Anti-sputtering evaporation boat
By setting up anti-splash shields and melting seats in the evaporation boat, the solid-liquid and liquid-gas conversion of aluminum material is handled in separate areas, which solves the aluminum material sputtering problem and increases the continuous film deposition length.
Patent Information
- Application Number
- CN202422966634.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-03
AI Technical Summary
Existing evaporation boats cannot achieve uniform solid-liquid and liquid-gas conversion of aluminum materials, resulting in aluminum material sputtering and affecting the continuous film deposition length.
An anti-splash cover and a melting seat are set in the evaporation boat to form a heating cavity, separating the melting of solid aluminum and the evaporation of liquid aluminum. The aluminum wire is processed in different areas through the feed hole and liquid flow hole.
This avoids the direct vaporization of aluminum from a solid state, solves the aluminum sputtering problem, and increases the continuous film deposition length.
Smart Images
Figure CN223522641U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to electroplating technical field especially relates to a kind of anti-sputtering evaporation boat. BACKGROUND
[0002] Vacuum evaporation refers to under vacuum condition, using certain heating evaporation mode to evaporate coating film material (or film material) and make it gasify, particle flies to the surface of substrate and condenses into film.The evaporation boat has been widely used in the preparation of existing conductive metal thin film, evaporation boat is a main body rectangular parallelepiped boat-shaped structure, the middle part is recessed, forms the molten pool, the both ends of evaporation boat main body can be clamped and fixed with external electrode.By heating aluminum (one of film material, the most widely used in the preparation of conductive metal thin film) can change the aluminum in molten pool from solid to liquid and then evaporate, that is, in the molten pool, respectively, the change of aluminum from solid to liquid, and the change of aluminum liquid from liquid to gas.
[0003] In the process of realizing the utility model, the inventor finds that there are at least the following problems in the prior art:
[0004] When molten pool is used for solid-liquid conversion and liquid-gas conversion, the conversion process cannot be uniform, it is impossible to completely realize the solid-state aluminum is converted into liquid aluminum and then gasified, so the solid-state aluminum is often directly gasified, because the heating efficiency of solid and liquid is different, the aluminum sputtering is easy to occur, and then the continuous film plating length is limited.Therefore, how to eliminate the problem of aluminum sputtering during evaporation boat evaporation, so as to improve the continuous film plating length, is a problem to be solved. UTILITY MODEL CONTENTS
[0005] The utility model embodiment provides a kind of anti-sputtering evaporation boat to solve the problem of aluminum sputtering during evaporation boat evaporation.
[0006] To achieve the above purpose, the utility model embodiment provides an anti-sputtering evaporation boat, which comprises an evaporation boat body, an anti-sputtering cover and a molten seat, the anti-sputtering cover is a hollow cylindrical structure with an open bottom, the middle part of the evaporation boat body is provided with an evaporation boat molten pool, the molten seat is a boss-shaped structure connected to the middle bottom surface of the evaporation boat molten pool, and the anti-sputtering cover is sleeved outside the molten seat;The top surface of the molten seat and the bottom surface of the top cover of the anti-sputtering cover have a heating cavity;The upper part of the anti-sputtering cover is provided with a feeding hole, the feeding hole penetrates the inside and outside of the anti-sputtering cover, and the diameter of the feeding hole is greater than the diameter of the film aluminum wire;The bottom of the anti-sputtering cover is provided with a liquid flow hole, the liquid flow hole penetrates the inside and outside of the anti-sputtering cover, and the liquid flow hole is connected with the lowest point of the heating cavity.
[0007] Further, the feeding hole is located on the side wall or top cover of the anti-sputtering cover;The number of feeding holes is one or more.
[0008] Further, the material of the melting seat is tungsten, molybdenum, tantalum, graphite, boron nitride or titanium diboride.
[0009] Further, the splash-proof cover is in a cylindrical structure.
[0010] Further, the melting seat is a conical boss with a small top and a large bottom, and a ring-shaped boss is fixedly connected to the inner side wall of the bottom of the splash-proof cover, and the inner side of the ring-shaped boss is in close contact with the outer side of the melting seat.
[0011] Further, the top end of the melting seat is a horizontal plane, and the top end of the melting seat is higher than the top surface of the ring-shaped boss.
[0012] Further, a liquid guide groove is formed in the outer side of the melting seat, the liquid guide groove extends along the generatrix direction of the corresponding cone of the melting seat, and the upper end of the liquid guide groove penetrates the top end of the melting seat.
[0013] Further, the liquid guide groove is a plurality of liquid guide grooves, and the plurality of liquid guide grooves are evenly distributed in the circumferential direction with the axis of the melting seat as the center; the liquid flow hole is a plurality of liquid flow holes, and the plurality of liquid flow holes are evenly distributed in the circumferential direction with the axis of the splash-proof cover as the center.
