Photoresist conveying device and semiconductor processing equipment

Abstract

The utility model provides a photoresist conveying device and semiconductor processing equipment, the photoresist conveying device comprises a photoresist supply bottle, a photoresist conveying pipeline and a fixed seat, the fixed seat is provided with a cavity for accommodating the photoresist supply bottle, and the photoresist supply bottle is fixed in the cavity of the fixed seat; the photoresist conveying pipeline is used for conveying photoresist in the photoresist supply bottle to the photoresist coating device, the photoresist conveying pipeline is provided with a photoresist suction port and a photoresist outlet, the photoresist suction port is located inside the photoresist supply bottle, and the photoresist outlet is located outside the photoresist supply bottle; a marking piece is arranged on the glue conveying pipeline and is close to a glue suction opening of the glue conveying pipeline; a detector for detecting the position of the marking piece is arranged at the bottom of the fixed seat; and the detector is close to the bottommost position of the photoresist supply bottle. According to the photoresist supply bottle, whether the photoresist suction port of the photoresist conveying pipeline is placed at the bottommost part in the photoresist supply bottle can be effectively judged, so that the photoresist residue can be effectively reduced, and the waste of the photoresist is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to a photoresist conveying device and semiconductor processing equipment. BACKGROUND

[0002] Photoresist coating process is an important process in the process of semiconductor silicon wafer manufacturing, and in the photoresist coating process, a photoresist conveying device is needed to convey photoresist to the inside of a machine table, which usually includes a photoresist supply bottle and a photoresist conveying pipeline, in order to ensure that the photoresist in the photoresist supply bottle can be smoothly conveyed to the inside of the machine table, high-pressure nitrogen is usually filled into the photoresist supply bottle to promote the flow of photoresist. In addition, in order not to cause waste of photoresist, one end of the photoresist conveying pipeline needs to be placed at the bottom of the photoresist supply bottle.

[0003] However, the existing photoresist conveying device cannot confirm the position of the photoresist conveying pipeline placed in the photoresist supply bottle, which is easy to cause a large amount of photoresist to remain in the photoresist supply bottle and cause waste of photoresist, resulting in an increase in the cost of manufacturing semiconductor devices, and may also cause environmental pollution in the future.

[0004] It should be noted that the information disclosed in the background art section of the utility model is only intended to deepen the understanding of the general background art of the utility model, and should not be regarded as acknowledging or implying in any form that the information constitutes prior art known to those skilled in the art. CONTENT OF THE UTILITY MODEL

[0005] The utility model aims to provide a photoresist conveying device and semiconductor processing equipment, which can effectively determine whether the suction port of the photoresist conveying pipeline is placed at the bottom of the photoresist supply bottle, thereby effectively reducing the remaining photoresist and avoiding waste of photoresist.

[0006] To achieve the above-mentioned purpose, the utility model provides a photoresist conveying device, which comprises a photoresist supply bottle, a photoresist conveying pipeline and a fixing seat, the fixing seat has a cavity for accommodating the photoresist supply bottle, the photoresist supply bottle is used for storing photoresist, and the photoresist supply bottle is fixed in the cavity of the fixing seat; the photoresist conveying pipeline is used for conveying the photoresist in the photoresist supply bottle to a photoresist coating device, the photoresist conveying pipeline has a suction port and a discharge port, the suction port is located in the inside of the photoresist supply bottle, and the discharge port is located in the outside of the photoresist supply bottle; a marker is arranged on the photoresist conveying pipeline, and the marker is arranged close to the suction port of the photoresist conveying pipeline; a detector is arranged at the bottom of the fixing seat and used for detecting the position of the marker, and the detector is close to the position of the bottom of the photoresist supply bottle.

[0007] Optionally, the material of the glue conveying pipe is Teflon.

[0008] Optionally, the marker is arranged along the circumference of the glue conveying pipe.

[0009] Optionally, the marker is embedded in the pipe wall of the glue conveying pipe.

[0010] Optionally, the material of the marker is stainless steel.

[0011] Optionally, the detector is embedded in the bottom wall of the fixing seat.

[0012] Optionally, the photoresist conveying device further comprises a threaded joint fixedly connected with the glue conveying pipe, the threaded joint is used for being threadedly connected with the bottle mouth of the photoresist supply bottle, and the glue suction port of the glue conveying pipe penetrates through the threaded joint to extend into the interior of the photoresist supply bottle.

