main body 100, a cross-floor transfer mechanism, a first storage and retrieval mechanism, and a second storage and retrieval mechanism. The main body 100 passes through the floor slab 200, and its two ends are located on both sides of the floor slab 200. The main body 100 has a receiving cavity 101, which is used to store wafer cassettes 800. The cross-floor transfer mechanism is located in the receiving cavity 101 and is used to transfer the wafer cassettes 800 in the receiving cavity 101 between the two sides of the floor slab 200. The first storage and retrieval mechanism 401 is connected to the receiving cavity 101. The second storage and retrieval mechanism 402 is connected to the receiving cavity 101, and the second storage and retrieval mechanism 402 and the first storage and retrieval mechanism 401 are located on both sides of the floor slab 200.

[0065] Specifically, the floor slab 200 is the floor slab of the building, used to vertically divide the building to form different floors within the building; the main body 100 passes through the floor slab 200, with both ends of the main body 100 located on both sides of the floor slab 200. The main body 100 has a receiving cavity 101, which is divided into an upper receiving cavity and a lower receiving cavity by the floor slab layer (the upper receiving cavity and the lower receiving cavity are connected). The cross-sectional shape of the receiving cavity 101 is circular, square, rectangular or other common shapes. In this embodiment, the cross-sectional shape of the receiving cavity 101 is rectangular. The receiving cavity 101 is used to store wafer cassettes 800. A cross-layer transfer mechanism is located in the receiving cavity 101. The cross-layer transfer mechanism can be a handling machine or other wafer transfer equipment. The cross-layer transfer mechanism is used to transport the wafer cassettes 800 in the upper receiving cavity to the lower receiving cavity, or to transport the wafers in the lower receiving cavity to the upper receiving cavity. The first retrieval mechanism 401 is fixedly connected to the outer wall of the main body 100 and communicates with the upper receiving cavity. The first retrieval mechanism 401 is used to transport the external wafer cassette 800 into the upper receiving cavity, or to transport the wafers in the upper receiving cavity to the outside. The second retrieval mechanism 402 is fixedly connected to the outer wall of the main body 100. The second retrieval mechanism 402 and the first retrieval mechanism 401 are located on opposite sides of the floor slab 200. 02 is connected to the lower receiving cavity. The second retrieval mechanism 402 is used to transport the wafer cassette 800 from the outside to the lower receiving cavity, or the second retrieval mechanism 402 is used to transport the wafer in the lower receiving cavity to the outside. The first retrieval mechanism 401 and the second retrieval mechanism both include a robot arm 3012 and a transport track for transporting the wafer cassette 800 between the outside and the receiving cavity 101. The first retrieval mechanism 401 and the second retrieval mechanism 402 are both mature technologies in the field and will not be described in detail here.

[0066] In this embodiment, the wafer cassette 800 can be transferred between the two sides of the floor panel 200 via a cross-floor transfer mechanism. A first retrieval and storage mechanism 401 facilitates the exchange of wafer cassette 800 with the outside world on one side of the floor panel 200, and a second retrieval and storage mechanism 402 facilitates the exchange of wafer cassette 800 with the outside world on the other side of the floor panel 200. This enables the wafer cassette 800 to be transported across floors within the receiving cavity 101, and retrieval and placement operations can be performed on both sides of the floor panel 200, meeting the requirements for configuring process equipment on different floors. Furthermore, it eliminates the need to remove the wafer cassette 800 from one side of the floor panel 200 and then transport it to the other side using an additional wafer cassette 800 handling device or manually, thereby improving efficiency, reducing costs, and minimizing the risk of contamination during transport. The storage repository provided in this embodiment integrates storage and transmission without requiring additional equipment.

[0067] In one embodiment, the cross-floor transfer mechanism includes a gripper 301 and a transfer drive 302. The gripper 301 is used to grip the wafer cassette 800 and can be a mechanical gripper, a suction cup gripper, a magnetic gripper, or other types of gripping. The transfer drive 302 can be a cylinder, a belt drive mechanism, a cam mechanism, a crank-slider mechanism, or other linear motion mechanism. The transfer drive 302 is disposed on the main body 100 and connected to the gripper 301. The transfer drive 302 can drive the gripper 301 to move back and forth between the two sides of the floor slab 200. When the wafer cassette 800 needs to be transferred, the transfer drive 302 moves the gripper 301 to the extraction position, then the gripper 301 grips the wafer cassette 800 at the extraction position, and the transfer drive 302 drives the gripper 301 to the storage position, whereby the gripper 301 places the wafer cassette 800.