[0014] Further, the bottom surface of the ring-shaped boss is higher than the liquid flow hole.
[0015] Further, the melting seat is detachably connected to the evaporation boat pool.
[0016] The above technical solution has the following beneficial effects:
[0017] In the technical solution, a special heating cavity is formed by the melting seat and the splash-proof cover, and the temperature in the heating cavity is low due to the far distance from the pool. By setting a suitable height or the material of the melting seat, the temperature in the heating cavity can be adjusted to a temperature range suitable for the melting of solid aluminum material, so that the aluminum wire delivered by the conveying device enters the heating cavity from the feeding hole and melts. Then the molten aluminum liquid is transferred to other areas of the evaporation boat pool through the liquid flow hole, and the evaporation of the aluminum liquid is realized under high temperature, thereby completing the evaporation. Since the melting process from solid to liquid and the evaporation process from liquid to gas are carried out separately in this way, the two areas are not in contact, which avoids the direct conversion of aluminum material from solid to gas and avoids the splash of aluminum material or aluminum liquid commonly existing in the existing evaporation boat. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0019] Figure 1 is a cross-sectional view of a splash-proof evaporation boat according to an embodiment of the present application;
[0020] Figure 2 is Figure 1 is a partial enlarged view of I in the middle;
[0021] Figure 3 is Figure 1 is a cross-sectional view of A-A in the middle;
[0022] Figure 4 is another embodiment of a splash-proof evaporation boat according to an embodiment of the present application;
[0023] Figure 5 is still another embodiment of a splash-proof evaporation boat according to an embodiment of the present application;
[0024] Fig. 10 is a splash-proof evaporation boat body; 11 is an evaporation boat molten pool; 12 is a molten seat; 13 is a liquid guide groove; 20 is a splash-proof cover; 21 is a feeding hole; 22 is a liquid flow hole; 23 is an annular boss; and 24 is an annular groove. DETAILED DESCRIPTION
[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0026] As shown in Figure 1 , Figure 2 embodiments of the present application provide a splash-proof evaporation boat, which comprises an evaporation boat body 10, a splash-proof cover 20 and a molten seat 12. The middle part of the evaporation boat body 10 is provided with an evaporation boat molten pool 11. The splash-proof cover 20 is a hollow columnar body structure with an open bottom. The molten seat 12 is a boss-like structure protruding from the bottom surface of the evaporation boat molten pool 11, and the bottom surface of the molten seat 12 is connected to the middle position of the evaporation boat molten pool 11. The splash-proof cover 20 is sleeved outside the molten seat 12. The top surface of the molten seat 12 and the bottom surface of the top cover of the splash-proof cover 20 have a heating cavity 30 therebetween. The upper part of the splash-proof cover 20 is provided with a feeding hole 21, which penetrates the inner and outer sides of the splash-proof cover 20, and the hole diameter of the feeding hole 21 is greater than the diameter of the film aluminum wire. The bottom part of the splash-proof cover 20 is provided with a liquid flow hole 22, which penetrates the inner and outer sides of the splash-proof cover 20, and the liquid flow hole 22 is in communication with the lowest point of the heating cavity 30.
[0027] To solve the foregoing problems, in the present application, a melting seat 12 and a splash-proof cover 20 are additionally arranged in the middle of the evaporation boat melting pool 11, and a special heating cavity 30 is formed on the top surface of the melting seat 12 and the inner side of the splash-proof cover 20. Since the melting seat 12 has a certain height, the heating cavity 30 is far away from the melting pool, and thus the temperature of the heating cavity 30 is relatively low. By adjusting the height of the melting seat 12, the temperature in the heating cavity 30 can be adjusted to a temperature range suitable for melting the solid aluminum material, so that the film aluminum wire delivered by the conveying device enters the heating cavity 30 through the feeding hole 21 and is melted. That is, the evaporation boat melting pool 11 is divided into two regions, a low-temperature region in the middle and a high-temperature region on the outside. The molten aluminum liquid is transferred to other regions of the evaporation boat melting pool 11 through the liquid flow hole 22, and since the normal setting temperature of the evaporation boat melting pool 11 is a high temperature that satisfies the evaporation of the aluminum liquid, the aluminum liquid in the evaporation boat melting pool 11 begins to evaporate, thereby completing the evaporation deposition. In this process, the conversion of the solid aluminum to the liquid aluminum and the conversion of the liquid aluminum to the gaseous aluminum are carried out separately, and the two regions are not in contact with each other, so that in the evaporation boat melting pool 11, the conversion of the aluminum material (i.e., the film aluminum wire) from the solid state to the gaseous state does not occur, and the problem of aluminum material or aluminum liquid splashing that exists in the existing evaporation boat is avoided.