[0013] Optionally, the photoresist conveying device further comprises a gas conveying pipe used for inputting gas into the photoresist supply bottle, the gas conveying pipe has a gas inlet and a gas outlet, the gas inlet is used for being connected with a gas source, and the gas outlet is located in the interior of the photoresist supply bottle.

[0014] Optionally, the gas outlet is arranged close to the bottle mouth of the photoresist supply bottle.

[0015] To achieve the above object, the utility model also provides a semiconductor processing equipment, the semiconductor processing equipment includes the photoresist conveying device of any one of the above.

[0016] Compared with the prior art, the photoresist conveying device and the semiconductor processing equipment provided by the utility model have the following beneficial effects:

[0017] The photoresist conveying device provided by the utility model discloses a photoresist supply bottle, a photoresist conveying pipeline and a fixing base, the fixing base has a cavity for accommodating the photoresist supply bottle, the photoresist supply bottle is used for storing photoresist, and the photoresist supply bottle is fixed in the cavity of the fixing base; the photoresist conveying pipeline is used for conveying the photoresist in the photoresist supply bottle to a photoresist coating device, the photoresist conveying pipeline has a photoresist suction port and a photoresist outlet, the photoresist suction port is located in the interior of the photoresist supply bottle, and the photoresist outlet is located in the exterior of the photoresist supply bottle; a marker is arranged on the photoresist conveying pipeline, and the marker is arranged close to the photoresist suction port of the photoresist conveying pipeline; a detector for detecting the position of the marker is arranged at the bottom of the fixing base for fixing the photoresist supply bottle, and the detector is close to the position of the bottommost part of the photoresist supply bottle. Therefore, the marker is arranged close to the photoresist suction port of the photoresist conveying pipeline, and the detector for detecting the position of the marker is arranged at the bottom of the fixing base for fixing the photoresist supply bottle, so that whether the marker is located at the bottommost part in the photoresist supply bottle can be detected through the detector, that is, whether the photoresist suction port of the photoresist conveying pipeline is located at the bottommost part in the photoresist supply bottle can be detected through the detector. It can be seen that whether the photoresist conveying pipeline is placed at the best position (the bottommost part in the photoresist supply bottle) can be effectively judged through the mutually matched detector and marker, so that photoresist residue can be reduced, and the waste of photoresist can be avoided (20cc to 30cc of photoresist can be saved each time, and 20 to 30 times of chip coating can be provided). In addition, the fixing base having the cavity for accommodating the photoresist supply bottle is arranged, the photoresist supply bottle can be fixed through the fixing base, the shaking of the photoresist supply bottle in the conveying process of the photoresist can be effectively prevented, and the stability in the conveying process of the photoresist can be improved. In addition, the detector is arranged at the bottom of the fixing base, the detector can be conveniently placed, and the repeated use of the detector can be ensured. When the photoresist in the photoresist supply bottle fixed in the fixing base is conveyed, only a new photoresist supply bottle for storing photoresist needs to be replaced, so that the operation is more convenient.

[0018] Since the semiconductor processing equipment provided by the utility model has the photoresist conveying device provided by the utility model, the semiconductor processing equipment provided by the utility model has all the beneficial effects of the photoresist conveying device provided by the utility model. The beneficial effects of the semiconductor processing equipment provided by the utility model can be referred to the related description of the beneficial effects of the photoresist conveying device provided by the utility model in the foregoing description, and will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1A structure schematic view of a photoresist conveying device in the prior art;

[0020] Figure 2 A structure schematic view of a photoresist conveying device provided by an embodiment of the present application;

[0021] Figure 3 A sectional view of a photoresist conveying pipeline provided by an embodiment of the present application.

