Mask pre-alignment device

Abstract

The utility model provides a mask pre-alignment device which comprises a supporting frame and a supporting plate, the supporting frame is provided with a driving assembly, a first limiting assembly and a second limiting assembly, the first limiting assembly and the second limiting assembly are in transmission connection with the driving assembly, and the driving assembly alternately or simultaneously drives the first limiting assembly and the second limiting assembly. The first limiting plate and the second limiting plate of the first limiting assembly move oppositely or oppositely in the first direction, and the third limiting plate and the fourth limiting plate of the second limiting assembly move oppositely or oppositely in the second direction. Therefore, the position of the mask plate on the supporting plate is calibrated; according to the mask pre-alignment device, the same driving assembly is adopted to drive the first limiting assembly and the second limiting assembly while accurate pre-alignment operation on the mask plate is achieved, the structure of the driving assembly is greatly simplified, and the manufacturing difficulty and the manufacturing cost of the mask pre-alignment device are reduced.

Description

Technical Field

[0001] This application relates to the field of lithography equipment technology, and in particular to a mask pre-alignment device. Background Technology

[0002] With the rise of the chip industry, lithography technology has seen tremendous development, especially in advanced lithography processes. The precision of each component and the manufacturing costs are extremely high. For example, advanced lithography processes require extremely high precision in mask pre-alignment, resulting in a highly complex structure and very high manufacturing costs for the corresponding mask pre-alignment device. Furthermore, mastering the core technologies that ensure this precision is extremely difficult.

[0003] However, with the gradual invalidation of Moore's Law and the limitations of quantum effects, the development of photolithography processes has slowed down. The diversification of applications for high-precision chips has led to a trend of diversified development in the structure of photolithography machines across different processes. Furthermore, mask transfer processes are becoming increasingly common, and while many processes do not require high precision in mask pre-alignment, the complexity and manufacturing cost of the corresponding mask pre-alignment devices remain difficult to reduce.

[0004] Therefore, there is an urgent need for a method that can greatly simplify the complexity of the mask pre-alignment device and reduce the manufacturing cost of the mask pre-alignment device in photolithography applications with lower precision requirements. Utility Model Content

[0005] The purpose of this application is to address the problem in the prior art of simplifying the complexity of mask pre-alignment devices and reducing manufacturing costs while ensuring photolithography quality. Therefore, this application provides a mask pre-alignment device that can perform position calibration on a mask template on a support surface using a first limiting component and a second limiting component in a first and a second direction, thereby achieving precise pre-alignment of the mask template. Furthermore, the first, second, third, and fourth limiting plates can be located away from the support surface, thus avoiding interference with the mask template position during placement and photolithography. Further, using the same driving component to drive the first and second limiting components greatly simplifies the structure of the driving component and reduces the manufacturing difficulty and cost of the mask pre-alignment device.

[0006] This application provides a mask pre-alignment device, including:

[0007] Support frame and support plate;

[0008] The support plate is fixedly mounted on the support frame and has a support surface for supporting the mask;

[0009] The support frame is provided with a driving assembly, and a first limiting assembly and a second limiting assembly in transmission connection with the driving assembly;

[0010] The first limiting assembly comprises limiting plates one and two oppositely arranged along a first direction of the support surface, and the second limiting assembly comprises limiting plates three and four oppositely arranged along a second direction of the support surface, and the first direction and the second direction intersect;

[0011] The limiting plates one, two, three and four are movably arranged relative to the support frame;

[0012] The driving assembly alternately or simultaneously drives the first limiting assembly and the second limiting assembly, so that the limiting plates one and two move oppositely or away from each other in the first direction, and the limiting plates three and four move oppositely or away from each other in the second direction;

[0013] The first direction and the second direction are perpendicular to each other, and the limiting plates one, two, three and four are provided with limiting rollers for limiting.

[0014] By arranging the first limiting assembly and the second limiting assembly in the intersecting first direction and second direction, it can be ensured that the first limiting assembly and the second limiting assembly can accurately position the mask on the support surface. The same driving assembly alternately or simultaneously drives the first limiting assembly and the second limiting assembly, which greatly simplifies the driving assembly, ensures the pre-alignment accuracy, simplifies the complexity of the mask pre-alignment device, and reduces the manufacturing cost of the mask pre-alignment device.

