Substrate feeding equipment

Abstract

The utility model relates to substrate conveying equipment, in particular to substrate feeding equipment which comprises a material box, a conveying module, a pushing unit and a material moving unit. When the base plates are fed, the material moving part is controlled by the moving unit to move the material box to the position between the first conveying part and the second conveying part, so that the pushing unit can push the base plates in the material box to the position between the first conveying part and the second conveying part, and the moving unit can control the material moving part to move the material box in the vertical direction; according to the substrate feeding device, the pushing unit can push the substrate to the position between the first conveying part and the second conveying part every time, calibration does not need to be conducted every time, and compared with the prior art, the substrate feeding efficiency is improved.

Description

Technical Field

[0001] This utility model relates to substrate transfer equipment, specifically to a substrate loading device. Background Technology

[0002] As the carrier of semiconductor chips, the substrate carries the key functions of the entire electronic product. During substrate processing, multiple substrates are typically stacked in a cassette, and then sequentially removed from the cassette and transferred to the next processing step. However, in existing technologies, each time a substrate is removed and transferred to the next process, its placement in the next process must be recalibrated before it can be placed down, resulting in low substrate loading efficiency. Utility Model Content

[0003] The technical solution adopted by this utility model to solve its technical problem is: to provide a substrate loading device, comprising:

[0004] A material box, in which several substrates are arranged vertically and placed;

[0005] A conveying module is used to convey a substrate to the next process. The conveying module includes a first conveying member and a second conveying member that rotate synchronously, and a telescopic cylinder. The output end of the telescopic cylinder is connected to the second conveying member. The telescopic cylinder controls the second conveying member to move toward the second conveying member so that the distance between the first conveying member and the second conveying member is adapted to the substrate.

[0006] A pushing unit, the output end of which corresponds to the conveying module, is used to push the substrate in the material box between the first conveying member and the second conveying member;

[0007] The material transfer unit includes a moving unit and a material transfer component. The material transfer component is located between the pushing unit and the conveying module. The material transfer component is used to transfer the material box from the material pick-up point. The output end of the moving unit is connected to the material transfer unit. The moving unit is used to control the substrate in the material box to move between the first conveying component and the second conveying component, and to control the material box to move in the vertical direction.

[0008] Furthermore, the moving unit includes a first moving module and a lifting module, the output end of the first moving module is connected to the lifting module, and the output end of the lifting module is connected to the material transfer unit.

[0009] Furthermore, the pushing unit is a cylinder, and the output end of the pushing unit is provided with a pushing plate. The pushing unit pushes the substrate between the first conveying member and the second conveying member through the pushing plate.

[0010] Furthermore, a pressure roller is rotatably provided on the second conveyor, and when the substrate is located between the first conveyor and the second conveyor, the pressure roller and the substrate come into contact.

[0011] Furthermore, the substrate loading device also includes a first conveying unit, which is used to transfer the material box from the feeding point to the picking point, and the output end of the first conveying unit corresponds to the material transfer component.

[0012] Furthermore, the material transfer component is equipped with a guide plate and a lifting cylinder. The output end of the first conveying unit is equipped with a guide groove that matches the guide plate. When the material transfer component transfers the material box, the guide plate is inserted into the guide groove. The output end of the lifting cylinder is equipped with a limiting plate. The lifting cylinder controls the limiting plate to rise and fall to cooperate with the guide plate to clamp the material box.

[0013] Furthermore, the output end of the first conveying unit is equipped with a magnetic sensor, which is used to sense whether the material box has moved to a position in the guide groove.

[0014] Furthermore, the substrate loading device also includes a second conveying unit, and the moving unit controls the material box to move to the input end of the second conveying unit.

[0015] Furthermore, the first conveying unit is located above the second conveying unit.

[0016] Furthermore, the input end of the second conveying unit is provided with a guide groove that is compatible with the guide plate.

[0017] The beneficial effects of this utility model are: it provides a substrate loading device, including a material box, a conveying module, a pushing unit, and a transferring unit. During substrate loading, the moving unit controls the transferring component to move the material box between the first and second conveying components, enabling the pushing unit to push the substrate in the material box between the first and second conveying components. Furthermore, the moving unit can control the transferring component to move the material box vertically, ensuring that the pushing unit can push the substrate between the first and second conveying components each time, eliminating the need for calibration each time. Compared to existing technologies, the substrate loading efficiency is improved. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] In the picture: Figure 1 An overall structural diagram of a substrate loading device provided by this utility model;

[0020] Figure 2 for Figure 1 The diagram shows the three-dimensional structure of the material transfer unit.

