Automatically-filled high-thermal-conductivity temperature probe
By designing an automatically filling high thermal conductivity temperature probe, the problem of poor contact between temperature sensors is solved by using thermally conductive materials to contact the object being measured, thus achieving efficient temperature measurement and making it suitable for a variety of objects being measured.
Patent Information
- Application Number
- CN202422676561.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-11-04
AI Technical Summary
Existing temperature sensors do not make close contact with the object being measured, resulting in poor thermal conductivity, inaccurate temperature measurement, and slow response. Furthermore, there is a lack of universally applicable high thermal conductivity temperature probes.
Design an automatically filling high thermal conductivity temperature probe, comprising a temperature sensor and thermally conductive material inside a housing. In the working state, the thermally conductive material overflows from the housing and contacts the object being measured. The temperature sensor is moved by a pusher, spring or micro motor to expel the thermally conductive material.
It achieves accurate temperature measurement in different application scenarios, with fast response speed, high accuracy, low cost, easy application, and wide applicability.
Smart Images
Figure CN223512818U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the product manufacturing field, specifically, relate to the manufacturing field of high progress product such as chip, especially in the manufacturing process of product such as chip, the instrument of measuring the temperature of production equipment, product, more specifically relate to high-precision temperature measurement probe. BACKGROUND
[0002] In the chip manufacturing field, often need to use temperature measuring equipment to measure the internal production environment temperature of production equipment, product temperature etc. In the process of measurement, usually the situation is that temperature sensor will be installed to the measured object, at this time, usually because the shape of temperature sensor is not consistent with the measured object, measured target object, makes temperature sensor and measured object cannot closely adhere. Because of not enough, lead to poor thermal conductivity, temperature measurement is not accurate, temperature response is slow. In popular terms, temperature sensor needs to contact the measured object as much as possible, so that it is easier to guarantee the accuracy of temperature measurement and timely response.
[0003] Especially for the armored temperature probe on the market, the shape of the probe top is usually circular, and the measured temperature object usually does not have a circular groove for receiving the temperature probe or making the temperature probe and the measured object as closely as possible. Therefore, the contact between the temperature probe and the measured object usually leaves more gaps.
[0004] There is a lot of air between the gaps, and air is a poor conductor of heat, which seriously affects the temperature measurement accuracy of the temperature sensor and the temperature response.
[0005] An easily thought of solution is to set a groove on the measured object as much as possible, and place the temperature probe in the groove, but the shape of the measured object usually cannot be changed, so the application of such design is very narrow. Moreover, the shape of the temperature probe is also various, if the measured object is designed to be a specific receiving mode, then a specific shape of temperature probe is needed for a measured object, which is very inconvenient, affects the production efficiency and increases the burden of production management.
[0006] In the prior art, there is no universal temperature probe with high thermal conductivity. UTILITY MODEL CONTENT
[0007] In view of the technical defects existing in the prior art, the utility model aims at providing an automatic filling high-thermal-conductivity temperature probe, comprising at least one temperature sensor 3, characterized in that it further comprises an outer shell 4 arranged outside the temperature sensor 3, and a thermal conductive material 2 is filled in the outer shell 4 and contacts the temperature sensor 3, and the thermal conductive material 2 overflows the outer shell 4 and contacts the measured object 1 in the working state.
[0008] Preferably, in the working state, the temperature sensor 3 moves towards the measured object 1, extruding the heat-conducting material 2 out of the shell 4.
[0009] Preferably, a propeller 9 is arranged between the inner periphery of the shell 4 and the temperature sensor 3, in the working state, the propeller moves towards the measured object 1, extruding the heat-conducting material 2 out of the shell 4.
[0010] Preferably, one end of the shell 4 towards the measured object 1 is left with a first opening.
[0011] Preferably, a protective cover 6 is arranged outside the first opening.
[0012] Preferably, a wire 5 is arranged, one end of the wire 5 is fixedly connected with the temperature sensor 3, and the other end extends out of the shell 4.
[0013] Preferably, a sealing plate is arranged at the end of the shell away from the measured object 1, the sealing plate is provided with a guide hole, and the wire 5 extends into the shell 4 through the guide hole and is connected with the temperature sensor 3.
[0014] Preferably, a spring 8 is arranged inside the shell 4, the spring 8 is fixedly connected with the wire 5, and the outer side of the spring 8 is connected with a snap ring 7, in the working state, the snap ring 7 moves or exerts pressure towards the spring 8, and the spring 8 drives the wire 5 to move.