[0028] Further, as shown in Figure 1 , Figure 5 , the feeding hole 21 can be arranged on the side wall of the splash-proof cover 20 (in a manner shown in Figure 1 , the film aluminum wire is fed in a direction parallel to the length of the evaporation boat body 10, Figure 5 , the film aluminum wire is fed in a direction parallel to the width of the evaporation boat body 10, which can be selected according to the actual needs of the equipment), at this time, the continuous feeding mechanism feeds the film aluminum wire in a horizontal manner, and the film aluminum wire enters the heating cavity 30 through the feeding hole 21; or as shown in Figure 4 , the feeding hole 21 is arranged on the top cover of the splash-proof cover 20, at this time, the continuous feeding mechanism feeds the film aluminum wire in a setting manner from top to bottom, and the film aluminum wire enters the heating cavity 30 through the feeding hole 21; the number of feeding holes 21 can be one or multiple, for example, as shown in Figure 1 , one feeding hole 21 is arranged on each side of the splash-proof cover 20, at this time, bilateral feeding can be realized, and the supply speed of the aluminum liquid is accelerated.
[0029] Further, as mentioned above, by adjusting the height of the melting seat 12, the distance of the heating cavity 30 from the melting pool can be adjusted, and thus the temperature thereof can be adjusted. In addition, the melting seat 12 should be made of the same high-temperature resistant material as the evaporation boat body 10, for example, tungsten, or molybdenum, or tantalum, or graphite, or boron nitride, or titanium diboride.
[0030] Further, in order to facilitate processing, the splash-proof cover 20 is provided in a cylindrical structure, at this time the bottom surface of the molten seat 12 is also a corresponding circle, and the molten seat 12 is a cylinder or a conical structure.
[0031] Further, in order to make the cooperation between the splash-proof cover 20 and the molten seat 12 more closely and firmly, the molten seat 12 is preferably a conical boss with a small upper part and a large lower part, at this time, the inner side wall of the bottom of the splash-proof cover 20 needs to be designed with a corresponding annular boss 23, and the inner side of the annular boss 23 is in close contact with the outer side of the molten seat 12.
[0032] Further, because the temperature of the top surface of the molten seat 12 is controlled more accurately than the temperature of the air in the heating cavity 30, it is preferred that the film aluminum wire is melted after the film aluminum wire is fed into the heating cavity 30 and the front end of the film aluminum wire is in contact with the molten seat 12. For this reason, the top end of the molten seat 12 is designed as a horizontal surface, and the top end of the molten seat 12 is higher than the top surface of the annular boss 23.
[0033] Further, the specific way in which the liquid flow hole 22 communicates with the heating cavity 30 is that a liquid guide groove 13 is formed on the outer side of the molten seat 12, the liquid guide groove 13 extends along the generatrix direction of the corresponding cone of the molten seat 12, and the upper end of the liquid guide groove 13 penetrates the top end of the molten seat 12.
[0034] Further, as shown in Figure 3 in order to improve work efficiency, the liquid guide groove 13 is designed to be multiple, for example, 3, or 4, or 6, etc., and the multiple liquid guide grooves 13 are evenly distributed in the circumferential direction with the axis of the molten seat 12 as the center; at the same time, the liquid flow hole 22 can also be multiple, and the multiple liquid flow holes 22 are evenly distributed in the circumferential direction with the axis of the splash-proof cover 20 as the center.
[0035] Further, the bottom surface of the annular boss 23 is higher than the liquid flow hole 22, at this time, as shown in Figure 2 an annular groove 24 is formed below the annular boss 23, the groove bottom diameter of the annular groove 24 is the same as the inner diameter of the cylinder at the upper part of the splash-proof cover 20 (i.e. the cavity inner diameter of the heating cavity 30), and at the same time, because the liquid flow hole 22 penetrates the side wall of the splash-proof cover 20, the annular groove 24 is in communication with the liquid flow hole 22. At this time, if the angle of the splash-proof cover 20 and the molten seat 12 does not match, causing the liquid flow hole 22 to be unable to directly align with the bottom end of the liquid guide groove 13, the aluminum liquid flowing down along the liquid guide groove 13 can also first collect in the annular groove 24, and then flow out to the outside along the liquid flow hole 22, so that in use, the liquid flow hole 22 and the liquid guide groove 13 do not need to be strictly corresponding in the circumferential direction, and the liquid aluminum can also be smoothly delivered to the high-temperature area in the evaporation boat melt pool 11.
