Cathode backboard for magnetron sputtering coating of energy-saving glass

Abstract

The utility model relates to the field of energy-saving glass production and manufacturing, in particular to a cathode back plate for magnetron sputtering coating of energy-saving glass, which comprises a plate body and a stainless steel mesh which are detachably connected. An adhesion layer is arranged on the plate body, the adhesion layer is located between the stainless steel mesh and the plate body, and the stainless steel mesh abuts against the adhesion layer; a rough surface is arranged on one side, far away from the plate body, of the adhesion layer; the adsorption force of the cathode backboard is increased through the rough surface on the adhesion layer, and the probability of slag falling on coated glass during coating is reduced; the plate body is detachably connected with the stainless steel mesh, and accumulated slag on the adhesion layer can be quickly cleaned after the stainless steel mesh is detached; the problem that the accumulated slag falls on the surface of the glass substrate to form pinhole defects is reduced, and the product quality and the production efficiency are improved.

Description

Technical Field

[0001] This utility model relates to the field of energy-saving glass manufacturing, and in particular to a cathode backplate for magnetron sputtering coating of energy-saving glass. Background Technology

[0002] Low-e energy-saving glass is prepared using large-area continuous vacuum magnetron sputtering coating technology. During the coating process, sputtered ions collide with each other, and the entire sputtering chamber is filled with sputtered ions. Therefore, sputtered ions inevitably adhere to the coating chamber, forming slag. If the slag on the top of the coated glass falls onto the surface of the coated glass during the sputtering ion deposition process, it will disrupt the uniformity of the film deposition, causing pinhole defects, which seriously affect the product's stability and appearance.

[0003] Inside the chamber, the cathode backplate is located directly above the glass substrate. Due to frequent switching of the film system, the target power needs to be adjusted, resulting in large temperature variations in the chamber. During the coating process, sputtered material continuously accumulates on the cathode backplate, eventually forming loosely deposited "slag". Since the "slag" cannot be completely and firmly adsorbed on the cathode backplate, it will continuously fall onto the surface of the coated glass if it encounters thermal expansion and contraction during the production process, forming pinhole defects and causing batch defects in the quality of the coated glass.

[0004] Traditional cathode backplates consist of a stainless steel backplate and an iron mesh. The coefficient of thermal expansion of stainless steel is 1-2 orders of magnitude different from that of the slag. When the temperature changes significantly, stress is easily generated, causing the slag to fall off. The surface of stainless steel is smooth, making it difficult for slag to adhere. Furthermore, the backplate and the iron mesh are welded together, making it difficult to clean the slag and affecting the quality of the coated glass. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies, such as the easy fall of slag on the cathode backplate during the coating process and the difficulty in cleaning the slag attached to the cathode backplate, and to provide a cathode backplate for energy-saving glass magnetron sputtering coating.

[0006] This utility model provides a cathode backplate for energy-saving glass magnetron sputtering coating, including...

[0007] A plate and a stainless steel mesh, wherein the plate and the stainless steel mesh are detachably connected;

[0008] An attachment layer is provided on the plate body, the attachment layer is located between the stainless steel mesh and the plate body, and the stainless steel mesh abuts against the attachment layer;

[0009] The side of the adhesive layer away from the plate has a rough surface.

[0010] This invention relates to a cathode backplate for magnetron sputtering coating of energy-saving glass. During glass coating, sputtered ions adhere to the adhesion layer, forming slag. Due to the rough surface of the adhesion layer, the slag formed on the rough surface mechanically interlocks with it, making it difficult for the slag to fall off. A stainless steel mesh is provided on the plate, which abuts against the adhesion layer to increase the adhesion points of the slag, further enhancing the adhesion of the cathode backplate to the slag. This prevents the slag from frequently falling onto the coated glass surface. The slag suspended on the stainless steel mesh reduces slag shedding caused by temperature differences, thereby ensuring product quality and improving product yield.

[0011] Preferably, the adhesion layer comprises an aluminum oxide structural component.

[0012] The rough surface of aluminum oxide makes it easier for slag to adhere to the adhesion layer, reducing slag falling off through mechanical interlocking; the thermal expansion coefficient of aluminum oxide is close to that of the slag, preventing slag from falling off the adhesion layer due to temperature differences.

[0013] Preferably, the plate and the adhesive layer are integrally formed structural components, and the plate is an aluminum plate.

