Wafer clamp device for wafer cleaning

Abstract

The wafer clamping device comprises a clamping handle, two symmetrically distributed clamping pieces are connected to the two ends of the opening end of the clamping handle respectively, the clamping handle and the clamping pieces are made of stainless steel sheets, a limiting mechanism is arranged on the outer side of the clamping handle in a sleeving mode, a supporting mechanism is installed on the limiting mechanism, and the supporting mechanism is arranged on the clamping handle. An adjusting mechanism is installed on the supporting mechanism, and a protection mechanism is installed on the clamping piece. After the connecting rod is fixed on the supporting mechanism, the side wall of the clamping handle is pressed inwards, the side walls of the two sides of the clamping handle collide with the resistance rod, the resistance rod presses the resistance spring, and the inward pressing resistance of the clamping handle is increased through the elastic force of the resistance spring, so that the effect of adjusting the pressing resistance of the clamping handle is achieved, and a transverse plate can be pushed according to the grip strength of the clamping handle; the distance between the adjusting mechanism and the side walls of the two sides of the clamping handle is adjusted, namely the distance between the side walls of the clamping handle and the resistance rod is adjusted, and the difficulty that the resistance rod obstructs the side walls of the two sides of the clamping handle is adjusted.

Description

Technical Field

[0001] This utility model relates to the field of clamping devices, and in particular to a wafer clamping device for wafer cleaning. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single-crystal silicon. After grinding, polishing, and slicing, the silicon ingot forms a silicon wafer. Domestic wafer production lines mainly use 8-inch and 12-inch wafers. The main wafer processing methods are wafer fabrication and batch processing, which involves processing one or more wafers simultaneously. As semiconductor feature sizes shrink and processing and measurement equipment becomes more advanced, new data characteristics have emerged in wafer processing. Simultaneously, the reduction in feature size increases the impact of airborne particles on the quality and reliability of the processed wafer, and with improved cleanliness, new data characteristics regarding particle count have also emerged.

[0003] Existing wafer clamps are simply clamps made of elastic steel sheets. Because the elastic steel sheets are elastic, they will open outwards. Therefore, when clamping a wafer, a person needs to use at least two fingers to press the clamp inwards from both sides of the clamp to hold the wafer. It is necessary to continuously press the left and right sides of the clamp to ensure that the clamp can continuously hold and fix the wafer. However, some people have strong hands and can easily press the clamp too much, damaging the wafer. Therefore, there is a need for a wafer clamp device for wafer cleaning that can increase the pressing resistance of the clamp to avoid excessive pressing and damage to the wafer. Utility Model Content

[0004] The purpose of this invention is to overcome the defect that the pressing resistance of the clamp cannot be adjusted and to provide a wafer clamp device for wafer cleaning.

[0005] The technical solution to achieve the above objective is: a wafer clamping device for wafer cleaning, including a clamping handle, two symmetrically distributed clamping plates connected to both ends of the open end of the clamping handle, the clamping handle and the clamping plates are both made of stainless steel sheets, a limiting mechanism is sleeved on the outside of the clamping handle, a supporting mechanism is installed on the limiting mechanism, an adjusting mechanism is installed on the supporting mechanism, and a protective mechanism is installed on the clamping plates.

[0006] The adjustment mechanism includes a connecting rod, a cross groove, a resistance rod, a resistance spring, and a screw. Both ends of the connecting rod are provided with cross grooves. A resistance rod is slidably connected in the cross groove. A resistance spring is connected to the side wall of the resistance rod. One end of the resistance spring is connected to one side wall of the cross groove. A screw is movably connected through the side wall of the connecting rod.

[0007] Preferably, a rubber pad is connected to the end of the resistance rod away from the connecting rod.

[0008] Preferably, the limiting mechanism includes a horizontal plate, a limiting screw hole, a sliding groove, and a limiting plate. The sidewalls of the two horizontal plates each have two symmetrically distributed sliding grooves. The two horizontal plates are staggered vertically. The horizontal plates have limiting screw holes. The sidewalls of the limiting plate are slidably connected to the sliding grooves.

[0009] Preferably, the sidewall of the limiting plate is fitted with a rubber sleeve.

[0010] Preferably, the support mechanism includes a support rod, a screw, and a mounting hole. The mounting hole is provided at the center of the side wall of the support rod, and a screw is connected to the end side wall of the support rod. The side wall of the mounting hole is provided with a mounting screw hole. The side wall of the screw is threadedly connected to the mounting screw hole, and the side wall of the screw is threadedly connected to the limiting screw hole.

[0011] Preferably, the protective mechanism includes a protective plate, slots, and a rubber rod. Two symmetrically distributed slots are provided on one side wall of the protective plate. One side wall of the protective plate is connected to one end of the rubber rod, and the other side wall of the protective plate is connected to the other end of the rubber rod.

[0012] Preferably, the protective plate is U-shaped.