[0021] Figure 3 for Figure 1 The three-dimensional structural diagram of the first conveying unit and the second conveying unit shown;

[0022] Figure 4 for Figure 1 The top view of the partial structure shown (the material box and substrate are hidden in the figure, and at this time the two ends of the substrate are aligned with the first conveyor and the second conveyor respectively);

[0023] Figure 5 This is a three-dimensional structural diagram of the material box involved in this utility model;

[0024] Explanation of reference numerals in the attached drawings: 100, substrate loading equipment; 10, material box; 11, mounting plate; 111, mounting groove; 20, conveying module; 21, first conveying component; 211, first supporting plate; 22, second conveying component; 221, second supporting plate; 23, telescopic cylinder; 24, pressure roller; 25, photoelectric sensor; 30, pushing unit; 31, pushing plate; 40, material transfer unit; 41, material transfer component; 411, guide plate; 412, lifting cylinder; 413, limiting plate; 42, first moving module; 43, lifting module; 50, first conveying unit; 51, guide groove one; 52, magnetic sensor; 60, second conveying unit; 61, guide groove two; 70, frame; 200, substrate. Detailed Implementation

[0025] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will now be described in detail with reference to the accompanying drawings. This drawing is a simplified schematic diagram, illustrating only the basic aspects of the present utility model, and therefore only shows the components relevant to the present utility model. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0026] Please refer to Figure 1-5 A substrate loading device 100 includes a substrate box 10, a conveying module 20, a pushing unit 30, a transferring unit, a first conveying unit 50, and a second conveying unit 60, as well as a frame 70 supporting the aforementioned devices. Only a portion of the frame 70 is shown in the figure. The substrate box 10, containing several substrates, is conveyed to the transferring unit via the first conveying unit 50. The transferring unit then transfers the substrates to the corresponding conveying module 20. The pushing unit 30 pushes the substrates in the substrate box 10 onto the conveying module 20, which then conveys the substrates to the next process. After all the substrates have been pushed to the next process, the transferring unit transfers the substrate box 10 to the second conveying unit 60.

[0027] With the height direction of the material box 10 as the vertical direction, the top surface of the material box 10 is considered horizontal. The end of the first conveying unit 50 furthest from the transfer unit 40 is the input end of the first conveying unit 50, i.e., the feeding point; the end closer to the transfer unit 40 is the output end of the first conveying unit 50, i.e., the picking point. Similarly, the end of the second conveying unit 60 furthest from the transfer unit is the output end of the second conveying unit 60, and the end closer to the transfer unit 40 is the input end of the second conveying unit 60.

[0028] Please refer to Figure 5 The material box 10 is provided with a mounting plate 11, and a plurality of mounting slots 111 for placing substrates are arranged sequentially on the mounting plate 11. Specifically, the plurality of mounting slots 111 are arranged sequentially in the vertical direction, and when the substrate is placed in the mounting slot 111, the substrate is in a flat state.

[0029] The conveying module 20 includes a first conveying member 21, a second conveying member 22, and a telescopic cylinder 23. The first conveying member 21 and the second conveying member 22 rotate synchronously. The output end of the telescopic cylinder 23 is fixedly connected to the second conveying member 22. The telescopic cylinder 23 controls the second conveying member 22 to move toward the first conveying member 21 so that the distance between the first conveying member 21 and the second conveying member 22 matches the width of the substrate. A pressure roller 24 is rotatably provided on the second conveying member 22. When the substrate is located on the conveying module 20, the pressure roller 24 abuts against the substrate.

[0030] Specifically, both the first conveyor 21 and the second conveyor 22 are existing belt conveyor mechanisms. The first conveyor 21 and the second conveyor 22 are arranged horizontally, and each is independently configured. The output end of the telescopic cylinder 23 and the frame in the second conveyor 22 that supports the various structures are fixedly connected.

[0031] The first conveyor 21 is provided with a first abutment plate 211, and the second conveyor 22 is provided with a second abutment plate 221. The first abutment plate 211 and the second abutment plate 221 are arranged opposite to each other. When the substrate 200 is located on the first conveyor 21 and the second conveyor 22, the two ends of the substrate 200 in the width direction abut against the first abutment plate 211 and the second abutment plate 221, respectively. The pressure roller 24 is provided to cooperate with the first conveyor 21, the second conveyor 22, and the conveying module 20, so that when the substrate moves from the conveying module 20 to the next process, the two ends of the substrate in the width direction abut against the first conveyor 21 and the second conveyor 22, respectively, and the top of the substrate abuts against the pressure roller 24. The substrate 200 is less likely to warp when transported to the next process.

