Vibration damper and vibration damping system

Abstract

The utility model relates to a shock absorber and a shock absorption system, and belongs to the technical field of precise shock absorption. The shock absorber comprises a bottom plate, a top plate, and a limiting supporting assembly and a motor assembly which are arranged between the bottom plate and the top plate; the limiting supporting assembly comprises a limiting supporting seat fixed to the bottom plate and a limiting structure fixed to the top plate, a limiting groove is formed in the side, facing the top plate, of the limiting supporting seat, at least part of the limiting structure is contained in the limiting groove, and a gap is formed between the outer side wall of the limiting structure and the inner side wall of the limiting groove; the motor assembly comprises a stator and a mover, one of the stator and the mover is fixed to the bottom plate, the other one of the stator and the mover is fixed to the top plate, and the mover is configured to move in the preset direction relative to the stator; moreover, the distance from the outer side wall of the limiting structure to the inner side wall of the limiting groove in the preset direction is smaller than the distance from the driven cell to the stator in the preset direction, so that collision between the rotor and the stator of the motor assembly can be avoided, the damage risk of the motor is reduced, the reliability of the shock absorber is improved, and the service life is prolonged.

Description

Technical Field

[0001] This application relates to the field of precision vibration reduction technology, specifically to a vibration damper and a vibration reduction system. Background Technology

[0002] With the continuous improvement of the precision of ultra-precision machining equipment and measuring instruments, the vibration of their working environment is increasingly demanding of low amplitude and low frequency, which places more stringent requirements on the vibration reduction performance of vibration damping tables. Traditional passive vibration isolation technology, consisting of a mass-spring-damper system, cannot meet the vibration reduction requirements of ultra-precision equipment due to the inherent contradiction between the low-frequency vibration transmissibility and the high-frequency vibration attenuation rate. Therefore, there is an urgent need for new technologies and methods to improve this situation.

[0003] Active vibration damping is a crucial technology for solving the aforementioned problems. Active vibration damping systems generally consist of a combination of passive vibration isolation elements and active actuators, such as active vibration dampers composed of air springs and voice coil motors in parallel, active vibration dampers composed of vibration-damping rubber and piezoelectric ceramics, and active vibration dampers combining air springs and pneumatic actuators. These types of active vibration dampers can achieve both low-frequency suppression and high-frequency isolation.

[0004] However, the aforementioned active vibration reduction system suffers from low reliability. Utility Model Content

[0005] The purpose of this application is to provide a vibration damper and a vibration damping system to improve the reliability of existing active vibration damping systems.

[0006] This application provides a vibration damper, which includes: a base plate and a top plate arranged at relative intervals, and a limiting support assembly and a motor assembly disposed between the base plate and the top plate; the limiting support assembly includes a limiting support seat and a limiting structure, wherein the limiting support seat is fixed to the base plate and has a limiting groove on the side of the limiting support seat facing the top plate, the limiting structure is fixed to the top plate and at least part of the limiting structure is accommodated in the limiting groove, and there is a gap between the outer wall of the limiting structure and the inner wall of the limiting groove; the motor assembly includes a stator and a mover, wherein one of the stator and the mover is fixed to the base plate, the other of the stator and the mover is fixed to the top plate, and the mover is configured to move relative to the stator in a preset direction; and the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the mover along the preset direction to the stator.

[0007] The limiting support seat has a connecting plate protruding laterally at the end facing the top plate, and a limiting groove is specifically provided on the side of the connecting plate facing the top plate and passes through the connecting plate; the limiting structure has a first end and a second end opposite to each other, the first end of the limiting structure is fixed to the top plate, and the second end of the limiting structure passes through the limiting groove and protrudes and is exposed on the side of the connecting plate away from the top plate; and the limiting support assembly also includes a stop member, which is fixed to the part of the limiting structure that protrudes and is exposed on the side of the connecting plate away from the top plate, and the stop member is configured to prevent the limiting structure from disengaging from the limiting groove.

[0008] The top plate has a limiting structure receiving groove on the side facing the bottom plate corresponding to the limiting structure, and the first end of the limiting structure extends into the limiting structure receiving groove; a through hole is provided on the middle area of ​​the surface of the limiting structure facing the bottom plate, and the through hole penetrates the limiting structure; in addition, the limiting support assembly also includes a locking screw, which passes through the through hole and is connected to the top plate to fix the first end of the limiting structure in the limiting structure receiving groove.