[0036] Further, the melting seat 12 can be integrated with the upper surface of the evaporation boat melting pool 11, but in order to facilitate maintenance or replacement, the melting seat 12 is preferably detachably connected to the evaporation boat melting pool 11, for example, a groove is formed in the middle of the evaporation boat melting pool 11, and the melting seat 12 is clamped and connected with the groove. In addition, the melting seat 12 and the splash-proof cover 20 can be a split structure, or they can form an integrated structure.
[0037] In actual work, a continuous feeding mechanism can be used to transport the film material aluminum wire. The continuous feeding mechanism includes a wire feeding disc and a traction mechanism. The film material aluminum wire is wound and fixed on the wire feeding disc. The traction mechanism includes a traction wheel driven by a motor and a clamping wheel arranged in pairs with the traction wheel. The traction wheel and the clamping wheel jointly clamp the film material aluminum wire in the wheel grooves to guide and pull the film material aluminum wire. Then, the film material aluminum wire is sent into the heating cavity 30 through the feeding hole 21.
[0038] In the above detailed description, various features are combined in a single embodiment for simplicity. This disclosure should not be interpreted as reflecting an intention that the claimed subject matter requires more features than are explicitly stated in each claim. On the contrary, as reflected by the appended claims, the inventive subject matter is intended to cover all modifications of the embodiments, which fall within the scope of the claims. Accordingly, the claims are expressly incorporated herein in their entirety by reference and maintain their scope as that claimed.
[0039] In order for any person skilled in the art to be able to implement or use the present application, the above describes the disclosed embodiments. For those skilled in the art, various modifications of these embodiments are obvious, and the general principles defined herein can also be applied to other embodiments without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure is not limited to the embodiments given herein, but is consistent with the broadest scope of the principles and novel features disclosed in the present application.
[0040] The above detailed description further explains the purpose, technical solutions and beneficial effects of the present application. It should be understood that the above is only a specific embodiment of the present application and is not intended to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A splash guard evaporation boat, characterized by, The evaporation boat body (10) is provided with an evaporation boat molten pool (11) in the middle part, the splash-proof cover (20) is a hollow columnar structure with an open bottom, and the molten seat (12) is a boss structure connected to the middle bottom surface of the evaporation boat molten pool (11); the splash-proof cover (20) is sleeved outside the molten seat (12); The top surface of the molten seat (12) and the bottom surface of the top cover of the splash-proof cover (20) have a heating cavity (30) therebetween; An upper part of the splash-proof cover (20) is provided with a feeding hole (21) penetrating the inner and outer sides of the splash-proof cover (20), and the diameter of the feeding hole (21) is greater than the diameter of the film aluminum wire; A bottom part of the splash-proof cover (20) is provided with a liquid flow hole (22) penetrating the inner and outer sides of the splash-proof cover (20), and the liquid flow hole (22) is connected to the lowest point of the heating cavity (30).
2. The sputter-resistant evaporation boat of claim 1, wherein The feeding hole (21) is located on the side wall or the top cover of the splash-proof cover (20), and the number of the feeding hole (21) is one or more.
3. The splash guard evaporation boat of claim 1 or 2, wherein The material of the molten seat (12) is tungsten, molybdenum, tantalum, graphite, boron nitride or titanium diboride.
4. The sputter-resistant evaporation boat of claim 1 or 2, wherein The splash-proof cover (20) is a cylindrical structure.
5. The sputter-resistant evaporation boat of claim 4, wherein, The molten seat (12) is a conical boss with a small upper part and a large lower part, an inner side wall of the bottom part of the splash-proof cover (20) is fixedly connected with a ring-shaped boss (23), and an inner side surface of the ring-shaped boss (23) is in close contact with an outer side surface of the molten seat (12).
6. The sputter-resistant evaporation boat of claim 5, wherein, A top end of the molten seat (12) is a horizontal surface, and the top end of the molten seat (12) is higher than a top surface of the ring-shaped boss (23).
7. The sputter-resistant evaporation boat of claim 6, wherein An outer side surface of the molten seat (12) is provided with a liquid guide groove (13) extending along the generatrix direction of the corresponding cone of the molten seat (12), and an upper end of the liquid guide groove (13) penetrates the top end of the molten seat (12).
8. The sputter-resistant evaporation boat of claim 7, wherein, The liquid guide groove (13) is a plurality of liquid guide grooves (13) distributed in a circumferential direction around the axis of the molten seat (12), and the liquid flow hole (22) is a plurality of liquid flow holes (22) distributed in a circumferential direction around the axis of the splash-proof cover (20).
9. A sputter shielded evaporation boat according to claim 7 or 8, c h a r a c t e r i z e d in that A bottom surface of the ring-shaped boss (23) is higher than the liquid flow hole (22).
10. The sputter resistant evaporation boat of any one of claims 1, 2, or 5-8, wherein, The molten seat (12) is detachably connected to the evaporation boat molten pool (11).