Evaporation equipment
By improving the structure and component design of the evaporation tank, the problem of aluminum sputtering was solved, enabling continuous delivery and quantitative control of aluminum material, and improving the stability and efficiency of the evaporation process.
Patent Information
- Application Number
- CN202422966637.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-03
AI Technical Summary
In existing vapor deposition equipment, aluminum materials are prone to sputtering during the transition from solid to gaseous state.
An improved evaporation tank structure is adopted, in which aluminum material is first converted into liquid and then enters the high-temperature section for heating and evaporation through the transition section. Combined with specially designed drip holes and cover plates, droplet splashing is avoided, and continuous conveying of aluminum wire is achieved through melting components and traction components.
This effectively avoids the problem of aluminum material sputtering, enables continuous feeding and quantitative control of aluminum material, and improves the stability and efficiency of the vapor deposition process.
Smart Images
Figure CN223522642U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to electroplating technical field especially relates to a kind of evaporation equipment. BACKGROUND
[0002] The composite current collector adopts a three-layer composite structure of "metal-polymer material-metal", and forms a nanoscale metal on the surface of a polymer PET / PP film by vacuum evaporation, magnetron sputtering and other methods, and then deposits and thickens the metal layer to more than 1 μm by electroplating, to replace traditional aluminum foil and copper foil as positive and negative electrode materials of a battery, with advantages of low cost, high safety, long service life and high energy density, and is increasingly widely used in lithium-ion batteries.
[0003] In the prior art, the preparation process of the composite current collector involves an evaporation step, and the corresponding evaporation equipment includes a vacuum cavity, a unwinding assembly, an evaporation equipment and an electromagnetic heating roller and other components. In the evaporation equipment, heating needs to be performed by a heating module, which includes an evaporation tank body and a graphite electrode arranged in the evaporation tank body. The graphite electrode generates heat after being powered on, and is fixed and electrically connected at both ends by conductive clamps, so that the plated material in the evaporation tank is heated to perform evaporation.
[0004] In the process of implementing the utility model, the inventors have found at least the following problems in the prior art:
[0005] In the existing evaporation equipment, aluminum material enters the evaporation tank in a solid state, and then is evaporated directly from a solid state by heating. In the process of changing from a solid state to a gaseous state, aluminum material is prone to sputtering due to the difference in heating efficiency between solid and liquid. Therefore, how to improve the evaporation equipment to eliminate the problem of aluminum material sputtering is a problem to be solved. CONTENT OF THE UTILITY MODEL
[0006] The utility model embodiment provides an evaporation equipment to solve the problem of easy sputtering of aluminum material in the existing evaporation equipment.
[0007] To achieve the above purpose, the utility model embodiment provides an evaporation equipment, which includes an evaporation tank. The evaporation tank includes a tank bottom and a side plate. The horizontal projection of the tank bottom is rectangular, and the side plate is fixedly connected to the four sides of the tank bottom. The evaporation tank includes a high-temperature section and a transition section. In the high-temperature section, the upper surface of the tank bottom is a plane. In the transition section, the upper surface of the tank bottom is an inclined surface, and the lower end of the inclined surface is connected to the plane. The high-temperature section is connected to a first heating assembly, and the transition section is connected to a second heating assembly. The set temperature of the first heating assembly is higher than that of the second heating assembly.
[0008] Further, a cover plate is arranged above the inclined surface, and the cover plate is fixedly connected to the side plate. A drip hole is formed in the cover plate.
[0009] Further, the relationship between the hole diameter D of the droplet hole and the depth H of the droplet hole is H>D.
[0010] Further, the hole diameter of the droplet hole is 0.1mm-10mm; and the depth of the droplet hole is 1mm-30mm.
[0011] Further, the included angle between the inclined surface and the horizontal surface is 30°-75°.
[0012] Further, the evaporation equipment further comprises a melting assembly arranged above the evaporation groove, the melting assembly comprising a melting sleeve, a vertical melting channel being arranged in the melting sleeve, and an electromagnetic induction coil being arranged in the melting channel; the droplet hole is located directly below the melting channel.
[0013] Further, an electron beam gun and an anode base are further arranged in the melting sleeve, the electron beam gun being arranged horizontally, and the emitting end of the electron beam gun and the anode base being arranged on the two sides of the melting channel opposite to each other; the electron beam gun is located below the electromagnetic induction coil.