[0015] Preferably, a micro motor is further arranged inside the shell 4, the micro motor is attached to the side of the temperature sensor 3 away from the measured object 1, and in the working state of the micro motor, the temperature sensor 3 is pushed to move towards the measured object 1.
[0016] Preferably, the wire 5 is provided with a range mark of the moving size of the wire, for example, the moving size is preferably 3 millimeters to 3 centimeters.
[0017] Preferably, the temperature sensor 3 is attached to the inside of the shell 4.
[0018] Preferably, the temperature sensor 3 is any one of the following components:
[0019] - a thermocouple;
[0020] - a thermal resistance;
[0021] - a thermistor;
[0022] - an optical fiber temperature measurement probe; or
[0023] - an electronic temperature measurement chip.
[0024] Preferably, the heat-conducting material 2 is any one of the following materials:
[0025] - heat-conducting silicone grease;
[0026] - heat-conducting glue;
[0027] - heat-conducting resin;
[0028] - graphite powder;
[0029] - high-heat-conducting ceramic powder; or
[0030] - high-temperature ceramic glue containing heat-conducting components.
[0031] The automatic high-heat-conducting temperature probe provided by the utility model can conveniently and accurately measure the temperature of measured objects in different application scenarios, has fast response speed and high accuracy, is low in cost, easy to apply, and easy to effectively promote. BRIEF DESCRIPTION OF DRAWINGS
[0032] Other features, objects and advantages of the utility model will become more apparent by reading the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0033] Figure 1 Fig. 1 shows a cross-sectional schematic view of an automatic high-heat-conducting temperature probe in an unused state according to a first embodiment of the utility model;
[0034] Figure 2 Fig. 2 shows a cross-sectional schematic view of an automatic high-heat-conducting temperature probe in an initial state in a used state according to the first embodiment of the utility model;
[0035] Figure 3 Fig. 3 shows a cross-sectional schematic view of an automatic high-heat-conducting temperature probe in a used state according to the first embodiment of the utility model;
[0036] Figure 4 Fig. 4 shows a cross-sectional schematic view of an automatic high-heat-conducting temperature probe according to a second embodiment of the utility model; and
[0037] Figure 5 Fig. 5 shows a cross-sectional schematic view of an automatic high-heat-conducting temperature probe according to a third embodiment of the utility model.
[0038] Legend
[0039] 1. Measured temperature object (temperature measurement hole);
[0040] 2. Heat-conducting material;
[0041] 3. Temperature sensor;
[0042] 4. Sleeve;
[0043] 5. Wire;
[0044] 6. Protective cover;
[0045] 7. Clasp;
[0046] 8. Spring;
[0047] 9. Pusher. DETAILED DESCRIPTION
[0048] In order to make the technical scheme of the utility model clearly, the utility model will be further described below in combination with the drawings.
[0049] Figure 1 Fig. 1 shows a cross-sectional view of the utility model in a first embodiment, which is a schematic view of an automatic filling high-thermal-conductivity temperature probe in a non-use state. Specifically, those skilled in the art understand that the automatic filling high-thermal-conductivity temperature probe provided by the utility model comprises at least one temperature sensor 3, characterized in that it further comprises a shell 4 arranged outside the temperature sensor 3, and a thermal-conductivity material 2 is filled in the shell 4 and in contact with the temperature sensor 3. In a working state, the thermal-conductivity material 2 overflows the shell 4 and is in contact with a measured object 1. Figure 1 In the embodiment shown in Fig. 1, one end of the shell 4 (i.e. the left side in the figure) towards the measured object 1 is provided with a first opening. As shown by the dashed line on the left side, the thermal-conductivity material 2 is extruded out of the shell 4 from the first opening in a working state, so as to be in contact with the measured object 1. Figure 1 In the embodiment shown in Fig. 1, one end of the shell 4 (i.e. the left side in the figure) towards the measured object 1 is provided with a first opening. As shown by the dashed line on the left side, the thermal-conductivity material 2 is extruded out of the shell 4 from the first opening in a working state, so as to be in contact with the measured object 1. Figure 3 In the embodiment shown in Fig. 1, one end of the shell 4 (i.e. the left side in the figure) towards the measured object 1 is provided with a first opening. As shown by the dashed line on the left side, the thermal-conductivity material 2 is extruded out of the shell 4 from the first opening in a working state, so as to be in contact with the measured object 1.
