Vacuum coating equipment

Abstract

The utility model discloses vacuum coating equipment, which belongs to the technical field of vacuum coating and comprises a coating machine body, a vacuumizing mechanism for vacuumizing the inside of the coating machine body is mounted on one side of the coating machine body, and a continuous rotating clamp for quickly clamping and rotating a base material is mounted in the coating machine body. A preheating mechanism for preheating the continuous rotating clamp is mounted in the coating machine body, the continuous rotating clamp comprises a first driving mechanism, a planet carrier mechanism and a quick turnover mechanism, the first driving mechanism is mounted on the upper side of the coating machine body, and the planet carrier mechanism is mounted at the output end of the first driving mechanism. According to the mode, double-sided coating can be realized under the condition that a base material is not disassembled and assembled again, the edge of the base material can be quickly fixed on the overturning plate in all directions, the base material can be overturned at a preset angle during rotation and revolution, and uniform coating of the special-shaped base material is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field, concretely is a kind of vacuum coating equipment. BACKGROUND

[0002] Vacuum coating equipment is a kind of film material deposition in vacuum environment on substrate surface, to change its surface properties and appearance, principle is to provide low pressure or high vacuum environment, the equipment inside is extracted into the vacuum degree required, heating and evaporating coating material, make it form vapor or plasma, these particles fly in vacuum environment without obstruction, finally uniformly deposited on substrate surface, form the film with specific performance.

[0003] The Chinese patent with publication number CN222349110U proposes a PVD vacuum coating equipment, which includes a coating kettle. The main body of the coating kettle is a one-way opening structure at the top end, and the inner side of the coating kettle is fixedly connected with clamping push rods. There are four clamping push rods in total, with each two longitudinally adjacent clamping push rods forming a group. The two groups of clamping push rods are fixedly connected in a linear array on the left and right sides of the inner wall of the coating kettle. The inner sides of the two groups of clamping push rods are both output ends, and the output ends are fixedly connected with clamping plates. Each group of clamping push rods is a synchronous control structure, and the clamping push rods and the clamping plates together form a clamping and limiting structure. The bottom end surface of the coating kettle is fixedly connected with legs. The main body of the leg is a cylindrical structure, and there are three legs in total. The three legs are fixedly connected in a circular array on the bottom end surface of the coating kettle. The bottom end surface of the leg is fixedly connected with a cushion block, and the main body of the cushion block is a cylindrical structure.

[0004] However, the technical solution of this patent has the following problems:

[0005] This patent cannot achieve double-sided coating without disassembling the substrate, cannot quickly fix the edges of the substrate on the turnover plate in all directions, and cannot achieve uniform coating of special-shaped substrates by presetting the angle of rotation during rotation and revolution.

[0006] Therefore, the technical personnel in the art provide a vacuum coating equipment to solve the above problems. UTILITY MODEL CONTENT

[0007] The utility model aims at providing a vacuum coating equipment to solve the problems raised in the background art.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0009] A kind of vacuum coating equipment, including coating machine body, vacuumizing mechanism is installed on one side of coating machine body, the inside of coating machine body is vacuumized, continuous rotating clamp is installed in the inside of coating machine body, substrate is quickly clamped and rotated, preheating mechanism is installed in the inside of coating machine body, and continuous rotating clamp is preheated;

[0010] The continuous rotating clamp includes: first drive mechanism, planetary carrier mechanism and quick turnover mechanism, the first drive mechanism is installed on the upper side of coating machine body, the planetary carrier mechanism is installed on the output end of first drive mechanism, and a plurality of quick turnover mechanisms are installed on the planetary carrier mechanism;

[0011] The planetary carrier mechanism includes: lower fixed frame, extension plate, support cylinder, guide wheel and rotating frame, the lower fixed frame is fixedly installed in the shell of coating machine body, the annular slot is formed in the lower fixed frame, a plurality of extension plates are fixedly installed on the output end of first drive mechanism, the support cylinder is rotatably connected to one end of the extension plate close to the lower fixed frame, the guide wheel is fixedly installed at one end of the support cylinder away from the center of the lower fixed frame, and the guide wheel is located in the annular slot, and the rotating frame is fixedly installed at one end of the support cylinder close to the center of the lower fixed frame;

[0012] The quick turnover mechanism includes: turnover assembly and quick clamping assembly, a plurality of turnover assemblies are distributed on the rotating frame with the center of the rotating frame as the center, the turnover assembly is installed on the rotating frame, and the quick clamping assembly is installed on the turnover assembly.