[0009] Among them, the top plate facing the bottom plate has a raised block protruding from the area of ​​the limiting structure towards the bottom plate, and the limiting structure receiving groove is specifically located on the side of the raised block facing the bottom plate.

[0010] The limiting support assembly has a working state and a non-working state; and the limiting support assembly also includes a transport locking screw, which is configured to fix the limiting support seat to the top plate when the limiting support assembly is in the non-working state.

[0011] The vibration damper also includes a damping pad and a panel. The panel is located on the side of the top plate away from the bottom plate, and the damping pad is bonded between the top plate and the panel.

[0012] Among them, a motor receiving groove is opened on the side of the top plate facing the bottom plate corresponding to the area of ​​the motor assembly, and the end of the motor assembly away from the bottom plate is housed in the motor receiving groove.

[0013] The top plate is a closed box-shaped structure welded from flat plates and profiles.

[0014] The vibration damper also includes a spring damping assembly and a sensor assembly disposed between the bottom plate and the top plate. One end of the spring damping assembly is fixed to the top plate, the other end of the spring damping assembly is fixed to the bottom plate, and the sensor assembly is fixed to the top plate.

[0015] This application also provides a vibration reduction system, which includes the vibration damper described above.

[0016] The beneficial effects of this application are as follows: The vibration damper and vibration damping system provided by this application are used in the vibration damping system and include a base plate and a top plate arranged at relatively intervals, as well as a limiting support assembly and a motor assembly disposed between the base plate and the top plate; wherein, the limiting support assembly includes a limiting support seat and a limiting structure, the limiting support seat is fixed to the base plate, and a limiting groove is opened on the side of the limiting support seat facing the top plate, the limiting structure is fixed to the top plate, and at least part of the limiting structure is accommodated in the limiting groove, and there is a gap between the outer side wall of the limiting structure and the inner side wall of the limiting groove; the motor assembly includes a stator and a motor. One of the stator, rotor, and moving part is fixed to the base plate, and the other is fixed to the top plate. The moving part is configured to move relative to the stator in a preset direction. Furthermore, the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the moving part to the stator along the preset direction. Therefore, if the top plate and the base plate of the vibration damper are excessively offset in the preset direction, the limiting structure will first collide with the limiting support to avoid the moving part of the motor assembly colliding with the stator. This protects the motor from collision damage, improves the reliability of the vibration damper, and extends its service life. Attached Figure Description

[0017] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application;

[0019] Figure 2 This is a side view of the vibration damper provided in the embodiments of this application;

[0020] Figure 3 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line A-A' in the diagram;

[0021] Figure 4 yes Figure 3 Enlarged view of the structure inside the circular frame C1;

[0022] Figure 5 yes Figure 3 Enlarged view of the structure inside the circular frame C2;

[0023] Figure 6 This is an exploded view of a sandwich structure formed by a top plate, a vibration damping pad, and a panel, provided in an embodiment of this application.

[0024] Figure 7 This is a bottom view of the top plate structure provided in the embodiment of this application;

[0025] Figure 8 It is along Figure 7A schematic diagram of the cross-sectional structure taken by line C-C' in the diagram;

[0026] Figure 9 yes Figure 8 Enlarged view of the internal structure of the circular frame C3;

[0027] Figure label:

[0028] 1-Vibration damper; 10-Base plate; 20-Top plate; 20A-Flat plate; 20B-Profile; 21-Limiting structure receiving groove; 22-Elevating block; 23-Motor receiving groove; 24-First groove; 25-Second groove; 26-Motor observation window;

[0029] 30-Limit support assembly; 31-Limit support base; 311-Limit groove; 312-Connecting plate; 313-Through hole; 314-Fixing plate; 32-Limit structure; 321-Through hole; 33-Stop; 34-Locking screw; 35-Transport locking screw;

[0030] 40 - Motor assembly; 41 - Stator; 42 - Mover; 43 - Adapter;

[0031] 50 - Vibration damping pad; 60 - Panel; 70 - Spring vibration damping assembly;

[0032] A1 - Gap; D1 / D2 - Distance. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0034] When describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between itself and the other layer or region. Furthermore, if the component is flipped, the layer or region will be located "below" or "under" the other layer or region. Additionally, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0035] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0036] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0037] Please see Figures 1 to 4 , Figure 1 This is a three-dimensional structural diagram of the vibration damper provided in the embodiments of this application. Figure 2 This is a side view of the shock absorber provided in the embodiment of this application. Figure 3 It is along Figure 2 A schematic diagram of the cross-sectional structure taken by line A-A' in the diagram. Figure 4 yes Figure 3 An enlarged view of the structure within the circular frame C1. (See diagram.) Figures 1 to 4 As shown, the shock absorber 1 includes a base plate 10 and a top plate 20 arranged at relative intervals, as well as a limiting support assembly 30 and a motor assembly 40 disposed between the base plate 10 and the top plate 20.