[0013] Preferably, an elastic rope is connected to the side wall end of the clamp handle.

[0014] The beneficial effects of this utility model are:

[0015] 1) After fixing the connecting rod to the support mechanism, press the side wall of the clamp handle inward. The two side walls of the clamp handle will touch the resistance rod, and the resistance rod will press the resistance spring. The elastic force of the resistance spring will increase the resistance of pressing the clamp handle inward, thereby achieving the effect of adjusting the pressing resistance of the clamp handle. You can push the horizontal plate according to your own grip strength to adjust the distance between the adjustment mechanism and the two side walls of the clamp handle, that is, adjust the distance between the side wall of the clamp handle and the resistance rod to adjust the difficulty of the resistance rod obstructing the two side walls of the clamp handle.

[0016] 2) First, pass the clamp handle through the square frame composed of two horizontal plates and two limiting plates. Then, screw the screw into the limiting screw hole to fix the support rod between the two horizontal plates. The side wall of the support rod is parallel to the front side wall of the horizontal plate, so that the mounting hole faces the opening of the clamp handle. Insert the connecting rod into the mounting hole and screw the screw into the mounting screw hole to fix the connecting rod on the support rod. This achieves the effect of convenient installation and support adjustment mechanism. When the clamp handle is not in use, insert the clamp piece into the slot. Both clamp pieces on both sides can be inserted into the slot. The clamp piece is wrapped and protected by the protective plate. Utilizing the elasticity of the rubber rod itself, the rubber rod can be bent, which makes it easy to insert the clamp piece into the slot. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model in use;

[0018] Figure 2 This is a schematic diagram of the placement device structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the limiting mechanism structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the support mechanism structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the adjustment mechanism structure of this utility model;

[0022] Figure 6 This is a schematic diagram of the protective mechanism structure of this utility model;

[0023] Figure 7 yes Figure 2 A magnified structural diagram of point A in the middle.

[0024] Icon labels:

[0025] 1. Clamping handle; 2. Clamping plate; 3. Limiting mechanism; 301. Horizontal plate; 302. Limiting screw hole; 303. Slide groove; 304. Limiting plate; 4. Supporting mechanism; 401. Support rod; 402. Screw; 403. Mounting hole; 5. Adjusting mechanism; 501. Connecting rod; 502. Cross groove; 503. Resistance rod; 504. Resistance spring; 505. Screw; 6. Protective mechanism; 601. Protective plate; 602. Slot; 603. Rubber rod; 7. Wafer body; 8. Elastic rope. Detailed Implementation

[0026] The technical solution of this utility model will now be clearly and completely described in conjunction with the accompanying drawings. In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] The present invention will be further described below with reference to the accompanying drawings.

[0028] Reference Appendix Figure 1-7 A wafer clamping device for wafer cleaning includes a clamping handle 1, an elastic rope 8 connected to the side wall end of the clamping handle 1, two symmetrically distributed clamping plates 2 connected to both ends of the open end of the clamping handle 1, the clamping handle 1 and the clamping plates 2 are both made of stainless steel sheets, a limiting mechanism 3 is sleeved on the outside of the clamping handle 1, a support mechanism 4 is installed on the limiting mechanism 3, an adjustment mechanism 5 is installed on the support mechanism 4, and a protective mechanism 6 is installed on the clamping plates 2.

[0029] The adjustment mechanism 5 includes a connecting rod 501, a cross groove 502, a resistance rod 503, a resistance spring 504, and a screw 505. Both ends of the connecting rod 501 are provided with cross grooves 502. The resistance rod 503 is slidably connected in the cross groove 502. The resistance spring 504 is connected to the side wall of the resistance rod 503. One end of the resistance spring 504 is connected to one side wall of the cross groove 502. The screw 505 is movably connected through the side wall of the connecting rod 501. A rubber pad is connected to the end of the resistance rod 503 away from the connecting rod 501.

[0030] After fixing the connecting rod 501 to the support mechanism 4, press the side wall of the clamp handle 1 inward. The two side walls of the clamp handle 1 come into contact with the resistance rod 503. The resistance rod 503 presses the resistance spring 504. The elastic force of the resistance spring 504 is used to increase the resistance of pressing the clamp handle 1 inward, thereby achieving the effect of adjusting the pressing resistance of the clamp handle 1. According to one's own grip strength, the horizontal plate 301 can be pushed to adjust the distance between the adjustment mechanism 5 and the two side walls of the clamp handle 1, that is, to adjust the distance between the side wall of the clamp handle 1 and the resistance rod 503, thereby adjusting the difficulty of the resistance rod 503 in obstructing the two side walls of the clamp handle 1.