[0014] When aluminum plates are oxidized by oxygen, aluminum oxide is formed on the surface, which is rough. When removing slag from aluminum plates, the slag and aluminum oxide layer on the plate surface can be scraped off together, so that the newly formed aluminum oxide layer on the plate can act as an adhesion layer.

[0015] Preferably, the rough surface has a number of protrusions and / or a number of depressions.

[0016] The protrusions or depressions create a mechanical interlock between the deposits and the protrusions or depressions, making it difficult for the deposits to fall off the adhesion layer.

[0017] Preferably, the plate is a rectangular plate, the shape of the plate is adapted to the shape of the stainless steel mesh, and the plate and the stainless steel mesh are adapted to be connected.

[0018] The rectangular plate is adapted for use with magnetron sputtering equipment. By adapting the shape of the stainless steel mesh to the shape of the plate, the stainless steel mesh is also a rectangular component. After the plate and the stainless steel mesh are connected, the projection of the stainless steel mesh on the plate just covers the entire rough surface, so that the stainless steel mesh can better support the slag.

[0019] Preferably, the stainless steel mesh includes a frame and a mesh surface, with the mesh surface laid within the frame.

[0020] The frame supports the mesh surface, making it easier for the stainless steel mesh to connect to the plate. Both the frame and the mesh surface are made of stainless steel.

[0021] Preferably, the plate body is provided with a plurality of limiting members, the limiting members penetrate the attachment layer, and the stainless steel mesh is detachably connected to the limiting members.

[0022] The limiting components play a role in positioning the stainless steel mesh. By using multiple limiting components to jointly position the stainless steel mesh, the stainless steel mesh can be installed quickly and fixed to the plate.

[0023] Preferably, the limiting member includes bolt posts, and a plurality of bolt posts are arranged in an array on the plate. The stainless steel mesh is provided with a plurality of bolt holes, and the bolt holes are adapted to be connected to the bolt posts.

[0024] The bolted connection method facilitates the installation and removal of stainless steel mesh on the plate, and the nuts installed on the bolt posts make it difficult to separate the stainless steel mesh from the plate.

[0025] Preferably, the plate has several intersecting grooves.

[0026] The grooves increase the adhesion area of ​​the sludge, making it less likely for the sludge to fall off the adhesion layer.

[0027] Preferably, the stainless steel mesh has diamond-shaped through holes.

[0028] The diamond-shaped through holes can increase the point of contact for the accumulated slag and reduce the amount of slag falling off.

[0029] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0030] 1. This utility model discloses a cathode backplate for magnetron sputtering coating of energy-saving glass. During the coating process, sputtered ions are attached to the adsorption layer to form slag. Due to the rough surface of the adsorption layer, the slag formed on the rough surface forms a mechanical interlock with the rough surface, making it difficult for the slag to fall off. A stainless steel mesh is provided on the plate, which abuts against the adsorption layer to increase the adhesion points of the slag and further enhance the adhesion of the cathode backplate to the slag. This prevents the slag from frequently falling onto the surface of the coated glass. The slag is suspended on the stainless steel mesh, which can reduce slag falling due to temperature differences, thereby ensuring product quality and improving product yield.

[0031] 2. This utility model provides a cathode backplate for magnetron sputtering coating of energy-saving glass, consisting of a stainless steel mesh and a plate with an adhesion layer. The rough surface on the adhesion layer increases the adsorption force of the cathode backplate, reducing the probability of slag falling onto the coated glass during coating. The plate and the stainless steel mesh are detachably connected, allowing for quick cleaning of the slag on the adhesion layer after the stainless steel mesh is removed. This reduces the problem of slag falling onto the glass substrate surface and forming pinhole defects, improving product quality and production efficiency, and has good economic and practical value. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of a cathode backplate for energy-saving glass magnetron sputtering coating according to the present invention;

[0033] Figure 2 This is a schematic diagram of the plate structure in Example 1;

[0034] Figure 3 This is a cross-sectional view of the plate body in Example 1;

[0035] Figure 4 This is a schematic diagram of the stainless steel mesh structure in Example 1;

[0036] Figure 5 This is a schematic diagram of the groove structure in Example 1;

[0037] Figure 6 This is a schematic diagram of the connection hole in Example 1.