[0038] Specifically, the limiting support assembly 30 may include a limiting support base 31 and a limiting structure 32. The limiting support base 31 is fixed to the base plate 10, and a limiting groove 311 is formed on the side of the limiting support base 31 facing the top plate 20. The limiting structure 32 is fixed to the top plate 20, and at least part of the limiting structure 32 is accommodated in the limiting groove 311. A gap A1 is formed between the outer side wall of the limiting structure 32 and the inner side wall of the limiting groove 311.

[0039] Specifically, the motor assembly 40 may include a stator 41 and a mover 42. One of the stator 41 and the mover 42 is fixed to the base plate 10, and the other is fixed to the top plate 20, and the mover 42 is configured to move relative to the stator 41 in a predetermined direction. In some examples, such as... Figure 2 As shown, the stator 41 can be fixed to the base plate 10, and the mover 42 can be fixed to the top plate 20. In some examples, the stator 41 can be fixed to the top plate 20, and the mover 42 can be fixed to the base plate 10.

[0040] Furthermore, the distance D1 from the outer wall of the limiting structure 32 along the preset direction to the inner wall of the limiting groove 311 can be less than the distance D2 from the mover 42 along the preset direction to the stator 41. Thus, if the top plate 20 and the bottom plate 10 of the vibration damper 1 are excessively offset in the preset direction, the limiting structure 32 will first collide with the limiting support 31 to avoid the mover 42 of the motor assembly 40 colliding with the stator 41, thereby protecting the motor from collision damage, improving the reliability of the vibration damper 1, and extending the service life of the vibration damper 1.

[0041] The preset direction can be a direction parallel to the horizontal plane, that is, a horizontal direction, specifically a horizontal transverse direction and / or a horizontal longitudinal direction, with the horizontal transverse direction perpendicular to the horizontal longitudinal direction. For example, the horizontal plane can refer to a plane parallel to the X-axis and Y-axis in the attached drawing, the horizontal transverse direction can refer to a direction parallel to the X-axis in the attached drawing, and the horizontal longitudinal direction can refer to a direction parallel to the Y-axis in the attached drawing.

[0042] In some examples, the motor assembly 40 described above may be specifically a bidirectional voice coil motor drive assembly. Accordingly, the number of movers included in the motor assembly 40 may be two, referred to as the first mover and the second mover. The first mover may be configured to move horizontally relative to the stator 41, and the second mover may be configured to move vertically relative to the stator 41.

[0043] Furthermore, the distance from the outer wall of the limiting structure 32 along the horizontal transverse direction to the inner wall of the limiting groove 311 can be less than the distance from the first moving part along the horizontal transverse direction to the stator 41, and the distance from the outer wall of the limiting structure 32 along the horizontal longitudinal direction to the inner wall of the limiting groove 311 can be less than the distance from the second moving part along the horizontal transverse direction to the stator 41. In this way, collisions between the motor moving part and the motor stator can be prevented in both horizontal directions, thereby more effectively protecting the motor from collision damage and further improving reliability.

[0044] In some embodiments, such as Figure 1 and Figure 2 As shown, the motor assembly 40 may also include an adapter 43, and the stator 41 may be fixed to the base plate 10 or the top plate 20 via the adapter 43.

[0045] In some embodiments, such as Figure 3 and Figure 4 As shown, the end of the limiting support 31 facing the top plate 20 (i.e., the top end) may have a connecting plate 312 protruding laterally, wherein the lateral direction can be any direction parallel to the horizontal plane, for example, it can be specifically as follows: Figure 3 and Figure 4 From right to left in the middle. In addition, the limiting groove 311 can be specifically provided on the side of the connecting plate 312 facing the top plate 20 (i.e., the top side), and can penetrate the connecting plate 312.