[0013] Further, the turnover assembly includes: second drive assembly and rotating assembly, the second drive assembly is installed on the rotating frame, and the rotating assembly is installed on the output end of the second drive assembly.

[0014] Further, the second drive assembly includes: second drive motor and main bevel gear, the second drive motor is fixedly installed in the support cylinder, and the main bevel gear is fixedly installed on the output shaft of the second drive motor.

[0015] Further, the rotating assembly includes: turnover plate and auxiliary bevel gear, the turnover plate is circular, a pair of protrusions is symmetrically extended in the diameter direction on the two sides of the turnover plate, an arc-shaped slot is formed in the protrusion, the turnover plate is rotatably connected to the rotating frame by the pivot, the auxiliary bevel gear is fixedly installed on the pivot of the turnover plate, the auxiliary bevel gear and the main bevel gear are meshed with each other, and a stepped hole is formed in the turnover plate.

[0016] Further, the quick clamping assembly includes: limiting assembly and elastic assembly, the limiting assembly is installed in the stepped hole, and the elastic assembly is installed on the protrusion, the limiting assembly includes: pressing frame, the pressing frame is located in the stepped hole, and a plurality of rectangular slots are formed in the pressing frame.

[0017] Further, the elastic assembly comprises a fixing screw, an L-shaped metal spring and a spring, the fixing screw is threadedly connected with the convex of the turnover plate, the L-shaped metal spring is rotatably connected with the fixing screw, the spring is sleeved on the rod of the fixing screw, one end of the spring is close to the head of the fixing screw, and the other end of the spring is close to the L-shaped metal spring.

[0018] Further, the vacuumizing mechanism comprises a low-temperature vacuum pump, a cylinder, a sealing plate and a blind plate, the output end of the low-temperature vacuum pump is fixedly installed on one side of the shell of the coating machine body, the cylinder is fixedly installed on the shell of the coating machine body, the sealing plate is fixedly installed on the output end of the cylinder, the sealing plate is located on the upper side of the output end of the low-temperature vacuum pump, and the blind plate is fixedly installed on one side of the shell of the coating machine body.

[0019] Further, the preheating mechanism comprises a heating lamp and a baffle, a plurality of heating lamps are fixedly installed in the shell of the coating machine body, and the baffle is fixedly installed on the shell of the heating lamp.

[0020] Compared with the prior art, the utility model has the advantages that: 1. the first drive motor output shaft of the continuous rotary clamp rotates and drives the upper rotary frame to rotate, the upper rotary frame drives the extension plate to rotate, the extension plate drives the guide wheel to roll in the annular slot of the lower fixed frame, the guide wheel rotates while moving along the annular slot, the rotary frame rotates while moving along the annular slot, drives the plurality of quick turnover mechanisms on the rotary frame to move, and the substrate rotates and revolves when being coated, so that the substrate is uniformly coated, the second drive motor output shaft of the second drive assembly rotates and drives the main bevel gear to rotate, the main bevel gear drives the auxiliary bevel gear to rotate, the auxiliary bevel gear drives the turnover plate to rotate by 180 degrees, double-sided coating can be realized without disassembling the substrate, the substrate is turned over by a preset angle when rotating and revolving, each surface of the substrate can be uniformly exposed to the film particle flow, and the special-shaped substrate is uniformly coated.