[0015] In some embodiments, the driving assembly comprises a driving member, and a first transmission assembly and a second transmission assembly arranged around the driving member;

[0016] The driving member drives the first limiting assembly and the second limiting assembly through the first transmission assembly and the second transmission assembly;

[0017] The first transmission assembly comprises a first transmission surface in transmission cooperation with the driving member, and the transmission direction of the first transmission surface is parallel to the first direction, and the second transmission assembly comprises a second transmission surface in transmission cooperation with the driving member, and the transmission direction of the second transmission surface is parallel to the second direction, and the first transmission surface and the second transmission surface are arranged in a staggered manner in a third direction.

[0018] The above technical solutions can avoid interference between the first transmission assembly and the second transmission surface when the first transmission assembly is driven in the first direction and the second transmission surface is driven in the second direction. Further, the first transmission assembly and the second transmission assembly can be stacked in the third direction, improving the integration of the mask pre-alignment device and reducing the volume of the driving assembly and the mask pre-alignment device as a whole.

[0019] In some embodiments, the output end of the driving member is movably arranged in the third direction, so that the output end is switched between the first transmission surface and the second transmission surface.

[0020] Alternatively, the output end of the driving member is simultaneously connected to the first transmission surface and the second transmission surface, and drives the limiting plates one, two, three and four to move towards or away from the support surface at the same time.

[0021] The above technical solutions can adjust the first limiting assembly and the second limiting assembly in sequence by switching the position of the output end, so that the mask on the support surface is adjusted in only one direction each time, thereby ensuring the accuracy of each adjustment.

[0022] Further, the first limiting assembly and the second limiting assembly can also be driven at the same time, so that the pre-alignment of the mask plate is completed efficiently at one time, greatly improving the pre-alignment efficiency of the mask pre-alignment device and simplifying the operation process. In addition, the output end of the driving member does not need to be movably arranged, further simplifying the structure of the driving member and reducing the cost of the mask pre-alignment device.

[0023] In some embodiments, the output end of the driving member is arranged as a transmission gear;

[0024] The first transmission assembly includes transmission racks one and two arranged in parallel, and one side of the transmission racks one and two provided with transmission teeth is the first transmission surface;

[0025] When the first transmission assembly cooperates with the transmission gear, the transmission racks one and two are clamped on both sides of the transmission gear;

[0026] The transmission racks one and two are movably arranged in the support frame through sliding rails;

[0027] The second transmission assembly includes transmission racks three and four arranged in parallel, and one side of the transmission racks three and four provided with transmission teeth is the second transmission surface;

[0028] When the second transmission assembly cooperates with the transmission gear, the transmission racks three and four are clamped on both sides of the transmission gear;

[0029] The limiting plate one, the limiting plate two, the limiting plate three and the limiting plate four are fixedly arranged on the transmission rack one, the transmission rack two, the transmission rack three and the transmission rack four.

[0030] By the above technical scheme, the output end of the driving member is connected with the first transmission assembly and the second transmission assembly in a rigid transmission mode of gear transmission, so that the stability and the motion precision of the first transmission assembly and the second transmission assembly during motion can be ensured.

[0031] Meanwhile, the transmission rack one and the transmission rack two are clamped on both sides of the transmission gear, so that the transmission rack one and the transmission rack two can be simultaneously driven to move in the first direction in a symmetrical and opposite or opposite direction when the transmission gear rotates, thereby reducing the motion error between the transmission rack one and the transmission rack two, and improving the limiting precision of the limiting plate one and the limiting plate two. Similarly, the limiting precision of the limiting plate three and the limiting plate four is also improved, so as to ensure the pre-alignment precision of the mask pre-alignment device.

[0032] In some embodiments, the support frame comprises a bottom plate arranged opposite to the support plate, and a support layer arranged between the bottom plate and the support plate.

[0033] The upper side of the support layer is fixedly connected with the support plate through a plurality of support columns.

[0034] The third direction is perpendicular to the support surface.

[0035] The support layer is provided with a first through hole penetrating in the third direction corresponding to the bottom surface of the support plate, and the first through hole is used for accommodating the movement of the output end of the driving member.