[0031] Reference Appendix Figure 3-7 The limiting mechanism 3 includes a horizontal plate 301, a limiting screw hole 302, a sliding groove 303, and a limiting plate 304. The side walls of the two horizontal plates 301 each have two symmetrically distributed sliding grooves 303. The two horizontal plates 301 are staggered vertically. The horizontal plates 301 have limiting screw holes 302. The side walls of the limiting plate 304 are slidably connected to the sliding grooves 303. The side walls of the limiting plate 304 are fitted with rubber sleeves. The support mechanism 4 includes a support rod 401, a screw rod 402, and a mounting hole 403. The center of the side wall of the support rod 401 has a mounting hole 403. The end side wall of the support rod 401 is connected to the screw rod 402. The side wall of the mounting hole 403 has a mounting screw hole. The side wall of the screw 505 is threadedly connected to the mounting screw hole. The side wall of the screw rod 402 is threadedly connected to the limiting screw hole 302.

[0032] First, pass the clamp 1 through the square frame formed by the two horizontal plates 301 and the two limiting plates 304. Then, screw the screw 402 into the limiting screw hole 302 to fix the support rod 401 between the two horizontal plates 301. The side wall of the support rod 401 is parallel to the front side wall of the horizontal plate 301. The mounting hole 403 faces the opening of the clamp 1. Insert the connecting rod 501 into the mounting hole 403 and screw the screw 505 into the mounting screw hole to fix the connecting rod 501 on the support rod 401. This achieves the effect of convenient installation and support adjustment mechanism 5.

[0033] Reference Appendix Figure 2-6 The protective mechanism 6 includes a protective plate 601, a slot 602, and a rubber rod 603. Two symmetrically distributed slots 602 are provided on one side wall of the protective plate 601. One side wall of one protective plate 601 is connected to one end of the rubber rod 603, and the other side wall of the protective plate 601 is connected to the other end of the rubber rod 603. The protective plate 601 is U-shaped.

[0034] When the handle 1 is not in use, insert the clip 2 into the slot 602. Both clips 2 on both sides can be inserted into the slot 602, so that the clips 2 are wrapped and protected by the protective plate 601. Utilizing the elasticity of the rubber rod 603 itself, the rubber rod 603 can be bent, which makes it easy to insert the clip 2 into the slot 602.

[0035] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A wafer clamping device for wafer cleaning, comprising a clamping handle (1), wherein two symmetrically distributed clamping plates (2) are connected to both ends of the open end of the clamping handle (1), and both the clamping handle (1) and the clamping plates (2) are made of stainless steel sheets, characterized in that, A limiting mechanism (3) is sleeved on the outside of the clamp (1), a support mechanism (4) is installed on the limiting mechanism (3), an adjustment mechanism (5) is installed on the support mechanism (4), and a protective mechanism (6) is installed on the clamp (2). The adjustment mechanism (5) includes a connecting rod (501), a cross groove (502), a resistance rod (503), a resistance spring (504), and a screw (505). Both ends of the connecting rod (501) are provided with cross grooves (502). The resistance rod (503) is slidably connected in the cross groove (502). The resistance spring (504) is connected to the side wall of the resistance rod (503). One end of the resistance spring (504) is connected to one side wall of the cross groove (502). The screw (505) is movably connected through the side wall of the connecting rod (501). A rubber pad is connected to the end of the resistance rod (503) away from the connecting rod (501).

2. The wafer clamping device for wafer cleaning according to claim 1, characterized in that, The limiting mechanism (3) includes a horizontal plate (301), a limiting screw hole (302), a sliding groove (303), and a limiting plate (304). The side walls of the two horizontal plates (301) are provided with two symmetrically distributed sliding grooves (303). The two horizontal plates (301) are staggered vertically. The horizontal plates (301) are provided with limiting screw holes (302). The side wall of the limiting plate (304) is slidably connected to the sliding groove (303).

3. A wafer clamping device for wafer cleaning according to claim 2, characterized in that, The side wall of the limiting plate (304) is fitted with a rubber sleeve.

4. A wafer clamping device for wafer cleaning according to claim 2, characterized in that, The support mechanism (4) includes a support rod (401), a screw rod (402), and a mounting hole (403). The mounting hole (403) is provided at the center of the side wall of the support rod (401). The screw rod (402) is connected to the end side wall of the support rod (401). The mounting hole (403) is provided with a mounting screw hole on the side wall. The side wall of the screw (505) is threadedly connected to the mounting screw hole. The side wall of the screw rod (402) is threadedly connected to the limiting screw hole (302).

5. A wafer clamping device for wafer cleaning according to claim 1, characterized in that, The protective mechanism (6) includes a protective plate (601), a slot (602) and a rubber rod (603). Two symmetrically distributed slots (602) are provided on one side wall of the protective plate (601). One side wall of the protective plate (601) is connected to one end of the rubber rod (603), and the other side wall of the protective plate (601) is connected to the other end of the rubber rod (603).

6. A wafer clamping device for wafer cleaning according to claim 5, characterized in that, The protective plate (601) is U-shaped.

7. A wafer clamping device for wafer cleaning according to claim 1, characterized in that, The side wall end of the clamp (1) is connected to an elastic rope (8).

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