Automatic adjusting device for electrode stem of PECVD (plasma enhanced chemical vapor deposition) process main machine table

Abstract

The utility model discloses an automatic adjusting device for a PECVD (Plasma Enhanced Chemical Vapor Deposition) process host station electrode stem, which belongs to the field of manufacturing of solar photovoltaic cells and comprises an electrode stem base, a shaft rod is rotatably connected onto the electrode stem base, the shaft rod is connected with the electrode stem, so that the shaft rod drives the electrode stem to move, one end of the shaft rod is connected with a micro servo motor, and the other end of the shaft rod is connected with a servo motor. The micro servo motor drives the shaft rod to rotate, the micro servo motor is connected with a driver, the driver is connected with a host PLC, and the host PLC sends an electric signal to the driver, so that the driver controls the rotation of the micro servo motor. The driver receives electric signals of the host PLC and feeds the electric signals back to the micro servo motor, the micro servo motor drives the shaft rod to rotate accurately, the shaft rod drives the electrode rod to move, automatic control over the angle of the electrode rod is achieved, the accuracy of the position of the electrode rod during butt joint is guaranteed, and the problems of downtime, high frequency and the like are reduced. And the operation stability of the machine is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of solar photovoltaic cell manufacturing, especially relates to a PECVD process main machine table electrode rod automatic adjusting device. BACKGROUND

[0002] The PECVD process equipment structure is six process furnace pipes in a main machine, each pipe is through the soft landing paddle to put the graphite boat into the furnace pipe, and the tail electrode rod is connected, and the different states of the graphite boat, that is, the full boat state or the empty boat state, cause the different overall weights of the graphite boat, and further cause the different variable types of the soft landing paddle, and finally the electrode rod connection appears the problems of unable to insert the graphite boat electrode hole or deviation, and causes a series of related problems such as machine shutdown and high frequency.

[0003] At present, the electrode rod is adjusted in angle through the base triangular fixing screw, and the electrode rod is frequently impacted when multiple processes are operated, and the angle of the electrode rod needs to be frequently adjusted to ensure that the electrode rod is connected with the graphite boat electrode hole, and if the alarm is not monitored, the machine table productivity is also affected, and batch products are not good.

[0004] Therefore, it is urgent to design a PECVD process main machine table electrode rod automatic adjusting device to solve the above-mentioned problem that the electrode rod needs to be frequently adjusted in angle by manual operation to be connected with the graphite boat electrode hole. UTILITY MODEL CONTENTS

[0005] In order to solve the technical problem that the angle of the electrode rod needs to be frequently adjusted by manual operation when multiple processes are operated in the background art, a PECVD process main machine table electrode rod automatic adjusting device is provided to solve the above-mentioned problems.

[0006] In order to achieve the above-mentioned purposes, the specific technical scheme of the utility model of a PECVD process main machine table electrode rod automatic adjusting device is as follows:

[0007] A PECVD process main machine table electrode rod automatic adjusting device, including electrode rod base, the rotation is connected with the axle rod on the electrode rod base, the axle rod is connected with the electrode rod, so that the axle rod drives the electrode rod to move, one end of the axle rod is connected with the micro servo motor, the micro servo motor drives the rotation of the axle rod, the micro servo motor is connected with the driver, the driver is connected with the main machine PLC, the main machine PLC sends the electric signal to the driver, and the rotation of the micro servo motor is controlled by the driver.

[0008] Further, the micro servo motor and the axle rod are connected through the shaft coupling.

[0009] Further, the electrode rod base is provided with a rotating hole, and the opposite ends of the axle rod are provided with rotating columns, and the rotating columns are rotationally connected with the rotating hole.

[0010] Further, the rotating column of the shaft rod near the end of the shaft is fixedly connected with a limiting column, and the limiting column is connected with the shaft, so that the micro servo motor drives the shaft to rotate synchronously through the shaft.

[0011] Further, the shaft rod is vertically arranged with the electrode rod, so that the electrode rod swings around the shaft rod when the shaft rod rotates.

[0012] Further, a screw hole is formed in the shaft rod, and a threaded section is formed in the electrode rod, and the threaded section is screwed with the screw hole, so that the shaft rod is connected with the electrode rod.

[0013] Further, a vertical hole is formed in the electrode rod base for swinging of the electrode rod.

[0014] Further, the driver is installed on the electrode rod base.

[0015] The PECVD process main machine table electrode rod automatic adjusting device has the following advantages:

[0016] The utility model discloses a PECVD process main machine table electrode rod automatic adjusting device, which comprises a shaft, a micro servo motor, a shaft rod, a limiting column and an electrode rod.

[0017] The utility model discloses a PECVD process main machine table electrode rod automatic adjusting device, which comprises a shaft, a micro servo motor, a shaft rod, a limiting column and an electrode rod. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the PECVD process main machine table electrode rod automatic adjusting device structure schematic drawing of the utility model.