[0036] The support layer extends downward to form a first guide plate in the third direction, and extends upward to form a second guide plate, and the first transmission assembly is movably arranged on the first guide plate, and the second transmission assembly is movably arranged on the second guide plate.

[0037] By the first guide plate and the second guide plate extending upward and downward on the support layer, the first transmission assembly and the second transmission assembly are staggered in the third direction, so as to avoid mutual interference between the first transmission assembly and the second transmission assembly. Further, the first guide plate and the second guide plate can guide and limit the movement of the first transmission assembly and the second transmission assembly, so as to further improve the stability of the movement of the first transmission assembly and the second transmission assembly, thereby ensuring the pre-alignment precision of the mask pre-alignment device.

[0038] In some embodiments, the support layer and the bottom plate are connected through a plurality of adjusting columns, the height of the adjusting column is adjustable, and the adjusting column is used for adjusting the flatness of the support layer.

[0039] By adjusting the flatness of the support layer supported by the adjusting column, the flatness of the support plate fixed to the support layer can be indirectly adjusted.

[0040] In some embodiments, the support frame further comprises a baffle surrounding the support layer.

[0041] The first limiting assembly and the second limiting assembly are located outside the baffle, and the baffle is provided with a second through hole in which the first transmission assembly and the second transmission assembly are movably arranged.

[0042] By adopting the above technical solution, the support layer and the driving assembly arranged in the support layer can be shielded, and the safety and reliability of the device can be reduced by reducing the influence of external components.

[0043] In some embodiments, the side of the support plate away from the support frame is provided with a plurality of support blocks, and the upper surfaces of the support blocks form the support surface.

[0044] By adopting the above technical solution, on the one hand, the area of the support surface can be reduced by adopting the support mode of a plurality of support blocks, and the frictional resistance between the support surface and the mask plate can be reduced, thereby facilitating the positioning of the mask plate by the first limiting assembly and the second limiting assembly.

[0045] In some embodiments, the first limiting plate and / or the second limiting plate is in an L-shaped arrangement, comprising a first extension portion corresponding to the side edge of the support surface, and a second extension portion connecting the first extension portion and the first transmission assembly; the first extension portion and the second extension portion are connected perpendicularly.

[0046] By adopting the above technical solution, the contact area of the first limiting plate and / or the second limiting plate with the side edge of the mask plate can be increased by adopting the first extension portion, thereby improving the stability of the calibration of the mask plate by the first limiting plate and / or the second limiting plate, and the placement posture of the mask plate can be calibrated, thereby ensuring the pre-alignment precision of the mask pre-alignment device.

[0047] Other features and corresponding advantages of the present application are described in the latter part of the specification, and it should be understood that at least part of the advantages become apparent from the description in the specification. BRIEF DESCRIPTION OF DRAWINGS

[0048] Fig. 1 FIG. 1 is a schematic diagram of the three-dimensional structure of a mask pre-alignment device according to an embodiment of the present application;

[0049] Fig. 2 FIG. 3 is a schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application;

[0050] Fig. 3FIG. 7 is a schematic view of an internal structure of a mask pre-alignment device according to an embodiment of the present application.

[0051] BRIEF DESCRIPTION OF DRAWINGS

[0052] 1, support frame;

[0053] 11, bottom plate;

[0054] 12, support layer;

[0055] 121, first guide plate; 122, second guide plate;

[0056] 13, support column; 14, adjusting column;

[0057] 2, support plate; 21, support block; p, support surface;

[0058] a, first transmission surface; b, second transmission surface;

[0059] 31, first transmission rack; 32, second transmission rack; 33, third transmission rack; 34, fourth transmission rack;

[0060] 35, output end;

[0061] 4, first limiting assembly;

[0062] 41, first limiting plate; 42, second limiting plate;

[0063] 5, second limiting assembly;

[0064] 51, third limiting plate; 52, fourth limiting plate;

[0065] 6, baffle; 61, second through hole;

[0066] 7, mask; 8, limiting roller;

[0067] X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0068] The following will describe the embodiments of the present application by specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in the specification. Although the description of the present application will be introduced in combination with the preferred embodiments, it does not mean that the features of the present application are limited to the embodiments. On the contrary, the purpose of introducing the present application in combination with the embodiments is to cover other alternatives or modifications which can be extended based on the claims of the present application. In order to provide a deep understanding of the present application, many specific details will be included in the following description. The present application can also be implemented without using these details. In addition, in order to avoid confusion or obscure the present application, some specific details will be omitted in the description. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict.