[0021] 2. the substrate is placed in the stepped hole of the turnover plate, the pressing frame of the limiting assembly is placed on the substrate, the edge of the substrate is limited in all directions, the L-shaped metal spring is rotated and pressed in the rectangular slot of the pressing frame, the spring and the L-shaped metal spring continuously press the pressing frame, the pressing frame is limited on the turnover plate, the substrate is fixed on the turnover plate in all directions, and the edge of the substrate is quickly fixed on the turnover plate in all directions. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a structural schematic view of the utility model;

[0023] Figure 2is a front view of the utility model;

[0024] Figure 3 is a plan view;

[0025] Figure 4 is a sectional view along Figure 3 direction A-A;

[0026] Figure 5 is a partial structure schematic view of the continuous rotary clamp of the utility model;

[0027] Figure 6 is a plan view of the partial structure of the continuous rotary clamp of the utility model;

[0028] Figure 7 is a sectional view along Figure 6 direction B-B;

[0029] Figure 8 is a structure schematic view of the rotary frame and the quick overturning mechanism of the utility model;

[0030] Figure 9 is an enlarged view of A; Figure 8

[0031] is an enlarged view of B; Figure 10 Figure 8 is an enlarged view of C.

[0032] Figure 11 Figure 8

[0033] In the figure: 1, film plating machine body; 2, vacuumizing mechanism; 21, low-temperature vacuum pump; 22, air cylinder; 23, sealing plate; 24, blind plate; 3, continuous rotary clamp; 31, first drive motor; 32, upper rotary frame; 33, lower fixed frame; 34, extension plate; 35, support cylinder; 36, guide wheel; 37, rotary frame; 38, annular slot; 39, second drive motor; 310, main bevel gear; 311, overturning plate; 312, auxiliary bevel gear; 313, protrusion; 314, arc-shaped slot; 315, stepped hole; 316, pressing frame; 317, fixed screw; 318, L-shaped metal spring piece; 319, spring; 320, rectangular slot; 321, base material; 4, preheating mechanism; 41, heating lamp; 42, baffle. DETAILED DESCRIPTION

[0034] ​​​Clearly and completely describe the technical scheme in the embodiments of the utility model with reference to the drawings in the embodiments of the utility model, obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the scope of protection of the utility model.

[0035] In the following description, "left", "right", "front", "rear", "upper", "lower" are oriented with the perspective of the front view.

[0036] Embodiment one: in some embodiments, referring to the drawings of the specification Figure 1 - Figure 11 A vacuum coating equipment, including coating machine body 1, one side of the coating machine body 1 is installed with the vacuumizing mechanism 2 that carries out vacuumizing to the inside of the coating machine body 1, the continuous rotating clamp 3 that carries out quick clamping and rotation to the base material 321 is installed in the coating machine body 1, the preheating mechanism 4 that carries out preheating to the continuous rotating clamp 3 is installed in the coating machine body 1.

[0037] As Figure 2 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 The continuous rotating clamp 3 includes: a first drive mechanism, a planet carrier mechanism and a quick turnover mechanism, the first drive mechanism is installed on the upper side of the coating machine body 1, the planet carrier mechanism is installed on the output end of the first drive mechanism, and a plurality of quick turnover mechanisms are installed on the planet carrier mechanism.

[0038] The planet carrier mechanism includes: a lower fixed frame 33, an extension plate 34, a support cylinder 35, a guide wheel 36 and a rotating frame 37, the lower fixed frame 33 is fixedly installed in the shell of the coating machine body 1, an annular slot 38 is formed in the lower fixed frame 33, a plurality of extension plates 34 are fixedly installed on the output end of the first drive mechanism, the support cylinder 35 is rotatably connected to one end of the extension plate 34 close to the lower fixed frame 33, the guide wheel 36 is fixedly installed at one end of the support cylinder 35 away from the center of the lower fixed frame 33, the guide wheel 36 is located in the annular slot 38, and the rotating frame 37 is fixedly installed at one end of the support cylinder 35 close to the center of the lower fixed frame 33.