[0014] Further, the distance between the bottom end of the melting channel and the top surface of the cover plate is 15mm-45mm.
[0015] Further, the evaporation equipment further comprises a traction assembly, a wire feeding disc, and an aluminum wire; the traction assembly comprises a traction wheel and a clamping wheel, the traction wheel being connected with the output shaft end of the traction motor; the end of the aluminum wire is wound on the wire feeding disc, the front end of the aluminum wire is guided into the melting channel from top to bottom after passing through the traction assembly; the aluminum wire is clamped between the rim side surface of the traction wheel and the rim side surface of the clamping wheel by the traction assembly.
[0016] Further, the rim side surface of the traction wheel and the rim side surface of the clamping wheel are both provided with grooves, and the depth of the grooves is less than the radius of the aluminum wire.
[0017] The above technical solution has the following beneficial effects:
[0018] In the technical solution, the aluminum material does not need to be directly evaporated from solid state as in the traditional technology, but the aluminum material in molten state is first input into the transition section arranged in the evaporation groove, then the liquid aluminum material is guided into the high-temperature section through the slope of the transition section, and then the liquid aluminum material in the high-temperature section is heated to be converted into gaseous state for evaporation, thereby avoiding the problem of aluminum material sputtering frequently in the existing operation.
[0019] In addition, the technical solution has the following characteristics:
[0020] In the application, the traction wheel and the clamping wheel are matched to drive the aluminum wire to advance, and the front end of the aluminum wire enters the melting assembly to be heated, so that the continuous conveying of the material is realized. In the liquid drop dripping process, the liquid drop can enter the transition section only through the specially designed drop hole, and the cover plate is arranged above the transition section, so that the splashing of the liquid drop during the dripping can be effectively avoided. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0022] Figure 1 is a sectional view of the evaporation tank in the evaporation equipment according to an embodiment of the present application;
[0023] Figure 2 is a top view of the evaporation tank in the evaporation equipment according to an embodiment of the present application;
[0024] Figure 3 is a schematic view of the feeding structure in the evaporation equipment according to an embodiment of the present application;
[0025] Corresponding reference signs: 10, wire feeding disc; 11, supporting wheel; 12, traction wheel; 13, clamping wheel; 20, melting sleeve; 21, electromagnetic induction coil; 22, melting channel; 23, liquid drop; 24, electron beam gun; 25, anode base; 30, evaporation tank; 31, cover plate; 32, drop hole; 33, inclined surface; 34, plane; 35, side plate. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.
[0027] As Figure 1As shown, the new evaporation device in the present application improves the structure of the evaporation tank 30, which includes a tank bottom and a side plate 35. The horizontal projection of the tank bottom is rectangular, and the side plate 35 is fixedly connected to the four sides of the tank bottom. Different from the existing products, the evaporation tank 30 includes a high-temperature section and a transition section. In the high-temperature section, the upper surface of the tank bottom is a plane 34. In the transition section, the upper surface of the tank bottom is an inclined surface 33, and the lower end of the inclined surface 33 is flush with and connected to the plane 34. The high-temperature section is connected to a first heating assembly, and the transition section is connected to a second heating assembly. The set temperature of the first heating assembly is higher than that of the second heating assembly.
[0028] To solve the above problems, the present application adopts a completely new way. Instead of directly placing solid aluminum material into the evaporation tank 30 and then evaporating the aluminum material from solid to gas by the evaporation tank 30 as in the traditional technology, the present application first delivers liquid aluminum material in a molten state to the transition section of the evaporation tank 30. The transition section is only used to receive liquid material, so it is connected to the second heating assembly with a lower set temperature (a heating assembly of the existing technology can be used, such as a graphite electrode). Then the aluminum material flows into the high-temperature section through the slope of the transition section, and the high-temperature section is connected to the first heating assembly with a higher set temperature, so that the liquid aluminum material can be converted from liquid to gas in the high-temperature section to complete evaporation and deposition. This working method avoids the direct conversion of aluminum material from solid to gas, which can greatly improve or even avoid the problem of aluminum material sputtering.