[0069] It should be noted that in the specification, similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0070] The technical solutions of the present application will be described clearly and completely in combination with the drawings below. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0071] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second", etc. can explicitly or implicitly include one or more features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0072] In the description of the present application, it should be noted that unless specifically defined and limited otherwise, the terms "mounting", "connected", "connection" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0073] In order to make the purpose, technical scheme and advantages of the present application more clear, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0074] Please refer to Figs. 1-3 , Fig. 1 A schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application is shown in Fig. 2 A schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application is shown in Fig. 3 A schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application is shown in

[0075] As Figs. 1-3 shown, the present application provides a mask pre-alignment device, which comprises:

[0076] A support frame 1 and a support plate 2;

[0077] The support plate 2 is fixedly arranged on the support frame 1 and has a support surface p for supporting a mask 7;

[0078] The support frame 1 is provided with a driving assembly, and a first limiting assembly 4 and a second limiting assembly 5 in transmission connection with the driving assembly;

[0079] The first limiting assembly 4 comprises a limiting plate one 41 and a limiting plate two 42 arranged oppositely along a first direction X of the support surface p, and the second limiting assembly 5 comprises a limiting plate three 51 and a limiting plate four 52 arranged oppositely along a second direction Y of the support surface p, and the first direction X and the second direction Y intersect;

[0080] The limiting plate one 41, the limiting plate two 42, the limiting plate three 51 and the limiting plate four 52 are movably arranged relative to the support frame 1;

[0081] The driving assembly drives the first limiting assembly 4 and the second limiting assembly 5 alternately or simultaneously, so that the limiting plate one 41 and the limiting plate two 42 move oppositely or away from each other in the first direction X, and the limiting plate three 51 and the limiting plate four 52 move oppositely or away from each other in the second direction Y;

[0082] The first direction X and the second direction Y are perpendicular to each other, and the limiting plate one 41, the limiting plate two 42, the limiting plate three 51 and the limiting plate four 52 are provided with the limiting roller 8 for limiting.

[0083] The first limiting assembly 4 and the second limiting assembly 5 are arranged on the intersecting first direction X and the second direction Y, so that the first limiting assembly 4 and the second limiting assembly 5 can accurately position the mask 7 on the supporting surface p. The same driving assembly is used to alternately or simultaneously drive the first limiting assembly 4 and the second limiting assembly 5, so that the driving assembly can be greatly simplified, the complexity of the mask pre-alignment device can be simplified, and the manufacturing cost of the mask pre-alignment device can be reduced.

[0084] In one embodiment, the first direction X and the second direction Y can be freely arranged according to the shape of the mask 7 to be pre-aligned and the position of the mask plate to be pre-aligned. For example, when the mask 7 is arranged as a cuboid, the first direction X and the second direction Y are arranged perpendicular to each other.

[0085] In one embodiment, the driving assembly includes a driving member, and a first transmission assembly and a second transmission assembly arranged around the driving member.

[0086] The driving member drives the first limiting assembly 4 and the second limiting assembly 5 through the first transmission assembly and the second transmission assembly.

[0087] The first transmission assembly includes a first transmission surface a in transmission cooperation with the driving member, and the transmission direction of the first transmission surface a is parallel to the first direction X. The second transmission assembly includes a second transmission surface b in transmission cooperation with the driving member, and the transmission direction of the second transmission surface b is parallel to the second direction Y. The first transmission surface a and the second transmission surface b are arranged in a staggered manner in the third direction Z.

[0088] So as to avoid the interference phenomenon of the first transmission assembly in the first direction X and the second transmission surface b in the second direction Y. Further, the first transmission assembly and the second transmission assembly can be arranged in a stacked manner in the third direction Z, improving the integration of the mask pre-alignment device and reducing the volume of the driving assembly and the mask pre-alignment device as a whole.

[0089] In one embodiment, in order to facilitate the support of the mask 7, the supporting surface p is often arranged horizontally. At this time, the third direction Z can be arranged perpendicular to the supporting surface p. So that the first transmission assembly and the second transmission assembly can be staggered in the height direction, which is conducive to integrating the first transmission assembly and the second transmission assembly between the supporting surface p and the bottom plate 11.