[0032] The material transfer unit 40 includes a moving unit and a material transfer component 41. The material transfer component 41 is located between the pushing unit 30 and the conveying module 20. The material transfer component 41 is used to transfer the material box 10 from the material pick-up point on the first output unit. The output end of the moving unit is connected to the material transfer component 41. The moving unit is used to control the material box 10 to move to correspond to the output end of the pushing unit 30, so that the two ends of the substrate in the width direction inside the material box 10 are aligned with the edges of the first conveying component 21 and the second conveying component 22, respectively, and to control the material box 10 to move in the vertical direction.

[0033] The material transfer component 41 is equipped with a guide plate 411 and a lifting cylinder 412. The output end of the lifting cylinder 412 is equipped with a limiting plate 413. The lifting cylinder 412 controls the limiting plate 413 to rise and fall until it cooperates with the guide plate 411 to clamp the material box 10. Specifically, in this embodiment, the material transfer component 41 is a frame structure composed of multiple plates.

[0034] Specifically, the moving unit includes a first moving module 42 and a lifting module 43. The output end of the first moving module 42 is fixedly connected to the lifting module 43, and the output end of the lifting module 43 is fixedly connected to the material transfer component 41. In this embodiment, both the first moving module 42 and the lifting module 43 adopt the screw drive structure in the prior art.

[0035] The output end of the pushing unit 30 corresponds to the conveying module 20. The pushing unit 30 is used to push the substrate in the material box 10 between the first conveying member 21 and the second conveying member 22. The pushing unit 30 is a cylinder, and the output end of the pushing unit 30 is arranged facing the conveying module 20. Furthermore, the output end of the pushing unit 30 is provided with a pushing plate 31, and the pushing unit 30 pushes the substrate onto the conveying module 20 through the pushing plate 31.

[0036] The first conveying unit 50 and the second conveying unit 60 are both parallel to the first moving module 42, with the first conveying unit 50 located directly above the second conveying unit 60. The output end of the first conveying unit 50 corresponds to the material transfer component. Both the output end of the first conveying unit 50 and the input end of the second conveying unit 60 are equipped with magnetic sensors 52, which are used to sense whether the material box 10 has moved to the guide groove 51. The moving unit controls the material box 10 to move to the input end of the second conveying unit 60. Specifically, in this embodiment, both the first conveying unit 50 and the second conveying unit 60 are existing belt conveyor structures, and the magnetic sensor 52 is also existing technology; the specific structure will not be described in detail in this embodiment.

[0037] The output end of the first conveying unit 50 is provided with a guide groove 51 that matches the guide plate 411, and the input end of the second conveying unit 60 is provided with a guide groove 62 that matches the guide plate 411. When the material transfer component transfers the material box 10 from the picking point on the first conveying unit 50, the guide plate 411 is inserted into the guide groove 51, and the guide plate 411 and the limiting plate 413 cooperate to clamp the material box 10. After the entire substrate is transferred to the next process, when the material transfer component transfers the empty material box 10 to the second conveying unit 60, the guide plate 411 is inserted into the guide groove 62 for alignment, and the lifting cylinder 412 controls the limiting plate 413 to rise, releasing the clamping of the material box 10. The setting of the guide groove 51 and the guide groove 62 facilitates the accurate positioning of the material transfer component when transferring the material box 10, improving the accuracy of the transfer, and also facilitates the material transfer component to remove and place the material box 10.

[0038] In some other embodiments, the conveying module 20 is also provided with a photoelectric sensor 25, which is disposed facing the substrate on the conveying module 20. The photoelectric sensor 25 is used to sense whether a substrate is passing through the conveying module 20.