[0038] Marked in the image:

[0039] 1-Plate body, 2-Stainless steel mesh, 21-Frame body, 22-Mesh surface, 23-Mesh hole, 3-Limiting component, 31-Bolt post, 32-Bolt hole, 4-Attachment layer, 5-Connecting hole, 6-Groove. Detailed Implementation

[0040] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0041] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0042] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0043] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0044] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0045] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0046] Example 1

[0047] like Figures 1-6 As shown, a cathode backplate for energy-saving glass magnetron sputtering coating includes...

[0048] The plate body 1 and the stainless steel mesh 2 are detachably connected;

[0049] An attachment layer 4 is provided on the plate 1. The attachment layer 4 is located between the stainless steel mesh 2 and the plate 1, and the stainless steel mesh 2 abuts against the attachment layer 4.

[0050] The side of the adhesion layer 4 away from the plate 1 has a rough surface.

[0051] During glass coating, sputtered ions adhere to the adhesion layer 4, forming slag. Due to the rough surface of the adsorption layer, the slag formed on the rough surface forms a mechanical bond with the rough surface, making it difficult for the slag to fall off. A stainless steel mesh 2 is provided on the plate 1. The stainless steel mesh 2 abuts against the adhesion layer 4, increasing the adhesion points of the slag and further enhancing the adhesion of the cathode backplate to the slag. This prevents the slag from frequently falling onto the coated glass surface. The slag is suspended on the stainless steel mesh 2, which can reduce slag falling due to temperature differences, thereby ensuring product quality and improving product yield.

[0052] In one or more embodiments, the adhesion layer 4 is an aluminum oxide structure. The surface of aluminum oxide is rough, which can provide a good adsorption effect for the slag. The mechanical interlocking between the slag and the rough surface reduces the slag falling off.

[0053] In an optional embodiment, the plate 1 and the adhesion layer 4 are integrally formed structural components. The plate 1 is an aluminum plate. After the surface of the plate 1 comes into contact with oxygen in the air, it is oxidized to an aluminum oxide layer. The aluminum oxide layer serves as the adhesion layer 4. Sputtered ions form slag on the adhesion layer 4. The rough surface of the aluminum oxide increases the adsorption force of the adhesion layer 4 on the slag, making the slag less likely to fall off. The thermal expansion coefficient of aluminum oxide is close to that of the slag, which can reduce the probability of the slag falling off due to temperature difference.

[0054] In one or more embodiments, the surface of the adhesion layer 4 has a plurality of protrusions or a plurality of depressions to form a rough surface; the rough surface has a plurality of protrusions or a plurality of depressions; the sludge is mechanically engaged with the grooves or protrusions to make the sludge less likely to fall off.

[0055] In one or more embodiments, the plate 1 is a rectangular plate, and the plate 1 is adapted to the stainless steel mesh 2. The shape of the stainless steel mesh 2 is adapted to the shape of the plate 1, so that the stainless steel mesh 2 is a rectangular component. After the stainless steel mesh 2 is installed, the projection of the stainless steel mesh 2 on the plate 1 just covers the entire rough surface, so that the stainless steel mesh 2 can increase the force point of the slag on the cathode back plate.

[0056] In one or more embodiments, the stainless steel mesh 2 is composed of a frame 21 and a mesh surface 22. The mesh surface 22 is laid inside the frame 21. The frame 21 enables the mesh surface 22 to be laid flat on the plate 1, making the stainless steel mesh 2 easier to install and disassemble.

[0057] In one or more embodiments, the plate 1 is provided with a plurality of limiting members 3, the limiting members 3 penetrate the attachment layer 4, and the stainless steel mesh 2 is detachably connected to the limiting members 3; the stainless steel mesh 2 is positioned by the plurality of limiting members 3 together, so that the stainless steel mesh 2 can be quickly installed on the plate 1.

[0058] In an optional embodiment, the limiting member 3 is a bolt post 31, and a plurality of bolt posts 31 are arranged in an array on the plate 1. The stainless steel mesh 2 is provided with a plurality of bolt holes 32, and the bolt holes 32 are adapted to be connected with the bolt posts 31. There are six bolt posts 31, and there is a gap between adjacent bolt posts 31. By inserting multiple bolt posts 31 into the corresponding bolt holes 32 at the same time, the stainless steel mesh 2 can be installed quickly.