[0090] In one embodiment, the output end 35 of the driving member is movably arranged in the third direction Z to switch the output end 35 between the first transmission surface a and the second transmission surface b. In this embodiment, the driving member is an electric motor, which is directly arranged on the support frame 1 by the lifting device, so that the driving member as a whole can move in the third direction Z to switch the output end 35 between the first transmission surface a and the second transmission surface b. In other alternative embodiments, the driving member is an electric motor, which is fixedly arranged on the support frame 1, and the output shaft of the electric motor is arranged as a telescopic member to movably arrange the output end 35 in the third direction Z to switch the output end 35 between the first transmission surface a and the second transmission surface b.

[0091] The output end 35 is switched between the first transmission surface a and the second transmission surface b, so that the first limiting assembly 4 and the second limiting assembly 5 can be adjusted in sequence, and the mask on the support surface p is subjected to adjustment in only one direction each time, thereby ensuring the accuracy of each adjustment.

[0092] In another embodiment, the output end 35 of the driving member is simultaneously in transmission connection with the first transmission surface a and the second transmission surface b, and drives the limiting plate one 41, the limiting plate two 42, the limiting plate three 51 and the limiting plate four 52 to move towards or away from the support surface p at the same time. In this way, the output end 35 of the driving member can simultaneously drive the first limiting assembly 4 and the second limiting assembly 5 to efficiently complete the pre-alignment of the mask 7 at one time, greatly improving the pre-alignment efficiency of the mask pre-alignment device and simplifying the operation process. Moreover, the output end 35 of the driving member does not need to be movably arranged, which further simplifies the structure of the driving member and reduces the cost of the mask pre-alignment device.

[0093] It should be noted that the limiting accuracy of the first limiting assembly 4 and the second limiting assembly 5 is related to the material strength of the first limiting assembly 4 and the second limiting assembly 5 itself and the uniformity of the distribution of the limiting force on the mask. Generally, the more limiting surfaces, the greater the friction between the mask 7 and the support surface p, which can easily lead to uneven distribution of the limiting force.

[0094] In one embodiment, the output end 35 of the driving member is arranged as a transmission gear;

[0095] The first transmission assembly includes the transmission rack one 31 and the transmission rack two 32 arranged in parallel, and one side of the transmission rack one 31 and the transmission rack two 32 provided with transmission teeth is the first transmission surface a;

[0096] When the first transmission assembly cooperates with the transmission gear, the transmission rack one 31 and the transmission rack two 32 are clamped on both sides of the transmission gear;

[0097] The transmission rack one 31 and the transmission rack two 32 are movably arranged on the support frame 1 by the slide rail.

[0098] The second transmission assembly includes transmission rack three 33 and transmission rack four 34 arranged in parallel, and the transmission rack three 33 and the transmission rack four 34 are provided with a second transmission surface b on one side of the transmission teeth;

[0099] When the second transmission assembly is matched with the transmission gear, the transmission rack three 33 and the transmission rack four 34 are clamped on both sides of the transmission gear;

[0100] The limiting plate one 41, the limiting plate two 42, the limiting plate three 51 and the limiting plate four 52 are fixedly arranged on the transmission rack one 31, the transmission rack two 32, the transmission rack three 33 and the transmission rack four 34.

[0101] The output end 35 of the driving member is in rigid transmission with the first transmission assembly and the second transmission assembly through gear transmission, so as to ensure the stability and movement accuracy of the first transmission assembly and the second transmission assembly during movement;

[0102] Meanwhile, the transmission rack one 31 and the transmission rack two 32 are clamped on both sides of the transmission gear, so that the transmission rack one 31 and the transmission rack two 32 can be simultaneously driven to move symmetrically and oppositely or away from each other in the first direction X when the transmission gear rotates, thereby reducing the movement error between the transmission rack one 31 and the transmission rack two 32, and improving the limiting accuracy of the limiting plate one 41 and the limiting plate two 42. Similarly, the limiting accuracy of the limiting plate three 51 and the limiting plate four 52 is also improved, so as to ensure the pre-alignment accuracy of the mask pre-alignment device.