[0022] Among them, the sign explanation is as follows:

[0023] Photoresist supply bottle-100;

[0024] Photoresist conveying pipeline-200; photoresist suction port-210; photoresist outlet-220; sign-230;

[0025] Fixing base-300; cavity-310; detector-320;

[0026] Threaded joint-400;

[0027] Gas conveying pipeline-500; gas inlet-510; gas outlet-520;

[0028] Photoresist-600. DETAILED DESCRIPTION

[0029] The photoresist conveying device and the semiconductor processing equipment according to the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the accompanying drawings are very simplified and all use non-precise proportions, only for the purpose of facilitating and clarifying the purpose of assisting the description of the embodiments of the present application. In order to make the purpose, features and advantages of the present application more apparent and easy to understand, please refer to the accompanying drawings. It should be understood that the structure, proportion, size and the like shown in the drawings of the present application are only used to cooperate with the content disclosed in the specification, so that those skilled in the art can understand and read, and are not used to limit the conditions of the implementation of the present application. Any modification of structure, change of proportion relationship or adjustment of size, as long as it is the same or similar to the effect and purpose that can be achieved by the present application, should still fall within the scope of the technical content disclosed by the present application. The specific design features of the present application disclosed in this paper include, for example, specific dimensions, directions, positions and shapes, which will be determined partly by the specific application and use environment. In addition, in the following description of the embodiments, sometimes the same reference signs are used between different drawings to represent the same parts or parts with the same function, and the repeated description is omitted. In this specification, similar signs and letters are used to represent similar items, so once an item is defined in one drawing, it does not need to be further discussed in the subsequent drawings. In addition, if the method described herein includes a series of steps, and the order of the steps presented herein is not necessarily the only order in which these steps can be performed, and some of the described steps can be omitted and / or some other steps not described herein can be added to the method.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor should they be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. The singular forms “a,” “one,” and “the” include plural objects. The term “or” is generally used to mean “and / or.” The term “several” is generally used to mean “at least one.” The term “at least two” is generally used to mean “two or more.” The term “multiple” is generally used to mean “at least two.”

[0031] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and thus cannot be understood as limiting the utility model. In the description of the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or internal communication of two elements or interaction relationship of two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. In addition, in the utility model, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "upper side" and "upper surface" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "lower", "lower side" and "lower surface" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0032] In order to facilitate understanding, before introducing the utility model, the research background of the utility model is briefly introduced. Please refer to Figure 1 It is a structure schematic view of a photoresist conveying device in the prior art. The existing photoresist conveying device cannot confirm the position of the photoresist conveying pipe 200 placed in the photoresist supply bottle 100, for example Figure 1 As shown, when the suction port 210 of the photoresist conveying pipe 200 is not placed at the bottom of the photoresist supply bottle 100, the photoresist 600 at the bottom of the photoresist supply bottle 100 is easy to be left.

[0033] Based on this, the core idea of the utility model is to provide a photoresist conveying device and a semiconductor processing equipment, which can effectively determine whether the suction port 210 of the photoresist conveying pipe 200 is placed at the bottom of the photoresist supply bottle 100, so as to effectively reduce the photoresist 600 left and avoid waste of the photoresist 600.

[0034] To realize the above idea, the utility model provides a photoresist conveying device, please refer to Figure 2 And Figure 3 Wherein, Figure 2 It is the structure schematic diagram of photoresist conveying device provided by one embodiment of the utility model; Figure 3 It is the section view of glue pipe 200 provided by one embodiment of the utility model. As Figure 2 And Figure 3 The utility model provides a photoresist conveying device, including photoresist supply bottle 100, glue pipe 200 and fixed seat 300, fixed seat 300 has the cavity 310 for accommodating photoresist supply bottle 100, photoresist supply bottle 100 is used to store photoresist 600, photoresist supply bottle 100 is fixed in the cavity 310 of fixed seat 300, glue pipe 200 is used to convey photoresist 600 in photoresist supply bottle 100 to photoresist 600 coating device, glue pipe 200 has glue suction port 210 and glue outlet 220, glue suction port 210 is located in the inside of photoresist supply bottle 100, and glue outlet 220 is located in the outside of photoresist supply bottle 100, be equipped with sign piece 230 on glue pipe 200, sign piece 230 is close to glue suction port 210 of glue pipe 200 and is arranged, the bottom of fixed seat 300 is equipped with detector 320 for detecting the position of sign piece 230, and detector 320 is close to the position of the bottommost part of photoresist supply bottle 100.