[0068] In one embodiment, the inter-floor transfer mechanism further includes a first slide rail 303, which is fixedly connected to the inner wall of the receiving cavity 101 and extends from one side of the floor slab 200 to the other side; a gripper 301 is slidably connected to the first slide rail 303. The gripper 301 can slide along the extending direction of the first slide rail 303 to ensure that the gripper 301 can move accurately to the set position and avoid deviation in the movement path of the gripper 301. In addition, the first slide rail 303 can provide support for the gripper 301 to prevent the gripper 301 from shaking during movement, ensuring that the gripper 301 can accurately grip the wafer cassette 800.

[0069] In one specific implementation, the transfer drive component 302 includes a motor 3021, a counterweight 3022, a pulley 3023, and a synchronous belt 3024. The motor 3021 is fixedly connected to the outer wall of the main body 100; for example... Figure 1 and Figure 5As shown, the motor 3021 is located on the top outer wall of the main body 100. The counterweight 3022 is slidably connected to the first slide rail 303, and the counterweight 3022 and the gripper 301 are respectively located on both sides of the first slide rail 303. The pulley 3023 is fixedly connected to the output shaft of the motor 3021. One end of the synchronous belt 3024 passes over the pulley 3023 and extends into the receiving cavity 101, where it is fixedly connected to the gripper 301. The other end extends into the receiving cavity 101 and is fixedly connected to the counterweight 3022. The motor 3021 drives the synchronous belt 3024 to achieve precise synchronous transmission, ensuring that the gripper 301 can move accurately to the set position. In addition, during the movement of the gripper 301, the counterweight 3022 pulls the synchronous belt 3024 by its own weight to ensure the tension of the synchronous belt 3024.

[0070] In a specific embodiment, such as Figure 6 As shown, the gripper 301 includes a second slide rail 3011 and a robotic arm 3012. The second slide rail 3011 is slidably connected to the first slide rail 303, and the extension direction of the second slide rail 3011 is perpendicular to the extension direction of the first slide rail 303. The robotic arm 3012 is slidably connected to the second slide rail 3011. The robotic arm 3012 can move along the extension direction of the second slide rail 3011, and the second slide rail 3011 can move along the extension direction of the first slide rail 303, and the extension direction of the second slide rail 3011 is perpendicular to the extension direction of the first slide rail 303. This expands the working range of the robotic arm 3012 and makes full use of the space within the receiving cavity 101.

[0071] In one specific implementation, it also includes multiple placement racks 500, which are spaced apart along a direction perpendicular to the floor slab 200. Each placement rack 500 is fixedly connected to the inner sidewall of the receiving cavity, and each placement rack 500 is used to place a wafer cassette 800. The multiple placement racks 500 form a group of placement racks 500, which are spaced apart along a direction parallel to the floor slab 200. Specifically, with... Figure 3 Taking the first slide rail 303 as an example, it is fixedly connected to the left inner wall of the receiving cavity 101. The fixed connection method can be welding, bolting, riveting, or other fixing methods. Two sets of placement racks 500 are located on both sides of the first slide rail 303, and another four sets of placement racks 500 are set on the right inner wall of the receiving cavity 101. The left and right inner walls are arranged opposite each other, and the synchronous belt 3024 and the gripper 301 are located in the corridor between the left and right inner walls. Of course, the number of sets of placement racks 500 in the receiving cavity 101 can be further increased by increasing the space inside the receiving cavity 101, thereby increasing the storage capacity of the wafer cassette 800 in the receiving cavity 101.

[0072] In one specific implementation, the main body 100 is an elevator shaft, utilizing the existing space of the building without the need to additionally open up the floor slabs 200. Of course, the main body 100 can also be any of the following: a pipe shaft or a ventilation shaft.

