Vacuum gate valve

Abstract

The vacuum gate valve comprises a shell, a first valve body, a second valve body, a valve element, an air cylinder and a piston rod, the first valve body and the second valve body are oppositely arranged on the side wall of the shell, the valve element is arranged between the first valve body and the second valve body, the air cylinder is arranged at one end of the valve body, and the piston rod is arranged at the other end of the valve body. One end of the piston rod is connected with the valve element, and the other end of the piston rod is connected with the air cylinder. According to the vacuum gate valve, the piston rod is driven by the air cylinder to be connected with the valve element to move so as to control the whole gate valve to be opened and closed, a guide pulley is not needed, the whole valve element is made of stainless steel, the requirements for high temperature and corrosion resistance are met, and the vacuum gate valve can be applied to a corrosive environment and form a vacuum environment under high-temperature baking.

Description

TECHNICAL FIELD

[0001] The utility model belongs to valve technical field, and specifically relates to a vacuum flashboard valve. BACKGROUND

[0002] In the coating film, namely semiconductor technology, corrosion medium is often encountered, and ultrahigh vacuum environment needs to be obtained, and the valve body needs to be baked, which needs that the valve body and the valve core can resist high temperature and corrosion.

[0003] The existing technology needs additional guide pulleys to guide and slide, not only occupies more space, and the corrosion resistance and high temperature resistance of the guide pulley are insufficient, and the demand cannot be met. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims at providing a vacuum flashboard valve, and solves the problem that the flashboard valve needs additional guide pulleys to guide and slide in the related technology.

[0005] Therefore, the utility model provides a vacuum flashboard valve, which comprises an outer shell, a first valve body, a second valve body, a valve core, a cylinder and a piston rod, the first valve body and the second valve body are oppositely arranged on the side wall of the outer shell, the valve core is arranged between the first valve body and the second valve body, the cylinder is at one end of the valve body, one end of the piston rod is connected with the valve core, and the other end is connected with the cylinder.

[0006] Preferably, the two sides of the valve core are respectively provided with first spring sheets and second spring sheets, the two ends of the first spring sheets and the second spring sheets are provided with fixed blocks, and the first spring sheets and the second spring sheets are fixedly connected with the fixed blocks.

[0007] Preferably, a plurality of steel ball cavities are arranged in the valve core, and a steel ball is arranged in each steel ball cavity.

[0008] Preferably, a supporting plate is arranged on one side of the valve core, and a sealing plate is arranged on the other side, the supporting plate is arranged on the side close to the first valve body, and the sealing plate is arranged on the side close to the second valve body.

[0009] Preferably, steel ball grooves are arranged on the supporting plate and the sealing plate, and the steel ball grooves are matched with the steel balls.

[0010] Preferably, the center of the first spring sheet is fixedly connected with the supporting plate, and the center of the second spring sheet is fixedly connected with the sealing plate.

[0011] Preferably, a bellows is sleeved on the outer side of the piston rod.

[0012] Preferably, a connecting support rod is arranged at one end of the valve core.

[0013] Preferably, one end of the piston rod is provided with a connecting block, and the connecting branch rod is inserted into the connecting block, and the connecting branch rod is fixedly connected with the connecting block through two fixing bolts.

[0014] Preferably, the piston rod is connected with the shell through a sliding bearing.

[0015] Advantages:

[0016] 1. The utility model provides a vacuum plug valve, moves control opening and closing of the whole through the cylinder drive piston rod connection valve element, does not need to use the guide pulley, and the valve element whole material adopts stainless steel, satisfies the demand of high temperature and corrosion resistance, can be applied in the corrosion environment and forms the vacuum environment under the high temperature baking.

[0017] 2. The steel ball, the supporting plate and the sealing plate and the first spring piece and the second spring piece cooperate, so that the valve element moves between the supporting plate and the sealing plate, and the sealing property of the supporting plate and the sealing plate and the first valve body and the second valve body is ensured.

[0018] 3. The connecting branch rod in the application is fixedly connected with the connecting block through two fixing bolts, prevents the valve element from rotating relative to the connecting block, and maintains the stability of connection and movement. DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0020] Figure 1 It is the structure schematic view of the embodiment 1 of the vacuum plug valve provided by the utility model.

[0021] Figure 2 It is the sectional view of the embodiment 1 of the vacuum plug valve provided by the utility model.

[0022] Figure 3 It is the valve element structure schematic view of the embodiment 1 of the vacuum plug valve provided by the utility model.

[0023] Figure 4 It is the steel ball position sectional view of the embodiment 1 of the vacuum plug valve provided by the utility model.

[0024] In the figure, 1 - shell, 2 - first valve body, 3 - second valve body, 4 - valve core, 41 - first spring piece, 42 - second spring piece, 43 - fixed block, 44 - steel ball hole, 45 - connecting branch, 5 - cylinder, 6 - piston rod, 61 - bellow, 62 - connecting block, 7 - sealing plate, 71 - steel ball groove, 8 - support plate, 9 - steel ball, 10 - sliding bearing. DETAILED DESCRIPTION

[0025] The content of the present application can be more easily understood by the following detailed description of the preferred embodiments of the present application and the examples included. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. When there is a conflict between the definitions in the specification and the meaning that is commonly used, the definition in the specification applies.

[0026] Example 1:

[0027] Provided is a vacuum plug valve as shown in Figures 1-4 The vacuum plug valve includes a shell 1, a first valve body 2, a second valve body 3, a valve core 4, a cylinder 5, and a piston rod 6. The first valve body 2 and the second valve body 3 are oppositely arranged on the side wall of the shell 1. The valve core 4 is arranged between the first valve body 2 and the second valve body 3. The cylinder 5 is arranged at one end of the valve body. One end of the piston rod 6 is connected to the valve core 4, and the other end is connected to the cylinder 5.

