Liquid material cleaning device and liquid material coating equipment

Abstract

The utility model relates to a liquid material cleaning device and liquid material coating equipment. The liquid material cleaning device comprises a body, a cover body detachably installed on the body, a gas connector arranged on the body and a connecting mechanism arranged between the body and the cover body. The cover body covers the opening of the containing chamber of the body and is provided with a liquid inlet hole communicated with the containing chamber. One end of the gas connector is communicated with the containing chamber, and the other end of the gas connector is communicated with a negative pressure source. The at least one connecting mechanism is provided with a first connecting part and a second connecting part which are used for connecting the body and the cover body. Through the structural design that the connecting mechanisms are arranged between the body and the cover body, the cover body can be stably fixed on the body.

Description

Technical Field

[0001] This utility model relates to a cleaning device, and more particularly to a liquid cleaning device and liquid coating equipment for cleaning the liquid outlet of a liquid coating device. Background Technology

[0002] In semiconductor manufacturing processes, for example, liquid coating equipment uses nozzles to drop, coat, or cover liquid materials onto the holes or surfaces of components to be processed. However, because the liquid material may be viscous, after a period of operation, liquid residue may remain at the nozzle, necessitating cleaning of the residual liquid.

[0003] Currently, the method for cleaning residual liquid from the dispensing nozzle is to transfer the nozzle to a cleaning device with a suction function, where the cleaning device removes the residual liquid adhering to the nozzle. This cleaning device generally includes a base, a cover that fits onto the base and defines a chamber, and a liquid cup disposed within the chamber. The cover has an inlet hole communicating with the chamber. The base is connected to a negative pressure source, and the negative pressure applied by the negative pressure source to the chamber and the inlet hole draws the residual liquid from the dispensing nozzle inserted in the inlet hole into the liquid cup.

[0004] The current cleaning device design, besides the inconvenience of having to open the cover periodically to check the liquid cup capacity, also has the problem that the cover is usually installed at the opening of the base by plugging it in with a sealing gasket. This can easily lead to the cover not being properly sealed, creating gaps between the cover and the base, which in turn affects the negative pressure suction of the liquid inlet. Utility Model Content

[0005] Therefore, the purpose of this invention is to provide a liquid cleaning device that can improve at least one of the shortcomings of the prior art.

[0006] Therefore, the liquid cleaning device of this utility model is suitable for connection to a negative pressure source. The liquid cleaning device includes a main body, a cover detachably mounted on the main body, a gas connector disposed on the main body, and at least one connecting mechanism disposed between the main body and the cover.

[0007] The main body has a chamber and an opening leading to the chamber. A cover covers the opening and has a liquid inlet port communicating with the chamber. A gas connector has one end attached to the main body and communicating with the chamber, and the other end is used to communicate with the negative pressure source. The at least one connecting mechanism has a first connecting portion and a second connecting portion for connecting the main body and the cover.

[0008] Therefore, another objective of this invention is to provide a liquid coating device that can be used with the liquid cleaning device.

[0009] Therefore, the liquid coating equipment of this utility model includes a machine platform with a table, a liquid dispensing device with a liquid outlet for dispensing liquid, a conveying device disposed on the table and capable of conveying workpieces to a predetermined processing position, a moving device disposed on the table and capable of driving the liquid dispensing device to move in multiple axes relative to the conveying device, and a liquid cleaning device disposed on the table as described above.

[0010] The beneficial effects of this utility model are as follows: through the structural design of providing such connecting mechanisms between the body and the cover, the cover can be firmly fixed to the body. Furthermore, through the structural design of the viewing cap of the cover, users can conveniently view the capacity of the liquid cup located in the body directly through the viewing cap without opening the cover. Attached Figure Description

[0011] Other features and beneficial effects of this utility model will be clearly presented in the embodiments with reference to the drawings, wherein:

[0012] Figure 1 This is a three-dimensional structural diagram of a first embodiment of the liquid coating equipment of this utility model;

[0013] Figure 2 This is a perspective structural diagram illustrating a liquid cleaning device according to the first embodiment of this utility model;

[0014] Figure 3 This is an exploded perspective view illustrating the liquid cleaning device of the first embodiment of this utility model;

[0015] Figure 4 This is a side sectional view illustrating the liquid cleaning device of the first embodiment of this utility model;

[0016] Figure 5 This is a perspective structural diagram of the liquid material cleaning device according to a second embodiment of the liquid material coating equipment of this utility model;

[0017] Figure 6 This is an exploded perspective view illustrating the liquid cleaning device of the second embodiment of this utility model;