[0046] Specifically, the limiting structure 32 may have a first end and a second end (i.e., a top end and a bottom end), and the first end (i.e., the top end) of the limiting structure 32 may be fixed to the top plate 20, and the second end (i.e., the bottom end) of the limiting structure 32 may pass through the limiting groove 311 and protrude and be exposed on the side of the connecting plate 312 away from the top plate 20 (i.e., the bottom side).

[0047] Furthermore, the limiting support assembly 30 may also include a stop 33, which can be fixed to the protruding portion of the limiting structure 32 exposed on the bottom side of the connecting plate 312, and the stop 33 can be configured to prevent the limiting structure 32 from disengaging from the limiting groove 311. Thus, in the vertical direction (i.e., the direction perpendicular to the horizontal plane), if the limiting structure 32 is excessively raised, the stop 33 will first strike the limiting support seat 31 to prevent the limiting structure 32 from disengaging upward from the limiting groove 311, thereby avoiding the problem of excessive vertical movement of the top plate 20 leading to instability, and achieving the purpose of protecting the vibration damped equipment on the top plate 20.

[0048] For example, such as Figure 4 As shown, in the limiting support assembly 30, the stop 33 and the limiting structure 32 can be integrally formed, and the stop 33 can protrude and be disposed around the outer side wall at the bottom end of the limiting structure 32.

[0049] For example, such as Figure 4 As shown, the orthographic projection of the gap A1 between the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311 on the horizontal plane can be completely covered by the orthographic projection of the stop 33 on the horizontal plane, and the orthographic projection area of ​​the stop 33 on the horizontal plane can be greater than the orthographic projection area of ​​the gap A1 between the outer wall of the limiting structure 32 and the inner wall of the limiting groove 311 on the horizontal plane, so as to ensure that the stop 33 can effectively prevent the limiting structure 32 from disengaging from the limiting groove 311.

[0050] In some embodiments, such as Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, a limiting structure receiving groove 21 can be opened on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the limiting structure 32, and the first end (i.e., the top end) of the limiting structure 32 can extend into the limiting structure receiving groove 21 and be fixed in the limiting structure receiving groove 21, thereby fixing the limiting structure 32 to the bottom side of the top plate 20.

[0051] Specifically, such as Figure 3 and Figure 4 As shown, a through hole 321 can be provided in the middle region of the surface of the limiting structure 32 facing the base plate 10 (i.e., the bottom surface), and the through hole 321 penetrates the limiting structure 32.

[0052] Furthermore, the limiting support assembly 30 may also include a locking screw 34, which can pass through the through hole 321 and be connected to the top plate 20, so that the top of the limiting structure 32 is fixed in the limiting structure receiving groove 21 by the locking screw 34.

[0053] For example, such as Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, a first groove 24 can be provided on the bottom wall of the limiting structure receiving groove 21, and the locking screw 34 can be fixedly connected to the first groove 24 by thread after passing through the through hole 321.

[0054] In some specific embodiments, the area of ​​the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the limiting structure 32 may be provided with a shim block 22 protruding towards the bottom plate 10, and the limiting structure receiving groove 21 and the first groove 24 may be specifically provided on the side of the shim block 22 facing the bottom plate 10 (i.e., the bottom side). In this way, by providing the shim block 22, the finishing area can be reduced, thereby reducing production costs.

[0055] In some embodiments, the limiting support component 30 may have an active state and a non-active state. Specifically, as shown in the figure... Figure 3 and Figure 4 As shown, the limiting support assembly 30 may also include a transport locking screw 35, and the transport locking screw 35 may be configured to fix the limiting support seat 31 to the top plate 20 when the limiting support assembly 30 is in a non-working state, thereby preventing the limiting support seat 31 from moving relative to the top plate 20 in a non-working state, so as to facilitate the transport of the shock absorber 1 in a non-working state.

[0056] Furthermore, when the limit support assembly 30 is in the working state, the transport locking screw 35 can be separated from the limit support base 31 and / or the top plate 20, thereby ensuring that the limit support base 31 can have the function of preventing the mover 42 of the motor assembly 40 from colliding with the stator 41.