[0028] The first spring piece 41 and the second spring piece 42 are arranged on the two sides of the valve core 4. The two ends of the first spring piece 41 and the second spring piece 42 are provided with a fixed block 43. The first spring piece 41 and the second spring piece 42 are fixedly connected to the fixed block 43 by bolts. The support plate 8 is arranged on one side of the valve core 4, and the sealing plate 7 is arranged on the other side. The support plate 8 is arranged on the side close to the first valve body 2, and the sealing plate 7 is arranged on the side close to the second valve body 3. The center of the first spring piece 41 is fixedly connected to the support plate 8, and the center of the second spring piece 42 is fixedly connected to the sealing plate 7.

[0029] Valve core 4 is provided with several steel ball holes 44, and steel ball 9 is arranged in the steel ball holes 44. Support plate 8 and sealing plate 7 are provided with steel ball grooves 71, which are matched with steel ball 9. Steel ball groove 71 is deep enough to accommodate the part of steel ball 9 protruding from valve core 4. When steel ball 9 is in steel ball groove 71, steel ball 9 will not generate support force on support plate 8 or sealing plate 7. First spring sheet 41 and second spring sheet 42 make support plate 8 and sealing plate 7 move, and a gap is left between support plate 8 and first valve body 2 and between sealing plate 7 and second valve body 3, so that the valve is not sealed. When piston rod 6 pushes valve core 4 to move, steel ball 9 moves out of steel ball groove 71, and steel ball 9 generates support force on support plate 8 and sealing plate 7, so that support plate 8 is tightly attached to first valve body 2, and sealing plate 7 is tightly attached to second valve plate, thereby realizing sealing. An annular groove is arranged on the sealing plate, and a sealing ring (not shown in the figure) is placed in the groove. The sealing ring is used to enhance the sealing property of the sealing plate.

[0030] Piston rod 6 is sleeved with a bellows 61 on the outside. One end of valve core 4 is provided with a connecting branch 45. One end of piston rod 6 is provided with a connecting block 62, and connecting branch 45 is inserted into connecting block 62. Connecting branch 45 and connecting block 62 are fixedly connected through two fixing bolts. Piston rod 6 is connected with shell 1 through a sliding bearing 10. Sliding bearing 10 plays a guiding role for the movement of piston rod 6. Connecting branch 45 and connecting block 62 are fixedly connected through two fixing bolts, which prevents valve core 4 from rotating relative to connecting block 62, and maintains the stability of connection and movement. An air vent is arranged at the connection between bellows 61 and shell 1, which is used for air exchange when bellows 61 is elongated or contracted.

[0031] The material of the main body and valve core 4 is stainless steel, and the preferred model is 316L. The sealing material is polyether ether ketone. The baking temperature of the vacuum plug valve can reach 300℃, the working temperature can reach 260℃, and it can be applied in a corrosive environment.

[0032] Working principle: Cylinder 5 drives valve core 4 to move linearly. When steel ball 9 is in steel ball groove 71, steel ball 9 will not generate support force on support plate 8 or sealing plate 7, and a gap is left between support plate 8 and first valve body 2 and between sealing plate 7 and second valve body 3, so that the valve is not sealed. With the movement of valve core 4, fixed block 43 is attached to one end of shell 1, and fixed block 43 stops moving but valve core 4 continues to move forward. First spring sheet 41 and second spring sheet 42 are compressed under force, so that support plate 8 and sealing plate 7 move away from valve core 4. At the same time, steel ball 9 moves out of steel ball groove 71 and rolls on the surface of support plate 8 or sealing plate 7. Steel ball 9 generates support force on support plate 8 and sealing plate 7, so that support plate 8 is tightly attached to first valve body 2, and sealing plate 7 is tightly attached to second valve plate, thereby realizing sealing.

[0033] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for part or all of the technical features. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A vacuum plug valve, characterized in that Include: The shell, first valve body, second valve body, valve core, cylinder and piston rod, the first valve body and the second valve body are oppositely arranged on the side wall of the shell, the valve core is arranged between the first valve body and the second valve body, the cylinder is at one end of the valve body, one end of the piston rod is connected with the valve core, and the other end is connected with the cylinder.

2. A vacuum plug valve according to claim 1, wherein The two sides of the valve core are respectively provided with first spring sheet and second spring sheet, and the two ends of the first spring sheet and the second spring sheet are provided with fixed blocks, and the first spring sheet and the second spring sheet are fixedly connected with the fixed blocks.

3. A vacuum plug valve according to claim 2, wherein A plurality of steel ball cavities are arranged in the valve core, and a steel ball is arranged in each steel ball cavity.

4. A vacuum plug valve according to claim 3, wherein One side of the valve core is provided with a support plate, and the other side is provided with a sealing plate, the support plate is close to one side of the first valve body, and the sealing plate is close to one side of the second valve body.

5. A vacuum plug valve according to claim 4, wherein Steel ball grooves are arranged on the support plate and the sealing plate, and the steel ball grooves are matched with the steel balls.

6. A vacuum plug valve according to claim 2, wherein The center of the first spring sheet is fixedly connected with the support plate, and the center of the second spring sheet is fixedly connected with the sealing plate.

7. A vacuum plug valve according to claim 1, wherein The outer side of the piston rod is sleeved with a bellows.

8. A vacuum plug valve according to claim 7, wherein One end of the valve core is provided with a connecting branch.

9. A vacuum plug valve according to claim 8, wherein One end of the piston rod is provided with a connecting block, and the connecting branch is inserted into the connecting block.

10. A vacuum plug valve according to claim 7, wherein The connecting branch and the connecting block are fixedly connected through two fixing bolts. The piston rod and the shell are connected through a sliding bearing.

Images