[0103] In one embodiment, the support frame 1 includes a bottom plate 11 arranged opposite to the support plate 2, and a support layer 12 arranged between the bottom plate 11 and the support plate 2;

[0104] The upper side of the support layer 12 is fixedly connected with the support plate 2 through a plurality of support columns 13;

[0105] The third direction Z is perpendicular to the support surface p;

[0106] The support layer 12 is provided with a first through hole corresponding to the bottom surface of the support plate 2 and penetrating in the third direction Z, and the first through hole is used for accommodating the movement of the output end 35 of the driving member;

[0107] The support layer 12 extends downward to form a first guide plate 121 in the third direction Z, and extends upward to form a second guide plate 122; and the first transmission assembly is movably arranged on the first guide plate 121, and the second transmission assembly is movably arranged on the second guide plate 122.

[0108] Thus, the first guide plate 121 and the second guide plate 122 extending up and down on the support layer 12 make the first transmission assembly and the second transmission assembly staggered in the third direction Z, avoiding mutual interference between the first transmission assembly and the second transmission assembly. Further, the first guide plate 121 and the second guide plate 122 can guide and limit the movement of the first transmission assembly and the second transmission assembly, thereby further improving the stability of the movement of the first transmission assembly and the second transmission assembly, thereby ensuring the pre-alignment accuracy of the mask pre-alignment device.

[0109] In an embodiment, the first guide plate 121 is respectively connected to the back surface of the first transmission rack 31 and the back surface of the second transmission rack 32 through a sliding rail, and one side of the first transmission rack 31 and the second transmission rack 32 abuts against the surface of the support layer 12, so that the support layer 12 and the first guide plate 121 can limit the movement of the first transmission rack 31 and the second transmission rack 32 from two planes, thereby ensuring the movement accuracy of the first transmission rack 31 and the second transmission rack 32.

[0110] In an embodiment, the support layer 12 is connected to the bottom plate 11 through a plurality of adjusting columns 14, the height of the adjusting column 14 is adjustable, and the adjusting column 14 is used to adjust the flatness of the support layer 12. Thus, the flatness of the support layer 12 can be adjusted by adjusting the adjusting column 14, thereby indirectly adjusting the flatness of the support plate 2 fixed to the support layer 12.

[0111] In an embodiment, the adjusting column 14 can be provided as a flat head screw, so as to facilitate prior adjustment of the flatness of the support layer 12.

[0112] In an embodiment, the support frame 1 further comprises a baffle 6 surrounding the support layer 12.

[0113] The first limiting assembly 4 and the second limiting assembly 5 are located outside the baffle 6, and the baffle 6 is provided with a second through hole 61 for the movement of the first transmission assembly and the second transmission assembly.

[0114] The baffle 6 can shield the support layer 12 and the driving assembly arranged in the support layer 12, reducing the influence of external components on the safety and reliability of the device.

[0115] In an embodiment, the side of the support plate 2 away from the support frame 1 is provided with a plurality of support blocks 21, and the upper surface of the support block 21 forms a support surface p. On the one hand, the use of a plurality of support blocks 21 can reduce the area of the support surface p and reduce the frictional resistance between the support surface p and the mask 7, thereby facilitating the positioning of the mask 7 by the first limiting assembly 4 and the second limiting assembly 5.

[0116] In one embodiment, the limiting plate one 41 and / or the limiting plate two 42 is in L-shaped arrangement, including a first extension part corresponding to the side edge of the support surface p, and a second extension part connecting the first extension part and the first transmission assembly; the first extension part and the second extension part are connected vertically. The first extension part can increase the contact area of the limiting plate one 41 and / or the limiting plate two 42 to the side edge of the mask 7, thereby improving the stability of the mask 7 calibration by the limiting plate one 41 and / or the limiting plate two 42, and at the same time, the placement attitude of the mask 7 can be calibrated to ensure the pre-alignment accuracy of the mask pre-alignment device. The second extension part can be fixedly connected with the first transmission assembly.