[0029] Further, as shown in Figure 2 In the technical solution, a cover plate 31 can be arranged above the inclined surface 33. The cover plate 31 is fixedly connected to the side plate 35, and a predetermined gap is left between the bottom surface of the cover plate 31 and the inclined surface 33. A drip hole 32 is formed in the cover plate 31. The simplest working method is to directly pour liquid aluminum in a molten state onto the inclined surface 33 of the transition section. However, this method is difficult to automate and the flow is not easy to control. Therefore, the aluminum material can be converted to liquid first, and then the liquid drops 23 are dropped onto the inclined surface 33, which is easier to realize the quantitative delivery of aluminum material. At this time, the cover plate 31 can prevent the liquid drops 23 from sputtering outside the evaporation tank 30 after dropping onto the inclined surface 33.
[0030] Further, in order to ensure that the liquid drops 23 do not splash during the falling process, the drip hole 32 should have a certain depth. Preferably, the relationship between the hole diameter D of the drip hole 32 and the depth H of the drip hole 32 is designed as follows: H > D. As a more preferred embodiment, the hole diameter of the drip hole 32 is 0.1 mm to 10 mm, and the depth of the drip hole 32 is 1 mm to 30 mm.
[0031] Further, in order to ensure that the liquid aluminum flows smoothly to the high-temperature section, while the size of the device is not too large (the inclination of the slope 33 may increase the overall thickness of the evaporation tank 30), the angle between the slope 33 and the horizontal plane is 30°-75°.
[0032] Further, in order to realize automatic feeding, as shown in Figure 3 As shown, a melting assembly for heating aluminum material (preferably, the raw material is aluminum wire) and converting the aluminum material from solid to liquid can be arranged above the evaporation tank 30, and the melting assembly includes a melting sleeve 20, a vertical melting channel 22 is arranged in the melting sleeve 20, and a spatially helically distributed electromagnetic induction coil 21 is coaxially arranged in the melting channel 22; the droplet hole 32 is located directly below the melting channel 22. The front end of the aluminum wire can be deeply inserted into the melting channel 22 from top to bottom, and then the aluminum wire is heated by the heating component (the electromagnetic induction coil 21) to form a liquid droplet 23, and then the liquid droplet 23 falls into the droplet hole 32 from the bottom outlet of the melting channel 22. In addition, the melting channel 22 is preferably arranged as a straight-up straight-down channel, which can facilitate the smooth entry of the aluminum wire into the melting channel 22, and can avoid the liquid droplet 23 from adhering to the side wall of the melting channel 22 and ensure the smooth falling of the liquid droplet 23.
[0033] Further, more preferably, an electron beam gun 24 and an anode base 25 are arranged in the melting sleeve 20, the electron beam gun 24 is horizontally arranged, the emitting end of the electron beam gun 24 is arranged opposite to the anode base 25 on both sides of the melting channel 22, and the electron beam gun 24 is located below the electromagnetic induction coil. At this time, the electromagnetic induction coil 21 is used for preheating, and the electron beam heating is used as the main melting heating mode. The electron beam gun 24 is an electron generator, and the anode base 25 is in contact with the aluminum wire and is conductive. When working, the anode base 25 becomes a high-voltage positive electrode, so that the electrons generated by the electron beam gun 24 move at high speed towards the anode base 25 and the aluminum wire which are positively charged, thereby heating the aluminum wire.
[0034] Further, the distance between the bottom end of the melting channel 22 and the top surface of the cover plate 31 is 15 mm-45 mm.
[0035] Further, as shown in Figure 3 In order to realize automatic feeding, a feeding structure is also needed, and the feeding structure includes a traction assembly and a wire feeding disc 10. The traction assembly includes a traction wheel 12 and a clamping wheel 13, and the traction wheel 12 is connected with the output shaft end of a traction motor. In working, the end of the aluminum wire is wound on the wire feeding disc 10, the front end of the aluminum wire is deeply inserted into the melting channel 22 from top to bottom after passing through the traction assembly, and the aluminum wire is clamped between the rim side surface of the traction wheel 12 and the rim side surface of the clamping wheel 13.
[0036] Further, by opening a groove with a similar radius to the aluminum wire on the flange side of the traction wheel 12 and the flange side of the clamping wheel 13, the aluminum wire can be placed in the groove to avoid deformation during the conveying process; but at the same time, the depth of the groove should be slightly smaller than the radius of the aluminum wire, otherwise, if the groove is too deep, it is possible that the outer side plate of the traction wheel 12 and the clamping wheel 13 is squeezed, but the aluminum wire is not clamped, at this time, the aluminum wire will slip, out of sync and other situations, which cannot guarantee smooth conveying.