[0050] In the embodiment shown in Fig. 1, the automatic filling high-thermal-conductivity temperature probe further comprises a protective cover 6 arranged outside the first opening. The protective cover 6 can be adhered to the first opening by double-sided adhesive tape, or can be screwed to the first opening. Correspondingly, the shell 4 is provided with threads on the outer side or inner side of the part of the shell 4 corresponding to the first opening, which are adapted to the threads of the protective cover 6. These changes are within the protection scope of the utility model. Figure 1 Further, referring to the embodiment shown in Fig. 1, those skilled in the art understand that the left side of the shell 4 is provided with a first opening. The first opening is outside the shell 4.
[0051] Figures 1 to 3 Further, referring to the embodiment shown in Fig. 1, those skilled in the art understand that the left side of the shell 4 is provided with a first opening. The first opening is outside the shell 4. Figure 1 Figure 1 The protective cover 6 is shown. Preferably, the first opening is a full opening, meaning it is open along the inner circumference of the outer casing 4. In a preferred variation, the first opening is a partial opening, for example, half of the inner circumference of the outer casing 4 is closed, while half of the area along the central axis of the outer casing 4 is open, and the heat-conducting material overflows and is squeezed out from this partial opening. Furthermore, the partial opening may be located approximately 5 mm inward from the left edge of the outer casing 4. Such variations are all within the protection scope of this utility model.
[0052] Correspondingly, the other end of the outer shell 4 ( Figure 1 A sealing plate (shown as a dotted line on the right side of the outer casing 4) is provided. The sealing plate has a guide hole through which the wire 5 extends into the outer casing 4 and connects to the temperature sensor 3. In this embodiment, the right side of the outer casing 4 is essentially closed, with only a guide hole for the wire 5 to pass through. Specifically, those skilled in the art will understand that during production, after connecting the temperature sensor 3 to the wire 5, the wire 5 is inserted into the outer casing 4 through the first opening, then through the guide hole, and then the temperature sensor 3 is pulled into the outer casing 4 through the wire 5 before the thermally conductive material is filled. Alternatively, in another embodiment, the temperature sensor 3 is first connected to the wire 5, then the temperature sensor 3 is placed into the outer casing 4 from the right side (i.e., the far side corresponding to the first opening), then the guide hole is inserted into the sealing plate, and finally the sealing plate is pressed into the right side of the outer casing 4 and essentially fixed. Correspondingly, to better secure the sealing plate, a raised ring can be provided on the inner side of the right side of the outer casing 4, allowing the sealing plate to abut against the raised ring and be relatively stably fixed. These modifications are all within the protection scope of this utility model.
[0053] exist Figure 1 On this basis, Figure 2 The diagram shows a cross-sectional view of the initial state of an automatically filling high thermal conductivity temperature probe according to a first embodiment of the present invention. Those skilled in the art will understand that, preferably, the automatically filling high thermal conductivity temperature probe is cylindrical. In use, the protective cover is removed, and the automatically filling high thermal conductivity temperature probe is brought close to the object being tested 1. The object being tested 1 can be of various shapes, such as a hole, and the automatically filling high thermal conductivity temperature probe extends into the hole and is approximately close to the bottom of the hole. In the working state, for example… Figures 3 to 5In the shown embodiment, the heat-conducting material is pushed out of the shell 4 and contacts the measured object 1, so that the temperature sensor 3 can measure the temperature of the measured object 1 via the contact of the heat-conducting material, etc. In another embodiment, the measured object 1 can also be a concave surface, or a flat surface, or a convex surface, and the automatic filling high-heat-conducting temperature probe provided by the present application can be used and measure the corresponding temperature according to the similar method.
[0054] Further, referring to Figures 1 to 2 In the shown embodiment, the temperature sensor 3 is not attached to the inner wall of the shell 4, and in a preferred embodiment, the temperature sensor 3 is attached to the inside of the shell 4, i.e. the inside of the shell 4 is filled with the temperature sensor 3.