[0073] In one embodiment, the system further includes a first transparent observation window 601 and a second transparent observation window 602. The first transparent observation window 601 is detachably connected to the main body 100; the second transparent observation window 602 is also detachably connected to the main body 100, and the second transparent observation window 602 and the first transparent observation window 601 are located on opposite sides of the floor slab 200. Specifically, the first transparent observation window 601 is located above the floor slab 200, and the second transparent observation window 602 is located below the floor slab 200. The first transparent observation window 601 is used to observe the interior of the receiving cavity 101 from one side of the floor slab 200, and the second transparent observation window 602 is used to observe the interior of the receiving cavity 101 from the other side of the floor slab 200. By disassembling the first transparent observation window 601 or the second transparent observation window 602, it is convenient to inspect and maintain other equipment inside the receiving cavity 101.

[0074] In one embodiment, the system further includes multiple floor slabs 200, which are spaced apart along the length of the cavity 101. A retrieval mechanism is provided between any two adjacent floor slabs, and a first slide rail 303 extends from one side of the bottom floor slab 200 to the other side of the top floor slab 200, so that the gripper 301 can transport the wafer cassette 800 between different floor slabs.

[0075] In one embodiment, a support 700 is further included, which is fixedly connected to the main body 100 and the floor slab 200 respectively. The support 700 supports the main body 100 to prevent it from tipping over.

[0076] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A repository, characterized in that, include: Floor slab (200); The main body (100) passes through the floor slab (200), and the two ends of the main body (100) are respectively located on both sides of the floor slab (200). The main body (100) has a receiving cavity (101) for storing a wafer cassette (800). A cross-layer transfer mechanism is provided in the receiving cavity (101) for transferring the wafer cassette (800) in the receiving cavity (101) between the two sides of the floor plate (200); The first storage mechanism (401) is connected to the receiving cavity (101); The second retrieval mechanism (402) is connected to the receiving cavity (101), and the second retrieval mechanism (402) and the first retrieval mechanism (401) are located on both sides of the floor slab (200).

2. The repository according to claim 1, characterized in that, The inter-layer transfer mechanism includes: A gripper (301) is used to grip the wafer cassette (800); A transfer drive unit (302) is disposed on the main body (100) and connected to the gripping unit (301); The transfer drive (302) can drive the gripper (301) to move back and forth between the two sides of the floor slab (200).

3. The repository according to claim 2, characterized in that, The inter-layer transfer mechanism also includes: The first slide rail (303) is fixedly connected to the inner wall of the receiving cavity (101) and extends from one side of the floor slab (200) to the other side; The gripper (301) is slidably connected to the first slide rail (303).

4. The repository according to claim 3, characterized in that, The transfer drive (302) includes: The motor (3021) is fixedly connected to the outer wall of the main body (100); The counterweight (3022) is slidably connected to the first slide rail (303), and the counterweight (3022) and the gripping member (301) are respectively located on both sides of the first slide rail (303); The pulley (3023) is fixedly connected to the output shaft of the motor (3021); The timing belt (3024) extends into the receiving cavity (101) after passing around the pulley (3023) and is fixedly connected to the gripper (301). The other end extends into the receiving cavity (101) and is fixedly connected to the counterweight (3022).

5. The repository according to claim 4, characterized in that, The gripper (301) includes: The second slide rail (3011) is slidably connected to the first slide rail (303), and the extension direction of the second slide rail (3011) is perpendicular to the extension direction of the first slide rail (303). The robotic arm (3012) is slidably connected to the second slide rail (3011).

6. The repository according to any one of claims 1-5, characterized in that, Also includes: Multiple placement racks (500) are spaced apart along a direction perpendicular to the floor slab (200), each placement rack (500) is fixedly connected to the inner sidewall of the receiving cavity (101), and each placement rack (500) is used to place the wafer cassette (800); The plurality of the placement racks (500) are a group of placement racks (500), and the plurality of the group of placement racks (500) are spaced apart along a direction parallel to the floor slab (200).

7. The repository according to claim 6, characterized in that, The main body (100) can be any one of elevator shaft, pipe shaft, or ventilation shaft.

8. The repository according to claim 1, characterized in that, Also includes: The first transparent observation window (601) is detachably connected to the main body (100); The second transparent observation window (602) is detachably connected to the main body (100), and the second transparent observation window (602) and the first transparent observation window (601) are located on both sides of the floor slab (200).

9. The repository according to claim 1, characterized in that, It includes multiple floor slabs (200), which are spaced apart along the length of the receiving cavity (101), and a storage mechanism is provided between any two adjacent floor slabs (200).

10. The repository according to claim 1, characterized in that, It also includes a bracket (700), which is fixedly connected to the main body (100) and the floor slab (200) respectively.

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