[0037] At the same time, one or more supporting wheels 11 can be provided between the wire feeding disc 10 and the traction assembly, which can support the aluminum wire from below to avoid deformation and affect the conveying of the aluminum wire, and the flange side of the supporting wheel 11 can also be provided with a groove with the same size as the groove on the traction wheel 12.
[0038] In the above detailed description, various features are combined together in a single embodiment to simplify the disclosure. Such disclosure method should not be interpreted as reflecting the intention that the embodiments of the claimed subject matter require more features than those clearly stated in each claim. On the contrary, as reflected in the appended claims, the utility model is in a state of less than all the features of the disclosed single embodiment. Therefore, the appended claims are hereby incorporated into the detailed description, where each claim is separately as a separate preferred embodiment of the utility model.
[0039] In order for any person skilled in the art to be able to implement or use the utility model, the above describes the disclosed embodiments. For those skilled in the art, various modifications of these embodiments are obvious, and the general principles defined herein can also be applied to other embodiments without departing from the spirit and protection scope of the disclosure. Therefore, the disclosure is not limited to the embodiments given herein, but is consistent with the broadest scope of the principles and novel features disclosed in this application.
[0040] The above specific embodiments further explain the purpose, technical solutions and beneficial effects of the utility model. It should be understood that the above is only a specific embodiment of the utility model and is not used to limit the protection scope of the utility model. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.
Claims
1. An evaporation apparatus comprising an evaporation cell, characterized in that The evaporation tank (30) comprises a tank bottom and side plates (35), the horizontal projection of the tank bottom is rectangular, and the side plates (35) are fixedly connected to four sides of the tank bottom; The evaporation tank (30) comprises a high-temperature section and a transition section, the upper surface of the tank bottom is a plane (34) in the high-temperature section, and the upper surface of the tank bottom is an inclined surface (33) in the transition section, and the lower end of the inclined surface (33) is connected with the plane (34); The high-temperature section is connected with a first heating assembly, the transition section is connected with a second heating assembly, and the set temperature of the first heating assembly is higher than that of the second heating assembly.
2. The evaporation apparatus according to claim 1, wherein A cover plate (31) is further arranged above the inclined surface (33), the cover plate (31) is fixedly connected with the side plates (35), and a liquid drop hole (32) penetrating through the cover plate (31) is formed in the cover plate (31).
3. The evaporation apparatus according to claim 2, wherein The relationship between the hole diameter D of the liquid drop hole (32) and the depth H of the liquid drop hole (32) is H>D.
4. The evaporation apparatus according to claim 3, wherein The hole diameter of the liquid drop hole (32) is 0.1mm-10mm, and the depth of the liquid drop hole (32) is 1mm-30mm.
5. The evaporation apparatus according to any one of claims 1 to 4, wherein The included angle between the inclined surface (33) and the horizontal plane is 30°-75°.
6. The evaporation apparatus according to claim 2 or 3, wherein A melting assembly is further arranged above the evaporation tank (30), the melting assembly comprises a melting sleeve (20), a vertical melting channel (22) is formed in the melting sleeve (20), an electromagnetic induction coil (21) is further arranged in the melting channel (22), and the liquid drop hole (32) is located directly below the melting channel (22).
7. The evaporation apparatus according to claim 6, wherein An electron beam gun (24) and an anode base (25) are further arranged in the melting sleeve (20), the electron beam gun (24) is horizontally arranged, the emitting end of the electron beam gun (24) is arranged on the opposite side of the melting channel (22) relative to the anode base (25), and the electron beam gun (24) is located below the electromagnetic induction coil.
8. The evaporation apparatus according to claim 7, wherein The distance between the bottom end of the melting channel (22) and the top surface of the cover plate (31) is 15mm-45mm.
9. The evaporation apparatus according to claim 6, wherein A traction assembly, a wire feeding disc (10) and an aluminum wire are further arranged, the traction assembly comprises a traction wheel (12) and a clamping wheel (13), the traction wheel (12) is connected with the output shaft end of a traction motor, the end of the aluminum wire is wound on the wire feeding disc (10), the front end of the aluminum wire is introduced into the melting channel (22) from top to bottom after passing through the traction assembly, and the aluminum wire is clamped between the rim side of the traction wheel (12) and the rim side of the clamping wheel (13) by the traction assembly.
10. The evaporation apparatus according to claim 9, wherein The rim side of the traction wheel (12) and the rim side of the clamping wheel (13) are both provided with grooves, and the depth of the grooves is smaller than the radius of the aluminum wire.