[0055] Figure 3 A cross-sectional schematic view of the automatic filling high-heat-conducting temperature probe in a use state is shown in the first embodiment of the present application. Preferably, in the use state, the wire 5 is gradually pushed to the left side at the position of the first opening, the wire 5 drives the temperature sensor 3 to move to the left side, i.e. to the direction of the measured object 1, and then the temperature sensor 3 drives the heat-conducting material to overflow the shell 4, so as to gradually contact the measured object 1. Preferably, according to the judgment of the reaction force of the pushing of the wire 5, the technician can know whether the heat-conducting material has fully contacted the measured object 1, or the reading value read by the upper computer can determine whether the heat-conducting material has fully contacted the measured object 1, so as to stop pushing the wire 5. In a variant, a red line indicating the maximum pushing value of the wire can be provided on the wire, or in another variant, a pushing size range can be marked on the wire to guide the technician to push the length and strength of the wire, etc. These variants are within the protection scope of the present application.
[0056] Figure 4The utility model discloses a second embodiment of the utility model's, a cross section schematic diagram of automatic filling high thermal conductivity temperature probe is shown. In this embodiment, the spring 8 of inside of the shell 4 is arranged, the spring 8 is fixed with the wire 5, and the outside of spring 8 is connected with the snap ring 7, in the working condition, the snap ring 7 moves or exerts pressure to the spring 8 direction, and the spring 8 drives the wire 5 to move. Preferably, the snap ring 7 is connected with the inside of the shell 4 through the thread, and in the use state, the snap ring 7 can rotate inward, thereby exerts the thrust to the spring 8, and the spring 8 drives the wire 5 to move left. In another variant, the snap ring 7 moves to the shell 4 inside based on the thrust from the right side, thereby exerts the thrust to the spring 8, and the spring 8 drives the wire 5 to move left. These changes are within the protection scope of the utility model.
[0057] Figure 5 The utility model discloses a third embodiment of the utility model's, a cross section schematic diagram of automatic filling high thermal conductivity temperature probe is shown. In this embodiment, the propeller 9 is arranged between the inner periphery of the shell 4 and the temperature sensor 3, and the propeller moves to the direction of the measured object 1 in the working condition, and the heat conducting material 2 is extruded out of the shell 4. Specifically, the propeller 9 includes the left side push connection piece 91 for placing the temperature sensor 3 in a preferred embodiment, and the push connection piece 91 is connected with the pusher 93 arranged at the right side opening of the shell 4 through the sliding piece 92 (the upper and lower dotted lines in the shell 4) close to the inner wall of the shell 4, Figure 5 When the pusher 93 moves left, the sliding piece 92 is driven to move, thereby driving the temperature sensor 3 to move along with the push connection piece 91, and since the push connection piece 91 basically fills the inner wall of the shell 4, the push connection piece 91 extrudes the heat conducting material out of the shell 4. Preferably, the shape of the push connection piece 91 is adapted to the shape of the inner wall of the shell 4, and two guide holes are arranged in the middle of the push connection piece 91, so that the wire 5 passes through the guide hole and transmits from the other side of the shell 4, and correspondingly, the pusher 93 can be a hollow structure, or a closed structure with two guide holes or multiple guide holes, and these changes are within the protection scope of the utility model.
[0058] Reference Figure 3 , Figure 4 , Figure 5The skilled in the art understands that in another variant, a micro motor is also included in the shell 4, which is attached to the temperature sensor 3 on the side far from the measured object 1, and pushes the temperature sensor 3 to move towards the measured object 1 when the micro motor works. The micro motor preferably adopts wireless control, and is driven by a micro battery. The micro motor can be controlled to start or stop, or even to go forward or reverse, etc. by wireless control signals.
[0059] Further, the skilled in the art understands that, Figures 1 to 5 The structure schematic diagram of the utility model is respectively shown from different angles, the temperature sensor 3 and its wire 5 and heat-conducting material 2 are installed in a sleeve 4, and the front end has a protective cover 6 for sealing protection.
[0060] The temperature sensor 3 can be an armored probe or a bare probe, and the type can be thermocouple, thermal resistance, thermistor, optical fiber temperature measuring probe or electronic temperature measuring chip, etc.
[0061] The heat-conducting material 2 can select different types of materials according to the temperature measuring range, such as heat-conducting silicone grease, heat-conducting glue and heat-conducting resin for low-temperature environment, graphite powder, Al N, Si C, Si N and other high-heat-conducting ceramic powder for high-temperature environment, or high-temperature ceramic glue containing heat-conducting components.
[0062] The heat-conducting material 2 is preferably soft and low-viscosity, which is beneficial to fully contact with the sensor and penetrate into the small gap between the sensor and the measured object.