[0018] Figure 7 This is a side sectional view illustrating the liquid cleaning device of the second embodiment of this utility model;

[0019] Figure 8 This is a perspective view of the liquid cleaning device according to a third embodiment of the liquid coating equipment of this utility model; and

[0020] Figure 9 This is an exploded perspective view illustrating the liquid cleaning device of the third embodiment of this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 200: Liquid Coating Equipment

[0023] 3: Machine

[0024] 30: Countertop

[0025] 4: Mobile devices

[0026] 5: Liquid material dispensing device

[0027] 51: Dispensing nozzle

[0028] 6: Conveying device

[0029] 7: Liquid cleaning device

[0030] 71: Ontology

[0031] 711: Ontology Department

[0032] 712: Upper convex part

[0033] 713: Refrigeration Room

[0034] 714: Opening

[0035] 715: Annular groove

[0036] 716: Sealing gasket

[0037] 72: Cover

[0038] 721: Cover

[0039] 722: First perforation

[0040] 723: Gap

[0041] 724: View Cover

[0042] 725: Liquid inlet hole

[0043] 726: Press-fit component

[0044] 727: Second perforation

[0045] 73: Gas connector

[0046] 74: Connecting Mechanism

[0047] 75: First connecting section

[0048] 751: Hook Seat

[0049] 752: Installation Department

[0050] 753: hook part

[0051] 754: Groove

[0052] 76: Second connecting section

[0053] 761: Fastener Set

[0054] 762: Pivot

[0055] 763: Dispatch

[0056] 764: Fasteners

[0057] 77: First connecting section

[0058] 771: Groove

[0059] 78: Second connecting section

[0060] 781: Fastener Set

[0061] 782: Pivot

[0062] 783: Fasteners

[0063] 784: Elastic component

[0064] 79: First connecting section

[0065] 791: Card Cancellation

[0066] 792: Support pin

[0067] 70: Second connecting section

[0068] 701: Goblin

[0069] 702: Guiding Section

[0070] 703: Positioning Segment

[0071] 704: Positioning Bead

[0072] 81: Liquid Cup

[0073] 82: Position sensing mechanism

[0074] 900: Negative pressure source. Detailed Implementation

[0075] Before this utility model is described in detail, it should be noted that similar elements are represented by the same reference numerals in the following description.

[0076] See Figures 1-4A first embodiment of the liquid coating equipment 200 of this utility model is suitable for performing liquid coating operations on multiple workpieces to be processed. The workpieces include, but are not limited to, semiconductor components, circuit boards, and electronic components. The liquid coating equipment 200 includes a machine base 3 with a table 30, a moving device 4 disposed on the table 30, a liquid dispensing device 5 disposed on the moving device 4, a conveying device 6 disposed on the table 30 for transferring the workpieces, and a liquid cleaning device 7 disposed on the table 30.

[0077] The moving device 4 can drive the liquid dispensing device 5 to move axially relative to the conveying device 6, and can also drive the liquid dispensing device 5 to be displaced onto any workpiece carried by the conveying device 6. The liquid dispensing device 5 has a dispensing nozzle 51 for dispensing liquid, and the liquid dispensed from the nozzle 51 is used to process each workpiece. The processing includes, but is not limited to, dripping, coating, and covering of the liquid.

[0078] The conveying device 6 can transfer the workpiece to be processed to a predetermined processing position on the table 30, and transfer the processed workpiece to the next process equipment.

[0079] Since the moving device 4, the liquid dispensing device 5, and the conveying device 6 are all existing technologies and there are many types, they will not be described in detail.

[0080] The liquid cleaning device 7 includes a main body 71, a cover 72 detachably mounted on the main body 71, a gas connector 73 disposed on the main body 71, two connecting mechanisms 74 installed between the main body 71 and the cover 72, and a liquid cup 81 disposed in the main body 71. The liquid cleaning device 7 can be disposed on the tabletop 30 by means of a fastener (not shown) directly fixed to the tabletop 30, or fixed to a calibration table (not shown) disposed on the tabletop 30.

[0081] The body 71 has a body portion 711 with an upward-facing opening 714, and an upper protrusion 712 protruding upward from the top surface of the body portion 711 near its inner periphery. The body portion 711 and the upper protrusion 712 cooperate to define a chamber 713 with an upward-facing opening 714. The outer peripheral surface of the upper protrusion 712 is recessed with an annular groove 715, and a sealing gasket 716 is disposed in the annular groove 715.