[0035] Therefore, this utility model provides a marker 230 near the suction port 210 of the adhesive delivery pipe 200, and a detector 320 for detecting the position of the marker 230 is provided at the bottom of the fixing base 300 for fixing the photoresist supply bottle 100. The detector 320 can detect whether the marker 230 is located at the bottom of the photoresist supply bottle 100, that is, whether the suction port 210 of the adhesive delivery pipe 200 is located at the bottom of the photoresist supply bottle 100. Thus, the detector 320 and marker 230, working in tandem, can effectively determine whether the adhesive delivery pipe 200 is placed in the optimal position, thereby helping to reduce photoresist 600 residue and avoid waste (estimated to save 20cc-30cc of photoresist 600 each time, enough for 20-30 chip coatings). Furthermore, by providing a fixing base 300 with a cavity 310 for accommodating the photoresist supply bottle 100, this invention can effectively fix the photoresist supply bottle 100 during the transport of the photoresist 600, thereby improving the stability of the photoresist 600 during transport. Additionally, by placing the detector 320 at the bottom of the fixing base 300, this invention not only facilitates the placement of the detector 320 but also ensures its reusability. When the photoresist 600 in the photoresist supply bottle 100 fixed within the fixing base 300 is exhausted, only a new photoresist supply bottle 100 containing photoresist 600 needs to be replaced, making operation more convenient.

[0036] Specifically, the detector 320 detects the position of the marker 230 based on the principle of electromagnetic induction. The specific detection principle can be found in relevant content of electromagnetic induction detection, which is well known to those skilled in the art, and will not be elaborated upon here. It should be noted that, as those skilled in the art will understand, this invention does not limit the specific type of photoresist 600 stored in the photoresist supply bottle 100; the photoresist 600 can be liquid photoresist or a high-viscosity colloidal photoresist. It should also be noted that, as those skilled in the art will understand… Figure 2 The mounting bracket 300 is not fully displayed. Figure 2 Part of the fixing base 300 is hidden. The overall shape of the fixing base 300 in this utility model is cylindrical.

[0037] In some exemplary embodiments, the detector 320 is further configured to send an alarm signal when the marker 230 is not detected at the bottom of the photoresist supply bottle 100. Thus, by sending an alarm signal when the marker 230 is not at the bottom of the photoresist supply bottle 100, the operator can be reminded to move the suction port 210 of the photoresist supply conduit 200 to the bottom of the photoresist supply bottle 100 in time.

[0038] In some exemplary embodiments, the photoresist supply conduit 200 is made of Teflon. Since Teflon has a smooth surface, extremely low surface adhesion, extremely small friction coefficient, and high temperature resistance and corrosion resistance, by using a Teflon tube as the photoresist supply conduit 200, not only can the photoresist 600 be effectively prevented from adhering to the wall of the photoresist supply conduit 200 during the delivery of the photoresist 600, but also the photoresist supply conduit 200 can be prevented from being corroded during the delivery of the photoresist 600, thereby improving the delivery effect of the photoresist supply conduit 200. It should be noted that, as those skilled in the art would understand, in other embodiments, the material of the photoresist supply conduit 200 can also be other plastic materials other than Teflon.

[0039] Please continue to refer to Figure 3 As shown in Figure 3 In some exemplary embodiments, the marker 230 is arranged along the circumference of the photoresist supply conduit 200 (i.e., the marker 230 is arranged in a ring shape). Thus, by arranging the marker 230 along the circumference of the photoresist supply conduit 200, when the suction port 210 of the photoresist supply conduit 200 is located at the bottom of the photoresist supply bottle 100, it can be smoothly detected by the detector 320 located below the bottom of the photoresist supply bottle 100.

[0040] Please continue to refer to Figure 3 As shown in Figure 3 In some exemplary embodiments, the marker 230 is embedded in the wall of the photoresist supply conduit 200. Thus, by embedding the marker 230 in the wall of the photoresist supply conduit 200, not only can the space be saved, but also the marker 230 can be effectively prevented from falling off the photoresist supply conduit 200.

[0041] Specifically, a first groove (the shape of the first groove matches the shape of the marker 230) can be arranged at a position near the suction port 210 of the wall of the photoresist supply conduit 200, and the marker 230 can be embedded in the first groove.

[0042] In some exemplary embodiments, the material of the marker 230 is stainless steel. Thus, by providing the marker 230 made of stainless steel on the glue conveying pipe 200, the marker 230 can be effectively prevented from being corroded by the photoresist 600, and the service life of the marker 230 can be effectively prolonged. It should be noted that, as can be understood by those skilled in the art, in other embodiments, the material of the marker 230 can also be other metal materials other than stainless steel.