[0063] The sleeve 4 is the shell of the sensor and the heat-conducting material, and can be in the form of two open ends, or one open end and the other end welded with the fixed end of the sensor tail.
[0064] The protective cover 6 is used to cover the front end of the sleeve 4 to seal and protect the heat-conducting material, and can be removed before installation.
[0065] Figure 2 And Figure 3 The utility model is installed into the measured temperature object, and the measured temperature object is a temperature measuring hole 1. The bottom of the hole is uneven, and the shape difference with the sensor is large. As shown in Figure 2 After the sleeve 2 with the sensor and the heat-conducting material is inserted into the temperature measuring hole 1, the temperature sensor 3 in the sleeve 2 is pushed to extrude the heat-conducting material 2 at the front end of the sensor 3 into the temperature measuring hole 1, as shown in Figure 3 The heat-conducting material 2 fills the gap between the temperature sensor 3 and the temperature measuring hole 1, fills the original gap, and makes the sensor and the temperature measuring hole achieve good heat transfer effect.
[0066] The skilled in the art understands that the utility model contents are proposed to solve the above problems, and the temperature sensor with a sleeve at the front end is provided, the sleeve is internally provided with a heat-conducting material, and the temperature sensor can extrude the heat-conducting material out of the sleeve as a push rod at the back, and fill the gap between the measured object and the temperature sensor.
[0067] After the above technical scheme is adopted, the obvious beneficial effects are that the heat-conducting material not only covers the temperature sensor after being extruded out of the sleeve, but also fills the gap between the measured object and the temperature sensor, extrudes the original gap, improves the heat conduction performance between the temperature sensor and the measured object, and makes the temperature sensor obtain more accurate temperature values and faster temperature response.
[0068] The specific embodiments of the utility model are described above. It is understood that the utility model is not limited to the above specific embodiments, and the skilled in the art can make various modifications or changes within the scope of claims, which does not affect the essential content of the utility model.
Claims
1. An automatic filling high thermal conductivity temperature probe comprising at least one temperature sensor (3), characterized in that, At least further comprising a shell (4) arranged outside the temperature sensor (3), and a heat-conducting material (2) filled in the shell (4) and in contact with the temperature sensor (3), which in working condition overflows the shell (4) and contacts the measured object (1).
2. The probe of claim 1, wherein, In working condition, the temperature sensor (3) moves towards the measured object (1) and pushes the heat-conducting material (2) out of the shell (4).
3. The probe of claim 1, wherein, A propeller (9) is arranged between the inner periphery of the shell (4) and the temperature sensor (3), which in working condition moves towards the measured object (1) and pushes the heat-conducting material (2) out of the shell (4).
4. The probe of any one of claims 1 to 3, wherein, The shell (4) has a first opening at one end towards the measured object (1).
5. The probe of claim 4, wherein, A protective cover (6) is further arranged outside the first opening.
6. The probe of claim 4, wherein, A wire (5) is further arranged, one end of which is fixedly connected with the temperature sensor (3) and the other end of which extends out of the shell (4).
7. The probe of claim 6, wherein, A sealing plate is arranged at one end of the shell away from the measured object (1), which has a guide hole through which the wire (5) extends into the shell (4) and is connected with the temperature sensor (3).
8. The probe of claim 6, wherein, A spring (8) is further arranged inside the shell (4), which is fixedly connected with the wire (5) and has a snap ring (7) connected outside, which in working condition moves towards the spring (8) or applies pressure to the spring (8), and the spring (8) drives the wire (5) to move.
9. The probe of claim 4, wherein, A micro motor is further arranged inside the shell (4), which is attached to the side of the temperature sensor (3) away from the measured object (1) and pushes the temperature sensor (3) to move towards the measured object (1) when the micro motor works.
10. The probe of claim 9, wherein, The temperature sensor (3) is attached inside the shell (4).
11. The probe of claim 4, wherein, The temperature sensor (3) is any one of the following components: a thermocouple; a thermal resistance; a thermistor; an optical fiber temperature measurement probe; or an electronic temperature measurement chip.
12. The probe of claim 11, wherein, The heat-conducting material (2) is any one of the following materials: a heat-conducting silicone grease; a heat-conducting glue; a heat-conducting resin; graphite powder; high-thermal-conductivity ceramic powder; high-temperature ceramic glue containing heat-conducting components.