[0019] Figure 2 It is the internal structure schematic drawing of the utility model.

[0020] Figure 3 It is the shaft rod structure schematic drawing of the utility model.

[0021] Figure 4 It is the electrode rod base structure schematic drawing of the utility model.

[0022] Figure 5The utility model discloses a PECVD process mainframe electrode rod automatic adjusting device.

[0023] Marked explanation in the drawing: 1, electrode rod base; 101, rotation hole; 102, vertical hole; 2, shaft; 201, rotation column; 202, limit post; 203, screw hole; 3, electrode rod; 301, threaded section; 4, micro servo motor; 5, driver; 6, shaft coupling; 7, limit block. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantage of the utility model embodiment more clear, the technical scheme in the utility model embodiment will be described clearly and completely below in conjunction with the drawings in the utility model embodiment, and obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the skilled in the art without creative labor are within the protection scope of the utility model.

[0025] The skilled in the art can understand that although some embodiments include certain features in other embodiments instead of other features, the combination of the features of different embodiments means to be within the scope of the utility model and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0026] The following will refer to the drawings Figure 1 to the drawings Figure 5 The utility model discloses a PECVD process mainframe electrode rod automatic adjusting device.

[0027] The existing electrode rod 3 is adjusted in angle through base triangle fixing screw, and when multiple processes run, the electrode rod 3 needs to be adjusted in angle frequently manually to be connected with graphite boat electrode hole, and the artificial workload is big.

[0028] Therefore, the utility model provides a kind of PECVD process mainframe electrode rod automatic adjusting device, as Figure 1 And Figure 2As shown, the electrode rod base 1 is provided with a shaft rod 2 rotatably connected thereto, and the shaft rod 2 is connected with an electrode rod 3 so that the shaft rod 2 drives the electrode rod 3 to move. One end of the shaft rod 2 is connected with a micro servo motor 4, the micro servo motor 4 drives the shaft rod 2 to rotate, and the micro servo motor 4 is connected with a driver 5, and the driver 5 is connected with a host PLC. The host PLC sends an electric signal to the driver 5 to control the rotation of the micro servo motor 4. Specifically, the host table full boat and empty boat running processes are different. When different processes are running, the host PLC receives different signals, and the host PLC feeds back an electric signal to the driver 5. The driver 5 drives the micro servo motor 4 to rotate according to the different electric signals received. The micro servo motor 4 drives the shaft rod 2 to rotate, and the shaft rod 2 drives the electrode rod 3 to move, thereby achieving the purpose of automatically adjusting the angle of the electrode rod 3, and further enabling the electrode rod 3 to accurately align with the electrode hole of the graphite boat.

[0029] As preferred, the micro servo motor 4 and the shaft rod 2 are connected through a shaft coupling 6, so that the shaft rod 2 and the micro servo motor 4 rotate synchronously, thereby ensuring the accuracy of the rotation of the shaft rod 2 and ensuring that the electrode rod 3 accurately aligns with the electrode hole of the graphite boat.

[0030] As preferred, as shown in Figure 3 and Figure 4 , a rotating hole 101 is formed in the electrode rod base 1, and opposite ends of the shaft rod 2 are provided with rotating columns 201 rotatably connected with the rotating hole 101, so that the electrode rod base 1 and the shaft rod 2 are rotatably connected.

[0031] As preferred, as shown in Figure 5 , a limiting block 7 is installed at the rotating hole 101 to limit the axial displacement of the shaft rod 2, thereby avoiding the movement of the shaft rod 2 in the axial direction causing the electrode rod 3 to be misaligned.

[0032] As preferred, as shown in Figure 3 , the rotating column 201 at one end of the shaft rod 2 close to the shaft coupling 6 is fixedly connected with a limiting column 202, and the limiting column 202 is connected with the shaft coupling 6, so that the micro servo motor 4 drives the shaft rod 2 to rotate synchronously through the shaft coupling 6.

[0033] As preferred, the shaft rod 2 and the electrode rod 3 are arranged perpendicularly, so that when the shaft rod 2 rotates, the electrode rod 3 swings around the shaft rod 2. Specifically, the shaft rod 2 rotates clockwise or counterclockwise, driving the electrode rod 3 to swing upward or downward to adjust the angle of the electrode rod 3.

[0034] As preferred, as shown in Figure 2 and Figure 3As shown, the shaft rod 2 is provided with a threaded hole 203, and the electrode rod 3 is provided with a threaded segment 301, the threaded segment 301 is screwed with the threaded hole 203, so that the shaft rod 2 is connected with the electrode rod 3, and the threaded connection facilitates the assembly and maintenance replacement of the electrode rod 3 and the shaft rod 2.