[0057] Specifically, in the above embodiment where a connecting plate 312 protrudes laterally from the end of the limiting support 31 facing the top plate 20, such as... Figure 3 and Figure 4 As shown, a through hole 313 can be provided on the surface of the connecting plate 312 facing the base plate 10 (i.e., the bottom surface), and the through hole 313 penetrates the connecting plate 312. Furthermore, when the limiting support assembly 30 is in a non-working state, the transport locking screw 35 can pass through the through hole 313 and connect to the top plate 20, so that the top of the limiting support base 31 is fixed to the bottom side of the top plate 20 by the transport locking screw 35.

[0058] Furthermore, in specific implementation, such as Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, a second groove 25 can be provided on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the area of ​​the transport locking screw 35, and the transport locking screw 35 can be fixedly connected to the second groove 25 by threads after passing through the through hole 321.

[0059] Specifically, in the above embodiment where a shim block 22 is provided in the area corresponding to the limiting structure 32 on the side of the top plate 20 facing the bottom plate 10, the shim block 22 can also extend from the area corresponding to the limiting structure 32 to the area corresponding to the transport locking screw 35 on the side of the top plate 20 facing the bottom plate 10, and the second groove 25 can be specifically provided on the side of the shim block 22 facing the bottom plate 10 (i.e., the bottom side), thereby helping to further reduce the finishing area and reduce production costs.

[0060] In some embodiments, such as Figures 1 to 4 As shown, the end of the limiting support 31 away from the top plate 20 (i.e., the bottom end) may have a fixing plate 314 protruding laterally. The lateral direction can be any direction parallel to the horizontal plane; for example, it can be specifically... Figure 3 and Figure 4 From right to left in the middle. Furthermore, the fixing plate 314 can be fixedly connected to the base plate 10 by screws, thereby realizing that the limiting support 31 is fixed to the base plate 10 by the fixing plate 314.

[0061] For example, a positioning groove may be provided on the side of the bottom plate 10 facing the top plate 20 (i.e., the top side) corresponding to the fixing plate 314, and the fixing plate 314 may be specifically connected to the bottom wall of the positioning groove by screws.

[0062] For example, such as Figure 4 As shown, the fixing plate 314 and the connecting plate 312 of the limiting support 31 can be arranged at intervals relative to each other. Specifically, the limiting support 31 may also include a support body, which can be connected between the fixing plate 314 and the connecting plate 312 to play a supporting role in the limiting support 31.

[0063] In some embodiments, such as Figure 6 and Figure 7 As shown, a motor receiving groove 23 can be provided on the side of the top plate 20 facing the bottom plate 10 (i.e., the bottom side) corresponding to the area of ​​the motor assembly 40, and the end of the motor assembly 40 away from the bottom plate 10 (i.e., the top part) can be accommodated in the motor receiving groove 23, thereby helping to improve space utilization and reduce the overall thickness of the shock absorber 1.

[0064] In some embodiments, such as Figures 1 to 4 As shown, the vibration damper 1 may further include a spring damping assembly 70 and a sensor assembly (not shown) disposed between the base plate 10 and the top plate 20. One end (i.e., the top end) of the spring damping assembly 70 is fixed to the top plate 20, and the other end (i.e., the bottom end) of the spring damping assembly 70 is fixed to the base plate 10. The sensor assembly is fixed to the top plate 20 and can be used to detect the movement of the top plate 20.

[0065] Specifically, such as Figure 1 and Figure 2 As shown, the number of spring damping components 70 included in the vibration damper 1 can be multiple, for example, four, and the four spring damping components 70 can be arranged at the four corners of the vibration damper 1 respectively.

[0066] Specifically, the shock absorber 1 can also be a controller (not shown in the figure), which can control the motor assembly 40 to work based on the detection results of the sensor assembly.

[0067] For example, the spring damping assembly 70 may include a spring, an upper limit structure, and a lower limit structure. The lower limit structure is fixedly connected to the base plate 10, the upper limit structure is located on the side of the lower limit structure opposite to the base plate 10 and is spaced apart from the lower limit structure, and the upper limit structure is fixedly connected to the top plate 20. The spring is vertically arranged between the upper limit structure and the lower limit structure, thereby achieving vertical damping function through the spring damping assembly 70.