[0082] The cover 72 is detachably placed over the upper protrusion 712 and stacked on the main body 711, covering the opening 714 of the chamber 713. The cover 72 includes a cover seat 721 detachably disposed on the top surface of the main body 711 and airtightly fitted around the sealing gasket 716; a viewing cover 724 fixed above the cover seat 721; and a pressure member 726 fixed above the viewing cover 724 and connected to the cover seat 721. The cover seat 721 has a first through-hole 722 extending vertically. The viewing cover 724 covers the first through-hole 722 and has a liquid inlet 725 extending vertically through the first through-hole 722, the liquid inlet 725 having a gradually decreasing diameter from top to bottom. The pressure member 726 has a second through-hole 727 extending vertically through the viewing cover 724 for viewing. The first perforation 722, the liquid inlet 725, and the second perforation 727 are arranged coaxially.

[0083] In this first embodiment, the body 71, the cover 721, and the pressure member 726 are all made of metal materials, such as, but not limited to, stainless steel. The viewing cover 724 is made of a transparent material, such as, but not limited to, acrylic, allowing the interior of the chamber 713 to be viewed through the second perforation 727 and the first perforation 722.

[0084] The liquid cup 81 is disposed in the chamber 713 and located below the liquid inlet 725, and can be used to receive liquid dripping from the liquid inlet 725.

[0085] The gas connector 73 is disposed on the main body 711, with one end connected to the chamber 713 and the other end connected to the negative pressure source 900. The gas connector 73 can apply a negative pressure suction to the interior of the chamber 713 via the negative pressure source 900.

[0086] The connecting mechanisms 74 are symmetrically arranged on two opposite sides of the body 71 and the cover 72, and the cover 72 is detachably fixed to the body 71. Each connecting mechanism 74 has a first connecting part 75 installed on the outer edge of the body 711, and a second connecting part 76 installed on the outer edge of the cover 721 and detachably connected to the first connecting part 75.

[0087] The first connecting part 75 has a hook seat 751 disposed on the body 71. The hook seat 751 has a mounting part 752 fixed to the body 71 and a hook part 753 that bends down from the top edge of the mounting part 752.

[0088] The second connecting part 76 has a fastener assembly 761. The fastener assembly 761 has a pivot 762 fixed to the main body part 711, a lever 763 that pivots up and down relative to the pivot 762, and a U-shaped fastener 764 with its two upward-facing ends pivotally mounted on the lever 763.

[0089] When the cover 72 is placed on the body 71, and the first connecting portion 75 of each connecting mechanism 74 is to be connected to the second connecting portion 76, the corresponding lever 763 can be pulled upward relative to each pivot 762, thereby causing the corresponding fastener 764 to engage upward with the hook portion 753 of the corresponding hook seat 751. At this time, the cover 72 is securely fixed to the body 71. Conversely, when it is necessary to remove the cover 72, the corresponding lever 763 can be pulled downward relative to each pivot 762, thereby causing the corresponding fastener 764 to disengage downward from the hook portion 753 of the hook seat 751.

[0090] When the liquid dispensing device 5 of the liquid coating equipment 200 needs cleaning after a period of use, the moving device 4 can move the liquid dispensing device 5 above the liquid cleaning device 7 and drive it downwards towards the liquid cleaning device 7, so that the dispensing nozzle 51 is close to or inserted into the liquid inlet 725. At this time, the negative pressure suction generated by the negative pressure source 900 in the chamber 713 can draw the residual liquid on the dispensing nozzle 51 downwards into the liquid cup 81. After the liquid dispensing device 5 is moved away from the liquid cleaning device 7, the user can directly see the liquid volume in the liquid cup 81 through the viewing cover 724 of the cover 72 without having to open the cover 72, which is very convenient.

[0091] See Figure 5 , 6 7. A second embodiment of the liquid coating equipment 200 of this utility model differs from the first embodiment in that the structural design of the connecting mechanisms 74 of the liquid cleaning device 7 is as follows. For ease of explanation, the following description will only focus on the differences between the embodiments.

[0092] In this second embodiment, each connecting mechanism 74 includes a first connecting portion 77 disposed on the body 71 and a second connecting portion 78 disposed on the cover 72. The first connecting portion 77 of each connecting mechanism 74 has a recess 771 recessed into the outer peripheral surface of the body portion 711. The second connecting portion 78 of each connecting mechanism 74 has a fastener assembly 781 disposed on the cover 721. The fastener assembly 781 includes a pivot 782 disposed on the cover 721, a fastener 783 extending vertically and pivotally mounted on the pivot 782 at its middle section, and an elastic member 784 installed between the fastener 783 and the cover 721. The elastic member 784 causes the bottom end of the fastener 783 to elastically deflect towards the body 71, thereby detachably locking and positioning it in the recess 771.