[0039] The quick turnover mechanism includes: a turnover assembly and a quick clamping assembly, a plurality of turnover assemblies are distributed on the rotating frame 37 in a circular array with the center of the rotating frame 37 as the center, the turnover assembly is installed on the rotating frame 37, and the quick clamping assembly is installed on the turnover assembly.

[0040] The first driving mechanism comprises a first driving motor 31 fixedly installed on the coating machine body 1 housing and an upper rotating frame 32 fixedly installed on an output shaft of the first driving motor 31, and a plurality of extension plates 34 are fixedly installed on the upper rotating frame 32.

[0041] The first driving motor 31 output shaft of the first driving mechanism of the continuous rotating clamp 3 rotates to drive the upper rotating frame 32 to rotate, the upper rotating frame 32 rotates to drive the extension plates 34 to rotate, the extension plates 34 rotate to drive the guide wheels 36 to roll in the annular slot 38 of the lower fixed frame 33, the guide wheels 36 rotate while moving along the annular slot 38, so that the rotating frame 37 rotates while moving along the annular slot 38, drives the plurality of quick turnover mechanisms on the rotating frame 37 to move, which is beneficial to the uniform coating of the substrate 321 on the quick turnover mechanism.

[0042] The substrate 321 is placed on the quick clamping assembly for quick clamping, and the turnover assembly can be turned over to drive the quick clamping assembly to turn over by one hundred and eighty degrees, so that both sides of the substrate 321 can be coated.

[0043] The turnover assembly comprises a second driving assembly and a rotating assembly, the second driving assembly is installed on the rotating frame 37, and the rotating assembly is installed on an output end of the second driving assembly.

[0044] The second driving assembly comprises a second driving motor 39 fixedly installed in the support cylinder 35 and a main bevel gear 310 fixedly installed on an output shaft of the second driving motor 39, and the second driving motor 39 can be provided as a self-locking motor.

[0045] The rotating assembly comprises a turnover plate 311 and a secondary bevel gear 312, the turnover plate 311 is circular, a pair of protrusions 313 are symmetrically extended on both sides of the turnover plate 311 in the diameter direction, an arc-shaped slot 314 is formed in the protrusions 313, the turnover plate 311 is rotationally connected to the rotating frame 37 through a rotating shaft, the secondary bevel gear 312 is fixedly installed on the rotating shaft of the turnover plate 311, the secondary bevel gear 312 and the main bevel gear 310 are meshed with each other, and a stepped hole 315 is formed in the turnover plate 311.

[0046] The output shaft of the second driving motor 39 of the second driving assembly rotates to drive the main bevel gear 310 to rotate, the main bevel gear 310 rotates to drive the secondary bevel gear 312 to rotate, and the secondary bevel gear 312 rotates to drive the turnover plate 311 to rotate by one hundred and eighty degrees, so that double-sided coating can be realized without reassembling the substrate 321.

[0047] In some embodiments, as Figure 1 - Figure 11As a preferred embodiment of the utility model, the quick clamping assembly comprises: a limiting assembly and an elastic assembly, the limiting assembly is installed in the stepped hole 315, the elastic assembly is installed on the protrusion 313, the limiting assembly comprises: a pressing frame 316, the pressing frame 316 is located in the stepped hole 315 and is used for omnibearing limiting the edge of the base material 321 in the stepped hole 315, a plurality of rectangular grooves 320 are formed in the pressing frame 316.

[0048] The elastic assembly comprises: a fixing screw 317, an L-shaped metal spring piece 318 and a spring 319, the fixing screw 317 is threadedly connected on the protrusion 313 of the turnover plate 311, the L-shaped metal spring piece 318 is rotationally connected on the fixing screw 317, the spring 319 is sleeved on the rod portion of the fixing screw 317, one end of the spring 319 is tightly attached to the head portion of the fixing screw 317, the other end of the spring 319 is tightly attached to the L-shaped metal spring piece 318, the arc-shaped groove 314 is used for accommodating the L-shaped metal spring piece 318, and part of the structure of the L-shaped metal spring piece 318 enters the arc-shaped groove 314 when rotating, so that the resistance when the L-shaped metal spring piece 318 rotates is reduced.