[0068] In some embodiments, such as Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, the vibration damper 1 may further include a damping pad 50 and a panel 60, wherein the panel 60 is disposed on the side of the top plate 20 facing away from the bottom plate 10, and the damping pad 50 is bonded between the top plate 20 and the panel 60. Specifically, a layer of damping pad 50 can be bonded between the top plate 20 and the panel 60 with adhesive (e.g., glue or double-sided tape), thereby forming a sandwich structure consisting of the top plate 20, the damping pad 50, and the panel 60. In this way, high-frequency vibrations of a certain frequency can be filtered through the damping pad 50 to improve the vibration damping performance of the vibration damper 1.

[0069] For example, the material of the vibration damping pad 50 can be rubber or silicone.

[0070] In the above embodiments, such as Figures 6 to 9 As shown, the top plate 20 can be a closed box-shaped structure welded from a flat plate 20A and a profile 20B. This improves the overall structural rigidity of the top plate 20, enabling it to withstand loads far exceeding its own mass.

[0071] For example, plate 20A can be a steel plate. Profile 20B can be a U-shaped profile (e.g., U-shaped channel steel).

[0072] Specifically, in the above embodiment where a motor receiving groove 23 is provided on the side of the top plate 20 facing the bottom plate 10 corresponding to the area of ​​the motor assembly 40, such as... Figure 6 and Figure 7 As shown, the motor receiving slot 23 can specifically be located on the side of the profile 20B facing away from the flat plate 20A (i.e., the bottom side). Furthermore, in a specific implementation, as... Figure 6 and Figure 7 As shown, a motor observation window 26 can be provided on the outer side wall of profile 20B in the area corresponding to the motor receiving groove 23. The motor observation window 26 is connected to the motor receiving groove 23 and is used to expose the motor assembly 40 inside the motor receiving groove 23 so as to observe the motor assembly 40.

[0073] Specifically, in the above embodiment where a shim block 22 is provided in the area corresponding to the limiting structure 32 on the side of the top plate 20 facing the bottom plate 10, the shim block 22 can be specifically provided on the side of the profile 20B away from the flat plate 20A (i.e., the bottom side). For example, the shim block 22 can be fixedly connected to the bottom side of the profile 20B away from the flat plate 20A by welding.

[0074] In some specific embodiments, such as Figure 7 As shown, the top plate 20 can be a closed box-shaped structure welded from a flat plate 20A and multiple profiles 20B (e.g., four profiles 20B). These multiple profiles 20B can be connected end-to-end on the side of the flat plate 20A facing the bottom plate 10 (i.e., the bottom side) to form a rectangular frame. Furthermore, the aforementioned raising block 22 can be installed across two adjacent profiles 20B, allowing adjacent profiles 20B to be connected together via the raising block 22, thereby increasing the connection rigidity of the top plate 20.

[0075] In the above embodiments, such as Figure 1 and Figure 2 As shown, the number of limiting support components 30 included in the above-mentioned shock absorber 1 can be one or more (for example, four), and the number of motor components 40 included in the above-mentioned shock absorber 1 can also be one or more (for example, four). The limiting support components 30 and the motor components 40 can correspond one-to-one. Furthermore, each limiting support component 30 can be located in the vicinity of its corresponding motor component 40 and is used to prevent the moving part and the stator of its corresponding motor component 40 from colliding, thereby protecting its corresponding motor component 40 from collision damage.

[0076] Furthermore, it should be noted that in the above-mentioned shock absorber 1, the specific structure of each limiting support component 30 and its corresponding motor component 40 can be the same as that of the limiting support component 30 and motor component 40 described in the above embodiment, so it will not be repeated here.

[0077] In the above embodiments, the vibration damper 1 can be used as a vibration damping platform for vibration damping of precision equipment such as semiconductor equipment and / or precision machine tools.

[0078] As can be seen from the above, the vibration damper provided in this embodiment includes a bottom plate and a top plate arranged at relatively intervals, as well as a limiting support assembly and a motor assembly disposed between the bottom plate and the top plate; wherein, the limiting support assembly includes a limiting support seat and a limiting structure, the limiting support seat is fixed to the bottom plate, and a limiting groove is formed on the side of the limiting support seat facing the top plate, the limiting structure is fixed to the top plate, and at least part of the limiting structure is accommodated in the limiting groove, and there is a gap between the outer side wall of the limiting structure and the inner side wall of the limiting groove; the motor assembly includes a stator and a mover, wherein one of the stator and the mover... One component is fixed to the base plate, and the other is fixed to the top plate. The mover is configured to move relative to the stator in a preset direction. Furthermore, the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the mover along the preset direction to the stator. Thus, if the top plate and the base plate of the vibration damper are excessively offset in the preset direction, the limiting structure will first collide with the limiting support to avoid collision between the mover and the stator of the motor assembly. This protects the motor from collision damage, improves the reliability of the vibration damper, and extends its service life.