[0093] When the cover 72 needs to be removed from the body 71, the top end of the fastener 783 of each fastener group 781 can be pressed to drive the fastener 783 to pivot relative to the pivot seat 782, causing the bottom ends of the fasteners 783 to disengage from the grooves 771, thus allowing the cover 72 to be removed from the body 71. Conversely, when the cover 72 is to be fixed on the body 71, the top ends of the fasteners 783 of the fastener group 781 are driven to swing towards the cover 72. After the cover 72 is placed on the body 71, the fasteners 783 are released, and the elastic members 784 will drive the fasteners 783 to swing back to their original position, causing the bottom ends of the fasteners 783 to engage with the grooves 771.

[0094] In the two embodiments described above, two connecting mechanisms 74 are symmetrically arranged between the body 71 and the cover 72 to securely fix the cover 72 to the body 71. However, in another embodiment of this utility model, the cover 72 can be pivotally mounted on the body 71 in a flip-up manner, and only one connecting mechanism 74 is provided, which can also fix the cover 72 to the body 71.

[0095] See Figure 8 , 9 The difference between a third embodiment of the liquid coating device 200 and the first embodiment is that the liquid cleaning device 7 has a structural design of the body 71 and the cover 72, and has only one connecting mechanism 74, and the liquid cleaning device 7 also has a positioning sensing mechanism 82 disposed on the body 71.

[0096] In this third embodiment, the body 71 is generally cylindrical. The cover 72 has a cover seat 721 that can rotatably cover the top section of the body 71, and a viewing cover 724 disposed on the cover seat 721. The cover seat 721 has a first through-hole 722 extending vertically, and a notch 723 extending radially upward from its bottom periphery. The viewing cover 724 closes the first through-hole 722 and has a liquid inlet 725 extending vertically.

[0097] The connecting mechanism 74 includes a first connecting portion 79 disposed on the body 71 and a second connecting portion 70 disposed on the cover 72. The first connecting portion 79 has a locking pin 791 and a support pin 792 that are horizontally protruding at the same height and spaced apart from each other on the outer peripheral surface of the body portion 711. Both the locking pin 791 and the support pin 792 are in the shape of round rods.

[0098] The second connecting portion 70 has a groove 701 that radially penetrates the cover 721 and extends along the periphery of the cover 721, and a positioning bead 704 that is rotatably disposed on the cover 721 and protrudes upward into the groove 701. The groove 701 has a guide section 702 that extends obliquely upward from the notch 723, and a positioning section 703 that extends horizontally outward from the top of the guide section 702. The positioning bead 704 is exposed in the positioning section 703.

[0099] The positioning sensing mechanism 82 is located below the first connecting portion 79 and can be used to detect whether the cover 72 is properly positioned during the process of the cover 72 covering the body 71. In this embodiment, the positioning sensing mechanism 82 is a proximity sensor, such as, but not limited to, an optical proximity sensor, a capacitive proximity sensor, etc.

[0100] When the cover 72 of this third embodiment is to be installed on the body 71, the cover 72 is placed over the body 71 with the notch 723 facing downwards, aligning with the locking pin 791 and the support pin 792. Then, the cover 72 is rotated relative to the body 71, causing the locking pin 791 and the support pin 792 to shift relative to each other and engage with the guide section 702 of the groove 701, and forcing the locking pin 791 past the positioning bead 704 and into the positioning section 703. At this time, the locking pin 791 is positioned in the positioning section 703 by the positioning bead 704, and the locking pin 791 and the support pin 792 are positioned by the cover seat 721 against it downwards. At the same time, the portion of the cover 721 located below the groove 701 will move above the positioning sensing mechanism 82, and the positioning sensing mechanism 82 will sense the cover 721, indicating that the cover 72 has been properly positioned.

[0101] When it is necessary to remove the cover 72 from the body 71, rotate the cover 72 in the opposite direction to the body 71 so that the locking pin 791 is forced past the positioning bead 704, and then the cover 72 can be rotated upwards to remove it from the body 71.