[0049] The base material 321 is placed in the stepped hole 315 of the turnover plate 311, the pressing frame 316 of the limiting assembly is placed on the base material 321, the edge of the base material 321 is omnibearing limited, the L-shaped metal spring piece 318 is rotated and pressed in the rectangular groove 320 of the pressing frame 316, the spring 319 and the L-shaped metal spring piece 318 continuously press the pressing frame 316, the pressing frame 316 is limited on the turnover plate 311, so that the base material 321 is omnibearing fixed on the turnover plate 311, and the edge of the base material 321 is omnibearing fixed on the turnover plate 311 quickly.

[0050] As shown in Figure 3 , Figure 4 The vacuumizing mechanism 2 comprises: a low-temperature vacuum pump 21, a cylinder 22, a sealing plate 23 and a blind plate 24, the output end of the low-temperature vacuum pump 21 is fixedly installed on one side of the shell of the coating machine body 1, the cylinder 22 is fixedly installed on the shell of the coating machine body 1, the sealing plate 23 is fixedly installed on the output end of the cylinder 22, the sealing plate 23 is located on the upper side of the output end of the low-temperature vacuum pump 21, and the blind plate 24 is fixedly installed on one side of the shell of the coating machine body 1.

[0051] The low-temperature vacuum pump 21 starts to rapidly vacuumize the inside of the coating machine body 1, the low-temperature vacuum pump 21 is closed, the output end of the cylinder 22 is elongated to drive the sealing plate 23 to move downward, the output end of the low-temperature vacuum pump 21 is sealed, at this time, the inside of the coating machine body 1 is in a vacuum state, the blind plate 24 is opened, through the installation and dismounting of the blind plate 24, visual inspection, fault diagnosis or component replacement of the low-temperature vacuum pump 21, the cylinder 22 and the sealing plate 23 can be realized, the maintenance complexity of the system is significantly reduced, the rapid maintenance and maintenance of the vacuumizing mechanism 2 can be realized, the vacuumizing effect in the equipment is improved, and the coating quality is indirectly improved.

[0052] As shown in Figure 1 , Figure 2 , Figure 4 The preheating mechanism 4 includes heating lamps 41 and baffles 42, a plurality of the heating lamps 41 are fixedly installed in the shell of the coating machine body 1, the heating lamps 41 can be quartz lamps, the quartz lamps can generate infrared radiation, and the heat can be directly radiated to the surface of the heated object, the baffles 42 are fixedly installed on the shell of the heating lamps 41 and are used for blocking part of the gaseous coating particles from passing to the light-emitting area of the quartz lamp, the temperature sensor is fixedly installed in the shell of the coating machine body 1, and the temperature sensor and the heating lamps 41 are electrically connected to the external controller.

[0053] The continuous rotation clamp 3 drives the continuous rotation of the base material 321, the heating lamps 41 of the preheating mechanism 4 are started to uniformly preheat the base material 321, and meanwhile, the temperature sensor and the heating lamps 41 can be controlled by the external controller to maintain the constant temperature in the coating machine body 1.