[0059] In one or more embodiments, the plate 1 is provided with a plurality of intersecting grooves 6; the grooves 6 can increase the adsorption area for slag, so that the plate 1 can adhere to more slag and reduce slag falling off.

[0060] In one or more embodiments, the mesh 23 of the stainless steel mesh 2 is a rhomboid through hole; the rhomboid through hole 23 facilitates the passage of sputtered ions, and the stainless steel material can reduce the adsorption and accumulation of slag on the stainless steel mesh 2.

[0061] In an optional embodiment, the limiting member 3 is detachably connected to the plate 1; by removing the limiting member 3, it is convenient to clean the accumulated residue on the adhesion layer 4; a through connecting hole 5 is opened in the aluminum plate, and after the connecting hole 5 is aligned and connected with the bolt hole 32 on the stainless steel mesh 2, a bolt is inserted for fixation.

[0062] Specifically, a cathode backplate for energy-saving glass magnetron sputtering coating consists of a plate body 1 and a stainless steel mesh 2, wherein the stainless steel mesh 2 is provided with threaded holes, the plate body 1 is an aluminum plate, and bolt posts 31 are provided on the aluminum plate as limiting members 3.

[0063] The six bolt posts 31 on the aluminum plate are evenly spaced to prevent the stainless steel mesh 2 from warping.

[0064] Among them, the aluminum plate surface is oxidized to form an oxide layer of aluminum oxide as an adhesion layer 4. The thermal expansion coefficient of aluminum oxide is similar to that of the slag. The internal stress caused by temperature changes is small, which can reduce the slag falling off the adsorption layer. In addition, the surface of the adhesion layer 4 is rough, and the slag forms a mechanical interlock with the adhesion layer 4 after it is attached, which increases the adhesion and reduces the slag falling off.

[0065] Among them, the stainless steel mesh 2 increases the slag adhesion points, further enhances the adhesion of slag, reduces the falling of large slag, and the slag hanging on the stainless steel mesh 2 can reduce slag falling due to temperature difference.

[0066] The aluminum plate and stainless steel mesh 2 are connected by bolts and can be disassembled, making it convenient to clean up the accumulated residue when changing targets.

[0067] Among them, the coefficients of thermal expansion are: slag: Si3N4: 3*10-6 / ℃; SiO2: 5.5*10-7 / ℃;

[0068] Stainless steel: 1.5*10-5 / ℃; Aluminum oxide: 7*10-6 / ℃; Metallic aluminum: 2*10-5 / ℃.

[0069] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cathode backplate for energy-saving glass magnetron sputtering coating, characterized in that, include A plate (1) and a stainless steel mesh (2), wherein the plate (1) and the stainless steel mesh (2) are detachably connected; An attachment layer (4) is provided on the plate (1), the attachment layer (4) is located between the stainless steel mesh (2) and the plate (1), and the stainless steel mesh (2) abuts against the attachment layer (4); The attachment layer (4) has a rough surface on the side away from the plate (1).

2. The cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The adhesion layer (4) includes aluminum oxide structural components.

3. The cathode backplate for energy-saving glass magnetron sputtering coating according to claim 2, characterized in that, The plate (1) and the attachment layer (4) are integrally formed structural components, and the plate (1) is an aluminum plate.

4. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The rough surface has several protrusions and / or several depressions.

5. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The plate (1) is a rectangular plate, and the shape of the plate (1) is adapted to the shape of the stainless steel mesh (2). The plate (1) and the stainless steel mesh (2) are adapted to be connected.

6. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The stainless steel mesh (2) includes a frame (21) and a mesh surface (22), with the mesh surface (22) laid inside the frame (21).

7. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The plate (1) is provided with several limiting members (3), the limiting members (3) penetrate the attachment layer (4), and the stainless steel mesh (2) is detachably connected to the limiting members (3).

8. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 7, characterized in that, The limiting component (3) includes bolt posts (31), and a plurality of bolt posts (31) are arranged in an array on the plate (1). The stainless steel mesh (2) is provided with a plurality of bolt holes (32), and the bolt holes (32) are adapted to be connected to the bolt posts (31).

9. A cathode backplate for energy-saving glass magnetron sputtering coating according to claim 1, characterized in that, The plate (1) has several intersecting grooves (6).

10. A cathode backplate for energy-saving glass magnetron sputtering coating according to any one of claims 1-9, characterized in that, The stainless steel mesh (2) has rhomboid through holes (23).

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