[0102] In summary, through the structural design of the connecting mechanism 74 between the main body 71 and the cover 72, the cover 72 can be securely fixed to the main body 71. Furthermore, through the structural design of the viewing cover 724 of the cover 72, the user can directly observe the capacity of the liquid cup 81 located in the main body 71 through the viewing cover 724 without opening the cover 72. Therefore, the liquid coating device 200 and its liquid cleaning device 7 of this utility model are indeed a highly innovative and convenient structure, and can indeed achieve the purpose of this utility model.

[0103] However, the above description is merely an embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Any simple equivalent changes and modifications made in accordance with the claims and patent specification of this utility model shall still fall within the scope of this utility model patent.

Claims

1. A liquid cleaning device, suitable for connection to a negative pressure source, characterized in that, include: A body having a chamber and an opening leading to the chamber; A cover is detachably mounted on the body and covers the opening, and has an inlet port communicating with the chamber; A gas connector, one end of which is located on the body and communicates with the chamber, and the other end of which is used to communicate with the negative pressure source; and At least one connecting mechanism has a first connecting portion and a second connecting portion for connecting the body to the cover.

2. The liquid cleaning device as described in claim 1, characterized in that, The first connecting part is located on the outer edge of the main body, and the second connecting part is located on the outer edge of the cover.

3. The liquid cleaning device as described in claim 1, characterized in that, The first connecting part has a hook seat, and the second connecting part has a fastener assembly that can be detachably hooked to the hook seat.

4. The liquid cleaning device as described in claim 3, characterized in that, The hook has a mounting portion fixed to the body and a hook portion extending downwardly from the mounting portion. The fastener assembly has a pivot fixed to the cover, a lever pivoting relative to the pivot, and a fastener pivotally mounted on the lever relative to the lever. The lever pivots relative to the pivot and drives the fastener to be detachably hooked into the hook portion.

5. The liquid cleaning device as described in claim 1, characterized in that, The first connecting part has a groove, and the second connecting part has a fastener assembly that can be detachably hooked into the groove.

6. The liquid cleaning device as described in claim 5, characterized in that, The fastener assembly has a pivot fixed to the cover, a fastener disposed on the pivot and pivoting relative to the pivot, and an elastic member disposed between the cover and the fastener. The fastener is detachably hooked into the groove, and the elastic member drives the fastener to move towards the groove.

7. The liquid cleaning device as described in claim 1, characterized in that, The first connecting part has a latch, and the second connecting part has a groove for the latch to be removably engaged.

8. The liquid cleaning device as described in claim 7, characterized in that, The first connecting part also has a support pin spaced apart from the locking pin and at the same height as the locking pin.

9. The liquid cleaning device as described in claim 7, characterized in that, The second connecting part also has a positioning bead that detachably limits the locking pin in the locking groove.

10. The liquid cleaning device as described in claim 1, characterized in that, Also includes: A positioning sensing mechanism is installed on the main body to sense the installation and positioning of the cover.

11. The liquid cleaning device as described in claim 1, characterized in that, Also includes: A liquid cup located in the chamber of the body and below the liquid inlet.

12. The liquid cleaning device as described in claim 1, characterized in that, The cover has a cover base, a viewing cover, and a pressing member connected together. The viewing cover is disposed between the cover base and the pressing member. The cover base has a first perforation, the viewing cover has a liquid inlet hole, and the pressing member has a second perforation. The first perforation, the liquid inlet hole, and the second perforation are connected.

13. The liquid cleaning device as described in claim 12, characterized in that, Both the cover and the clamp are made of metal, while the cover itself is made of transparent material.

14. The liquid cleaning device as described in claim 12, characterized in that, The first perforation, the liquid inlet hole, and the second perforation are coaxial.

15. The liquid cleaning device as described in claim 1, characterized in that, The cover has a cover base and a viewing cover connected together. The cover base has a first perforation, and the viewing cover has the liquid inlet hole. The first perforation is connected to the liquid inlet hole.

16. The liquid cleaning device as described in claim 15, characterized in that, The base is made of metal, while the cover itself is made of transparent material.

17. The liquid cleaning device as described in claim 15, characterized in that, The first perforation is coaxial with the liquid inlet hole.

18. The liquid cleaning device as described in claim 1, characterized in that, Also includes: Two of these connecting mechanisms.

19. A liquid coating equipment, characterized in that, include: A machine has a table. A liquid dispensing device is provided with a liquid dispensing nozzle; A conveying device is set on the table and conveys the workpiece to a predetermined processing position; A mobile device, disposed on the platform, drives the liquid dispensing device to move in multiple axes relative to the conveying device; and The liquid cleaning device as described in any one of claims 1 to 18 is disposed on the countertop.

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