[0043] It should also be noted that, as can be understood by those skilled in the art, in other embodiments, the marker 230 can also be sleeved on the outer surface of the glue conveying pipe 200.

[0044] Please continue to refer to Figure 2 As shown in Figure 2 In some exemplary embodiments, the probe 320 is embedded in the bottom wall of the fixing seat 300. Thus, by embedding the probe 320 in the bottom wall of the fixing seat 300, not only the internal space of the fixing seat 300 can be saved, but also the probe 320 can be prevented from interfering with the photoresist supply bottle 100, so that the photoresist supply bottle 100 can be more stably placed in the cavity 310 of the fixing seat 300.

[0045] Specifically, a second groove (the shape of the second groove matches the shape of the probe 320) can be provided in the region of the bottom wall of the fixing seat 300 corresponding to the bottommost position of the photoresist supply bottle 100, and the probe 320 can be embedded in the second groove.

[0046] Please continue to refer to Figure 2 As shown in Figure 2 In some exemplary embodiments, the photoresist conveying device further comprises a threaded joint 400 fixedly connected with the glue conveying pipe 200, the threaded joint 400 is used for being threadedly connected with the bottle mouth of the photoresist supply bottle 100, and the glue suction port 210 of the glue conveying pipe 200 penetrates through the threaded joint 400 to extend into the interior of the photoresist supply bottle 100. Thus, by providing the threaded joint 400 threadedly connected with the bottle mouth of the photoresist supply bottle 100, and fixedly connecting the glue conveying pipe 200 with the threaded joint 400, the position of the glue suction port 210 of the glue conveying pipe 200 in the photoresist supply bottle 100 can be adjusted by rotating the threaded joint 400, so that the operation is more convenient.

[0047] Please continue to refer to Figure 2 As shown in Figure 2As shown, in some exemplary embodiments, the photoresist delivery device further includes a gas delivery pipe 500 for inputting gas into the photoresist supply bottle 100. The gas delivery pipe 500 has an inlet 510 and an outlet 520. The inlet 510 is connected to a gas source, and the outlet 520 is located inside the photoresist supply bottle 100. Thus, high-pressure gas supplied by a gas source can be input into the photoresist supply bottle 100 through the gas delivery pipe 500. Under the action of the high-pressure gas, the photoresist 600 in the photoresist supply bottle 100 is forced into the delivery pipe 200, so that the delivery pipe 200 can smoothly deliver the photoresist 600 in the photoresist supply bottle 100 to the photoresist coating apparatus.

[0048] Specifically, the high-pressure gas provided by the gas source can be high-purity nitrogen, which can effectively allow impurities in the gas to come into contact with the photoresist 600, thereby preventing the photoresist 600 from deteriorating.

[0049] It should be noted that, as those skilled in the art will understand, the gas supply pipe 500 is also fixedly connected to the threaded joint 400, and the gas outlet 520 of the gas supply pipe 500 extends into the interior of the threaded joint 400 and communicates with the inner cavity of the photoresist supply bottle 100.

[0050] Please continue to refer to this. Figure 2 ,like Figure 2 As shown, in some exemplary embodiments, the vent 520 is positioned close to the opening of the photoresist supply bottle 100. Therefore, by positioning the vent 520 of the gas delivery pipe 500 close to the opening of the photoresist supply bottle 100, contact between the gas delivery pipe 500 and the photoresist 600 inside the photoresist supply bottle 100 can be effectively prevented.

[0051] To achieve the above-mentioned goals, this utility model also provides a semiconductor processing apparatus, which includes the photoresist delivery device described above. Since the semiconductor processing apparatus provided by this utility model incorporates the photoresist delivery device, it possesses at least all the beneficial effects of the photoresist delivery device. For details regarding the beneficial effects of the semiconductor processing apparatus provided by this utility model, please refer to the relevant descriptions of the beneficial effects of the photoresist delivery device above; further explanation is not provided here.

[0052] It should be noted that, as those skilled in the art will understand, the semiconductor processing equipment may be a photolithography device, which includes not only the photoresist delivery device mentioned above, but also a photoresist coating device, etc.