[0039] Please refer to Figure 1 and Figure 4The working process of the substrate loading device 100 provided by this utility model is as follows: a material box 10 containing several substrates is placed at the feeding point of the first conveying unit 50. The material box 10 is conveyed to the picking point by the first conveying unit 50. The magnetic sensor 52 at the picking point senses that the material box 10 has moved to the picking point. The magnetic sensor 52 transmits the signal that the material box 10 has reached the picking point to the first moving module 42 and the lifting module 43. Then, the first moving module 42 and the lifting module 43 control the material transfer component to move to the picking point. The guide plate 411 on the material transfer component is inserted into the guide groove 51 on the first conveying unit 50. The lifting cylinder 412 controls the limiting plate 413 to descend to cooperate with the guide plate 411 to clamp the material box 10. At this time, the bottom surface of the material box 10 is in contact with the guide plate 411. Next, the first moving module 42 and the lifting module 43 work together to control the material transfer component to move the material box 10 to a position corresponding to the conveying module 20, so that the two ends of the bottom substrate in the width direction of the material box 10 are aligned with the first conveying component 21 and the second conveying component 22, respectively. Then, the pushing unit 30 pushes the substrates in the material box 10 from bottom to top onto the conveying module 20, and the conveying module 20 then conveys the substrates to the next process. After each substrate is pushed onto the conveying module 20 by the pushing unit 30, the lifting module 43 controls the material box 10 to move downwards until the bottom substrate corresponds to the pushing unit 30. After all substrates are conveyed to the next process, the lifting module 43 and the first moving module 42 cooperate to control the material transfer component to move the empty material box 10 to the input end of the second conveying unit 60. The guide plate 411 is inserted into the guide groove 62. At this time, the bottom surface of the material box 10 contacts the second conveying unit 60. The lifting cylinder 412 controls the limit plate 413 to rise to release the clamp on the material box 10. Then, the lifting module 43 and the first moving module 42 cooperate to control the material transfer component to leave the second conveying unit 60. The second conveying unit 60 then transfers the material box 10 to the output end of the second output unit for easy removal by the staff.

[0040] Beneficial effects: When loading the substrate, the moving unit controls the transfer component to move the material box 10 to correspond with the first conveyor 21 and the second conveyor 22, so that the pushing unit 30 can push the substrate in the material box 10 between the first conveyor 21 and the second conveyor 22. The moving unit can also control the transfer component to move the material box 10 vertically, so that the pushing unit 30 can push the substrate between the first conveyor 21 and the second conveyor 22 each time without needing to calibrate each time. Compared with the prior art, the substrate loading efficiency is improved.

Claims

1. A substrate loading device, characterized in that, include: A material box, in which several substrates are arranged vertically and placed; A conveying module is used to convey a substrate to the next process. The conveying module includes a first conveying member and a second conveying member that rotate synchronously, and a telescopic cylinder. The output end of the telescopic cylinder is connected to the second conveying member. The telescopic cylinder controls the second conveying member to move toward the second conveying member so that the distance between the first conveying member and the second conveying member is adapted to the substrate. A pushing unit, the output end of which corresponds to the conveying module, is used to push the substrate in the material box between the first conveying member and the second conveying member; The material transfer unit includes a moving unit and a material transfer component. The material transfer component is located between the pushing unit and the conveying module. The material transfer component is used to transfer the material box from the material pick-up point. The output end of the moving unit is connected to the material transfer unit. The moving unit is used to control the substrate in the material box to move between the first conveying component and the second conveying component, and to control the material box to move in the vertical direction.

2. The substrate loading equipment according to claim 1, characterized in that: The moving unit includes a first moving module and a lifting module. The output end of the first moving module is connected to the lifting module, and the output end of the lifting module is connected to the material transfer unit.

3. The substrate loading equipment according to claim 1, characterized in that: The pushing unit is a cylinder, and the output end of the pushing unit is provided with a pushing plate. The pushing unit pushes the substrate between the first conveying member and the second conveying member through the pushing plate.

4. The substrate loading equipment according to claim 1, characterized in that: The second conveyor is provided with a pressure roller, and when the substrate is located between the first conveyor and the second conveyor, the pressure roller and the substrate come into contact.

5. The substrate loading equipment according to claim 1, characterized in that: The substrate loading equipment further includes a first conveying unit, which is used to transfer the material box from the feeding point to the picking point. The output end of the first conveying unit corresponds to the material transfer component.

6. The substrate loading equipment according to claim 5, characterized in that: The material transfer component is equipped with a guide plate and a lifting cylinder. The output end of the first conveying unit is equipped with a guide groove that matches the guide plate. When the material transfer component transfers the material box, the guide plate is inserted into the guide groove. The output end of the lifting cylinder is equipped with a limiting plate. The lifting cylinder controls the limiting plate to rise and fall to cooperate with the guide plate to clamp the material box.

7. The substrate loading equipment according to claim 6, characterized in that: The output end of the first conveying unit is equipped with a magnetic sensor, which is used to sense whether the material box has moved to a position in the guide groove.

8. The substrate loading equipment according to claim 5, characterized in that: The substrate loading device further includes a second conveying unit, and the moving unit controls the material box to move to the input end of the second conveying unit.

9. The substrate loading equipment according to claim 8, characterized in that: The first conveying unit is located above the second conveying unit.

10. The substrate loading equipment according to claim 8, characterized in that: The input end of the second conveying unit is provided with a guide groove that is compatible with the guide plate.

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