[0117] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A mask pre-alignment device, characterized by, The application relates to a mask pre-alignment device. The device comprises a support frame and a support plate. The support plate is fixedly arranged on the support frame and has a support surface for supporting a mask. The support frame is provided with a driving assembly, a first limiting assembly and a second limiting assembly which are in transmission connection with the driving assembly. The first limiting assembly comprises limiting plates one and two which are oppositely arranged along a first direction of the support surface, and the second limiting assembly comprises limiting plates three and four which are oppositely arranged along a second direction of the support surface, and the first direction and the second direction are intersected. The limiting plates one, two, three and four are movably arranged relative to the support frame. The driving assembly drives the first limiting assembly and the second limiting assembly alternately or simultaneously, so that the limiting plates one and two move oppositely or away from each other in the first direction, and the limiting plates three and four move oppositely or away from each other in the second direction. The first direction and the second direction are perpendicular to each other, and the limiting plates one, two, three and four are provided with limiting rollers for limiting.

2. The mask pre-alignment device according to claim 1, wherein The driving assembly comprises a driving member, and a first transmission assembly and a second transmission assembly which are arranged around the driving member. The driving member drives the first limiting assembly and the second limiting assembly through the first transmission assembly and the second transmission assembly. The first transmission assembly comprises a first transmission surface which is in transmission cooperation with the driving member, and the transmission direction of the first transmission surface is parallel to the first direction, and the second transmission assembly comprises a second transmission surface which is in transmission cooperation with the driving member, and the transmission direction of the second transmission surface is parallel to the second direction, and the first transmission surface and the second transmission surface are arranged in a staggered mode in a third direction.

3. The mask pre-alignment device of claim 2, wherein, The output end of the driving member is movably arranged in the third direction, so that the output end is switched between the first transmission surface and the second transmission surface. Alternatively, the output end of the driving member is in transmission connection with the first transmission surface and the second transmission surface simultaneously, and drives the limiting plates one, two, three and four to move towards or away from the support surface simultaneously.

4. The mask pre-alignment device according to claim 2, wherein The output end of the driving member is arranged as a transmission gear. The first transmission assembly comprises transmission racks one and two which are arranged in parallel, and one side of the transmission teeth of the transmission racks one and two is the first transmission surface. When the first transmission assembly cooperates with the transmission gear, the transmission racks one and two are oppositely clamped on two sides of the transmission gear. The transmission racks one and two are movably arranged on the support frame through sliding rails. The second transmission assembly comprises transmission racks three and four which are arranged in parallel, and one side of the transmission teeth of the transmission racks three and four is the second transmission surface. When the second transmission assembly cooperates with the transmission gear, the transmission racks three and four are oppositely clamped on two sides of the transmission gear. The limiting plate one, the limiting plate two, the limiting plate three and the limiting plate four are fixedly arranged on the transmission rack one, the transmission rack two, the transmission rack three and the transmission rack four.

5. The mask pre-alignment device of claim 4, wherein, The support frame comprises a bottom plate arranged opposite to the support plate, and a support layer arranged between the bottom plate and the support plate; The upper side of the support layer is fixedly connected with the support plate through a plurality of support columns; The third direction is perpendicular to the support surface; The support layer is provided with a first through hole penetrating in the third direction corresponding to the bottom surface of the support plate, and the first through hole is used for accommodating the movement of the output end of the driving member; The support layer is downwardly extended to form a first guide plate in the third direction, and is upwardly extended to form a second guide plate; the first transmission assembly is movably arranged on the first guide plate; and the second transmission assembly is movably arranged on the second guide plate.

6. The mask pre-alignment device of claim 5, wherein, The support layer and the bottom plate are connected through a plurality of adjusting columns, the height of the adjusting column is adjustable, and the adjusting column is used for adjusting the flatness of the support layer.

7. The mask pre-alignment device of claim 5, wherein, The support frame further comprises a baffle surrounding the support layer; The first limiting assembly and the second limiting assembly are located outside the baffle, and the baffle is provided with a second through hole movably accommodating the first transmission assembly and the second transmission assembly.

8. The mask pre-alignment device of claim 1, wherein: The support plate is provided with a plurality of support blocks on the side away from the support frame, and the upper surface of the support block forms the support surface.

9. The mask pre-alignment device of claim 4, wherein, The limiting plate one and / or the limiting plate two are arranged in an L shape, comprising a first extension part corresponding to the side edge of the support surface, and a second extension part connecting the first extension part and the first transmission assembly; the first extension part and the second extension part are vertically connected.

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