[0053] Compared with the prior art, the photoresist conveying device and the semiconductor processing equipment have the following beneficial effects:

[0054] The utility model discloses a setting sign piece 230 in the position of the glue pipe 200 close to its suction port 210, and setting the detector 320 for detecting the position of sign piece 230 on the bottom of the fixed seat 300 for fixing photoresist supply bottle 100, so that whether sign piece 230 is located in the bottom of photoresist supply bottle 100 can be detected through detector 320, that is, whether the suction port 210 of glue pipe 200 is located in the bottom of photoresist supply bottle 100 can be detected through detector 320, it is obvious that whether glue pipe 200 is placed in the best position can be judged through the mutual cooperation of detector 320 and sign piece 230, thereby can help reducing photoresist 600 residue, avoiding the waste of photoresist 600 (estimating that 20cc~30cc photoresist 600 can be saved each time, and 20 times~30 times chip coating can be provided). In addition, the utility model discloses setting the fixed seat 300 with the cavity 310 for accommodating photoresist supply bottle 100, the fixed seat 300 can play a certain fixing effect to photoresist supply bottle 100, effectively prevent photoresist supply bottle 100 from shaking in the conveying process of photoresist 600, thereby the stability in the conveying process of photoresist 600 can be improved. In addition, the utility model discloses setting detector 320 on the bottom of fixed seat 300, not only can facilitate the placement of detector 320, but also can guarantee the reuse of detector 320, when the photoresist 600 in photoresist supply bottle 100 fixed in fixed seat 300 is conveyed, only needs to replace the new photoresist supply bottle 100 that stores photoresist 600, thereby more convenient operation.

[0055] In addition, in the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0056] The above description is only a description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way, and any change or modification made by the ordinary skilled in the art according to the above disclosure belongs to the protection scope of the utility model. Obviously, those skilled in the art can make various modifications and changes to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and changes belong to the scope of the utility model and its equivalent technology, the utility model also intends to include these modifications and changes.

Claims

1. A photoresist delivery apparatus, characterized by, The application relates to a photoresist conveying device, which comprises a photoresist supply bottle, a photoresist conveying pipe and a fixing base, the fixing base is provided with a cavity for accommodating the photoresist supply bottle, the photoresist supply bottle is used for storing photoresist, and the photoresist supply bottle is fixed in the cavity of the fixing base. The photoresist conveying pipe is used for conveying the photoresist in the photoresist supply bottle to a photoresist coating device, the photoresist conveying pipe is provided with a suction port and a discharge port, the suction port is located in the interior of the photoresist supply bottle, and the discharge port is located outside the photoresist supply bottle. A mark part is arranged on the photoresist conveying pipe, and the mark part is arranged close to the suction port of the photoresist conveying pipe. A detector is arranged at the bottom of the fixing base and used for detecting the position of the mark part, and the detector is arranged close to the bottommost position of the photoresist supply bottle.

2. The photoresist delivery apparatus of claim 1, wherein The material of the photoresist conveying pipe is Teflon.

3. The photoresist delivery apparatus of claim 1, wherein The mark part is arranged along the circumference of the photoresist conveying pipe.

4. The photoresist delivery apparatus of claim 1, wherein The mark part is embedded in the pipe wall of the photoresist conveying pipe.

5. The photoresist delivery apparatus of claim 1, wherein The material of the mark part is stainless steel.

6. The photoresist delivery apparatus of claim 1, wherein The detector is embedded in the bottom wall of the fixing base.

7. The photoresist delivery apparatus of claim 1, wherein A threaded connector is further arranged in fixed connection with the photoresist conveying pipe, the threaded connector is used for being threadedly connected with the bottle mouth of the photoresist supply bottle, and the suction port of the photoresist conveying pipe penetrates through the threaded connector to extend into the interior of the photoresist supply bottle.

8. The photoresist delivery apparatus of claim 1, wherein A gas conveying pipe is further arranged and used for inputting gas into the photoresist supply bottle, the gas conveying pipe is provided with a gas inlet and a gas outlet, the gas inlet is used for being connected with a gas source, and the gas outlet is located in the interior of the photoresist supply bottle.

9. The photoresist delivery apparatus of claim 8, wherein, The gas outlet is arranged close to the bottle mouth of the photoresist supply bottle.

10. A semiconductor processing apparatus, characterized by comprising: The application further relates to a photoresist conveying device comprising any one of the photoresist conveying devices in claims 1 to 9.

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