[0079] This application also provides a vibration reduction system, which includes the vibration damper of any of the above embodiments.

[0080] Specifically, the vibration damping system may also include a load, which can be fixed above the top plate of the vibration damper, thereby achieving vibration damping of the load.

[0081] For example, the load can be a semiconductor device, a precision machine tool, or other precision equipment.

[0082] It should be noted that the vibration reduction system provided in this application embodiment, because it is equipped with the vibration damper provided in this application embodiment, can achieve the beneficial effects that any vibration damper provided in this application embodiment can achieve, as detailed in the previous embodiments, and will not be repeated here.

[0083] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration damper, characterized in that, It includes a base plate and a top plate that are spaced apart from each other, as well as a limiting support assembly and a motor assembly disposed between the base plate and the top plate; The limiting support assembly includes a limiting support base and a limiting structure. The limiting support base is fixed to the base plate, and a limiting groove is formed on the side of the limiting support base facing the top plate. The limiting structure is fixed to the top plate, and at least a portion of the limiting structure is accommodated in the limiting groove. There is a gap between the outer side wall of the limiting structure and the inner side wall of the limiting groove. The motor assembly includes a stator and a mover, wherein one of the stator and the mover is fixed to the base plate, the other of the stator and the mover is fixed to the top plate, and the mover is configured to move relative to the stator in a preset direction; Furthermore, the distance from the outer wall of the limiting structure along the preset direction to the inner wall of the limiting groove is less than the distance from the mover along the preset direction to the stator.

2. The vibration damper according to claim 1, characterized in that, The end of the limiting support facing the top plate has a connecting plate protruding laterally, and the limiting groove is specifically located on the side of the connecting plate facing the top plate and passes through the connecting plate; The limiting structure has a first end and a second end opposite to each other. The first end of the limiting structure is fixed to the top plate, and the second end of the limiting structure passes through the limiting groove and protrudes out and is exposed on the side of the connecting plate away from the top plate. Furthermore, the limiting support assembly also includes a stop member, which is fixed to the portion of the limiting structure that protrudes and is exposed on the side of the connecting plate opposite to the top plate, and the stop member is configured to prevent the limiting structure from disengaging from the limiting groove.

3. The vibration damper according to claim 2, characterized in that, A limiting structure receiving groove is formed on the side of the top plate facing the bottom plate in the area corresponding to the limiting structure, and the first end of the limiting structure extends into the limiting structure receiving groove. The limiting structure has a through hole in the central area of ​​the surface facing the base plate, and the through hole penetrates the limiting structure. Furthermore, the limiting support assembly also includes a locking screw, which passes through the through hole and is connected to the top plate to fix the first end of the limiting structure in the limiting structure receiving groove.

4. The vibration damper according to claim 3, characterized in that, The top plate has a raised block protruding from the side facing the bottom plate, corresponding to the area of ​​the limiting structure, and the limiting structure receiving groove is specifically located on the side of the raised block facing the bottom plate.

5. The vibration damper according to claim 1, characterized in that, The limiting support component has a working state and a non-working state; Furthermore, the limiting support assembly also includes a transport locking screw, which is configured to fix the limiting support base to the top plate when the limiting support assembly is in a non-working state.

6. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a damping pad and a panel, wherein the panel is disposed on the side of the top plate away from the bottom plate, and the damping pad is bonded between the top plate and the panel.

7. The vibration damper according to claim 1, characterized in that, A motor receiving groove is provided on the side of the top plate facing the bottom plate corresponding to the area of ​​the motor assembly, and the end of the motor assembly facing away from the bottom plate is housed in the motor receiving groove.

8. The vibration damper according to claim 1, characterized in that, The top plate is a closed box-shaped structure welded from flat plates and profiles.

9. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a spring damping assembly and a sensor assembly disposed between the base plate and the top plate, wherein one end of the spring damping assembly is fixed to the top plate, the other end of the spring damping assembly is fixed to the base plate, and the sensor assembly is fixed to the top plate.

10. A vibration reduction system, characterized in that, Includes the vibration damper as described in any one of claims 1 to 9.

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