[0035] As preferred, the electrode rod 3 is provided with a threaded segment 301, the threaded segment 301 is screwed with the threaded hole 203 of the shaft rod 2, so that the shaft rod 2 is connected with the electrode rod 3. Figure 4 As shown, the electrode rod base 1 is provided with a vertical hole 102 for the swing of the electrode rod 3, so as to provide swing space for the angle adjustment of the electrode rod 3.

[0036] As preferred, the driver 5 is installed on the electrode rod base 1, so as to improve the integration of the device and improve the space utilization.

[0037] The assembly steps of the utility model are as follows:

[0038] S1, the electrode rod 3 is screwed to the shaft rod 2;

[0039] S2, the shaft rod 2 is installed on the electrode rod base 1;

[0040] S3, the micro servo motor 4 is connected with the shaft rod 2 through the shaft coupling 6;

[0041] S4, the micro servo motor 4 is connected with the driver 5, and the driver 5 is connected with the main machine table power supply and the main machine PLC.

[0042] The operation principle of the utility model is as follows: the main machine table full boat and empty boat operation processes are different, the main machine PLC receives different electric signals when the furnace tube runs different processes, the main machine PLC feeds back the electric signals to the driver 5, the driver 5 drives the micro servo motor 4 to rotate through accepting different electric signals, the micro servo motor 4 rotates and makes the electrode rod 3 move to the low position parameter position when the furnace tube runs the full boat process, the micro servo motor 4 rotates and makes the electrode rod 3 move to the high position parameter position when the furnace tube runs the empty boat process, so that the electrode rod 3 accurately aligns with the graphite boat electrode hole.

[0043] The utility model receives the main machine PLC electric signal through the driver 5, feeds back the electric signal to the micro servo motor 4, and the micro servo motor 4 drives the shaft rod 2 to rotate accurately, the shaft rod 2 drives the electrode rod 3 to move, realizes the automatic control of the angle of the electrode rod 3, guarantees the accuracy of the position of the electrode rod 3 when butting, reduces the occurrence of problems such as downtime and high frequency, improves the stability of the machine table operation, the micro servo motor 4 rotates positively when the furnace tube runs the full boat process, the electrode rod 3 swings to the low position, on the contrary, the micro servo motor 4 reverses when the furnace tube runs the empty boat process, the electrode rod 3 swings to the high position, the process does not need to stop and manually adjust, reduces the artificial workload, improves the stability of the machine table operation, prevents the batch products from being bad, realizes the high intelligence of the machine table.

[0044] The utility model discloses can effectively solve the problem of affecting machine table productivity and product yield rate caused by the graphite boat weight problem butt joint failure, effectively improve machine table actual on -line rate and product yield rate, improve production efficiency, have higher practical value and extensive application prospect.

[0045] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, other different forms of changes or changes can be made on the basis of the above description. Here, all the embodiments are not exhausted. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A PECVD process main station electrode rod automatic adjustment device, characterized in that, The electrode rod base is provided with a shaft rod rotatably connected thereto, the shaft rod is connected with the electrode rod so that the shaft rod drives the electrode rod to move, one end of the shaft rod is connected with a micro servo motor, the micro servo motor drives the shaft rod to rotate, the micro servo motor is connected with a driver, the driver is connected with a host PLC, the host PLC sends an electric signal to the driver to control the rotation of the micro servo motor.

2. The PECVD process main station electrode rod automatic adjustment apparatus according to claim 1, wherein, The micro servo motor and the shaft rod are connected through a coupling.

3. The PECVD process main station electrode rod automatic adjustment apparatus of claim 2, wherein, The electrode rod base is provided with a rotating hole, and the opposite ends of the shaft rod are provided with rotating columns rotatably connected with the rotating hole.

4. The PECVD process main station electrode rod automatic adjustment apparatus of claim 3, wherein, The rotating column at one end of the shaft rod close to the coupling is fixedly connected with a limiting column connected with the coupling, so that the micro servo motor drives the shaft rod to rotate synchronously through the coupling.

5. The PECVD process main station electrode rod automatic adjustment apparatus of claim 1, wherein, The shaft rod is arranged perpendicularly to the electrode rod, so that the electrode rod swings around the shaft rod when the shaft rod rotates.

6. The PECVD process main station electrode rod automatic adjustment apparatus of claim 5, wherein, The shaft rod is provided with a screw hole, and the electrode rod is provided with a threaded section, the threaded section is screwed with the screw hole, so that the shaft rod is connected with the electrode rod.

7. The PECVD process main station electrode rod automatic adjustment apparatus of claim 1, wherein, The electrode rod base is provided with a vertical hole for the swing of the electrode rod.

8. The PECVD process main station electrode rod automatic adjustment apparatus of claim 1, wherein, The driver is installed on the electrode rod base.

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