[0054] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features can be replaced by equivalents; and these modifications or replacements will not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A vacuum coating apparatus comprising a coating machine body (1), characterized in that, The vacuumizing mechanism (2) is installed on one side of the coating machine body (1) to vacuumize the inside of the coating machine body (1), the continuous rotating clamp (3) is installed in the coating machine body (1) to quickly clamp and rotate the substrate (321), and the preheating mechanism (4) is installed in the coating machine body (1) to preheat the continuous rotating clamp (3); The continuous rotating clamp (3) comprises a first driving mechanism, a planet carrier mechanism and a quick overturning mechanism, the first driving mechanism is installed on the upper side of the coating machine body (1), the planet carrier mechanism is installed on the output end of the first driving mechanism, and a plurality of quick overturning mechanisms are installed on the planet carrier mechanism. The planet carrier mechanism comprises a lower fixed frame (33), an extension plate (34), a support cylinder (35), a guide wheel (36) and a rotating frame (37), the lower fixed frame (33) is fixedly installed in the shell of the coating machine body (1), an annular slot (38) is formed in the lower fixed frame (33), a plurality of extension plates (34) are fixedly installed on the output end of the first driving mechanism, the support cylinder (35) is rotatably connected to one end of the extension plate (34) close to the lower fixed frame (33), the guide wheel (36) is fixedly installed at one end of the support cylinder (35) away from the center of the lower fixed frame (33), the guide wheel (36) is located in the annular slot (38), and the rotating frame (37) is fixedly installed at one end of the support cylinder (35) close to the center of the lower fixed frame (33). The quick overturning mechanism comprises a overturning assembly and a quick clamping assembly, a plurality of overturning assemblies are arranged in a circumferential array around the center of the rotating frame (37), the overturning assembly is installed on the rotating frame (37), and the quick clamping assembly is installed on the overturning assembly.

2. The vacuum coating apparatus according to claim 1, wherein The overturning assembly comprises a second driving assembly and a rotating assembly, the second driving assembly is installed on the rotating frame (37), and the rotating assembly is installed on the output end of the second driving assembly.

3. The vacuum coating apparatus according to claim 2, wherein The second driving assembly comprises a second driving motor (39) and a main bevel gear (310), the second driving motor (39) is fixedly installed in the support cylinder (35), and the main bevel gear (310) is fixedly installed on the output shaft of the second driving motor (39).

4. The vacuum coating apparatus according to claim 3, wherein The rotating assembly comprises an overturning plate (311) and a secondary bevel gear (312), the overturning plate (311) is circular, a pair of protrusions (313) are symmetrically extended on the two sides of the overturning plate (311) along the diameter direction, an arc-shaped slot (314) is formed in the protrusion (313), the overturning plate (311) is rotatably connected to the rotating frame (37) through a rotating shaft, the secondary bevel gear (312) is fixedly installed on the rotating shaft of the overturning plate (311), the secondary bevel gear (312) and the main bevel gear (310) are meshed with each other, and a stepped hole (315) is formed in the overturning plate (311).

5. The vacuum coating apparatus according to claim 4, wherein The quick clamping assembly comprises a limiting assembly and an elastic assembly, the limiting assembly is installed in the stepped hole (315), the elastic assembly is installed on the convex (313), the limiting assembly comprises a pressing frame (316), the pressing frame (316) is located in the stepped hole (315), a plurality of rectangular slots (320) are formed in the pressing frame (316).

6. The vacuum coating apparatus according to claim 5, wherein The elastic assembly comprises a fixing screw (317), an L-shaped metal elastic sheet (318) and a spring (319), the fixing screw (317) is threadedly connected with the convex (313) of the turnover plate (311), the L-shaped metal elastic sheet (318) is rotatably connected with the fixing screw (317), the spring (319) is sleeved with the rod portion of the fixing screw (317), one end of the spring (319) is tightly attached to the head portion of the fixing screw (317), and the other end of the spring (319) is tightly attached to the L-shaped metal elastic sheet (318).

7. The vacuum coating apparatus according to claim 6, wherein The vacuumizing mechanism (2) comprises a low-temperature vacuum pump (21), a cylinder (22), a sealing plate (23) and a blind plate (24), the output end of the low-temperature vacuum pump (21) is fixedly installed on one side of the shell of the coating machine body (1), the cylinder (22) is fixedly installed on the shell of the coating machine body (1), the sealing plate (23) is fixedly installed on the output end of the cylinder (22), the sealing plate (23) is located on the upper side of the output end of the low-temperature vacuum pump (21), and the blind plate (24) is fixedly installed on one side of the shell of the coating machine body (1).

8. The vacuum coating apparatus according to claim 7, wherein The preheating mechanism (4) comprises a heating lamp (41) and a baffle (42), a plurality of heating lamps (41) are fixedly installed in the shell of the coating machine body (1), and the baffle (42) is fixedly installed on the shell of the heating lamp (41).

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